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    Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope
    1.
    发明申请
    Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope 审中-公开
    探针扫描控制方法及扫描探针显微镜探头扫描控制装置

    公开(公告)号：US20080236259A1

    公开(公告)日：2008-10-02

    申请号：US11660271

    申请日：2005-08-18

    申请人： Tooru Kurenuma ,  Yukio Kenbou ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Takafumi Morimoto

    发明人： Tooru Kurenuma ,  Yukio Kenbou ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Takafumi Morimoto

    IPC分类号： G01B5/28

    CPC分类号： G01Q10/065

    摘要： A scanning probe microscope provided with a cantilever 21 having a probe 20 facing a sample 12, a measurement unit 24 measuring a physical quantity occurring between the probe and sample, and movement mechanisms 11, 29 changing a positional relationship between the probe and sample to cause a scanning operation and making the probe scan the surface of the sample by the movement mechanism and measure the surface of the sample by the measurement unit. This method is provided with a step of feeding the probe in a direction along the surface of the sample at a position separate from the surface at certain distances, a step of making the probe approach the sample at each of a plurality of measurement points determined at certain distances and perform measurement to obtain measurement values, then retract, and a step setting a measurement point at a position between a certain measurement point and next measurement point for measurement when a difference between a measurement value at the certain measurement point and a measurement value at the next measurement point is larger than a reference value.

    摘要翻译： 具有悬臂21的扫描探针显微镜，其具有面向样品12的探针20，测量在探针和样品之间发生的物理量的测量单元24和改变探针与样品之间的位置关系的移动机构11,29， 扫描操作并使探针通过移动机构扫描样品的表面，并通过测量单元测量样品的表面。 该方法具有以下步骤：沿着与样品表面在一定距离处分开的位置沿着样品表面的方向进给探针，使得探针在多个测量点中的每一个测量点处接近样品的步骤 一定距离并进行测量以获得测量值，然后缩回，并且当在某个测量点处的测量值与测量值之间的差异时，将某个测量点和下一测量点之间的位置处的测量点设置为测量点 在下一个测量点大于参考值。

    Scanning probe microscope and measurement method using the same
    5.
    发明授权
    Scanning probe microscope and measurement method using the same 失效
    扫描探针显微镜和测量方法使用相同

    公开(公告)号：US07333191B2

    公开(公告)日：2008-02-19

    申请号：US10893364

    申请日：2004-07-19

    申请人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    发明人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    IPC分类号： G01B1/00

    CPC分类号： G01Q20/02 ,  G01Q30/06 ,  G01Q70/04

    摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

    摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。

    Probe replacement method for scanning probe microscope
    8.
    发明申请
    Probe replacement method for scanning probe microscope 审中-公开
    用于扫描探针显微镜的探头更换方法

    公开(公告)号：US20070180889A1

    公开(公告)日：2007-08-09

    申请号：US10565509

    申请日：2004-03-22

    申请人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

    发明人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

    IPC分类号： G12B21/00 ,  G01N13/10

    CPC分类号： G01Q10/06 ,  G01Q30/06 ,  G01Q70/02

    摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.

    摘要翻译： 一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。 扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。 在第一步中，从悬臂盒中选择悬臂，并安装在悬臂安装座上。 在第二步骤中，移动光学显微镜，并且在将悬臂安装在扫描探针显微镜中之后，将安装的悬臂设置在视野中的规定位置。 在第二步骤中，提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。

    PROBE CONTROL METHOD FOR SCANNING PROBE MICROSCOPE
    9.
    发明申请
    PROBE CONTROL METHOD FOR SCANNING PROBE MICROSCOPE 审中-公开
    用于扫描探针显微镜的探测控制方法

    公开(公告)号：US20080087820A1

    公开(公告)日：2008-04-17

    申请号：US11867476

    申请日：2007-10-04

    申请人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

    发明人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

    IPC分类号： G01N23/00

    CPC分类号： G01Q10/06 ,  G01Q30/06

    摘要： This probe control method is applied to the scanning probe microscope having a probe section with a probe pointed at a sample, a detection section for detecting physical quantity between the sample and the probe, a measurement section for measuring the surface of the sample to obtain the surface information on the basis of the physical quantity when scanning the sample surface by the probe, and a movement mechanism with at least two degree of freedom. The probe control method has steps of moving the probe in a scanning direction different from the contact direction while making the probe come into contact with the sample surface, detecting the torsional state of the probe during the movement of the probe, and adjusting either or both of the rate in the scanning direction and the force in the contact direction on the basis of the detected value obtained by the detection step.

    摘要翻译： 将该探针控制方法应用于具有探针指向样品的探针部的扫描探针显微镜，用于检测样品与探针之间的物理量的检测部，测定样品表面的测定部， 基于通过探针扫描样品表面时的物理量的表面信息，以及具有至少两个自由度的移动机构。 探针控制方法具有使探针沿着与接触方向不同的扫描方向移动的步骤，同时使探针与样品表面接触，检测探针移动期间探针的扭转状态，并且调节任一或两者 基于通过检测步骤获得的检测值，扫描方向上的速率和接触方向上的力。

    Ultrasonic inspection and imaging instrument
    10.
    发明授权
    Ultrasonic inspection and imaging instrument 失效
    超声波检查和成像仪器

    公开(公告)号：US5179954A

    公开(公告)日：1993-01-19

    申请号：US707567

    申请日：1991-05-30

    申请人： Yukio Arima ,  Hiroaki Yanagimoto ,  Yuichi Kunitomo ,  Tetsuyoshi Tominaga

    发明人： Yukio Arima ,  Hiroaki Yanagimoto ,  Yuichi Kunitomo ,  Tetsuyoshi Tominaga

    IPC分类号： G01Q30/04 ,  G01Q80/00 ,  G01Q90/00 ,  G01S7/52 ,  G01S15/89

    CPC分类号： G01S15/8945 ,  B82Y15/00 ,  G01S7/52061

    摘要： An ultrasonic inspection and imaging instrument scans an object under examination, the object having an inspection plane at a predetermined depth, in the direction slanted to the depth (slant scanning), in such a way as to cause rectilinear scanning as viewed from the plane. Measured data on a peak value corresponding to each measurement point obtained from the slant scanning are displayed in the form of a picture on the screen of a display relative to each measurement point. The image displayed on the picturee at that time is most clearly demonstrated, provided an image portion in the vicinity of a test portion corresponding to a test surface is brought into focus in the depth direction. An operator selects the image portion clearly indicated out of the picture displayed on the display, and inputs the position of the image thereon to an input unit, whereby an image processor bases the positional information about the display data thus fed and the relevant information indicating the positional relationship in the depth direction on obtaining the position of the probe in the depth direction when the measured value resulting from the image is collected. The image processor positions the probe there, so that the probe is automatically focused on the test surface.