公开(公告)号：US08475625B2

公开(公告)日：2013-07-02

申请号：US11381523

申请日：2006-05-03

申请人： Sharma Pamarthy ,  Huutri Dao ,  Xiaoping Zhou ,  Kelly A. McDonough ,  Jivko Dinev ,  Farid Abooameri ,  David E. Gutierrez ,  Jim Zhongyi He ,  Robert S. Clark ,  Dennis M. Koosau ,  Jeffrey William Dietz ,  Declan Scanlan ,  Subhash Deshmukh ,  John P. Holland ,  Alexander Paterson

发明人： Sharma Pamarthy ,  Huutri Dao ,  Xiaoping Zhou ,  Kelly A. McDonough ,  Jivko Dinev ,  Farid Abooameri ,  David E. Gutierrez ,  Jim Zhongyi He ,  Robert S. Clark ,  Dennis M. Koosau ,  Jeffrey William Dietz ,  Declan Scanlan ,  Subhash Deshmukh ,  John P. Holland ,  Alexander Paterson

IPC分类号： H01L21/3065

CPC分类号： H01J37/3266 ,  H01J37/3244 ,  H01J37/32706 ,  H01J2237/3347

摘要： Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

公开(公告)号：US20070256785A1

公开(公告)日：2007-11-08

申请号：US11381523

申请日：2006-05-03

申请人： Sharma Pamarthy ,  Huutri Dao ,  Xiaoping Zhou ,  Kelly McDonough ,  Jivko Dinev ,  Farid Abooameri ,  David Gutierrez ,  Jim He ,  Robert Clark ,  Dennis Koosau ,  Jeffrey Dietz ,  Declan Scanlan ,  Subhash Deshmukh ,  John Holland ,  Alexander Paterson

发明人： Sharma Pamarthy ,  Huutri Dao ,  Xiaoping Zhou ,  Kelly McDonough ,  Jivko Dinev ,  Farid Abooameri ,  David Gutierrez ,  Jim He ,  Robert Clark ,  Dennis Koosau ,  Jeffrey Dietz ,  Declan Scanlan ,  Subhash Deshmukh ,  John Holland ,  Alexander Paterson

IPC分类号： H01L21/306 ,  H01L21/302

CPC分类号： H01J37/3266 ,  H01J37/3244 ,  H01J37/32706 ,  H01J2237/3347

摘要： Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

公开(公告)号：US20100099266A1

公开(公告)日：2010-04-22

申请号：US12563526

申请日：2009-09-21

申请人： Manfred Oswald ,  Jivko Dinev ,  Jan Rupf ,  Markus Meye ,  Francesco Maletta ,  Uwe Leucke ,  Ron Tilger ,  Farid Abooameri ,  Alexander Matyushkin ,  Denis Koosau ,  Xiaoping Zhou ,  Thorsten Lehmann ,  Declan Scanlan

发明人： Manfred Oswald ,  Jivko Dinev ,  Jan Rupf ,  Markus Meye ,  Francesco Maletta ,  Uwe Leucke ,  Ron Tilger ,  Farid Abooameri ,  Alexander Matyushkin ,  Denis Koosau ,  Xiaoping Zhou ,  Thorsten Lehmann ,  Declan Scanlan

IPC分类号： H01L21/3065 ,  C23F1/08

CPC分类号： H01J37/32045 ,  H01J37/32009 ,  H01J2237/334

摘要： Embodiments of the invention provide a method and apparatus that enables plasma etching of high aspect ratio features. In one embodiment, a method for etching is provided that includes providing a substrate having a patterned mask disposed on a silicon layer in an etch reactor, providing a gas mixture of the reactor, maintaining a plasma formed from the gas mixture, wherein bias power and RF power provided the reactor are pulsed, and etching the silicon layer in the presence of the plasma.

