摘要:
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
摘要:
A condenser-type acoustic sensor is provided. The acoustic sensor includes an acoustic chamber formed by etching an upper portion of a substrate, an insulating layer formed on the substrate and having a central area etched so that the acoustic chamber is exposed, a diaphragm formed on the insulating layer, and a stationary electrode formed on the diaphragm. Thus, a nonlinear component resulting from horizontal movement of the support and the diaphragm is removed to improve a sound-pressure response characteristic, and a substrate backside process can be omitted to simplify a fabrication process and improve a yield.
摘要:
A method of fabricating an electronic device using nanowires, minimizing the number of E-beam processing steps and thus improving a yield, includes the steps of: forming electrodes on a substrate; depositing a plurality of nanowires on the substrate including the electrodes; capturing an image of the substrate including the nanowires and the electrodes; drawing virtual connection lines for connecting the nanowires with the electrodes on the image using an electrode pattern simulated through a computer program, after capturing the image; coating an E-beam photoresist on the substrate; removing the photoresist from regions corresponding to the virtual connection lines and the electrode pattern using E-beam lithography; depositing a metal layer on the substrate after removing the photoresist from the regions of the virtual connection lines; and removing remaining photoresist from the substrate using a lift-off process. It is possible to reduce the time and cost associated with fabricating electronic devices with nanowires because the number of E-beam processing steps remarkably decreases compared to the conventional method that fabricates electronic devices only by means of the E-beam lithography processes. After calling upon an image of the substrate having nanowires on a computer program, the electronic devices are fabricated with reference to the substrate image, thus enhancing the product yield.
摘要:
Provided is an active piezoelectric energy harvester, which can control a direct current voltage applied to an embedded variable capacitance layer to precisely adjust a resonance frequency in real time, and thus achieve a simpler structure and a smaller size compared to a conventional one that adjusts the resonance frequency using a separate variable capacitor provided outside. Further, the active piezoelectric energy harvester can precisely adjust the resonance frequency even when the frequency of vibration varies over time as in a real natural vibration environment or when it is degraded to undergo a variation in its own resonance frequency, and thus can continuously maintain optimal energy conversion characteristics.
摘要:
An electrochemical gas sensor and a method of manufacturing the same are provided. The electrochemical gas sensor includes: a substrate; an electrode patterned on the substrate; a solid electrolyte layer having proton conductivity formed on the substrate having the patterned electrode; and a hydrophobic microporous membrane formed on the solid electrolyte layer. The gas sensor chip is easily integrated with a driving circuit and uses a solid electrolyte layer, and thus it can be manufactured in a smaller size and in a large area process.
摘要:
Provided is a hetero-junction membrane including: a first layer comprising first nanoparticles of a first conductive type; and a second layer comprising second nanoparticles of a second conductive type, wherein the first layer and the second layer are joined to each other. The hetero-junction membrane has advantages in that actuating efficiency is much higher, the direction of actuating can be predicted and the manufacturing processes are simple compared to conventional bucky paper formed of a single layer.
摘要:
Provide is a forced acoustic dipole in which a direction of an acoustic lobe can be freely steered by controlling phase and sound pressure of input signals input into first and second sound sources, respectively. Accordingly, when a forced acoustic multipole array is configured by arranging a plurality of forced acoustic dipoles and a direction of an acoustic lobe is steered in a particular direction by controlling phase and sound pressure of input signals input into the first and second sound sources, respectively, it is possible for a sound to be heard in a desired location without auditory disturbance to others.
摘要:
Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.
摘要:
A method of manufacturing a flexible-film primary battery includes forming a first conductive carbon layer on a surface-treated inner surface of a first pouch film to form a positive electrode collector, and forming a positive electrode layer on the first conductive carbon layer to form a positive electrode plate. A second conductive carbon layer is formed on a surface-treated inner surface of a second pouch film to form a negative electrode collector, and a negative electrode layer is formed on the second conductive carbon layer to form a negative electrode plate. An adhesion/post-injection polymer electrolyte layer is inserted between the positive electrode plate and the negative electrode plate to manufacture a battery assembly. An electrolyte is injected into the polymer electrolyte layer of the battery assembly. The battery assembly is sealed completely to form a primary battery.
摘要:
Provided is a parallel processor for supporting a floating-point operation. The parallel processor has a flexible structure for easy development of a parallel algorithm involving multimedia computing, requires low hardware cost, and consumes low power. To support floating-point operations, the parallel processor uses floating-point accumulators and a flag for floating-point multiplication. Using the parallel processor, it is possible to process a geometric transformation operation in a 3-dimensional (3D) graphics process at low cost. Also, the cost of a bus width for instructions can be minimized by a partitioned Single-Instruction Multiple-Data (SIMD) method and a method of conditionally executing instructions.