Load drive control apparatus
    1.
    发明授权
    Load drive control apparatus 有权
    负载驱动控制装置

    公开(公告)号:US06232758B1

    公开(公告)日:2001-05-15

    申请号:US09365753

    申请日:1999-08-03

    IPC分类号: H02J100

    摘要: A load drive control apparatus includes a drive control circuit for driving and controlling a load in response to a given drive condition. A power supply circuit operates for feeding drive electric power to the drive control circuit. The feed of the drive electric power to the drive control circuit by the power supply circuit is controlled in response to a control signal for drive and control of the load to implement a change between a normal mode of operation and a stand-by mode of operation in which consumed electric power is reduced.

    摘要翻译: 负载驱动控制装置包括用于响应于给定的驱动条件来驱动和控制负载的驱动控制电路。 电源电路用于将驱动电力馈送到驱动控制电路。 响应于用于驱动和控制负载的控制信号来控制由电源电路向驱动控制电路馈送驱动电力,以实现正常操作模式和待机操作模式之间的改变 其中消耗的电力降低。

    WELDING SYSTEM AND WELDING METHOD
    2.
    发明申请
    WELDING SYSTEM AND WELDING METHOD 审中-公开
    焊接系统和焊接方法

    公开(公告)号:US20110284508A1

    公开(公告)日:2011-11-24

    申请号:US13111211

    申请日:2011-05-19

    IPC分类号: B23K26/00

    CPC分类号: B23K31/125

    摘要: A welding system has: a welding mechanism, a reception laser light source, a reception optical mechanism, an interferometer, a data recording/analysis mechanism and a data recording/analysis mechanism. The reception laser light source generates reception laser light so as to irradiate the object to be welded with the reception laser light for the purpose of detecting a reflected ultrasonic wave obtained as a result of reflection of a transmission ultrasonic wave. The reception optical mechanism transmits, during or after welding operation, the reception laser light generated from the reception laser light source to the surface of the object to be welded for irradiation while moving, together with the welding mechanism, relative to the object to be welded and collects laser light scattered/reflected at the surface of the object to be welded.

    摘要翻译: 焊接系统具有:焊接机构,接收激光光源,接收光学机构,干涉仪,数据记录/分析机构和数据记录/分析机构。 为了检测作为发送超声波的反射而得到的反射超声波,接收激光光源产生接收激光以照射被接收激光的被焊物体。 接收光学机构在焊接操作期间或之后将从接收激光光源产生的接收激光与焊接机构相对于被焊接物体一起移动而被发射到被焊接物体的表面 并收集在待焊接物体的表面上散射/反射的激光。

    Pattern forming method and method for manufacturing semiconductor device
    3.
    发明申请
    Pattern forming method and method for manufacturing semiconductor device 审中-公开
    图案形成方法和半导体器件的制造方法

    公开(公告)号:US20070275331A1

    公开(公告)日:2007-11-29

    申请号:US11529678

    申请日:2006-09-29

    IPC分类号: G03F7/20

    CPC分类号: G03F7/70466

    摘要: A micropattern is formed with high accuracy with a sufficient manufacture process margin without using a photomask complicated in manufacture process at high manufacture cost like an alternating phase shift mask. Double exposure is performed by using a pair of photomasks such as an ordinary chrome mask, an attenuated phase shift mask or the like which is not an alternating phase shift mask, and a pattern is transferred onto a photoresist. Here, on the occasion of performing exposure with the photomask for forming a finer pattern, double pole illumination is used as an illumination system.

    摘要翻译: 在具有高制造成本的制造工艺中使用像交替相移掩模那样使用复杂的光掩模的情况下,以高精度形成具有足够的制造工艺余量的微图案。 通过使用不是交替相移掩模的普通镀铬掩模,衰减相移掩模等的一对光掩模进行双重曝光,并将图案转印到光致抗蚀剂上。 这里,在用用于形成更精细图案的光掩模进行曝光的场合,使用双极照明作为照明系统。

    Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure
    5.
    发明申请
    Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure 有权
    掩模图案校正装置,掩模图案的校正方法,曝光修正装置以及曝光校正方法

    公开(公告)号:US20060018529A1

    公开(公告)日:2006-01-26

    申请号:US10995215

    申请日:2004-11-24

    IPC分类号: G03C5/00 G06K9/00 G03F1/00

    摘要: In view of realizing a lithographic process which makes it possible to estimate and correct flare with an extremely high accuracy, and causes only an extremely small dimensional variation in width, over the entire portion not only of a single shot region, but also of a single chip region, a mask pattern correction device of the present invention has a numerical aperture calculation unit calculating, for every -single shot region, flare energy for a mask pattern corresponding to a transferred pattern, based on an exposure layout of a plurality of shot regions, or more specifically, while considering flare from a plurality of shot regions located around every single shot region.

