LITHOGRAPHY AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

    公开(公告)号:US20230055365A1

    公开(公告)日:2023-02-23

    申请号:US17692438

    申请日:2022-03-11

    Abstract: A method includes grouping, in a first layout, pattern regions which have duplicate layout patterns including weak regions as a group, calculating defect probabilities of the pattern regions, respectively, calculating a defect frequency and a defect rate of the group based on the defect probabilities of the pattern regions, predicting a degree of defects of a second layout of the pattern regions, based on the defect frequency and the defect rate, and performing an extreme ultraviolet (EUV) lithography process on a substrate, based on the second layout. The defect probabilities are calculated by performing an optical proximity correction (OPC) simulation on the pattern region, calculating a stochastic variation of a linewidth of a simulation pattern in the weak region as a Gaussian distribution, and defining a threshold linewidth, which is used as a reference of the random defect, in the Gaussian distribution.

    PHASE-LOCKED LOOP DEVICE AND OPERATION METHOD THEREOF

    公开(公告)号:US20240120927A1

    公开(公告)日:2024-04-11

    申请号:US18142939

    申请日:2023-05-03

    CPC classification number: H03L7/091 H03L7/089

    Abstract: A phase-locked loop device and its operating method are provided. The phase-locked loop device includes a voltage controlled oscillator configured to generate an output clock signal, a divider configured to divide the output clock signal into first and second phase division signals having a constant phase difference, a sampling phase frequency detector configured to sample a sampling voltage based on the first phase division signal and output any one of the sampling voltage, a first supply voltage, and a second supply voltage based on the second phase division signal, a transconductance circuit configured to output a conversion current based on a hold voltage, and a loop filter configured to generate a voltage control signal based on the conversion current and output the voltage control signal to the voltage controlled oscillator.

    INTEGRATED CIRCUIT DEVICE AND ELECTRONIC DEVICE INCLUDING THE SAME

    公开(公告)号:US20230145187A1

    公开(公告)日:2023-05-11

    申请号:US17980728

    申请日:2022-11-04

    Abstract: An integrated circuit device includes a substrate, and a unit cell on the substrate. The unit cell defines a unit cell area including at least two discrete devices. The unit cell includes a routing layer configured to route a signal and a voltage to the at least two discrete devices, the routing layer including a signal line and a voltage line extending in a first direction, and the signal line and the voltage line spaced apart from each other in a second direction, and a metal line stack including metal lines stacked between the unit cell area and the routing layer in the first direction. A plurality of contact vias are each configured to connect at least two adjacent ones of the signal line, the voltage line, the metal lines and the at least two discrete devices, in a third direction.

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