MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME
    1.
    发明申请
    MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME 有权
    微机电系统(MEMS)麦克风及其制造方法

    公开(公告)号:US20120187077A1

    公开(公告)日:2012-07-26

    申请号:US13434622

    申请日:2012-03-29

    IPC分类号: H05K3/06

    摘要: Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.

    摘要翻译: 提供了一种微机电系统(MEMS)麦克风及其制造方法。 与使用上基板工艺和下基板工艺的常规技术相比,制造工艺简化。 由于制造过程中可能发生的缺陷由于简化的制造过程而降低,所以提高了制造生产能力,并且由于提高了MEMS麦克风的耐久性,提高了对外部环境的系统稳定性。

    ACOUSTIC SENSOR AND METHOD OF FABRICATING THE SAME
    2.
    发明申请
    ACOUSTIC SENSOR AND METHOD OF FABRICATING THE SAME 审中-公开
    声学传感器及其制造方法

    公开(公告)号:US20110141854A1

    公开(公告)日:2011-06-16

    申请号:US12708765

    申请日:2010-02-19

    IPC分类号: H04R17/00 C23F1/00

    摘要: A condenser-type acoustic sensor is provided. The acoustic sensor includes an acoustic chamber formed by etching an upper portion of a substrate, an insulating layer formed on the substrate and having a central area etched so that the acoustic chamber is exposed, a diaphragm formed on the insulating layer, and a stationary electrode formed on the diaphragm. Thus, a nonlinear component resulting from horizontal movement of the support and the diaphragm is removed to improve a sound-pressure response characteristic, and a substrate backside process can be omitted to simplify a fabrication process and improve a yield.

    摘要翻译: 提供了一种冷凝器式声学传感器。 声学传感器包括通过蚀刻衬底的上部形成的声学室,形成在衬底上的绝缘层,并且具有被蚀刻以使声学室被暴露的中心区域,形成在绝缘层上的隔膜和固定电极 形成在隔膜上。 因此,去除由支撑体和隔膜的水平移动产生的非线性分量,以改善声压响应特性,并且可以省略衬底背面处理以简化制造工艺并提高产量。

    METHOD OF FABRICATING ELECTRONIC DEVICE USING NANOWIRES
    3.
    发明申请
    METHOD OF FABRICATING ELECTRONIC DEVICE USING NANOWIRES 有权
    使用纳米级制造电子器件的方法

    公开(公告)号:US20080132052A1

    公开(公告)日:2008-06-05

    申请号:US11947139

    申请日:2007-11-29

    IPC分类号: H01L21/44

    摘要: A method of fabricating an electronic device using nanowires, minimizing the number of E-beam processing steps and thus improving a yield, includes the steps of: forming electrodes on a substrate; depositing a plurality of nanowires on the substrate including the electrodes; capturing an image of the substrate including the nanowires and the electrodes; drawing virtual connection lines for connecting the nanowires with the electrodes on the image using an electrode pattern simulated through a computer program, after capturing the image; coating an E-beam photoresist on the substrate; removing the photoresist from regions corresponding to the virtual connection lines and the electrode pattern using E-beam lithography; depositing a metal layer on the substrate after removing the photoresist from the regions of the virtual connection lines; and removing remaining photoresist from the substrate using a lift-off process. It is possible to reduce the time and cost associated with fabricating electronic devices with nanowires because the number of E-beam processing steps remarkably decreases compared to the conventional method that fabricates electronic devices only by means of the E-beam lithography processes. After calling upon an image of the substrate having nanowires on a computer program, the electronic devices are fabricated with reference to the substrate image, thus enhancing the product yield.