摘要翻译： 本发明的实施例提供一种能够等离子体蚀刻高纵横比特征的方法和装置。 在一个实施例中，提供了一种用于蚀刻的方法，其包括提供具有设置在蚀刻反应器中的硅层上的图案化掩模的衬底，提供反应器的气体混合物，保持由气体混合物形成的等离子体，其中偏置功率和 RF电源提供反应器是脉冲的，并且在存在等离子体的情况下蚀刻硅层。

公开(公告)号：US08440049B2

公开(公告)日：2013-05-14

申请号：US11421208

申请日：2006-05-31

申请人： Xiaoping Zhou ,  Jeffrey William Dietz

发明人： Xiaoping Zhou ,  Jeffrey William Dietz

IPC分类号： H01L21/3065

CPC分类号： H01L21/02002 ,  H01J37/32477 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/67253 ,  H01L21/6831

摘要： Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

摘要翻译： 本发明的实施例提供了一种适于蚀刻高纵横比特征的方法和装置，例如处理室。 其他实施例包括用于处理室中的喷头组件。 在一个实施例中，处理室包括具有布置在其中的喷头组件和基板支撑件的室主体。 喷头组件包括至少两个流体隔离的增压室，对光学测量信号透射的区域，以及通过喷淋头组件形成的多个气体通道，其将气室流体耦合到室主体的内部空间。

公开(公告)号：US09530336B2

公开(公告)日：2016-12-27

申请号：US12964595

申请日：2010-12-09

申请人： Ramin Safavi ,  Zhicun Gao ,  Xiaoping Zhou ,  Larry T. Taylor

发明人： Ramin Safavi ,  Zhicun Gao ,  Xiaoping Zhou ,  Larry T. Taylor

IPC分类号： G09B23/02 ,  G09G3/00

CPC分类号： G09G3/006 ,  G09F21/048 ,  G09G2320/0646 ,  G09G2330/10 ,  G09G2360/144 ,  G09G2360/145

摘要： A sign-monitoring system includes at least one electronic sign and a controller comprising a processor and memory. The electronic sign includes a pixel array, the pixel array including a plurality of pixels. The electronic sign further includes an embedded controller coupled to the at least one electronic sign. The embedded controller develops diagnostic information for the at least one electronic sign, the diagnostic information including information related to a number of malfunctioning pixels in the plurality of pixels. The controller is communicably coupled to the embedded controller and receives at least a portion of the diagnostic information from the embedded controller. In addition, the controller assesses the at least a portion of the diagnostic information to develop health information. The assessment involves evaluating the information related to the number of malfunctioning pixels.

摘要翻译： 标志监视系统包括至少一个电子标志和包括处理器和存储器的控制器。 电子标志包括像素阵列，像素阵列包括多个像素。 电子标志还包括耦合到至少一个电子标志的嵌入式控制器。 嵌入式控制器开发用于至少一个电子标志的诊断信息，诊断信息包括与多个像素中的多个故障像素有关的信息。 控制器可通信地耦合到嵌入式控制器并从嵌入式控制器接收至少一部分诊断信息。 此外，控制器评估至少一部分诊断信息以开发健康信息。 评估包括评估与故障像素数量有关的信息。

公开(公告)号：US09267742B2

公开(公告)日：2016-02-23

申请号：US12886255

申请日：2010-09-20

申请人： Kallol Bera ,  Xiaoping Zhou ,  Douglas A. Buchberger, Jr. ,  Andrew Nguyen ,  Hamid Tavassoli ,  Surajit Kumar ,  Shahid Rauf

发明人： Kallol Bera ,  Xiaoping Zhou ,  Douglas A. Buchberger, Jr. ,  Andrew Nguyen ,  Hamid Tavassoli ,  Surajit Kumar ,  Shahid Rauf

IPC分类号： F25B29/00 ,  F28F3/12 ,  F28F13/00

CPC分类号： F28F3/12 ,  F28F2013/001

摘要： Apparatus for controlling the thermal uniformity of a substrate. In some embodiments, the thermal uniformity of the substrate is controlled to be more uniform. In some embodiments, the thermal uniformity of the substrate is controlled to be non-uniform in a desired pattern. In some embodiments, an apparatus for controlling thermal uniformity of a substrate includes a substrate support having a support surface to support a substrate thereon. A plurality of flow paths having a substantially equivalent fluid conductance are disposed within the substrate support to flow a heat transfer fluid beneath the support surface.

