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公开(公告)号：US07264849B2
公开(公告)日：2007-09-04
申请号：US10618478
申请日：2003-07-11
IPC分类号： H05H1/24
CPC分类号： C23C16/45502 , C23C16/4412 , C23C16/45578 , C23C16/509 , H01J37/32082 , H01J37/3244 , H01J37/32449
摘要： A chemical vapor deposition method includes a step of maintaining a hydrogen plasma at low pressure in a processing chamber. The processing chamber has a long, wide, thin geometry to favor deposition of thin-film silicon on sheet substrates over the chamber walls. The sheet substrates are moved through between ends. A pair of opposing radio frequency electrodes above and below the workpieces are electrically driven hard to generate a flat, pancaked plasma cloud in the middle spaces of the processing chamber. A collinear series of gas injector jets pointed slightly up on a silane-jet manifold introduce 100% silane gas at high velocity from the side in order to roll the plasma cloud in a coaxial vortex. A second such silane-jet manifold is placed on the opposite side and pointed slightly down to further help roll the plasma and maintain a narrow band of silane concentration. A silane-concentration monitor observes the relative amplitudes of the spectral signatures of the silane and the hydrogen constituents in the roll-vortex plasma and outputs a process control feedback signal that is used to keep the silane in hydrogen concentration at about 6-7%.
摘要翻译： 化学气相沉积方法包括在处理室中保持低压下的氢等离子体的步骤。 处理室具有长的，宽的，薄的几何形状，以有利于在室壁上的薄片基材上沉积薄膜硅。 片材基片在两端之间移动。 在工件上方和下方的一对相对的射频电极被电驱动，以在处理室的中间空间中产生平坦的，扁平的等离子体云。 在硅烷喷射歧管上略微向上突出的共线系列气体喷射器喷嘴从侧面以高速度引入100％硅烷气体，以在同轴涡流中滚动等离子体云。 第二个这样的硅烷喷射歧管放置在相反的一侧并稍微向下倾斜，以进一步帮助滚动等离子体并保持窄的硅烷浓度带。 硅烷浓度监测器观察到辊涡流等离子体中硅烷和氢组分的光谱特征的相对振幅，并输出用于将硅烷在氢浓度中保持在约6-7％的过程控制反馈信号。
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公开(公告)号：US07464663B2
公开(公告)日：2008-12-16
申请号：US11420429
申请日：2006-05-25
IPC分类号： C23C16/00 , B05C11/00 , C23F1/00 , H01L21/306
CPC分类号： C23C16/45502 , C23C16/4412 , C23C16/45578 , C23C16/509 , H01J37/32082 , H01J37/3244 , H01J37/32449
摘要： A system comprises a processing chamber for maintaining a hydrogen plasma at low pressure. The processing chamber has a long, wide, thin geometry to favor deposition of thin-film silicon on sheet substrates over the chamber walls. The sheet substrates are moved through between ends. A pair of opposing radio frequency electrodes above and below the workpieces are electrically driven hard to generate a flat, pancaked plasma cloud in the middle spaces of the processing chamber. A collinear series of gas injector jets pointed slightly up on a silane-jet manifold introduce 100% silane gas at high velocity from the side in order to roll the plasma cloud in a coaxial vortex. A second such silane-jet manifold is placed on the opposite side and pointed slightly down to further help roll the plasma and maintain a narrow band of silane concentration. A silane-concentration monitor observes the relative amplitudes of the spectral signatures of the silane and the hydrogen constituents in the roll-vortex plasma and outputs a process control feedback signal that is used to keep the silane in hydrogen concentration at about 6-7%.
摘要翻译： 一种系统包括用于在低压下维持氢等离子体的处理室。 处理室具有长的，宽的，薄的几何形状，以有利于在室壁上的薄片基材上沉积薄膜硅。 片材基片在两端之间移动。 在工件上方和下方的一对相对的射频电极被电驱动，以在处理室的中间空间中产生平坦的，扁平的等离子体云。 在硅烷喷射歧管上略微向上突出的共线系列气体喷射器喷嘴从侧面以高速度引入100％硅烷气体，以在同轴涡流中滚动等离子体云。 第二个这样的硅烷喷射歧管放置在相反的一侧并稍微向下倾斜，以进一步帮助滚动等离子体并保持窄的硅烷浓度带。 硅烷浓度监测器观察到辊涡流等离子体中硅烷和氢组分的光谱特征的相对振幅，并输出用于将硅烷在氢浓度中保持在约6-7％的过程控制反馈信号。
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公开(公告)号：US07057258B2
公开(公告)日：2006-06-06
申请号：US10695710
申请日：2003-10-29
IPC分类号： H01L29/00
CPC分类号： H01L27/101 , G11C11/16 , G11C17/16
摘要： A resistive cross point array memory device comprising a plurality of word lines extending in a row direction, a plurality of bit lines extending in a column direction such that a plurality of cross points is formed at intersections between the word and bit lines, and at least one memory element formed in at least one of the cross points. The memory element comprises a first tunnel junction having a bottom conductor, a top conductor, a barrier layer adjacent the bottom conductor, and wherein the bottom conductor comprises a non-uniform upper surface.
