公开(公告)号：US20140203344A1

公开(公告)日：2014-07-24

申请号：US13748747

申请日：2013-01-24

Applicant: MICRON TECHNOLOGY, INC.

Inventor： John Hopkins ,  Darwin Franseda Fan ,  Fatma Arzum Simsek-Ege ,  James Brighten ,  Aurelio Giancarlo Mauri ,  Srikant Jayanti

IPC: H01L29/423 ,  H01L29/40

CPC classification number: H01L29/7887 ,  H01L21/28035 ,  H01L21/28273 ,  H01L21/28282 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11582 ,  H01L29/401 ,  H01L29/42324 ,  H01L29/518 ,  H01L29/66825 ,  H01L29/7827 ,  H01L29/7881 ,  H01L29/7889

Abstract: Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.

Abstract translation: 三维存储器单元以及制造和使用存储器单元的方法一般在此讨论。 在一个或多个实施例中，三维垂直存储器可以包括存储器堆栈。 这样的存储器堆可以包括存储器单元和相邻存储单元之间的电介质，每个存储单元包括控制栅极和电荷存储结构。 存储单元还可以包括电荷存储结构和控制栅极之间的阻挡材料，电荷存储结构和阻挡材料具有基本相等的尺寸。

公开(公告)号：US10170639B2

公开(公告)日：2019-01-01

申请号：US14987147

申请日：2016-01-04

Applicant: Micron Technology, Inc.

Inventor： John Hopkins ,  Darwin Franseda Fan ,  Fatma Arzum Simsek-Ege ,  James Brighten ,  Aurelio Giancarlo Mauri ,  Srikant Jayanti

IPC: H01L29/788 ,  H01L29/423 ,  H01L29/66 ,  H01L27/11556 ,  H01L29/40 ,  H01L21/28 ,  H01L27/11582 ,  H01L29/51 ,  H01L27/11524 ,  H01L29/78

Abstract: Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.

公开(公告)号：US20150140797A1

公开(公告)日：2015-05-21

申请号：US14610755

申请日：2015-01-30

Applicant: Micron Technology, Inc.

Inventor： John Hopkins ,  Darwin Franseda Fan ,  Fatma Arzum Simsek-Ege ,  James Brighten ,  Aurelio Giancarlo Mauri ,  Srikant Jayanti

IPC: H01L27/115 ,  H01L29/51 ,  H01L21/28

CPC classification number: H01L29/7887 ,  H01L21/28035 ,  H01L21/28273 ,  H01L21/28282 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11582 ,  H01L29/401 ,  H01L29/42324 ,  H01L29/518 ,  H01L29/66825 ,  H01L29/7827 ,  H01L29/7881 ,  H01L29/7889

Abstract: Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.

Abstract translation: 三维存储器单元以及制造和使用存储器单元的方法一般在此讨论。 在一个或多个实施例中，三维垂直存储器可以包括存储器堆栈。 这样的存储器堆可以包括存储器单元和相邻存储单元之间的电介质，每个存储单元包括控制栅极和电荷存储结构。 存储单元还可以包括电荷存储结构和控制栅极之间的阻挡材料，电荷存储结构和阻挡材料具有基本相等的尺寸。

公开(公告)号：US08946807B2

公开(公告)日：2015-02-03

申请号：US13748747

申请日：2013-01-24

Applicant: Micron Technology, Inc.

Inventor： John Hopkins ,  Darwin Franseda Fan ,  Fatma Arzum Simsek-Ege ,  James Brighten ,  Aurelio Giancarlo Mauri ,  Srikant Jayanti

IPC: H01L29/788 ,  H01L29/423 ,  H01L29/40

CPC classification number: H01L29/7887 ,  H01L21/28035 ,  H01L21/28273 ,  H01L21/28282 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11582 ,  H01L29/401 ,  H01L29/42324 ,  H01L29/518 ,  H01L29/66825 ,  H01L29/7827 ,  H01L29/7881 ,  H01L29/7889

Abstract: Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.

Abstract translation: 三维存储器单元以及制造和使用存储器单元的方法一般在此讨论。 在一个或多个实施例中，三维垂直存储器可以包括存储器堆栈。 这样的存储器堆可以包括存储器单元和相邻存储单元之间的电介质，每个存储单元包括控制栅极和电荷存储结构。 存储单元还可以包括电荷存储结构和控制栅极之间的阻挡材料，电荷存储结构和阻挡材料具有基本相等的尺寸。

公开(公告)号：US20160133752A1

公开(公告)日：2016-05-12

申请号：US14987147

申请日：2016-01-04

Applicant: Micron Technology, Inc.

Inventor： John Hopkins ,  Darwin Franseda Fan ,  Fatma Arzum Simsek-Ege ,  James Brighten ,  Aurelio Giancarlo Mauri ,  Srikant Jayanti

IPC: H01L29/788 ,  H01L27/115

CPC classification number: H01L29/7887 ,  H01L21/28035 ,  H01L21/28273 ,  H01L21/28282 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11582 ,  H01L29/401 ,  H01L29/42324 ,  H01L29/518 ,  H01L29/66825 ,  H01L29/7827 ,  H01L29/7881 ,  H01L29/7889

Abstract: Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.

公开(公告)号：US09230986B2

公开(公告)日：2016-01-05

申请号：US14610755

申请日：2015-01-30

Applicant: Micron Technology, Inc.

Inventor： John Hopkins ,  Darwin Franseda Fan ,  Fatma Arzum Simsek-Ege ,  James Brighten ,  Aurelio Giancarlo Mauri ,  Srikant Jayanti

IPC: H01L29/788 ,  H01L27/115 ,  H01L29/423 ,  H01L29/66 ,  H01L29/40 ,  H01L21/28 ,  H01L29/51

CPC classification number: H01L29/7887 ,  H01L21/28035 ,  H01L21/28273 ,  H01L21/28282 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11582 ,  H01L29/401 ,  H01L29/42324 ,  H01L29/518 ,  H01L29/66825 ,  H01L29/7827 ,  H01L29/7881 ,  H01L29/7889

Abstract: Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.