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公开(公告)号:US20210134380A1
公开(公告)日:2021-05-06
申请号:US17001740
申请日:2020-08-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Eunsun NOH , Sungchul LEE , Unghwan PI
Abstract: A magnetic memory device includes a reading unit on a substrate, a magnetic track layer on the reading unit, the magnetic track layer including a bottom portion between first and second sidewall portions, and a mold structure on the bottom portion of the magnetic track layer, and between the first and second sidewall portions. The mold structure includes first and second mold layers alternately arranged in a first direction perpendicular to a top surface of the substrate, and the magnetic track layer includes magnetic domains and magnetic domain walls between magnetic domains, the first and second sidewall portions of the magnetic track layer including sidewall notches corresponding to the magnetic domain walls, and the bottom portion includes a bottom notch corresponding to one of the magnetic domain walls.
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公开(公告)号:US20210264957A1
公开(公告)日:2021-08-26
申请号:US17316973
申请日:2021-05-11
Applicant: Samsung Electronics Co., Ltd.
Inventor: Eunsun NOH , Juhyun KIM , Ung Hwan PI
Abstract: A magnetic property measuring system includes coil structures configured to apply a magnetic field to a sample, a light source configured to irradiate incident light to the sample, and a detector configured to detect polarization of light reflected from the sample. The magnetic field is perpendicular to a surface of the sample. Each coil structure includes a pole piece and a coil surrounding an outer circumferential surface of the pole piece. A wavelength of the incident light is equal to or less than about 580 nm.
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公开(公告)号:US20210079517A1
公开(公告)日:2021-03-18
申请号:US16856539
申请日:2020-04-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Joonmyoung LEE , Whankyun KIM , Eunsun NOH , Jeong-heon PARK , Junho JEONG
Abstract: A sputtering apparatus including a chamber, a gas supply configured to supply the chamber with a first gas and a second inert gas, the first inert gas and the second inert gas having a first evaporation point and second evaporation point, respectively, a plurality of sputter guns in an upper portion of the chamber, a chuck in a lower portion of the chamber and facing the sputter guns, the chuck configured to accommodate a substrate thereon, and a cooling unit connected to a lower portion of the chuck, the cooling unit configured to cool the chuck to a temperature less than the first evaporation point and greater than the second evaporation point, and a method of fabricating a magnetic memory device may be provided.
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公开(公告)号:US20200152700A1
公开(公告)日:2020-05-14
申请号:US16434478
申请日:2019-06-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Joonmyoung LEE , Ung Hwan PI , Eunsun NOH , Yong Sung PARK
Abstract: A magnetic memory device includes a first magnetic tunnel junction pattern on a substrate, a second magnetic tunnel junction pattern on the first magnetic tunnel junction pattern, and a conductive line between the first magnetic tunnel junction pattern and the second magnetic tunnel junction pattern. The conductive line is configured such that a current flowing through the conductive line flows in parallel to an interface between the conductive line and each of the first and second magnetic tunnel junction patterns.
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公开(公告)号:US20230074076A1
公开(公告)日:2023-03-09
申请号:US17726056
申请日:2022-04-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Joonmyoung LEE , Whankyun KIM , Eunsun NOH , Heeju SHIN , Junho JEONG
Abstract: A magnetic memory device may include a pinned magnetic pattern and a free magnetic pattern which are stacked on a substrate, a tunnel barrier pattern between the pinned magnetic pattern and the free magnetic pattern, a capping pattern on the free magnetic pattern, and a non-magnetic pattern between the free magnetic pattern and the capping pattern. The free magnetic pattern may be between the tunnel barrier pattern and the capping pattern. The non-magnetic pattern may include a first non-magnetic metal and boron, and the capping pattern includes a second non-magnetic metal. A boride formation energy of the second non-magnetic metal may be higher than a boride formation energy of the first non-magnetic metal.
