Abstract:
A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.
Abstract:
A method of manufacturing a semiconductor device, the method including forming a tunnel insulating layer on an upper surface of a substrate, forming gate patterns on an upper surface of the tunnel insulating layer, forming capping layer patterns on sidewalls of the gate patterns and on the upper surface of the tunnel insulating layer, etching a portion of the tunnel insulating layer that is not covered with the gate patterns or the capping layer patterns to form a tunnel insulating layer pattern, and forming a first insulating layer on the upper surface of the substrate to cover the gate patterns, the capping layer patterns, and the tunnel insulating layer pattern, wherein the first insulating layer has an air gap between the capping layer patterns.
Abstract:
A touch controller includes a controller receiving a display timing signal and generating a touch sensing control signal synchronously with the display timing signal. The touch controller also includes a sensing circuit driving a touch sensing array in response to the touch sensing control signal in order to generate touch data corresponding to sensing signals provided by the touch sensing array. The sensing circuit provides a first driving signal having a first polarity to at least one driving channel of the touch sensing array during a first display frame period, and provides a second driving signal having a second polarity different from the first polarity during a second display frame period.
Abstract:
Provided are substrate processing systems and methods of managing the same. The method may include displaying a notification for a preventive maintenance operation on a chamber, performing a maintenance operation on the chamber, performing a first optical test, and evaluating the preventive maintenance operation. The first optical test may include generating a reference plasma reaction, measuring a variation of intensity by wavelength for plasma light emitted from the reference plasma reaction, and calculating an electron density and an electron temperature from a ratio in intensity of the plasma light.
Abstract:
An apparatus and method for acquiring a code image in a portable terminal includes an image recognizing unit for acquiring a picture including the code image and a code analyzing unit for verifying color information items for pixels with respect to the acquired picture, deleting a certain color information item according to a predetermined scheme when there are a plurality of color information items in order to recognize the code image having at least one of a QR code and a bar code.
Abstract:
A flash memory management method is provided. According to the method, when a request to write the predetermined data to a page to which data has been written is made, the predetermined data is written to a log block corresponding to a data block containing the page. When a request to write the predetermined data to the page again is received, the predetermined data is written to an empty free page in the log block. Even if the same page is requested to be continuously written to, the management method allows this to be processed in one log block, thereby improving the effectiveness in the use of flash memory resources.