摘要翻译： 用于控制基板的热均匀性的装置。 在一些实施例中，将基板的热均匀性控制得更均匀。 在一些实施例中，基板的热均匀性被控制为以期望的图案不均匀。 在一些实施例中，用于控制衬底的热均匀性的装置包括具有用于在其上支撑衬底的支撑表面的衬底支撑件。 具有基本相当的流体电导的多个流动路径设置在基板支撑件内，以使传热流体在支撑表面下方流动。

公开(公告)号：US20140241516A1

公开(公告)日：2014-08-28

申请号：US14348245

申请日：2012-04-25

申请人： Dalin Zhou ,  Jinshu Chen ,  Xiaoping Zhou ,  Yangpeng Zhang

发明人： Dalin Zhou ,  Jinshu Chen ,  Xiaoping Zhou ,  Yangpeng Zhang

IPC分类号： H04M11/02

CPC分类号： H04M11/025 ,  H04B3/548 ,  H04N7/186

摘要： The present invention discloses a dual-channel analog door entry system and a method thereof. The dual-channel analog door entry system comprises two cables connected between the building gateway and the floor distributors, configured to transmit audio and/or video signals between the outdoor stations and indoor phones; the building gateway, configured to receive a call request from at least one of the outdoor stations, identify and assign an available cable as an intercom channel, send the call request to each of the floor distributors via the intercom channel, and switch the audio and/or video signals from the outdoor station to the available cable; at least one of floor distributors, configured to receive and forward the call request to a desired indoor phone, receive a call response from the desired indoor phone if the desired indoor phone is available, and switch the audio and/or video signals from the available cable to the desired indoor phone. The solutions of the present invention achieves great improvement on line busy probability for large buildings and communities; and the solution is smart and simple to implement with low additional cost for reconstruction.

摘要翻译： 本发明公开了一种双通道模拟门禁系统及其方法。 双通道模拟门进入系统包括连接在建筑物网关和楼层分配器之间的两条电缆，被配置为在室外站和室内电话之间传输音频和/或视频信号; 所述建筑物网关被配置为从所述室外站中的至少一个接收呼叫请求，识别并分配可用电缆作为对讲信道，经由所述对讲信道向所述楼层分配器发送呼叫请求，并且切换所述音频和 /或从户外站到可用电缆的视频信号; 配置为接收并转发呼叫请求到所需室内电话的地板分配器中的至少一个，如果期望的室内电话可用，则从期望的室内电话接收呼叫响应，并且从可用的方式切换音频和/或视频信号 连接到所需的室内电话。 本发明的解决方案大大改善了大型建筑物和社区的线路繁忙概率; 并且解决方案是智能和简单的实施，低成本的重建。

公开(公告)号：US08633423B2

公开(公告)日：2014-01-21

申请号：US13097822

申请日：2011-04-29

申请人： Xing Lin ,  Douglas A. Buchberger, Jr. ,  Xiaoping Zhou ,  Valentin Todorow ,  Andrew Nguyen ,  Anchel Sheyner

发明人： Xing Lin ,  Douglas A. Buchberger, Jr. ,  Xiaoping Zhou ,  Valentin Todorow ,  Andrew Nguyen ,  Anchel Sheyner

IPC分类号： H05B1/00 ,  H01L21/683

CPC分类号： H05B6/105 ,  H01L21/67109 ,  H01L21/6831

摘要： Methods and apparatus for controlling the temperature of a substrate during processing are provided herein. In some embodiments, an apparatus for retaining and controlling substrate temperature may include a puck of dielectric material; an electrode disposed in the puck proximate a surface of the puck upon which a substrate is to be retained; and a plurality of heater elements disposed in the puck and arranged in concentric rings to provide independent temperature control zones.

