公开(公告)号：US09897486B2

公开(公告)日：2018-02-20

申请号：US15402751

申请日：2017-01-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Yong Jo ,  Young-Joo Lee ,  Chang-Hoon Choi ,  Jong-Jeong Kim

IPC: G01D18/00 ,  G01J3/02

CPC classification number: G01J3/0297 ,  G01J3/28

Abstract: A method of calibrating a measuring apparatus includes determining apparatus parameters that have an influence on a measurement spectrum generated by the measuring apparatus, generating the measurement spectrum by exposing a measurement target on a sample to light generated by the measuring apparatus, calculating an error of the apparatus parameters by comparing the measurement spectrum to an ideal spectrum corresponding to the apparatus parameters, and calibrating the measuring apparatus based on the calculated error of the apparatus parameters.

公开(公告)号：US09123503B2

公开(公告)日：2015-09-01

申请号：US14257048

申请日：2014-04-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min-Kook Kim ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chang-Hoon Choi

IPC: H01J37/26 ,  H01J37/08

CPC classification number: H01J37/265 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/0807

Abstract: Microelectronic substrate inspection equipment includes a gas container which contains helium gas, a helium ion generator which is disposed in the gas container and converts the helium gas into helium ions and a wafer stage which is disposed under the gas container and on which a substrate to be inspected is placed. The equipment further includes a secondary electron detector which is disposed above the wafer stage and detects electrons generated from the substrate, a compressor which receives first gaseous nitrogen from a continuous nitrogen supply device and compresses the received first gaseous nitrogen into liquid nitrogen, a liquid nitrogen dewar which is connected to the compressor and stores the liquid nitrogen, and a cooling device that is coupled to the helium ion generator. The cooling device is disposed on the gas container, and cools the helium ion generator by vaporizing the liquid nitrogen received from the liquid nitrogen dewar into second gaseous nitrogen. Related methods are also disclosed.

Abstract translation: 微电子基板检查设备包括含有氦气的气体容器，设置在气体容器中并将氦气转换为氦离子的氦离子发生器和设置在气体容器下方的晶片载台， 检查被放置。 该设备还包括二次电子检测器，其设置在晶片台上方并检测从基板产生的电子;压缩机，其接收来自连续氮供应装置的第一气态氮并将接收到的第一气态氮压缩成液态氮;液氮 连接到压缩机并储存液氮的杜瓦瓶，以及耦合到氦离子发生器的冷却装置。 冷却装置设置在气体容器上，并且通过将从液氮氮气中接收的液氮蒸发成第二气态氮来冷却氦离子发生器。 还公开了相关方法。

公开(公告)号：US09746430B2

公开(公告)日：2017-08-29

申请号：US14823343

申请日：2015-08-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Joong Kim ,  Young-Kyu Park ,  Ki-Jung Son ,  Byeong-Hwan Jeon ,  Chang-Hoon Choi

IPC: G01N21/00 ,  G01N21/956 ,  G01N21/958

CPC classification number: G01N21/956 ,  G01N21/958 ,  G01N2021/95676

Abstract: An optical inspecting apparatus includes a first light source, a beam splitter, a first lens, a first light detector, and pinhole plates. The first light source emits a first light beam. The beam splitter transmits or reflects the first light beam. The first lens provides the first light beam to transmit through a transparent substrate of a photomask and forms a first focusing spot on a first surface of the transparent substrate or a top surface of a photomask pattern formed on the transparent substrate. The first light detector detects a first reflection light beam generated by reflecting the first light beam from the first surface of the transparent substrate or the top surface of the photomask pattern. The pinhole plates are disposed in front of the first light detector to filter noise in the reflection light beam.

公开(公告)号：US09702826B2

公开(公告)日：2017-07-11

申请号：US14751477

申请日：2015-06-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kohei Hashimoto ,  Wook-Rae Kim ,  Byeong-Hwan Jeon ,  Chang-Hoon Choi

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/958 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: A method of inspecting a surface of an object includes providing a laser beam irradiated in a first direction substantially parallel to the surface of the object, adjusting a diameter of the annular laser beam, reflecting the annular laser beam toward the surface of the object in a second direction substantially perpendicular to the first direction, in a primary reflection, and reflecting the primarily reflected laser toward an inspection region of the object, in a secondary reflection. An incident angle of the annular laser beam with respect to the surface of the object may be determined by the diameter of the annular laser beam.

公开(公告)号：US20140224987A1

公开(公告)日：2014-08-14

申请号：US14257048

申请日：2014-04-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min-Kook KIM ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chang-Hoon Choi

IPC: H01J37/26 ,  H01J37/08

CPC classification number: H01J37/265 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/0807

Abstract: Microelectronic substrate inspection equipment includes a gas container which contains helium gas, a helium ion generator which is disposed in the gas container and converts the helium gas into helium ions and a wafer stage which is disposed under the gas container and on which a substrate to be inspected is placed. The equipment further includes a secondary electron detector which is disposed above the wafer stage and detects electrons generated from the substrate, a compressor which receives first gaseous nitrogen from a continuous nitrogen supply device and compresses the received first gaseous nitrogen into liquid nitrogen, a liquid nitrogen dewar which is connected to the compressor and stores the liquid nitrogen, and a cooling device that is coupled to the helium ion generator. The cooling device is disposed on the gas container, and cools the helium ion generator by vaporizing the liquid nitrogen received from the liquid nitrogen dewar into second gaseous nitrogen. Related methods are also disclosed.

Abstract translation: 微电子基板检查设备包括含有氦气的气体容器，设置在气体容器中并将氦气转换为氦离子的氦离子发生器和设置在气体容器下方的晶片载台， 检查被放置。 该设备还包括二次电子检测器，其设置在晶片台上方并检测从基板产生的电子;压缩机，其接收来自连续氮供应装置的第一气态氮并将接收到的第一气态氮压缩成液态氮;液氮 连接到压缩机并储存液氮的杜瓦瓶，以及耦合到氦离子发生器的冷却装置。 冷却装置设置在气体容器上，并且通过将从液氮氮气中接收的液氮蒸发成第二气态氮来冷却氦离子发生器。 还公开了相关方法。