Photolithographic pattern-forming material and method for formation of fine pattern therwith
    1.
    发明授权
    Photolithographic pattern-forming material and method for formation of fine pattern therwith 失效
    光刻图案形成材料和形成精细图案的方法

    公开(公告)号:US06692894B1

    公开(公告)日:2004-02-17

    申请号:US09651730

    申请日:2000-08-30

    IPC分类号: G03F700

    CPC分类号: G03F7/11 G03F7/2008

    摘要: Disclosed is a photolithographic pattern-forming material capable of giving a fine patterned resist layer rapidly and being used repeatedly. The pattern-forming material is a multilayered body comprising a substrate and a photoresist layer thereon which is overlaid with a three-layered composite film for near-field light generation consisting of an intermediate layer of a non-linear optical material such as antimony sandwiched between two dielectric layers. When irradiated with active rays focused on the optically nonlinear layer, a fine optical window or light scattering point is formed therein where a near-field light is generated to pattern-wise expose the photoresist layer.

    摘要翻译: 公开了一种光刻图案形成材料,其能够快速赋予精细的图案化抗蚀剂层并重复使用。 图案形成材料是包括基板和其上的光致抗蚀剂层的多层体,其上覆盖有用于近场光产生的三层复合膜,由诸如锑之类的非线性光学材料的中间层夹在 两个电介质层。 当聚焦在光学非线性层上的活性射线照射时,在其中形成精细的光学窗口或光散射点,其中产生近场光以图案地曝光光致抗蚀剂层。

    Optical probe array head device
    2.
    发明授权
    Optical probe array head device 失效
    光探头阵列头装置

    公开(公告)号:US06542455B1

    公开(公告)日:2003-04-01

    申请号:US09651731

    申请日:2000-08-30

    IPC分类号: G11B700

    摘要: Provided is an optical probe array head device in which a single optical detector or a plurality of optical detectors are disposed to each of the optical probes constituting an optical probe array having a plurality of apertures. The optical detectors are arranged to surround the aperture so as to be able to efficiently detect scattering of a feeble near-field light enabling similtaneous detection of a multipilicity of optical signals. In this device, an optical lens system necessary for optical detection can be omitted by integrating the optical probe array and the optical detectors. In addition, the output signals from the optical detectors can be utilized for conducting position control of the optical probe array head.

    摘要翻译: 提供了一种光学探针阵列头装置,其中单个光学检测器或多个光学检测器设置在构成具有多个孔的光学探针阵列的每个光学探针中。 光学检测器被布置成围绕孔径,以便能够有效地检测弱视近场光的散射,从而能够进行光信号的多重性的即时检测。 在该装置中,通过集成光学探针阵列和光学检测器,可以省略光学检测所需的光学透镜系统。 此外,来自光学检测器的输出信号可以用于对光学探头阵列头进行位置控制。

    Pattern forming materials and pattern formation method using the materials
    3.
    发明授权
    Pattern forming materials and pattern formation method using the materials 有权
    图案形成材料和图案形成方法使用材料

    公开(公告)号:US08187786B2

    公开(公告)日:2012-05-29

    申请号:US10531897

    申请日:2003-10-20

    IPC分类号: G03F7/00

    摘要: A pattern forming materials includes a thermal sensitive material layer formed on a target substrate, a first light-to-heat converting layer formed between the thermal sensitive material layer and the target substrate, and a second light-to-heat converting layer formed on a surface of the thermal sensitive material layer opposite to the first light-to-heat converting layer, the thermal sensitive material layer being interposed between the first and second light-to-heat converting layers. A higher aspect ratio fine pattern can be formed in the thermal sensitive material layer made of photoresist using heat generated in the first and second light-to-heat converting layers formed on both surfaces of the thermal sensitive material layer.

    摘要翻译: 图案形成材料包括形成在目标基板上的热敏材料层,形成在热敏材料层和目标基板之间的第一光热转换层和形成在热敏材料层上的第二光热转换层 所述热敏材料层的表面与所述第一光热转换层相对,所述热敏材料层插入在所述第一和第二光热转换层之间。 可以在形成在热敏材料层的两个表面上的第一和第二光热转换层中产生的热量的光致抗蚀剂材料层中形成更高的纵横比精细图案。

    Method for determining a reproducing power of a laser beam and an apparatus for recording and reproducing data
    4.
    发明授权
    Method for determining a reproducing power of a laser beam and an apparatus for recording and reproducing data 有权
    用于确定激光束的再现功率的方法和用于记录和再现数据的装置

    公开(公告)号:US07440370B2

    公开(公告)日:2008-10-21

    申请号:US10929894

    申请日:2004-08-30

    IPC分类号: G11B7/00

    摘要: A method for determining a read power of a laser beam includes a step of setting a power of a laser beam to a recommended recording power Pw′ and forming a recording mark train including at least one of a recording mark having a length shorter than a resolution limit and a blank region having a length shorter than the resolution limit in an optical recording disc, thereby recording test data therein. The method also includes a step of setting the power of the laser beam to a recommended read power Pr′ and reproducing the test data recorded in the optical recording disc, a step of judging whether or not signal characteristics of a reproduced signal obtained by reproducing the test data satisfies reference conditions, and determining an optimum read power of the laser beam based on the result of the judgment.