摘要翻译： 一种电阻式交叉点阵列存储器件，包括沿行方向延伸的多条字线，沿列方向延伸的多条位线，使得多个交叉点形成在字和位线之间的交叉处，至少 一个存储元件形成在至少一个交叉点上。 存储元件包括具有底部导体，顶部导体，邻近底部导体的阻挡层的第一隧道结，并且其中底部导体包括不均匀的上表面。
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4.发明授权公开(公告)号：US06915267B2
公开(公告)日：2005-07-05
申请号：US09404692
申请日：1999-09-24
申请人： Warren B. Jackson , David K. Biegelsen , Tad H. Hogg , Chee We Ng , Andrew A. Berlin , Koenraad F. Van Schuylenbergh , Carlos Mochon
发明人： Warren B. Jackson , David K. Biegelsen , Tad H. Hogg , Chee We Ng , Andrew A. Berlin , Koenraad F. Van Schuylenbergh , Carlos Mochon
CPC分类号： G06Q10/04 , G06F19/00 , G06Q30/0206 , G06Q50/24
摘要： The present invention encompasses a control system and method for systems of producing and consuming units. The method of the invention includes the steps of setting each producing unit to have an output responsive to an analog signal representative of a market price, and connecting each producing unit to a marketwire, with the changes in the analog signal on the marketwire representing changes in the market price resulting from inputs from the consuming units and the output response of each producing unit.
摘要翻译： 本发明包括用于生产和消费单元的系统的控制系统和方法。 本发明的方法包括以下步骤：将每个产生单元设置为具有响应于代表市场价格的模拟信号的输出，以及将每个生成单元连接到标记，随着标记上的模拟信号的变化表示变化 消费单位投入产生的市场价格和每个生产单位的产出反应。
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公开(公告)号：US06737686B2
公开(公告)日：2004-05-18
申请号：US10172304
申请日：2002-06-13
IPC分类号： H01L2710
摘要： A memory cell includes a heating component that is connected to a voltage-breakdown component. The heating component is configured to accelerate the break-down of a voltage-breakdown component. Memory structures and methods for making them are also disclosed.
摘要翻译： 存储单元包括连接到电压击穿元件的加热元件。 加热部件被配置为加速电压击穿部件的分解。 还公开了用于制造它们的记忆结构和方法。
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公开(公告)号：US06490960B1
公开(公告)日：2002-12-10
申请号：US09901896
申请日：2001-07-11
IPC分类号： F16D3102
CPC分类号： F15B15/103
摘要： A PC board actuator that emulates a muscle fiber includes a first pressure source, a second pressure source lower than the first source, at least one expansion chamber alternately communicating with the first and second pressure sources, first and second valves mounted with the PC board that opens and closes the chamber with respect to the first and second pressure sources, and an actuator member interacting with the expansion chamber to apply a force to the object. The actuator is preferably formed using planar batch technology and the valves preferably comprise electrically controllable flap valves mounted on the PC board. Alternatively, the actuator includes antagonistically arranged expansion chambers that operatively apply reciprocating forces to the object. In other embodiments, the actuator includes plural expansion chambers arranged in series or in parallel in order to increase the overall extent of attainable displacement or to amplify the force generated by the actuator.
摘要翻译： 模拟肌肉纤维的PC板致动器包括第一压力源，低于第一源的第二压力源，与第一和第二压力源交替连通的至少一个膨胀室，安装有PC板的第一和第二阀， 相对于第一和第二压力源打开和关闭室，以及与膨胀室相互作用以对物体施加力的致动器构件。 致动器优选地使用平面间歇技术形成，并且阀优选地包括安装在PC板上的可电控制的瓣阀。 或者，致动器包括对向布置的膨胀室，其可操作地向对象施加往复力。 在其他实施例中，致动器包括串联或并联布置的多个膨胀室，以便增加可获得的位移的总体程度或放大由致动器产生的力。
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7.发明授权公开(公告)号：US06328409B1
公开(公告)日：2001-12-11
申请号：US09163954
申请日：1998-09-30
申请人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Andrew A. Berlin , G. A. Neville Connell
发明人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Andrew A. Berlin , G. A. Neville Connell
IPC分类号： B41J217
CPC分类号： B41J2/14 , B41J2/14008 , B41J2/211 , B41J2202/02
摘要： A marking apparatus is disclosed in which a propellant stream is passed through a channel and directed toward a substrate. A liquid marking material, such as ink, is controllably introduced into the propellant stream and imparted with sufficient kinetic energy thereby to be made incident upon a substrate. A multiplicity of channels for directing the propellant and marking material allow for high throughput, high resolution marking. Multiple marking materials may be introduced into the channel and mixed therein prior to being made incident on the substrate, or mixed or superimposed on the substrate without registration. One example is a single-pass, full-color printer.