    摘要翻译: 鉴于实现能够以极高的精度估计和校正火炬的平版印刷工艺,并且在整个部分上不仅在单一拍摄区域上,而且在单个区域的整个部分上仅产生非常小的尺寸变化 芯片区域,本发明的掩模图案校正装置具有数值孔径计算单元,对于每个单独拍摄区域,基于多个拍摄区域的曝光布局来计算对应于被转印图案的掩模图案的闪光能量 或者更具体地,同时考虑来自位于每个单个拍摄区域周围的多个拍摄区域的闪光。

    Optical exposure method
    7.
    发明授权
    Optical exposure method 失效
    光学曝光方法

    公开(公告)号:US06420094B1

    公开(公告)日:2002-07-16

    申请号:US09500527

    申请日:2000-02-09

    IPC分类号: G03F720

    摘要: An optical exposure method in photolithography applied for precise processing when semiconductor devices are produced. A pattern on a photomask is projected and exposed on a register on a base plate with an exposure device including a deformation illumination system, a photomask and a projection lens. The deformation illumination system is composed of a light source, a diaphragm and a condenser lens, and the diaphragm is provided with a linear through-hole. The optical exposure method uses a ray of linear light for illumination or two rays of linear light for illumination that are parallel with the pattern. The two rays of linear light are symmetrical with respect to an optical axis. These rays are parallel with the pattern in a position separate from the optical axis of the exposure device when the photomask pattern is a line and space pattern.

    摘要翻译: 在制造半导体器件时,用于精密加工的光刻中的光学曝光方法。 光掩模上的图案被投影并暴露在具有包括变形照明系统,光掩模和投影透镜的曝光装置的基板上的寄存器上。 变形照明系统由光源,光阑和聚光透镜组成,隔膜设有直线通孔。 光学曝光方法使用用于照明的线性光线或与图案平行的用于照明的两束线性光。 两条线性光线相对于光轴对称。 当光掩模图案是线和空间图案时,这些光线与图案平行于与曝光装置的光轴分离的位置。

    Optical exposure method
    9.
    发明授权
    Optical exposure method 失效
    光学曝光方法

    公开(公告)号:US5607821A

    公开(公告)日:1997-03-04

    申请号:US510128

    申请日:1995-08-01

    摘要: An optical exposure method in photolithography applied for precise processing when semiconductor devices are produced. A pattern on a photomask is projected and exposed on a register on a base plate with an exposure device including a deformation illumination system, a photomask and a projection lens. The deformation illumination system is composed of a light source, a diaphragm and a condenser lens, and the diaphragm is provided with a linear through-hole. The optical exposure method uses a ray of linear light for illumination or two rays of linear light for illumination that are parallel with the pattern. The two rays of linear light are symmetrical with respect to an optical axis. These rays are parallel with the pattern in a position separate from the optical axis of the exposure device when the photomask pattern is a line and space pattern.

    摘要翻译: 在制造半导体器件时,用于精密加工的光刻中的光学曝光方法。 光掩模上的图案被投影并暴露在具有包括变形照明系统,光掩模和投影透镜的曝光装置的基板上的寄存器上。 变形照明系统由光源,光阑和聚光透镜组成,隔膜设有直线通孔。 光学曝光方法使用用于照明的线性光线或与图案平行的用于照明的两束线性光。 两条线性光线相对于光轴对称。 当光掩模图案是线和空间图案时,这些光线与图案平行于与曝光装置的光轴分离的位置。

    Steam turbine and steam turbine blade
    10.
    发明授权
    Steam turbine and steam turbine blade 有权
    汽轮机和汽轮机叶片

    公开(公告)号:US09309773B2

    公开(公告)日:2016-04-12

    申请号:US12977548

    申请日:2010-12-23

    IPC分类号: F01D5/28 C23C18/12

    摘要: A steam turbine 3 includes: a turbine rotor 4; a rotor blade 5 implanted to the turbine rotor 4; a stator blade 6 provided at an upstream side of the rotor blade 5; and a turbine casing 13 supporting the stator blade 6 and including the turbine rotor 4, the rotor blade 5 and the stator blade 6, and have a constitution in which a stage 7 is formed by a pair of the rotor blade 5 and the stator blade 6, and a steam passage 8 is formed by arranging plural stages 7 in an axial direction of the turbine rotor 4. A surface treatment to suppress an increase of a surface roughness caused by oxidation is performed for at least a part of a surface of the stator blade 6 and a surface of the rotor blade 5.

    摘要翻译: 蒸汽轮机3包括:涡轮机转子4; 植入涡轮机转子4的转子叶片5; 设置在转子叶片5的上游侧的定子叶片6; 以及支撑定子叶片6并且包括涡轮转子4,转子叶片5和定子叶片6的涡轮壳体13,并且具有这样的构造,其中阶段7由一对转子叶片5和定子叶片形成 并且通过在涡轮机转子4的轴向上配置多个级7来形成蒸汽通道8.为了抑制由氧化引起的表面粗糙度的增加,进行表面处理以至少部分表面粗糙度 定子叶片6和转子叶片5的表面。