公开(公告)号：US09683302B2

公开(公告)日：2017-06-20

申请号：US13701217

申请日：2011-05-31

申请人： Michael Siemer ,  Cornelia Roeger-Goepfert ,  Nicole Meier ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer ,  Alexander Fluegel

发明人： Michael Siemer ,  Cornelia Roeger-Goepfert ,  Nicole Meier ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer ,  Alexander Fluegel

IPC分类号： C25D3/58 ,  C25D3/38 ,  C25D5/02 ,  C08G73/06 ,  C08L79/04 ,  C23C18/31 ,  C25D3/02 ,  C25D3/32

CPC分类号： C25D3/38 ,  C08G73/0616 ,  C08L79/04 ,  C23C18/31 ,  C25D3/02 ,  C25D3/32 ,  C25D3/58 ,  C25D5/02

摘要： A composition comprising a source of metal ions and at least one leveling agent comprising a linear or branched, polymeric imidazolium compound comprising the structural unit of formula L1 (L1) wherein R1, R2, R3 are each independently selected from an H atom and an organic radical having from 1 to 20 carbon atoms, R4 is a divalent, trivalent or mutlivalent organic radical which does not comprise a hydroxyl group in the a or β position relative to the nitrogen atom of the imidazole rings is an integer.

公开(公告)号：US20130068626A1

公开(公告)日：2013-03-21

申请号：US13701217

申请日：2011-05-31

申请人： Michael Siemer ,  Cornelia Roeger-Goepfert ,  Nicole Meier ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer ,  Alexander Fluegel

发明人： Michael Siemer ,  Cornelia Roeger-Goepfert ,  Nicole Meier ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer ,  Alexander Fluegel

IPC分类号： C25D3/38 ,  C25D5/02

CPC分类号： C25D3/38 ,  C08G73/0616 ,  C08L79/04 ,  C23C18/31 ,  C25D3/02 ,  C25D3/32 ,  C25D3/58 ,  C25D5/02

摘要： A composition comprising a source of metal ions and at least one leveling agent comprising a linear or branched, polymeric imidazolium compound comprising the structural unit of formula L1 (L1) wherein R1, R2, R3 are each independently selected from an H atom and an organic radical having from 1 to 20 carbon atoms, R4 is a divalent, trivalent or mutlivalent organic radical which does not comprise a hydroxyl group in the α or β position relative to the nitrogen atom of the imidazole rings is an integer.

摘要翻译： 一种包含金属离子源的组合物和至少一种包含线性或支化的聚合咪唑鎓化合物的流平剂，其包含式L1（L1）的结构单元，其中R 1，R 2，R 3各自独立地选自H原子和有机 具有1至20个碳原子的基团，R 4是在α或bgr中不包含羟基的二价，三价或多价的有机基团; 相对于咪唑环的氮原子的位置是整数。

公开(公告)号：US09631292B2

公开(公告)日：2017-04-25

申请号：US14123129

申请日：2012-05-31

申请人： Cornelia Roeger-Goepfert ,  Marco Arnold ,  Alexander Fluegel ,  Charlotte Emnet ,  Roman Benedikt Raether ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Marco Arnold ,  Alexander Fluegel ,  Charlotte Emnet ,  Roman Benedikt Raether ,  Dieter Mayer

IPC分类号： C25D3/38 ,  C23C18/38 ,  C25D7/12 ,  C08G73/02 ,  C08L79/02

CPC分类号： C25D3/38 ,  C08G73/028 ,  C08L79/02 ,  C23C18/38 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76898

摘要： A composition comprising a source of metal ions and at least one polyaminoamide, said polyaminoamide comprising amide and amine functional groups in the polymeric backbone and aromatic moieties attached to or located within said polymeric backbone.

