公开(公告)号：US20130244441A1

公开(公告)日：2013-09-19

申请号：US13828176

申请日：2013-03-14

Applicant: LAM RESEARCH CORPORATION

Inventor： Dean Jay Larson ,  Tom Stevenson ,  Victor Wang

IPC: H01L21/3065 ,  H05K13/00

CPC classification number: H01L21/3065 ,  B29C65/483 ,  B29C65/4835 ,  B29C65/4855 ,  B29C65/4865 ,  B29C65/4875 ,  B29C65/4885 ,  B29C65/5028 ,  B29C65/5057 ,  B29C65/5071 ,  B29C66/73111 ,  B29C66/73112 ,  B29C66/742 ,  B29K2305/00 ,  B32B37/025 ,  B32B37/1292 ,  B32B38/145 ,  B32B38/164 ,  B32B2307/202 ,  B32B2309/02 ,  B32B2309/10 ,  B32B2309/105 ,  B32B2457/00 ,  C23C16/45565 ,  H01J37/32009 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/3255 ,  H05K13/00 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T29/5313 ,  Y10T29/532 ,  Y10T29/53204 ,  Y10T156/10 ,  Y10T156/1062

Abstract: A method of forming an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of ≧300% in a temperature range of room temperature to 300° C. such as heat curable high molecular weight dimethyl silicone with fillers. Installation can be manually, manually with installation tooling, or with automated machinery.

Abstract translation: 在电极和背衬构件的配合表面之间形成弹性体片粘合剂的方法，以适应在温度循环期间由于热膨胀系数不匹配而产生的应力。 弹性体片材包括能够在室温至300℃的温度范围内承受≥300％的高剪切应变的导热硅酮粘合剂，例如具有填料的可热固化的高分子量二甲基硅氧烷。 安装可以手动，手动安装工具或自动化机械。

公开(公告)号：US08701268B2

公开(公告)日：2014-04-22

申请号：US13828176

申请日：2013-03-14

Applicant: Lam Research Corporation

Inventor： Dean Jay Larson ,  Tom Stevenson ,  Victor Wang

IPC: H01S4/00 ,  B23P17/04 ,  B23P19/00 ,  H01L21/306 ,  C23F1/00

CPC classification number: H01L21/3065 ,  B29C65/483 ,  B29C65/4835 ,  B29C65/4855 ,  B29C65/4865 ,  B29C65/4875 ,  B29C65/4885 ,  B29C65/5028 ,  B29C65/5057 ,  B29C65/5071 ,  B29C66/73111 ,  B29C66/73112 ,  B29C66/742 ,  B29K2305/00 ,  B32B37/025 ,  B32B37/1292 ,  B32B38/145 ,  B32B38/164 ,  B32B2307/202 ,  B32B2309/02 ,  B32B2309/10 ,  B32B2309/105 ,  B32B2457/00 ,  C23C16/45565 ,  H01J37/32009 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/3255 ,  H05K13/00 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T29/5313 ,  Y10T29/532 ,  Y10T29/53204 ,  Y10T156/10 ,  Y10T156/1062

Abstract: A method of forming an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of ≧300% in a temperature range of room temperature to 300° C. such as heat curable high molecular weight dimethyl silicone with fillers. Installation can be manually, manually with installation tooling, or with automated machinery.

Abstract translation: 在电极和背衬构件的配合表面之间形成弹性体片粘合剂的方法，以适应在温度循环期间由于热膨胀系数不匹配而产生的应力。 弹性体片材包括能够在室温至300℃的温度范围内承受≥300％的高剪切应变的导热硅胶粘合剂，例如具有填料的热固化高分子量二甲基硅酮。 安装可以手动，手动安装工具或自动化机械。