    摘要翻译: 使用纳米线制造电子器件的方法,使电子束处理步骤的数量最小化并因此提高产量,包括以下步骤:在衬底上形成电极; 在包括电极的基板上沉积多个纳米线; 捕获包括纳米线和电极的衬底的图像; 绘制虚拟连接线,用于在捕获图像之后,使用通过计算机程序模拟的电极图案将纳米线与图像上的电极连接; 在基板上涂覆电子束光致抗蚀剂; 使用电子束光刻从与虚拟连接线对应的区域和电极图案中去除光致抗蚀剂; 在从虚拟连接线的区域去除光致抗蚀剂之后,在基板上沉积金属层; 以及使用剥离工艺从衬底去除剩余的光致抗蚀剂。 与仅通过电子束光刻工艺制造电子器件的常规方法相比,电子束处理步骤的数量显着降低,可以减少与制造具有纳米线的电子器件相关联的时间和成本。 在计算机程序上调用具有纳米线的衬底的图像之后,参考衬底图像制造电子器件,从而提高产品产量。

    ACTIVE PIEZOELECTRIC ENERGY HARVESTER WITH EMBEDDED VARIABLE CAPACITANCE LAYER AND METHOD OF MANUFACTURING THE SAME
    4.
    发明申请
    ACTIVE PIEZOELECTRIC ENERGY HARVESTER WITH EMBEDDED VARIABLE CAPACITANCE LAYER AND METHOD OF MANUFACTURING THE SAME 有权
    具有嵌入式可变电容层的有源压电式收发器及其制造方法

    公开(公告)号:US20110140579A1

    公开(公告)日:2011-06-16

    申请号:US12899499

    申请日:2010-10-06

    IPC分类号: H02N2/18 H01L41/22

    摘要: Provided is an active piezoelectric energy harvester, which can control a direct current voltage applied to an embedded variable capacitance layer to precisely adjust a resonance frequency in real time, and thus achieve a simpler structure and a smaller size compared to a conventional one that adjusts the resonance frequency using a separate variable capacitor provided outside. Further, the active piezoelectric energy harvester can precisely adjust the resonance frequency even when the frequency of vibration varies over time as in a real natural vibration environment or when it is degraded to undergo a variation in its own resonance frequency, and thus can continuously maintain optimal energy conversion characteristics.

    摘要翻译: 提供了一种有源压电能量收集器,其可以控制施加到嵌入式可变电容层的直流电压,以实时精确地调节谐振频率,从而实现比传统调节器的传统电容器更简单的结构和更小的尺寸 谐振频率使用外部提供的单独的可变电容器。 此外,即使在真实的自然振动环境中,随着时间的推移,振动频率随时间而变化,或者当其自身的谐振频率变差而发生变化时,有源压电能量收集器也可以精确地调节谐振频率,从而可以持续保持最佳 能量转换特性。

    FORCED ACOUSTIC DIPOLE AND FORCED ACOUSTIC MULTIPOLE ARRAY USING THE SAME
    7.
    发明申请
    FORCED ACOUSTIC DIPOLE AND FORCED ACOUSTIC MULTIPOLE ARRAY USING THE SAME 审中-公开
    使用它的强制声音多重和强迫声音多点阵列

    公开(公告)号:US20100124342A1

    公开(公告)日:2010-05-20

    申请号:US12558015

    申请日:2009-09-11

    IPC分类号: H04R1/40

    CPC分类号: H04R1/403 H04R3/12

    摘要: Provide is a forced acoustic dipole in which a direction of an acoustic lobe can be freely steered by controlling phase and sound pressure of input signals input into first and second sound sources, respectively. Accordingly, when a forced acoustic multipole array is configured by arranging a plurality of forced acoustic dipoles and a direction of an acoustic lobe is steered in a particular direction by controlling phase and sound pressure of input signals input into the first and second sound sources, respectively, it is possible for a sound to be heard in a desired location without auditory disturbance to others.

    摘要翻译: 提供是强制声偶极子,其中通过控制输入到第一和第二声源的输入信号的相位和声压分别可以自由地控制声波瓣的方向。 因此,当通过布置多个强制声学偶极子来配置强制声学多极阵列时,分别通过控制输入到第一和第二声源的输入信号的相位和声压来沿着特定方向转向声波瓣的方向 ,可以在期望的位置听到声音,而没有对他人的听觉干扰。

    MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME
    8.
    发明申请
    MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME 有权
    微电子系统系统类型半导体气体传感器使用具有多个孔的微波炉及其制造方法