公开(公告)号：US20140097092A1

公开(公告)日：2014-04-10

申请号：US14123129

申请日：2012-05-31

申请人： Cornelia Roeger-Goepfert ,  Marco Arnold ,  Alexander Fluegel ,  Charlotte Emnet ,  Roman Benedikt Raether ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Marco Arnold ,  Alexander Fluegel ,  Charlotte Emnet ,  Roman Benedikt Raether ,  Dieter Mayer

IPC分类号： C25D3/38

CPC分类号： C25D3/38 ,  C08G73/028 ,  C08L79/02 ,  C23C18/38 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76898

摘要： A composition comprising a source of metal ions and at least one polyaminoamide, said polyaminoamide comprising amide and amine functional groups in the polymeric backbone and aromatic moieties attached to or located within said polymeric backbone.

摘要翻译： 包含金属离子源和至少一种聚氨基酰胺的组合物，所述聚氨基酰胺在聚合物主链中包含酰胺和胺官能团，以及连接到或位于所述聚合物主链内的芳族部分。

公开(公告)号：US20130020203A1

公开(公告)日：2013-01-24

申请号：US13634140

申请日：2011-03-17

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer

IPC分类号： C25D3/02 ,  C25D5/16 ,  C25D3/38

CPC分类号： C08L79/02 ,  C08G73/0206 ,  C23C18/31 ,  C25D3/30 ,  C25D3/38 ,  C25D7/123

摘要： A composition comprising a source of metal ions and at least one additive comprising a polyalkyleneimine backbone, said polyalkyleneimine backbone having a molecular weight Mw of from 300 g/mol to 1000000 g/mol, wherein the N hydrogen atoms in the backbone are substituted by a polyoxyalkylene radical and wherein the average number of oxyalkylene units in said polyoxyalkylene radical is from 1.5 to 10 per N—H unit.

摘要翻译： 一种包含金属离子源和至少一种包含聚亚烷基亚胺主链的添加剂的组合物，所述聚亚烷基亚胺主链的分子量Mw为300g / mol至1000000g / mol，其中主链中的N个氢原子被 聚氧化烯基，其中所述聚氧化烯基中的氧化烯单元的平均数为每N-H单元1.5至10。

公开(公告)号：US09598540B2

公开(公告)日：2017-03-21

申请号：US13510328

申请日：2010-11-22

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Charlotte Emnet ,  Marco Arnold

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Charlotte Emnet ,  Marco Arnold

IPC分类号： C25D3/38 ,  C08G73/02 ,  C08L79/02 ,  H01L21/288 ,  H01L21/768 ,  H05K3/42

CPC分类号： C08G73/028 ,  C08L79/02 ,  C25D3/38 ,  H01L21/2885 ,  H01L21/76877 ,  H01L2924/0002 ,  H05K3/423 ,  H01L2924/00

摘要： A composition comprising a source of metal ions and at least one additive comprising at least one polyaminoamide represented by formula (I) or derivatives of a polyaminoamide of formula (I) obtainable by complete or partial protonation, N-quarternisation or acylation.

公开(公告)号：US20120292193A1

公开(公告)日：2012-11-22

申请号：US13510328

申请日：2010-11-22

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Charlotte Emnet ,  Marco Arnold

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Charlotte Emnet ,  Marco Arnold

IPC分类号： C25D3/38 ,  C25D5/02 ,  C25D3/02

CPC分类号： C08G73/028 ,  C08L79/02 ,  C25D3/38 ,  H01L21/2885 ,  H01L21/76877 ,  H01L2924/0002 ,  H05K3/423 ,  H01L2924/00

摘要： A composition comprising a source of metal ions and at least one additive comprising at least one polyaminoamide represented by formula (I) or derivatives of a polyaminoamide of formula (I) obtainable by complete or partial protonation, N-quarternisation or acylation.

