Source reagent liquid delivery apparatus, and chemical vapor deposition
system comprising same
    1.
    发明授权
    Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same 失效
    源试剂液体输送装置和包含该源试剂液体输送装置的化学气相沉积系统

    公开(公告)号:US5711816A

    公开(公告)日:1998-01-27

    申请号:US484025

    申请日:1995-06-07

    摘要: A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporization matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may suitably comprise a foraminous matrix element such as screen mesh onto which the reagent source liquid is distributed for flash vaporization. The invention is particularly useful for delivery of Group II reagents and compounds and complexes of early transition metals such as zirconium and hafnium, and may be usefully employed with Group II beta-diketonate source layers, e.g., of YBaCuO, BiSrCaCuO, and TlBaCaCuO types, as well as for forming interlayers of Group II metal fluorides between superconductor or gallium arsenide overlayers, and for depositing thin films of photonic and ferroelectric materials, e.g., BaTiO.sub.3, Ba.sub.x Sr.sub.1-x Nb.sub.2 O.sub.6, and PbZr.sub.1-x Ti.sub.x O.sub.3.

    摘要翻译: 一种用于递送气态非挥发性试剂的方法和装置,其中非挥发性试剂源液体在升高的温度下在汽化基质结构上闪蒸。 载气可以流过闪蒸基质结构以产生含有闪蒸的源试剂的载气混合物。 基体结构优选具有高的表面体积比,并且可以适当地包括诸如筛网的多孔基质元素,其上分配有试剂源液体用于闪蒸。 本发明特别可用于递送II族试剂和早期过渡金属如锆和铪的化合物和络合物,并且可以有用地用于IIB型β-二酮源层,例如YBaCuO,BiSrCaCuO和TlBaCaCuO类型, 以及用于在超导体或砷化镓覆盖层之间形成第II族金属氟化物的夹层,以及用于沉积光致电子和铁电材料的薄膜,例如BaTiO3,BaxSr1-xNb2O6和PbZr1-xTixO3。

    Apparatus for flash vaporization delivery of reagents
    2.
    发明授权
    Apparatus for flash vaporization delivery of reagents 失效
    用于闪蒸的试剂装置

    公开(公告)号:US5536323A

    公开(公告)日:1996-07-16

    申请号:US280143

    申请日:1994-07-25

    摘要: A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporzation matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may sutiably comprise a foraminous matrix element such as screen mesh onto which the reagent source liquid is distributed for flash vaporization. The invention is particularly useful for delivery of Group II reagents and compounds and complexes of early transition metals such as zirconium and hafnium, and may be usefully employed with Group II beta-diketonate source layers, e.g., of YBaCuO, BiSrCaCuO, and TlBaCaCuO types, as well as for forming interlayers of Group II metal fluorides between superconductor or gallium arsenide overlayers, and for depositing thin films of photonic and ferroelectric materials, e.g., BaTiO.sub.3, Ba.sub.x Sr.sub.1-x Nb.sub.2 O.sub.6, and PbZr.sub.1-x Ti.sub.x O.sub.3.

    摘要翻译: 一种用于递送气态非挥发性试剂的方法和装置,其中非挥发性试剂源液体在升高的温度下在汽化基质结构上闪蒸。 载气可以流过闪蒸气化基质结构以产生含有闪蒸的源试剂的载气混合物。 基质结构优选具有高的表面体积比,并且可以适当地包含诸如筛网的多孔基质元素,其上分配有试剂源液体用于闪蒸。 本发明特别可用于递送II族试剂和早期过渡金属如锆和铪的化合物和络合物,并且可以有用地用于IIB型β-二酮源层,例如YBaCuO,BiSrCaCuO和TlBaCaCuO类型, 以及用于在超导体或砷化镓覆盖层之间形成第II族金属氟化物的夹层,以及用于沉积光致电子和铁电材料的薄膜,例如BaTiO3,BaxSr1-xNb2O6和PbZr1-xTixO3。

    Method for delivering an involatile reagent in vapor form to a CVD
reactor
    3.
    发明授权
    Method for delivering an involatile reagent in vapor form to a CVD reactor 失效
    将蒸气形式的非挥发性试剂输送到CVD反应器的方法

    公开(公告)号:US5204314A

    公开(公告)日:1993-04-20

    申请号:US807807

    申请日:1991-12-13

    摘要: A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporization matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may suitably comGOVERNMENT RIGHTS IN INVENTIONThis invention was made with Government support under Contract No. N00014 88-0531 awarded by the Defense Advanced Projects Research Administration (DARPA). The Government has certain rights in this invention.

