公开(公告)号：US09496154B2

公开(公告)日：2016-11-15

申请号：US14488187

申请日：2014-09-16

Applicant: Invensas Corporation

Inventor： Eric S. Tosaya ,  Rajesh Katkar ,  Liang Wang ,  Cyprian Emeka Uzoh

IPC: H01L21/00 ,  H01L21/56 ,  H01L23/00 ,  H01L21/48 ,  H01L23/31 ,  H01L25/065 ,  H01L25/00

CPC classification number: H01L21/563 ,  H01L21/481 ,  H01L23/13 ,  H01L23/3178 ,  H01L23/49827 ,  H01L24/05 ,  H01L24/06 ,  H01L24/13 ,  H01L24/16 ,  H01L24/81 ,  H01L24/83 ,  H01L24/91 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/05568 ,  H01L2224/05571 ,  H01L2224/06102 ,  H01L2224/13022 ,  H01L2224/13023 ,  H01L2224/16237 ,  H01L2224/2908 ,  H01L2224/2919 ,  H01L2224/2929 ,  H01L2224/29388 ,  H01L2224/73104 ,  H01L2224/73204 ,  H01L2224/81191 ,  H01L2224/81193 ,  H01L2224/81194 ,  H01L2224/81203 ,  H01L2224/81395 ,  H01L2224/814 ,  H01L2224/81815 ,  H01L2224/83192 ,  H01L2224/83193 ,  H01L2224/83203 ,  H01L2224/83385 ,  H01L2224/83856 ,  H01L2224/9211 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2924/14 ,  H01L2924/15159 ,  H01L2924/014 ,  H01L2224/81 ,  H01L2224/83

Abstract: A microelectronic component (110, 120) has a contact pad (110C, 120C, 920C) recessed in a cavity (410) and covered by underfill tape (130). The cavity has a void (410V) below the underfill tape. A protruding contact pad of another microelectronic component ruptures the underfill tape to enter the cavity and bond to the recessed contact pad. The void helps in rupturing the underfill tape, thus reducing the amount of underfill residue between the two contact pads and improving the contact resistance. Also provided is a microelectronic component having a substrate with a cavity and having a through-substrate via extending into the cavity. Other features are also provided.

Abstract translation: 微电子部件（110,120）具有凹陷在空腔（410）中并被底部填充带（130）覆盖的接触垫（110C，120C，920C）。 空腔在底部填充带下方具有空隙（410V）。 另一微电子元件的突出的接触垫破坏了底部填充带进入腔并结合到凹陷接触垫。 该空隙有助于破裂底部填充带，从而减少两个接触垫之间的底部填充残余物的量并改善接触电阻。 还提供了一种微电子部件，其具有带有空腔的基板，并且具有延伸到空腔中的贯穿基板。 还提供其他功能。

公开(公告)号：US09524883B2

公开(公告)日：2016-12-20

申请号：US14535159

申请日：2014-11-06

Applicant: Invensas Corporation

Inventor： Charles G. Woychik ,  Eric S. Tosaya ,  Rajesh Katkar

IPC: H01L21/48 ,  H01L25/00 ,  H01L25/065 ,  H01L21/683 ,  H01L23/13 ,  H01L23/498

CPC classification number: H01L21/4853 ,  H01L21/6831 ,  H01L21/6838 ,  H01L23/04 ,  H01L23/13 ,  H01L23/49811 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/562 ,  H01L25/00 ,  H01L25/065 ,  H01L25/0655 ,  H01L25/50 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2924/15174 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/16152 ,  H01L2924/16195 ,  H01L2924/00

Abstract: A workpiece (120) has protruding conductive features (140) at least on a first side. The second side is processed while the workpiece is held from the first side by a holder (220H). To prevent damage to the protruding features and flatten the workpiece (which could be otherwise warped), a spacer (210) is inserted between the workpiece and the holder. The spacer has holes (250) receiving the protruding features. The workpiece can be held by forces generated by the holder such as vacuum or an electrostatic force, without an adhesive. Other features and advantages are provided.

Abstract translation: 工件（120）至少在第一侧具有突出的导电特征（140）。 在第二面被保持器（220H）从第一侧保持的同时进行第二面处理。 为了防止突出特征的损坏并使工件变平（可能会扭曲），在工件和保持器之间插入间隔件（210）。 间隔件具有接收突出特征的孔（250）。 工件可以由保持器产生的力例如真空或静电力保持，而不用粘合剂。 提供其他特点和优点。

公开(公告)号：US20150333049A1

公开(公告)日：2015-11-19

申请号：US14535159

申请日：2014-11-06

Applicant: Invensas Corporation

Inventor： Charles G. Woychik ,  Eric S. Tosaya ,  Rajesh Katkar

IPC: H01L25/00 ,  H01L21/683 ,  H01L23/498 ,  H01L25/065

CPC classification number: H01L21/4853 ,  H01L21/6831 ,  H01L21/6838 ,  H01L23/04 ,  H01L23/13 ,  H01L23/49811 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/562 ,  H01L25/00 ,  H01L25/065 ,  H01L25/0655 ,  H01L25/50 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2924/15174 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/16152 ,  H01L2924/16195 ,  H01L2924/00

Abstract: A workpiece (120) has protruding conductive features (140) at least on a first side. The second side is processed while the workpiece is held from the first side by a holder (220H). To prevent damage to the protruding features and flatten the workpiece (which could be otherwise warped), a spacer (210) is inserted between the workpiece and the holder. The spacer has holes (250) receiving the protruding features. The workpiece can be held by forces generated by the holder such as vacuum or an electrostatic force, without an adhesive. Other features and advantages are provided.

Abstract translation: 工件（120）至少在第一侧具有突出的导电特征（140）。 在第二面被保持器（220H）从第一侧保持的同时进行第二面处理。 为了防止突出特征的损坏并使工件变平（可能会扭曲），在工件和保持器之间插入间隔件（210）。 间隔件具有接收突出特征的孔（250）。 工件可以由保持器产生的力例如真空或静电力保持，而不用粘合剂。 提供其他特点和优点。