-
公开(公告)号:US20250024675A1
公开(公告)日:2025-01-16
申请号:US18904472
申请日:2024-10-02
Applicant: Micron Technology, Inc.
Inventor: Sidhartha Gupta , Naveen Kaushik , Pankaj Sharma
IPC: H10B41/27 , H01L23/538 , H10B43/27
Abstract: A method used in forming a memory array comprises forming a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory-cell strings extend through the insulative and conductive tiers. Conductive vias are formed above and individually electrically coupled to individual of the channel-material strings. Insulating material is laterally-between immediately-adjacent of the conductive vias. At least some of the insulating material is vertically removed to form an upwardly-open void-space that is circumferentially about multiple of the conductive vias. Insulative material formed laterally-between the immediately-adjacent conductive vias to form a covered void-space from the upwardly-open void-space. Digitlines are formed above that are individually electrically coupled to a plurality of individual of the conductive vias there-below. Other embodiments, including structure independent of method, are disclosed.
-
公开(公告)号:US20240268091A1
公开(公告)日:2024-08-08
申请号:US18432870
申请日:2024-02-05
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Pankaj Sharma , Manuj Nahar , Nicholas R. Tapias , Scott E. Sills
IPC: H10B12/00
CPC classification number: H10B12/00
Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first conductive region; a second conductive region; a memory cell between the first and second conductive regions and including a first transistor including a first region coupled to the first and second conductive regions, and a charge storage structure separated from the first conduction region, and a second transistor including a second region coupled to the charge storage structure and the second conductive region; and a structure separated from the first region, the charge storage structure, and the second region by a dielectric structure, the structure forming part of a gate of the first transistor and the second transistor, and the structure including a first portion adjacent the dielectric structure, and a second portion adjacent the first portion, wherein the first portion includes a semiconductor material and the second portion includes a conductive material.
-
3.
公开(公告)号:US20240074138A1
公开(公告)日:2024-02-29
申请号:US18238269
申请日:2023-08-25
Applicant: Micron Technology, Inc.
Inventor: Durai Vishak Nirmal Ramaswamy , Karthik Sarpatwari , Kamal M. Karda , Pankaj Sharma
IPC: H10B12/00
CPC classification number: H10B12/00
Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first data line; a second data line adjacent the first data line and separated from the first data line by a first dielectric structure; and a memory cell formed over the first and second data lines. The memory cell includes a first transistor including a first channel region formed over and coupled to the first data line, and a charge storage structure separated from the first channel region; a second transistor including a second channel region formed over and coupled to the second data line, wherein the charge storage structure is formed over and coupled to the second channel region; and a second dielectric structure between the first channel region and each of the second channel region and the charge storage structure.
-
公开(公告)号:US20230187346A1
公开(公告)日:2023-06-15
申请号:US18164903
申请日:2023-02-06
Applicant: Micron Technology, Inc.
Inventor: Naveen Kaushik , Sidhartha Gupta , Pankaj Sharma , Haitao Liu
IPC: H01L23/522 , G11C5/06 , H01L21/48 , H01L21/768 , H10B41/27 , H10B43/27
CPC classification number: H01L23/5226 , G11C5/06 , H01L21/486 , H01L21/76802 , H01L21/76877 , H10B41/27 , H10B43/27
Abstract: A method of forming a microelectronic device comprises forming a stack structure comprising vertically alternating insulating structures and conductive structures arranged in tiers. Each of the tiers individually comprises one of the insulating structures and one of the conductive structures. A sacrificial material is formed over the stack structure and pillar structures are formed to extend vertically through the stack structure and the sacrificial material. The method comprises forming conductive plug structures within upper portions of the pillar structures, forming slots extending vertically through the stack structure and the sacrificial material, at least partially removing the sacrificial material to form openings horizontally interposed between the conductive plug structures, and forming a low-K dielectric material within the openings. Microelectronic devices, memory devices, and electronic systems are also described.
-
公开(公告)号:US20220238546A1
公开(公告)日:2022-07-28
申请号:US17158259
申请日:2021-01-26
Applicant: Micron Technology, Inc.
Inventor: Sidhartha Gupta , Naveen Kaushik , Pankaj Sharma , Kyle A. Ritter
IPC: H01L27/11582 , H01L27/11556 , H01L27/11519 , H01L27/11565
Abstract: Some embodiments include an integrated assembly having a channel-material-pillar extending vertically through a stack of alternating conductive levels and insulative levels. The channel-material-pillar includes a first semiconductor material. A second semiconductor material is directly against an upper region of the channel-material-pillar. The second semiconductor material has a higher dopant concentration than the first semiconductor material and joins to the first semiconductor along an abrupt interfacial region such that there is little to no mixing of dopant from the second semiconductor material into the first semiconductor material. Some embodiments include methods of forming integrated assemblies.
-
公开(公告)号:US20210193663A1
公开(公告)日:2021-06-24
申请号:US16721006
申请日:2019-12-19
Applicant: Micron Technology, Inc.