    摘要翻译: 用于确定激光束的读取功率的方法包括将激光束的功率设置为推荐的记录功率Pw'的步骤,并形成包括长度短于分辨率的记录标记中的至少一个的记录标记串 限制,并且具有比光记录盘中的分辨率限制短的长度的空白区域,从而在其中记录测试数据。 该方法还包括将激光束的功率设置为推荐的读取功率Pr'并再现记录在光学记录盘中的测试数据的步骤,判断通过再现所获得的再现信号的信号特性 测试数据满足参考条件,并且基于判断结果确定激光束的最佳读取功率。

    Method for reproducing data and an apparatus for recording and reproducing data
    6.
    发明授权
    Method for reproducing data and an apparatus for recording and reproducing data 有权
    用于再现数据的方法和用于记录和再现数据的装置

    公开(公告)号:US07457215B2

    公开(公告)日:2008-11-25

    申请号:US10929892

    申请日:2004-08-30

    IPC分类号: G11B7/00

    摘要: A method for reproducing data according to the present invention is adapted for reproducing data recorded in an optical recording disc including a multi-layered body formed by forming a decomposition reaction layer containing noble metal oxide as a primary component and a light absorption layer so as to sandwich a dielectric layer therebetween by irradiating a laser beam onto the optical recording disc and forming a recording mark train including at least one of a recording mark having a length shorter than a resolution limit and a blank region having a length shorter than the resolution limit therein, and is constituted by changing the read power Pr of the laser beam in accordance with a readout linear velocity at which data are to be reproduced from the optical recording disc. According to the thus constituted method for reproducing data, even in the case where the length of a recording mark or the length of a blank region between neighboring recording marks is shorter than the resolution limit, it is possible to record and reproduce a recording mark train including these recording marks and the blank regions. Therefore, this method can be applied to an optical recording medium whose storage capacity is markedly increased.

    摘要翻译: 根据本发明的再现数据的方法适用于再现记录在包括通过形成含有贵金属氧化物作为主要成分的分解反应层和光吸收层而形成的多层体的光学记录盘中的数据,以便 通过将激光束照射到光学记录盘上并形成包括长度小于分辨率极限的记录标记和长度小于分辨率极限的空白区域中的至少一个的记录标记列,夹在其间的电介质层 并且通过根据从光记录盘再现数据的读出线速度来改变激光束的读取功率Pr构成。 根据这样构成的再现数据的方法,即使在记录标记的长度或相邻记录标记之间的空白区域的长度短于分辨率极限的情况下,也可以记录和再现记录标记列 包括这些记录标记和空白区域。 因此,该方法可以应用于存储容量明显增加的光记录介质。

    Method for determining a reproducing power of a laser beam and an apparatus for recording and reproducing data
    8.
    发明申请
    Method for determining a reproducing power of a laser beam and an apparatus for recording and reproducing data 有权
    用于确定激光束的再现功率的方法和用于记录和再现数据的装置

    公开(公告)号:US20050105418A1

    公开(公告)日:2005-05-19

    申请号:US10929894

    申请日:2004-08-30

    摘要: A method for determining a read power of a laser beam according to the present invention includes a step of setting a power of a laser beam to a recommended recording power Pw′ and forming a recording mark train including at least one of a recording mark having a length shorter than a resolution limit and a blank region having a length shorter than the resolution limit in an optical recording disc, thereby recording test data therein, a step of setting the power of the laser beam to a recommended read power Pr′ and reproducing the test data recorded in the optical recording disc, a step of judging whether or not signal characteristics of a reproduced signal obtained by reproducing the test data satisfies reference conditions, and determining an optimum read power of the laser beam based on the result of the judgment. According to the thus constituted method for determining a read power of a laser beam, even in the case where the length of a recording mark or the length of a blank region between neighboring recording marks is shorter than the resolution limit, it is possible to record and reproduce a recording mark train including these recording marks and blank regions. Therefore, this method can be applied to an optical recording medium whose storage capacity is markedly increased.