摘要翻译： 公开了一种标记装置，其中推进剂流通过通道并指向基板。 诸如油墨的液体标记材料被可控地引入推进剂流中并赋予足够的动能，从而使其入射到基底上。 用于引导推进剂和标记材料的多个通道允许高通量，高分辨率标记。 可以将多个标记材料引入通道中并在其入射到基板之前混合，或者混合或叠加在基板上而不进行配准。 一个例子是单程全彩色打印机。
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公开(公告)号：US6089534A
公开(公告)日：2000-07-18
申请号：US4520
申请日：1998-01-08
CPC分类号： B65H5/228 , F16K99/0015 , B65H2406/11 , B65H2406/414
摘要： A variable fluid flow valve is disclosed. The valve can be batch fabricated in two dimensional valve arrays, with all valves in the array being controlled in parallel to achieve high flow rates without increasing response time. Typically, each valve includes a valve housing having an aperture plate defining an elongated aperture therethrough, and an opposing plate positioned in spaced apart relationship to the aperture plate. In one embodiment a flexible film or strip is attached at its first end to the aperture plate and at its second end to the opposing plate. In another embodiment of the invention, the flexible film is attached at only one end and is free to move at the other end. In both types of valves, valve action is provided by using electrodes to variably move the flexible film from an aperture blocking to an aperture non-blocking position. The flexible film may be moved in a continuously variable manner or a discretely variable manner, depending upon the electrode configuration. Binary valves in matrixes may also be used with the elongated opening.
摘要翻译： 公开了一种可变流体流量阀。 该阀可以批量制造在二维阀阵列中，阵列中的所有阀并联控制以实现高流速而不增加响应时间。 通常，每个阀包括具有限定穿过其中的细长孔的孔板的阀壳体和与孔板间隔开的关系。 在一个实施例中，柔性膜或带在其第一端附接到孔板并且在其第二端处连接到相对的板。 在本发明的另一个实施例中，柔性膜仅在一端附接并在另一端自由移动。 在两种类型的阀中，通过使用电极来将柔性膜从孔径阻挡可变地移动到孔阻塞位置来提供阀动作。 取决于电极配置，柔性膜可以以连续可变的方式或离散地变化的方式移动。 基体中的二元阀也可以与细长的开口一起使用。
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公开(公告)号：US5971355A
公开(公告)日：1999-10-26
申请号：US757219
申请日：1996-11-27
摘要： A valve array system including microelectromechanical valves embedded in a dielectric substrate is disclosed. These microelectromechanical valves can be batch fabricated using resin impregnated dielectric laminates having photolithographically formed circuitry for electrical connections. Movable components of valves, including electromagnetic or electrostatically actuated membranes, flaps, or beams, can be formed from laminate material using sacrifice layers and etching.
摘要翻译： 公开了一种包括嵌入电介质基片中的微机电阀的阀阵列系统。 这些微机电阀可以使用具有光刻形成的用于电连接的电路的树脂浸渍介电层压板来批量制造。 可以使用牺牲层和蚀刻由层压材料形成阀的可移动部件，包括电磁或静电致动膜，折翼或梁。
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公开(公告)号：US5864127A
公开(公告)日：1999-01-26
申请号：US728654
申请日：1996-10-10
CPC分类号： G06K7/143 , G06K7/10722
摘要： Bands of predetectors (92) detect the approach of lines of glyphs (12, 14) within an image being scanned. Linear lines or arrays of glyph detectors (116, 118, 120) are sampled in accordance with the detected approach of lines of glyphs. Each detector array includes a plurality of analog glyph detectors (20, 50) which respond to the presence of glyphs with a characteristic analog output. Preferably, the glyph detectors generate a corresponding analog output of a first polarity or other characteristic in response to glyphs of a first orientation and an output of a second polarity or characteristic in response to glyphs of a second orientation. The analog signals which are characteristic of the detection of a glyph are converted into binary 1's and 0's in accordance with the polarity or other characteristic of the signals. In this manner, glyphs are detected by analog detectors and the information encoded in the glyphs is directly output as a binary signal without computer analysis of the image.
摘要翻译： 预先检测器带（92）检测正在扫描的图像内的字形线（12,14）的接近。 根据检测到的字形线的方法对线性线或字形检测器（116,118,120）的阵列进行采样。 每个检测器阵列包括多个模拟字形检测器（20,50），其响应于具有特征模拟输出的字形的存在。 优选地，字形检测器响应于第一取向的字形和响应于第二取向的字形的第二极性或特性的输出而产生第一极性或其他特性的相应模拟输出。 根据信号的极性或其他特性，将检测字形的特征的模拟信号转换为二进制1和0。 以这种方式，通过模拟检测器检测字形，并且在字形中编码的信息直接作为二进制信号输出，而不对图像进行计算机分析。
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