    公开(公告)号:US20120198918A1

    公开(公告)日:2012-08-09

    申请号:US13345772

    申请日:2012-01-09

    IPC分类号: G01N27/04 H01L21/02

    CPC分类号: G01N27/128 G01N27/123

    摘要: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

    摘要翻译: 公开了使用具有许多孔的微加热器的MEMS型半导体气体传感器及其制造方法。 MEMS型半导体气体传感器包括:以预定厚度蚀刻中心区域的基板; 第二膜,形成在所述基板的中心区域的上部并具有许多孔; 形成在第二膜上并具有许多孔的发热电阻器; 形成在包括所述发热电阻器并具有许多孔的所述第二膜上的第一膜; 形成在第一膜上并具有许多孔的感测电极; 以及感测材料,形成在感测电极上。

    VACUUM-SEALING-TYPE FLEXIBLE-FILM PRIMARY BATTERY AND METHOD OF MANUFACTURING THE SAME
    9.
    发明申请
    VACUUM-SEALING-TYPE FLEXIBLE-FILM PRIMARY BATTERY AND METHOD OF MANUFACTURING THE SAME 有权
    真空密封型柔性电池一次电池及其制造方法

    公开(公告)号:US20120324721A1

    公开(公告)日:2012-12-27

    申请号:US13607645

    申请日:2012-09-07

    IPC分类号: H01M6/00

    摘要: A method of manufacturing a flexible-film primary battery includes forming a first conductive carbon layer on a surface-treated inner surface of a first pouch film to form a positive electrode collector, and forming a positive electrode layer on the first conductive carbon layer to form a positive electrode plate. A second conductive carbon layer is formed on a surface-treated inner surface of a second pouch film to form a negative electrode collector, and a negative electrode layer is formed on the second conductive carbon layer to form a negative electrode plate. An adhesion/post-injection polymer electrolyte layer is inserted between the positive electrode plate and the negative electrode plate to manufacture a battery assembly. An electrolyte is injected into the polymer electrolyte layer of the battery assembly. The battery assembly is sealed completely to form a primary battery.

    摘要翻译: 制造柔性膜一次电池的方法包括:在第一袋膜的表面处理内表面上形成第一导电性碳层,形成正极集电体,在第一导电性碳层上形成正极层,形成 正极板。 在第二袋膜的表面处理内表面上形成第二导电性碳层,形成负极集电体,在第二导电性碳层上形成负极层,形成负极板。 在正极板和负极板之间插入粘合/后注入聚合物电解质层以制造电池组件。 将电解质注入到电池组件的聚合物电解质层中。 电池组件被完全密封以形成一次电池。

    PARALLEL PROCESSOR FOR EFFICIENT PROCESSING OF MOBILE MULTIMEDIA
    10.
    发明申请
    PARALLEL PROCESSOR FOR EFFICIENT PROCESSING OF MOBILE MULTIMEDIA 有权
    并行处理器对移动多媒体的高效处理

    公开(公告)号:US20080294875A1

    公开(公告)日:2008-11-27

    申请号:US12045844

    申请日:2008-03-11

    IPC分类号: G06F15/76 G06F9/02

    CPC分类号: G06F15/8007

    摘要: Provided is a parallel processor for supporting a floating-point operation. The parallel processor has a flexible structure for easy development of a parallel algorithm involving multimedia computing, requires low hardware cost, and consumes low power. To support floating-point operations, the parallel processor uses floating-point accumulators and a flag for floating-point multiplication. Using the parallel processor, it is possible to process a geometric transformation operation in a 3-dimensional (3D) graphics process at low cost. Also, the cost of a bus width for instructions can be minimized by a partitioned Single-Instruction Multiple-Data (SIMD) method and a method of conditionally executing instructions.

    摘要翻译: 提供了一种用于支持浮点运算的并行处理器。 并行处理器具有灵活的结构,便于开发涉及多媒体计算的并行算法,需要较低的硬件成本,并且消耗低功耗。 为了支持浮点运算,并行处理器使用浮点累加器和浮点乘法的标志。 使用并行处理器,可以以低成本在三维(3D)图形处理中处理几何变换操作。 此外,可以通过分区单指令多数据(SIMD)方法和有条件执行指令的方法来最小化用于指令的总线宽度的成本。