PROCESS FOR REMOVING A BULK MATERIAL LAYER FROM A SUBSTRATE AND A CHEMICAL MECHANICAL POLISHING AGENT SUITABLE FOR THIS PROCESS
    4.
    发明申请
    PROCESS FOR REMOVING A BULK MATERIAL LAYER FROM A SUBSTRATE AND A CHEMICAL MECHANICAL POLISHING AGENT SUITABLE FOR THIS PROCESS 审中-公开
    从基板上移除大块材料层的方法和适用于本工艺的化学机械抛光剂

    公开(公告)号:US20120235081A1

    公开(公告)日:2012-09-20

    申请号:US13510830

    申请日:2010-11-25

    IPC分类号: C09K13/00 B44C1/22 H01L21/306

    摘要: A process for removing a bulk material layer from a substrate and planarizing the exposed surface by CMP by (1) providing an CMP agent exhibiting at the end of the chemical mechanical polishing, without the addition of supplementary materials, the same SER as at its start and a lower MRR than at its start,—an SER which is lower than the initial SER and an MRR which is the same or essentially the same as the initial MRR or a lower SER and a lower MRR than at its start; (2) contacting the surface of the bulk material layer with the CMP agent; (3) the CMP of the bulk material layer with the CMP agent; and (4) continuing the CMP until all material residuals are removed from the exposed surface; and a CMP agent and their use for manufacturing electrical and optical devices.

    摘要翻译: (1)提供在化学机械抛光结束时显示的CMP试剂,而不添加补充材料,与其开始时相同的SER的方法,用于从基底去除体材料层并通过CMP平坦化暴露表面的方法 和比开始时更低的MRR - SER低于初始SER,MRR与初始MRR相同或基本相同或较低的SER和较低的MRR比开始时更低; (2)使本体材料层的表面与CMP剂接触; (3)散装材料层的CMP与CMP剂; 和(4)继续CMP,直到从暴露表面去除所有材料残留物; 和CMP剂及其用于制造电气和光学器件的用途。

    Amphiphilic water-soluble alkoxylated polyalkyleneimines having an inner polyethylene oxide block and an outer polypropylene oxide block
    6.
    发明授权
    Amphiphilic water-soluble alkoxylated polyalkyleneimines having an inner polyethylene oxide block and an outer polypropylene oxide block 有权
    具有内部聚环氧乙烷嵌段和外部聚环氧丙烷嵌段的两亲性水溶性烷氧基化聚亚烷基亚胺

    公开(公告)号:US08318653B2

    公开(公告)日:2012-11-27

    申请号:US12739747

    申请日:2008-11-07

    摘要: The present invention relates to amphiphilic water-soluble alkoxylated polyalkyleneimines having an inner polyethylene oxide block comprising 20 to 50 polyethylene oxide units and an outer polypropylene oxide block comprising 10 to 50 polyethylene oxide units and especially to such alkoxylated polyalkyleneimines wherein the ratio of polyethylene oxide units and polypropylene oxide units is proportionally related to the square root of the number of polyalkyleneimine units present in the backbone. The present invention further relates to the use of these alkoxylated polyalkyleneimines as a soil detachment promoting additive to laundry detergents and cleaning compositions and to laundry detergents and cleaning compositions which comprise these alkoxylated mono- or polyalkyleneimines.

    摘要翻译: 本发明涉及具有包含20-50个聚环氧乙烷单元的内部聚环氧乙烷嵌段的两亲性水溶性烷氧基化聚亚烷基亚胺和包含10-50个聚环氧乙烷单元的外部聚环氧丙烷嵌段,特别涉及这样的烷氧基化聚亚烷基亚胺,其中聚环氧乙烷单元 和聚丙烯氧化物单元与存在于主链中的聚亚烷基亚胺单元的数量的平方根成比例地相关。 本发明还涉及这些烷氧基化聚亚烷基亚胺作为洗涤剂和清洁组合物的促进添加剂的土壤剥离剂以及包含这些烷氧基化单 - 或聚亚烷基亚胺的衣物洗涤剂和清洁组合物的用途。

    Alkoxylated polyalkanolamines
    7.
    发明授权
    Alkoxylated polyalkanolamines 有权
    烷氧基化聚链烷醇胺

    公开(公告)号:US08129326B2

    公开(公告)日:2012-03-06

    申请号:US12740050

    申请日:2008-11-07

    IPC分类号: C11D3/30

    CPC分类号: C08G73/024

    摘要: The present invention relates to polymers obtainable by condensation of N-(hydroxy-alkyl)amines and reacting the remaining hydroxy and/or secondary amino groups of the condensation product with alkylene oxides and to derivatives obtainable by quaternization, protonation, sulphation and/or phosphation of said polymers, as well as to a process for preparing said polymers and a process for preparing said derivatives.

    摘要翻译: 本发明涉及通过N-(羟基 - 烷基)胺的缩合和使缩合产物的剩余羟基和/或仲氨基与环氧烷反应得到的聚合物和通过季铵化,质子化,硫酸化和/或磷酸化得到的衍生物 的所述聚合物,以及制备所述聚合物的方法和制备所述衍生物的方法。