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公开(公告)号:US20230013146A1
公开(公告)日:2023-01-19
申请号:US17956281
申请日:2022-09-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Joonmyoung LEE , Whankyun KIM , Eunsun NOH , Jeong-heon PARK , Junho JEONG
Abstract: A sputtering apparatus including a chamber, a gas supply configured to supply the chamber with a first gas and a second inert gas, the first inert gas and the second inert gas having a first evaporation point and second evaporation point, respectively, a plurality of sputter guns in an upper portion of the chamber, a chuck in a lower portion of the chamber and facing the sputter guns, the chuck configured to accommodate a substrate thereon, and a cooling unit connected to a lower portion of the chuck, the cooling unit configured to cool the chuck to a temperature less than the first evaporation point and greater than the second evaporation point, and a method of fabricating a magnetic memory device may be provided.
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公开(公告)号:US20210103011A1
公开(公告)日:2021-04-08
申请号:US16592086
申请日:2019-10-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Eunsun NOH
IPC: G01R33/032 , H01L21/66 , H01L43/12 , H01L43/02
Abstract: A magnetic property measuring system may include a stage configured to load a sample and to rotate the sample about a rotation axis such that the stage rotates the sample by a rotation angle, the rotation axis extending normal to a top surface of the sample. The magnetic property measuring system may further include a polarizer having a first polarization axis, and an analyzer having a second polarization axis. The polarizer and the analyzer may enable the first and second polarization axes to be independently rotated based on the rotation angle of the sample.
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公开(公告)号:US20230117646A1
公开(公告)日:2023-04-20
申请号:US17952808
申请日:2022-09-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Joonmyoung LEE , Whankyun KIM , Eunsun NOH , Junho JEONG , YoungJun CHO
Abstract: A magnetic memory device includes a pinned magnetic pattern, a tunnel barrier pattern, a free magnetic pattern, a diffusion barrier pattern, a non-magnetic pattern and a capping pattern, which are sequentially stacked on a substrate. The diffusion barrier pattern includes a first non-magnetic metal and oxygen. The non-magnetic pattern includes a second non-magnetic metal and oxygen. An oxide formation energy of the first non-magnetic metal is lower than an oxide formation energy of the second non-magnetic metal.
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公开(公告)号:US20220320418A1
公开(公告)日:2022-10-06
申请号:US17502411
申请日:2021-10-15
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Whankyun KIM , Joonmyoung LEE , Junho JEONG , Eunsun NOH , Jeong-Heon PARK , YoungJun CHO
Abstract: A magnetic memory device including a substrate; a first and second magnetic pattern stacked on the substrate; a tunnel barrier pattern between the first and second magnetic pattern; a bottom electrode between the substrate and the first magnetic pattern; a seed pattern between the bottom electrode and the first magnetic pattern; and a diffusion barrier pattern between the bottom electrode and the seed pattern, wherein a bottom surface of the at least one diffusion barrier pattern is in contact with a top surface of the bottom electrode, and a top surface of the at least one diffusion barrier pattern is in contact with a bottom surface of the seed pattern, the at least one diffusion barrier pattern includes a non-magnetic metal, or an alloy of the non-magnetic metal and a non-metal element, and the non-magnetic metal includes Ta, W, Nb, Ti, Cr, Zr, Hf, Mo, Al, Mg, or V.
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公开(公告)号:US20190295616A1
公开(公告)日:2019-09-26
申请号:US15933659
申请日:2018-03-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Eunsun NOH , Juhyun KIM , Ung Hwan Pl , Ferenc Z VAJDA , Rachid MAFHOUM
Abstract: A magnetic property measuring system includes coil structures configured to apply a magnetic field to a sample, a light source configured to irradiate incident light to the sample, and a detector configured to detect polarization of light reflected from the sample. The magnetic field is perpendicular to a surface of the sample. Each coil structure includes a pole piece and a coil surrounding an outer circumferential surface of the pole piece. A wavelength of the incident light is equal to or less than about 580 nm.
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