    摘要翻译: 一种用于递送气态非挥发性试剂的方法和装置,其中非挥发性试剂源液体在升高的温度下在汽化基质结构上闪蒸。 载气可以流过闪蒸基质结构以产生含有闪蒸的源试剂的载气混合物。 基体结构优选具有高的表面体积比,并且可以适当地包括诸如筛网的多孔基质元素,其上分配有试剂源液体用于闪蒸。 本发明特别可用于递送II族试剂和早期过渡金属如锆和铪的化合物和络合物,并且可有效地用于II类β-二酮源材料以形成高温超导材料层,例如YBaCuO ,BiSrCaCuO和TlBaCaCuO类型,以及用于在砷化镓或硅衬底和高温超导体或砷化镓覆盖层之间形成第II族金属氟化物的夹层,并且用于沉积光子和铁电材料的薄膜,例如BaTiO 3,BaxSr 1, xNb2O6和PbZr1-xTixO3。

    FOURIER TRANSFORM INFRARED (FTIR) SPECTROMETRIC TOXIC GAS MONITORING SYSTEM, AND METHOD OF DETECTING TOXIC GAS SPECIES IN A FLUID ENVIRONMENT CONTAINING OR SUSCEPTIBLE TO THE PRESENCE OF SUCH TOXIC GAS SPECIES
    4.
    发明授权
    FOURIER TRANSFORM INFRARED (FTIR) SPECTROMETRIC TOXIC GAS MONITORING SYSTEM, AND METHOD OF DETECTING TOXIC GAS SPECIES IN A FLUID ENVIRONMENT CONTAINING OR SUSCEPTIBLE TO THE PRESENCE OF SUCH TOXIC GAS SPECIES 有权
    FOURIER变换红外(FTIR)光谱毒性气体监测系统以及检测含有这种毒性物质的流体环境中的有毒气体物种的方法

    公开(公告)号:US06862535B2

    公开(公告)日:2005-03-01

    申请号:US10218551

    申请日:2002-08-14

    申请人: Robin L. Binder

    发明人: Robin L. Binder

    摘要: An FT-IR toxic gas monitoring system and method for detection of one or more toxic gas species in a fluid environment containing or susceptible to presence of toxic gases. Such gas monitoring system includes: (1) a spectroscopic monitoring assembly for transmitting modulated infrared radiation through a spectroscopic cell that contains a gas sample from such fluid environment and generating a corresponding digitized spectrum characteristics of such gas sample for analysis; (2) a gas sampling and delivery subsystem for sampling the fluid environment and delivering the gas sample to the spectroscopic cell; and (3) a computational assembly (i) including a stored signal-to-noise ratio reference, and a stored background spectrum for the fluid environment when the toxic gas species is not present, and (ii) arranged to analyze the digitized spectrum and responsively produce an output indicative of quantitative presence of the toxic gas species in the fluid environment.

    摘要翻译: 用于检测含有或易于存在有毒气体的流体环境中的一种或多种有毒气体物质的FT-IR有毒气体监测系统和方法。 这种气体监测系统包括:(1)光谱监测组件,用于通过含有来自这种流体环境的气体样品的分光单元传输调制的红外辐射并产生用于分析的这种气体样品的相应的数字化光谱特征; (2)气体采样和传送子系统,用于对流体环境进行取样并将气体样品输送到分光单元; 和(3)包含存储的信噪比参考的计算组合(i)和当不存在有毒气体物质时用于流体环境的储存背景光谱,以及(ii)安排分析数字化光谱和 响应地产生指示在流体环境中定量存在有毒气体物质的输出。

    Drug abuse test paper
    5.
    发明授权
    Drug abuse test paper 失效
    药物滥用试纸

    公开(公告)号:US4752448A

    公开(公告)日:1988-06-21

    申请号:US943539

    申请日:1986-12-17

    摘要: A diagnostic test paper detects abuse-type drugs in a test specimen of a biological fluid. A particular method of making the diagnostic test paper includes impregnating a bibulous carrier material with the dry residue of a reagent reactive to abuse-type drugs. A particular method is used for screening a biological fluid to determine the presence of abuse-type drugs therein. A test specimen applying area is located on the bibulous carrier material adjacent one side of a concentrated reagent zone having a first color. A particular method of application and a specific syringe device is used to apply a test specimen that has been prepared under very precise conditions. The test specimen moves from the particular applying area into the concentrated reagent zone to produce the specific results of detecting the presence of abuse-type drugs therein. A novel solvent composition is used to prepare the test specimen applied to the bibulous carrier material of the invention.

    摘要翻译: 诊断试纸检测生物流体试样中的滥用药物。 制作诊断试纸的具体方法包括用吸收型药物反应的试剂的干燥残余物浸渍吸水性载体材料。 特定的方法用于筛选生物流体以确定其中滥用型药物的存在。 试样施加区域位于与具有第一颜色的浓缩试剂区域的一侧相邻的吸水性载体材料上。 使用特定的施用方法和特定的注射器装置来施加在非常精确的条件下制备的试样。 试样从特定应用区域移动到浓缩试剂区域,以产生检测其中滥用药物的存在的具体结果。 使用新的溶剂组合物来制备应用于本发明的吸水性载体材料的试样。