摘要翻译： 本文提供了在处理期间控制基板的温度的方法和装置。 在一些实施例中，用于保持和控制衬底温度的装置可以包括电介质材料的圆盘; 设置在靠近所述圆盘的表面的所述圆盘中的电极，待保持基板的电极; 以及多个加热器元件，其布置在圆盘中并且布置成同心环以提供独立的温度控制区。

公开(公告)号：US08518599B2

公开(公告)日：2013-08-27

申请号：US13039282

申请日：2011-03-02

申请人： Xiaoping Zhou ,  Yang Wu ,  Jeff Qiang Xu ,  Xiang Li

发明人： Xiaoping Zhou ,  Yang Wu ,  Jeff Qiang Xu ,  Xiang Li

IPC分类号： H01M8/22

CPC分类号： H01M8/04 ,  H01M8/22

摘要： A fuel storage device for fuel cell comprises a tank-in-tank or tank-by-tank type tank. In addition, a pipe-in-pipe or pipe-by-pipe delivery system is also provided. A fuel cell system using the fuel storage device comprises liquid fuel at the anode side, liquid oxidant at the cathode side, electrolyte, fuel and oxidant tank-in-tank storage system, fuel and oxidant pipe-in-pipe deliverable system, and by-products handling at both the anode and cathode sides. The liquid fuels include amine-based compounds such as hydrazine, hydroxyl amine, ammonia, and their derivatives.

摘要翻译： 一种用于燃料电池的燃料储存装置包括罐内坦克或逐桶式罐。 此外，还提供管道管道或逐管输送系统。 使用燃料储存装置的燃料电池系统包括在阳极侧的液体燃料，阴极侧的液体氧化剂，电解质，燃料和氧化剂罐内储存系统，燃料和氧化剂管内输送系统，以及由 - 在阳极和阴极两侧处理的产品。 液体燃料包括胺类化合物如肼，羟胺，氨及其衍生物。

公开(公告)号：US20130196562A1

公开(公告)日：2013-08-01

申请号：US13877106

申请日：2010-09-30

申请人： Haoqing Hou ,  Chuyun Cheng ,  Shuiliang Chen ,  Xiaoping Zhou ,  Xiaoyi Lv ,  Ping He ,  Xiaoming Kuang ,  Jinsheng Ren

发明人： Haoqing Hou ,  Chuyun Cheng ,  Shuiliang Chen ,  Xiaoping Zhou ,  Xiaoyi Lv ,  Ping He ,  Xiaoming Kuang ,  Jinsheng Ren

IPC分类号： D04H1/00

CPC分类号： D04H1/00 ,  C08G73/10 ,  C08G73/1042 ,  D01F6/74 ,  D01F6/78 ,  D04H1/4326 ,  D04H1/728 ,  D04H3/009 ,  D04H3/016 ,  H01M2/162 ,  Y10T442/60

摘要： A copolyimide nano-fiber non-woven fabric, a process for producing the same and the use thereof. The process comprises the following steps: tetracid dianhydride monomer and diamine monomer are polycondensated in the reaction medium of a high polar solvent under mechanical agitation to form a solution of a copolyamic acid; the copolyamic acid solution is electrostatically spinned under a high voltage electric field to give a non-woven fabric of a nano-fiber of the copolyamic acid; and then the non-woven fabric is imidized. The copolyimide nano-fiber non-woven fabric has features of a strong tear resistance, a high porosity, high/low-temperature resistances and excellent mechanical properties, etc., and can be used in battery membrane and capacitor membrane.

摘要翻译： 共聚酰亚胺纳米纤维无纺布，其制造方法及其用途。 该方法包括以下步骤：在机械搅拌下，在高极性溶剂的反应介质中将四酸二酐单体和二胺单体缩聚形成共聚酰胺酸溶液; 在高压电场下静电纺丝共聚酰胺酸溶液，得到共聚酰胺酸的纳米纤维的无纺布; 然后无纺布被酰亚胺化。 共聚酰亚胺纳米纤维无纺布具有抗撕裂性强，孔隙率高，耐低温，耐低温，机械性能优良等特点，可用于电池膜和电容器膜。