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公开(公告)号：US08011230B2
公开(公告)日：2011-09-06
申请号：US12023158
申请日：2008-01-31
申请人： Masahiro Watanabe , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Shuichi Baba , Toshihiko Nakata , Manabu Edamura , Yukio Kembo
发明人： Masahiro Watanabe , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Shuichi Baba , Toshihiko Nakata , Manabu Edamura , Yukio Kembo
IPC分类号： G01B5/28
摘要： A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.
摘要翻译： 扫描探针显微镜，其能够执行不受样品静电荷分布影响的形状测量，其通过检测与测量同步的静电荷引起的静电荷的悬臂的挠曲或振动状态的变化来监测静电荷状态 通过探针和样品之间的相对扫描，进行电位调整，以消除静电电荷分布的影响，从而防止由于放电而引起的探针或样品的损伤，并实现由静电电荷分布引起的测量误差的降低。
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公开(公告)号：US20080245139A1
公开(公告)日：2008-10-09
申请号：US12061308
申请日：2008-04-02
申请人： Takafumi Morimoto , Toru Kurenuma , Manabu Edamura , Hiroshi Kuroda , Yukio Kembo , Masahiro Watanabe , Shuichi Baba
发明人： Takafumi Morimoto , Toru Kurenuma , Manabu Edamura , Hiroshi Kuroda , Yukio Kembo , Masahiro Watanabe , Shuichi Baba
IPC分类号： G01B5/28
摘要： A measurement method of a scanning probe microscope including a first approach operation adjusting an operation position of a fine positioning unit to near a maximum extension amount and ending the approach by coarse positioning, a first measurement operation making the probe scan the surface for measurement in a close probe state based on the first approach operation to obtain relief information of the sample surface, a positioning operation positioning the probe at a recessed part based on the relief information obtained by the first measurement operation, a second approach operation making the probe again approach the surface at a position determined by the positioning operation, adjusting an operation position of the Z-axis fine positioning device to close to a maximum extension amount, and ending the repeated approach, and a second measurement operation making the probe scan the surface for measurement in a close probe state based on the second approach operation to obtain relief information of the sample surface.
摘要翻译： 一种扫描探针显微镜的测量方法，包括：将精细定位单元的操作位置调整到最大延伸量附近的第一接近操作，并且通过粗略定位来结束接近;第一测量操作，使得探测器扫描表面以进行测量 基于第一接近操作关闭探针状态以获得样品表面的浮雕信息，基于通过第一测量操作获得的浮雕信息将探针定位在凹陷部分的定位操作，使探针再次接近的第二接近操作 在由定位操作确定的位置处的表面，将Z轴精细定位装置的操作位置调整为接近最大延伸量，并且结束重复进近，以及使探针扫描表面以进行测量的第二测量操作 基于第二种方法操作获得缓解的近距离探测状态 样品表面的信息。
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公开(公告)号：US07631548B2
公开(公告)日：2009-12-15
申请号：US11737779
申请日：2007-04-20
申请人： Shuichi Baba , Masahiro Watanabe , Toshihiko Nakata , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Yukio Kembo , Manabu Edamura
发明人： Shuichi Baba , Masahiro Watanabe , Toshihiko Nakata , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Yukio Kembo , Manabu Edamura
IPC分类号： G01B5/28
摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.
摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。
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公开(公告)号：US20070266780A1
公开(公告)日：2007-11-22
申请号：US11737779
申请日：2007-04-20
申请人： SHUICHI BABA , Masahiro Watanabe , Toshihiko Nakata , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Yukio Kembo , Manabu Edamura
发明人： SHUICHI BABA , Masahiro Watanabe , Toshihiko Nakata , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Yukio Kembo , Manabu Edamura
IPC分类号： G01N13/10
摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.
摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。
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公开(公告)号：US20080223122A1
公开(公告)日：2008-09-18
申请号：US12023158
申请日：2008-01-31
申请人： Masahiro Watanabe , Toru KURENUMA , Hiroshi Kuroda , Takafumi Morimoto , Shuichi Baba , Toshihiko Nakata , Manabu Edamura , Yukio Kembo
发明人： Masahiro Watanabe , Toru KURENUMA , Hiroshi Kuroda , Takafumi Morimoto , Shuichi Baba , Toshihiko Nakata , Manabu Edamura , Yukio Kembo
IPC分类号： G01B5/28
摘要： A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.
摘要翻译： 扫描探针显微镜，其能够执行不受样品静电荷分布影响的形状测量，其通过检测与测量同步的静电荷引起的静电荷的悬臂的挠曲或振动状态的变化来监测静电荷状态 通过探针和样品之间的相对扫描，进行电位调整，以消除静电电荷分布的影响，从而防止由于放电而引起的探针或样品的损伤，并实现由静电电荷分布引起的测量误差的降低。
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6.发明申请Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope 审中-公开探针扫描控制方法及扫描探针显微镜探头扫描控制装置公开(公告)号：US20080236259A1
公开(公告)日：2008-10-02
申请号：US11660271
申请日：2005-08-18
IPC分类号： G01B5/28
CPC分类号： G01Q10/065
摘要： A scanning probe microscope provided with a cantilever 21 having a probe 20 facing a sample 12, a measurement unit 24 measuring a physical quantity occurring between the probe and sample, and movement mechanisms 11, 29 changing a positional relationship between the probe and sample to cause a scanning operation and making the probe scan the surface of the sample by the movement mechanism and measure the surface of the sample by the measurement unit. This method is provided with a step of feeding the probe in a direction along the surface of the sample at a position separate from the surface at certain distances, a step of making the probe approach the sample at each of a plurality of measurement points determined at certain distances and perform measurement to obtain measurement values, then retract, and a step setting a measurement point at a position between a certain measurement point and next measurement point for measurement when a difference between a measurement value at the certain measurement point and a measurement value at the next measurement point is larger than a reference value.