Inventor: Pankaj Sharma , Muralikrishnan Balakrishnan
IPC: H01L27/108 , H01L27/11502 , H01L45/00 , H01L49/00 , H01L29/786 , G11C11/22
Abstract: Some embodiments include a memory cell having a non-ohmic device between a transistor source/drain region and a capacitor. Some embodiments include a memory cell having a transistor with a first source/drain region, a second source/drain region, and a channel region between the first and second source/drain regions. A capacitor is electrically coupled to the second source/drain region through a non-ohmic device. The non-ohmic device includes a non-ohmic-device-material which changes conductivity in response to an electrical property along the channel region. The non-ohmic-device-material has a high-resistivity-mode when the electrical property along the channel region is below a threshold level, and transitions to a low-resistivity-mode when the electrical property along the channel region meets or exceeds the threshold level. Some embodiments include a memory array.
-
公开(公告)号:US12154853B2
公开(公告)日:2024-11-26
申请号:US18164903
申请日:2023-02-06
Applicant: Micron Technology, Inc.
Inventor: Naveen Kaushik , Sidhartha Gupta , Pankaj Sharma , Haitao Liu
IPC: H01L23/522 , G11C5/06 , H01L21/48 , H01L21/768 , H10B41/27 , H10B43/27
Abstract: A method of forming a microelectronic device comprises forming a stack structure comprising vertically alternating insulating structures and conductive structures arranged in tiers. Each of the tiers individually comprises one of the insulating structures and one of the conductive structures. A sacrificial material is formed over the stack structure and pillar structures are formed to extend vertically through the stack structure and the sacrificial material. The method comprises forming conductive plug structures within upper portions of the pillar structures, forming slots extending vertically through the stack structure and the sacrificial material, at least partially removing the sacrificial material to form openings horizontally interposed between the conductive plug structures, and forming a low-K dielectric material within the openings. Microelectronic devices, memory devices, and electronic systems are also described.
-
公开(公告)号:US20240385713A1
公开(公告)日:2024-11-21
申请号:US18787322
申请日:2024-07-29
Applicant: Micron Technology, Inc.
Inventor: Pankaj Sharma
IPC: G06F3/041 , G06F3/01 , G06F3/0481 , G06F3/04817 , G06F3/0482 , G06F3/0484 , G06F3/04883 , G06F3/04886 , G06Q10/10 , G11B27/10 , H01L29/24 , H01L29/423 , H01L29/78 , H01L29/788 , H04L65/403 , H04N21/00 , H04N21/472 , H04N21/84 , H04N21/854
Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region vertically offset from the first source/drain region, and a channel region between the first and second source/drain regions. A first conductive gate is operatively adjacent to the channel region of the active region. Insulative material is between the first conductive gate and the channel region. A second conductive gate is adjacent to the first conductive gate. Ferroelectric material is between the first and second conductive gates. Some embodiments include integrated memory. Some embodiments include methods of forming integrated assemblies.
-
公开(公告)号:US11605589B2
公开(公告)日:2023-03-14
申请号:US17161313
申请日:2021-01-28
Applicant: Micron Technology, Inc.
Inventor: Naveen Kaushik , Sidhartha Gupta , Pankaj Sharma , Haitao Liu
IPC: H01L23/522 , H01L27/11582 , G11C5/06 , H01L21/48 , H01L21/768 , H01L27/11556
Abstract: A method of forming a microelectronic device comprises forming a stack structure comprising vertically alternating insulating structures and conductive structures arranged in tiers. Each of the tiers individually comprises one of the insulating structures and one of the conductive structures. A sacrificial material is formed over the stack structure and pillar structures are formed to extend vertically through the stack structure and the sacrificial material. The method comprises forming conductive plug structures within upper portions of the pillar structures, forming slots extending vertically through the stack structure and the sacrificial material, at least partially removing the sacrificial material to form openings horizontally interposed between the conductive plug structures, and forming a low-K dielectric material within the openings. Microelectronic devices, memory devices, and electronic systems are also described.
-
公开(公告)号:US20230039621A1
公开(公告)日:2023-02-09
申请号:US17395211
申请日:2021-08-05
Applicant: Micron Technology, Inc.
Inventor: Sidhartha Gupta , Naveen Kaushik , Pankaj Sharma
IPC: H01L27/11556 , H01L23/538 , H01L27/11582
Abstract: A method used in forming a memory array comprises forming a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory-cell strings extend through the insulative and conductive tiers. Conductive vias are formed above and individually electrically coupled to individual of the channel-material strings. Insulating material is laterally-between immediately-adjacent of the conductive vias. At least some of the insulating material is vertically removed to form an upwardly-open void-space that is circumferentially about multiple of the conductive vias. Insulative material is formed laterally-between the immediately-adjacent conductive vias to form a covered void-space from the upwardly-open void-space. Digitlines are formed above that are individually electrically coupled to a plurality of individual of the conductive vias there-below. Other embodiments, including structure independent of method, are disclosed.
-
-
-
-
-
-
-
-
-