公开(公告)号：US20130248114A1

公开(公告)日：2013-09-26

申请号：US13826446

申请日：2013-03-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seung Dae SEOK ,  Kyoungran KIM ,  Jae Bong SHIN ,  Hyung Sok YEO ,  Byung Joon LEE ,  Il Young HAN

IPC: H01L21/683

CPC classification number: H01L21/6838 ,  H01L24/16 ,  H01L24/75 ,  H01L24/81 ,  H01L2224/16225 ,  H01L2224/75101 ,  H01L2224/75264 ,  H01L2224/75501 ,  H01L2224/75744 ,  H01L2224/81075 ,  H01L2224/81203 ,  H01L2224/81222 ,  H01L2224/81815 ,  H01L2924/01007

Abstract: A bonding apparatus includes at least one stage unit to support a circuit board having a chip thereon and a bonding unit coupled to the stage unit to define a chamber. The bonding unit has at least one inductive heater to heat to bond the chip to the circuit board, and the stage unit includes a vacuum generator configured to generate a vacuum between the stage unit and the circuit board. The vacuum is used to hold the circuit board on the stage unit during bonding of the chip to the circuit board. The induction heater may include one or more induction heating antennas, and the chamber may include one or more stage units.

Abstract translation: 接合装置包括至少一个级单元，用于支撑其上具有芯片的电路板和耦合到级单元的接合单元以限定腔室。 接合单元具有至少一个感应加热器以加热以将芯片结合到电路板，并且平台单元包括配置成在平台单元和电路板之间产生真空的真空发生器。 在将芯片接合到电路板时，真空用于将电路板保持在平台单元上。 感应加热器可以包括一个或多个感应加热天线，并且腔室可以包括一个或多个平台单元。

公开(公告)号：US20170136570A1

公开(公告)日：2017-05-18

申请号：US15340303

申请日：2016-11-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Dae Seok ,  Sang Yoon Kim ,  Hui Jae KIM ,  Jae Bong SHIN ,  Byung Joon LEE

IPC: B23K20/02 ,  B23K20/00 ,  B23K20/26 ,  H01L23/00

CPC classification number: B23K20/026 ,  B23K3/085 ,  B23K20/004 ,  B23K20/26 ,  B23K37/003 ,  H01L24/75 ,  H01L2224/75251 ,  H01L2224/75501 ,  H01L2224/7598 ,  H01L2224/75988

Abstract: A bonding stage is provided. The bonding stage includes a first heater disposed under a first region of a substrate having a plurality of semiconductor chips disposed thereon, a second heater disposed under a second region different from the first region of the substrate, a cooler disposed under the first heater and the second heater and blocking heat of the first heater and heat of the second heater from being transferred to lower portions of the first heater and the second heater, and a thin plate disposed on the first heater and the second heater to support the substrate and transferring the heat of the first heater and the heat of the second heater to the substrate, wherein the first heater and the second heater are independently operated.

公开(公告)号：US20150155210A1

公开(公告)日：2015-06-04

申请号：US14337571

申请日：2014-07-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byung Joon LEE ,  Masato KAJINAMI ,  Yoshiaki YUKIMORI ,  Sang-Yoon KIM ,  Hui-Jae KIM ,  Byeong-Kuk PARK ,  Seung Dae SEOK ,  Jae Bong SHIN ,  Byeong Kap CHOI

IPC: H01L21/66 ,  H01L21/67 ,  H01L23/00

CPC classification number: H01L21/67259 ,  H01L21/67109 ,  H01L21/67144 ,  H01L24/75 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L2224/73204 ,  H01L2224/75502 ,  H01L2224/7565 ,  H01L2224/75753 ,  H01L2224/75824 ,  H01L2224/7598 ,  H01L2224/81127 ,  H01L2224/81204 ,  H01L2224/81801 ,  H01L2224/83127 ,  H01L2224/83204 ,  H01L2224/8385 ,  H01L2224/92125 ,  H05K13/046 ,  H01L2924/00012 ,  H01L2924/00014

Abstract: A semiconductor manufacturing apparatus may include: a pickup unit configured to pick up a chip in a first region of the semiconductor manufacturing apparatus; a bonding head configured to receive the picked-up chip and configured to move from the first region to a top of a circuit board in a second region of the semiconductor manufacturing apparatus; and/or an optical unit configured to detect a bonding position on the circuit board while moving from the first region to the second region. A semiconductor manufacturing apparatus may include: a bonding head including a heater for heating a chip and bonding the chip onto a circuit board; and/or a cooling block, adjacent to the heater, through which cooling liquid flows. The cooling liquid may be removed from the cooling block while the heater generates heat. The cooling liquid may be supplied to the cooling block while the heater is cooled.

Abstract translation: 半导体制造装置可以包括：拾取单元，被配置为拾取半导体制造装置的第一区域中的芯片; 接合头，被配置为接收所拾取的芯片并且被配置为在所述半导体制造装置的第二区域中从所述第一区域移动到电路板的顶部; 和/或配置成在从第一区域移动到第二区域时检测电路板上的接合位置的光学单元。 半导体制造装置可以包括：接合头，包括用于加热芯片并将芯片接合到电路板上的加热器; 和/或与加热器相邻的冷却块，冷却液通过该冷却块流动。 当加热器产生热量时，冷却液体可从冷却块移除。 冷却液可以在加热器被冷却时供应到冷却块。