摘要翻译： 具有悬臂21的扫描探针显微镜，其具有面向样品12的探针20，测量在探针和样品之间发生的物理量的测量单元24和改变探针与样品之间的位置关系的移动机构11,29， 扫描操作并使探针通过移动机构扫描样品的表面，并通过测量单元测量样品的表面。 该方法具有以下步骤：沿着与样品表面在一定距离处分开的位置沿着样品表面的方向进给探针，使得探针在多个测量点中的每一个测量点处接近样品的步骤 一定距离并进行测量以获得测量值，然后缩回，并且当在某个测量点处的测量值与测量值之间的差异时，将某个测量点和下一测量点之间的位置处的测量点设置为测量点 在下一个测量点大于参考值。
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公开(公告)号：US06229607B1
公开(公告)日：2001-05-08
申请号：US09182048
申请日：1998-10-29
IPC分类号： G01B1114
CPC分类号： G01Q10/04 , Y10S977/87
摘要： A fine movement mechanism unit is configured by a supporting member, two fixed sections fixed to this supporting member, two pairs of parallel-plate flexural sections disposed between the two fixed sections, an X fine movement mechanism, a Y fine movement mechanism, and a Z fine movement mechanism. The X fine movement mechanism has an X moving section movable in an X direction, connected to each of the two fixed sections through the two pairs of parallel-plate flexural sections, and two X direction piezoelectric actuators causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections, a Y moving section movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator causing the Z moving section to move.
摘要翻译： 精细运动机构单元由支撑构件构成，固定在该支撑构件上的两个固定部，设置在两个固定部之间的两对平行板弯曲部，X微移动机构，Y细移动机构和 Z精细机芯。 X精细机构具有可沿X方向移动的X移动部，通过两对平行板弯曲部连接到两个固定部中的每一个，以及使X移动部移动的两个X方向压电致动器。 设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分，Y方向移动的Y移动部分，通过另外两对平行板弯曲部分连接到X移动部分 以及两个Y方向的压电致动器，其使Y移动部相对于X移动部移动。 配置在Y移动部上的Z细移动机构具有能够沿与X方向和Y方向垂直的Z方向移动的Z移动部，Z方向的压电致动器使Z移动部移动。
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8.发明授权公开(公告)号：US07350404B2
公开(公告)日：2008-04-01
申请号：US10569373
申请日：2004-08-27
申请人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
发明人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
摘要翻译： 扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。 当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。 通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。
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公开(公告)号：US06881954B1
公开(公告)日：2005-04-19
申请号：US09626106
申请日：2000-07-26
申请人： Takafumi Morimoto , Hiroshi Kuroda
发明人： Takafumi Morimoto , Hiroshi Kuroda
CPC分类号： G01Q10/06 , G01Q30/06 , Y10S977/851
摘要： A scanning probe microscope has an XY scanner for making a probe scan a sample surface, an approach and separate drive element for making the probe approach to the sample surface at a sampling position and separate the probe from the sample surface during movement between the sampling positions, and a servo controller for holding the distance between the probe and the sample surface at a reference distance during measurement at the sampling position. A plurality of scattered measurement locations are set away from each other as sampling positions. The approach and separation movements are performed at each sampling position. When measuring the surface by the probe at a sampling position and while making the probe move between sampling positions, servo control by the servo controller is continued. This makes it possible to quickly measure the surface by a simple controller and possible to measure a wide area or measure a high aspect ratio. When making the probe approach to the sample surface for measurement at the sampling position, it is also possible to cause a scan motion for tandem movement at an equal speed and in the same direction as the scan motion by the XY scanner.
摘要翻译： 扫描探针显微镜具有用于使探针扫描样品表面的XY扫描器，用于使探针在取样位置处接近样品表面的方法和分离的驱动元件，并且在采样位置之间移动期间将探针与样品表面分离 以及伺服控制器，用于在采样位置的测量期间将探头和样品表面之间的距离保持在参考距离处。 将多个分散的测量位置彼此设置为采样位置。 在每个采样位置执行进场和分离运动。 当在采样位置通过探头测量表面时，并且当探头在采样位置之间移动时，伺服控制器进行伺服控制。 这使得可以通过简单的控制器快速测量表面，并且可以测量宽的面积或测量高的纵横比。 当在采样位置使探针接近样品表面进行测量时，也可以以与XY扫描仪的扫描运动相同的速度和相同的方向进行串联移动的扫描运动。
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公开(公告)号：US20050012936A1
公开(公告)日：2005-01-20
申请号：US10893364
申请日：2004-07-19
申请人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号： G01B21/30 , G01B11/24 , G01B11/30 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q30/20 , G01Q60/24 , H01L21/66
摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。
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