摘要翻译： 包含金属离子源和至少一种添加剂的组合物，其包含至少一种由式（I）表示的聚氨基酰胺或通过完全或部分质子化，N-季铵化或酰化可得到的式（I）的聚氨基酰胺的衍生物。

公开(公告)号：US09834677B2

公开(公告)日：2017-12-05

申请号：US13634140

申请日：2011-03-17

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Marco Arnold ,  Charlotte Emnet ,  Dieter Mayer

IPC分类号： C08L79/02 ,  C08G73/02 ,  C25D3/38 ,  C25D7/12 ,  C25D3/30 ,  C23C18/31

CPC分类号： C08L79/02 ,  C08G73/0206 ,  C23C18/31 ,  C25D3/30 ,  C25D3/38 ,  C25D7/123

摘要： A composition comprising a source of metal ions and at least one additive comprising a polyalkyleneimine backbone, said polyalkyleneimine backbone having a molecular weight Mw of from 300 g/mol to 1000000 g/mol, wherein the N hydrogen atoms in the backbone are substituted by a polyoxyalkylene radical and wherein the average number of oxyalkylene units in said polyoxyalkylene radical is from 1.5 to 10 per N—H unit.

公开(公告)号：US20120024711A1

公开(公告)日：2012-02-02

申请号：US13257716

申请日：2010-03-25

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC分类号： C25D5/02

CPC分类号： C23C18/31 ,  C23C18/32 ,  C25D3/38 ,  C25D3/58 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/423

摘要： A composition for filling submicrometer sized features having an aperture size of 30 nanometers or less comprising a source of copper ions, and at least one suppressing agent selected from compounds of formula (I) wherein the R1 radicals are each independently selected from a copolymer of ethylene oxide and at least one further C3 to C4 alkylene oxide, said copolymer being a random copolymer. the R2 radicals are each independently selected from R1 or alkyl. X and Y are spacer groups independently, and X for each repeating unit independently, selected from C1 to C6 alkylen and Z—(O—Z)m wherein the Z radicals are each independently selected from C2 to C6 alkylen, n is an integer equal to or greater than 0. m is an integer equal to or greater than 1.

摘要翻译： 用于填充具有30纳米或更小孔径的亚微米尺寸特征的组合物，其包含铜离子源，以及至少一种选自式（I）化合物的抑制剂，其中R 1基团各自独立地选自乙烯的共聚物 氧化物和至少一种其它C 3至C 4环氧烷烃，所述共聚物是无规共聚物。 R 2基团各自独立地选自R 1或烷基。 X和Y独立地为间隔基，X独立地选自C 1 -C 6亚烷基和Z-（O-Z）m，其中Z基独立地选自C 2 -C 6亚烷基，n是等于 m以上的整数，m为1以上的整数。

公开(公告)号：US09011666B2

公开(公告)日：2015-04-21

申请号：US13140712

申请日：2009-12-08

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Sophia Ebert ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Sophia Ebert ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC分类号： C25D3/38 ,  C08G73/02 ,  C08L79/02 ,  H01L21/288 ,  H01L21/768 ,  C25D3/02 ,  H05K3/42

CPC分类号： C08G73/024 ,  C08L79/02 ,  C25D3/02 ,  C25D3/38 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/423

摘要： A composition comprising a source of metal ions and at least one leveling agent obtainable by condensing at least one trialkanolamine of the general formula N(R1—OH)3 (Ia) and/or at least one dialkanolamine of the general formula R2—N(R1—OH)2 (Ib) to give a polyalkanolamine(II), wherein the R1 radicals are each independently selected from a divalent, linear or branched aliphatic hydrocarbon radical having from 2 to 6 carbon atoms, and the R2 radicals are each selected from hydrogen and linear or branched aliphatic, cycloaliphatic and aromatic hydrocarbon radicals having from 1 to 30 carbon atoms, or derivatives obtainable by alkoxylation, substitution or alkoxylation and substitution of said polyalkanolamine(II).

摘要翻译： 包含金属离子源和至少一种流平剂的组合物，其可通过将至少一种通式为N（R 1 -OH）3（Ia）的三烷醇胺和/或至少一种通式R 2 -N的二链烷醇胺 R1-OH）2（Ib），得到聚链烷醇胺（II），其中R1基团各自独立地选自具有2至6个碳原子的二价，直链或支链脂族烃基，R2基团各自选自 氢和具有1至30个碳原子的直链或支链脂族，脂环族和芳族烃基，或通过所述聚链烷醇胺（II）的烷氧基​​化，取代或烷氧基化和取代得到的衍生物。