    摘要翻译: 根据本发明的用于确定激光束的读取功率的方法包括将激光束的功率设置为推荐的记录功率Pw'并形成记录标记列的步骤,该记录标记列包括具有 长度短于分辨率极限,并且具有长度短于光学记录盘中的分辨率极限的空白区域,从而在其中记录测试数据,将激光束的功率设置为推荐读取功率Pr'并再现 记录在光学记录盘中的测试数据,判断通过再现测试数据获得的再现信号的信号特性是否满足参考条件,并且基于判断结果确定激光束的最佳读取功率的步骤。 根据如此构成的确定激光束的读取功率的方法,即使在记录标记的长度或相邻记录标记之间的空白区域的长度短于分辨率限制的情况下,也可以记录 并且再现包括这些记录标记和空白区域的记录标记列。 因此,该方法可以应用于存储容量明显增加的光记录介质。

    Multi-layer structure and method of drawing microscopic structure therein, optical disc master and method of fabricating the same using the multi-layer structure, and optical disc manufactured using the optical disc master
    9.
    发明授权
    Multi-layer structure and method of drawing microscopic structure therein, optical disc master and method of fabricating the same using the multi-layer structure, and optical disc manufactured using the optical disc master 失效
    多层结构及其微观结构的绘制方法,光盘主机及其制造方法使用多层结构,以及使用光盘主机制造的光盘

    公开(公告)号:US07435468B2

    公开(公告)日:2008-10-14

    申请号:US10849522

    申请日:2004-05-20

    IPC分类号: B32B9/00

    摘要: A multi-layer structure whose volume changes when a temperature exceeds a predetermined threshold value, a microscopic structure drawing method that involves emitting a laser beam onto the multi-layer structure to create a temperature distribution within a beam spot and performing microscopic recording on a portion of the beam spot having a temperature higher than the threshold value, an optical disc master, and a mastering method using the same, where the multi-layer structure includes a substrate and a transformation layer formed on the substrate, wherein a volume of a portion of the transformation layer irradiated by a laser beam changes when the temperature of the portion exceeds a predetermined temperature. The microscopic structure drawing method includes emitting the laser beam onto a predetermined region of the transformation layer and heating the region of the transformation layer irradiated by the laser beam beyond a predetermined temperature so that the heated region can undergo a volume change.

    摘要翻译: 一种当温度超过预定阈值时其体积变化的多层结构,涉及在多层结构上发射激光以产生束斑内的温度分布并在部分上进行微观记录的显微结构拉伸方法 具有温度高于阈值的光斑,光盘母盘及其使用方法,其中所述多层结构包括衬底和形成在所述衬底上的相变层,其中所述部分的体积 当部分的温度超过预定温度时,由激光束照射的变换层的变化将发生变化。 微观结构绘制方法包括将激光束发射到转变层的预定区域上,并将由激光束照射的相变层的区域加热超过预定温度,使得加热区域能够经历体积变化。

    Method for reproducing data and an apparatus for recording and reproducing data
    10.
    发明申请
    Method for reproducing data and an apparatus for recording and reproducing data 有权
    用于再现数据的方法和用于记录和再现数据的装置

    公开(公告)号:US20050117478A1

    公开(公告)日:2005-06-02

    申请号:US10929892

    申请日:2004-08-30

    摘要: A method for reproducing data according to the present invention is adapted for reproducing data recorded in an optical recording disc including a multi-layered body formed by forming a decomposition reaction layer containing noble metal oxide as a primary component and a light absorption layer so as to sandwich a dielectric layer therebetween by irradiating a laser beam onto the optical recording disc and forming a recording mark train including at least one of a recording mark having a length shorter than a resolution limit and a blank region having a length shorter than the resolution limit therein, and is constituted by changing the read power Pr of the laser beam in accordance with a readout linear velocity at which data are to be reproduced from the optical recording disc. According to the thus constituted method for reproducing data, even in the case where the length of a recording mark or the length of a blank region between neighboring recording marks is shorter than the resolution limit, it is possible to record and reproduce a recording mark train including these recording marks and the blank regions. Therefore, this method can be applied to an optical recording medium whose storage capacity is markedly increased.

    摘要翻译: 根据本发明的再现数据的方法适用于再现记录在包括通过形成含有贵金属氧化物作为主要成分的分解反应层和光吸收层而形成的多层体的光学记录盘中的数据,以便 通过将激光束照射到光学记录盘上并形成包括长度小于分辨率极限的记录标记和长度小于分辨率极限的空白区域中的至少一个的记录标记列,夹在其间的电介质层 并且通过根据从光记录盘再现数据的读出线速度来改变激光束的读取功率Pr构成。 根据这样构成的再现数据的方法,即使在记录标记的长度或相邻记录标记之间的空白区域的长度比分辨率极限短的情况下,也可以记录和再现记录标记列 包括这些记录标记和空白区域。 因此,该方法可以应用于存储容量明显增加的光记录介质。