Memory cell comprising a phase-change material

    公开(公告)号:US10797234B2

    公开(公告)日:2020-10-06

    申请号:US16182990

    申请日:2018-11-07

    Abstract: A memory cell includes a heating element topped with a phase-change material. Two first silicon oxide regions laterally surround the heating element along a first direction. Two second silicon oxide regions laterally surround the heating element along a second direction orthogonal to the first direction. Top surfaces of the heating element and the two first silicon oxide regions are coplanar such that the heating element and the two first silicon oxide regions have a same thickness.

    Memory cell comprising a phase-change material

    公开(公告)号:US11329225B2

    公开(公告)日:2022-05-10

    申请号:US17012558

    申请日:2020-09-04

    Abstract: A memory cell includes a heating element topped with a phase-change material. Two first silicon oxide regions laterally surround the heating element along a first direction. Two second silicon oxide regions laterally surround the heating element along a second direction orthogonal to the first direction. Top surfaces of the heating element and the two first silicon oxide regions are coplanar such that the heating element and the two first silicon oxide regions have a same thickness.

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