-
公开(公告)号：US06854956B2
公开(公告)日：2005-02-15
申请号：US10387058
申请日：2003-03-12
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/601
摘要： A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.
摘要翻译： 涡轮分子泵具有主体和用于覆盖主体的泵壳体。 第一凸缘与泵壳一体地形成，用于与真空室一体地连接到第二凸缘。 泵壳的法兰和真空室的法兰通过紧固螺栓一体连接在一起。 夹持结构通过围绕第一和第二凸缘中的每一个的一部分而将第一和第二凸缘分别夹紧在一起。
-
公开(公告)号：US20120141254A1
公开(公告)日：2012-06-07
申请号：US13381239
申请日：2010-05-31
IPC分类号： F01D1/36
CPC分类号： F04D19/042 , F04D25/0693 , F04D27/0292 , F04D29/522 , F04D29/601
摘要： To provide a vacuum pump in which possibilities of decreased exhaust performance and gas leakage at the time of breakage of a rotor are lessened, in the case where a rotating part closes the inside opening portion of an exhaust outlet portion to decrease the height dimension of the vacuum pump, and further a connector lead wire is installed, easily.An inside opening edge portion of a gas discharge passage for combining the downstream space of the rotor with the exhaust outlet portion is caused to take a shape such that the opening edge portion has no blind portion when a gas exhaust passage forming member is viewed from at least either of an upper side or an oblique upper side, or from at least either of an lower side or an oblique lower side. Furthermore, the inner corner portion of this opening edge portion is formed into a rounded shape to reduce stress concentration. Also, a base is provided with a groove for combining a lead wire installing hole with a hole in the central part, and further the corners of these parts are formed into a rounded shape.
摘要翻译： 为了提供一种真空泵，其中在转子断裂时排气性能下降和气体泄漏降低的可能性减小，在旋转部分封闭排气出口部分的内部开口部分以降低其转速的高度尺寸的情况下 真空泵，另外还可以安装连接器导线。 当将来自转子的下游空间与排气出口部分组合的气体排出通道的内部开口边缘部分形成使得当从那里观察排气通道形成构件时开口边缘部分不具有盲区 至少上侧或倾斜的上侧中的至少一个，或从下侧或倾斜的下侧中的至少一个。 此外，该开口边缘部分的内角部形成为圆形，以减小应力集中。 此外，基部设置有用于将引线安装孔与中心部分中的孔组合的凹槽，并且这些部分的角部还形成为圆形。
-
公开(公告)号：US20120143390A1
公开(公告)日：2012-06-07
申请号：US13381254
申请日：2010-06-14
申请人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
发明人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
IPC分类号： G05D23/00
CPC分类号： F04D19/042 , F04D27/001 , F04D29/584 , F05D2270/303
摘要： To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump.One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater 147 and a magnetic valve 163 is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.
摘要翻译： 提供一种能够使用少于配置在泵中的温度传感器的数量的一个或多个加热装置或冷却装置进行温度控制的真空泵。 在泵中为每个目标设置一个温度传感器，而仅设置由加热器147和电磁阀163组成的一个。 基于为温度传感器设定的优先级，基于来自多个温度传感器的输出信号来控制由加热器和电磁阀组成的一组。 如上所述，通过设定温度传感器的优先级，通过进行快速ON / OFF控制，将设置有较高优先级的温度传感器的目标温度设定在控制范围内，然后设置具有 给定较低优先级的温度传感器在控制范围内确定。
-
公开(公告)号：US10001126B2
公开(公告)日：2018-06-19
申请号：US13381254
申请日：2010-06-14
申请人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
发明人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
CPC分类号： F04D19/042 , F04D27/001 , F04D29/584 , F05D2270/303
摘要： To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater and a magnetic valve is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.
-
公开(公告)号：US09388816B2
公开(公告)日：2016-07-12
申请号：US13817473
申请日：2011-07-20
申请人： Yoshiyuki Sakaguchi , Tooru Miwata , Akihiko Wada
发明人： Yoshiyuki Sakaguchi , Tooru Miwata , Akihiko Wada
CPC分类号： F04D19/042 , F04D19/044 , F04D29/644 , F04D29/662
摘要： An object of the present invention is to enhance the capacity of a turbomolecular pump.A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion.Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.
摘要翻译： 本发明的目的是提高涡轮分子泵的容量。 涡轮分子泵是组合刀片部分和螺纹槽部分的复合型真空泵。 开口形成在保持转子叶片的转子叶片保持部和保持转子圆筒部的阶梯部之间的接合部，使得开口跨越转子叶片保持部和台阶部。 由叶片部分排出的气体的一部分通过由转子筒部和定子螺纹槽形成的螺纹槽部抽出，其余的气体经由开口被引入转子筒部，并且 通过由转子筒部和另一个定子螺纹槽形成的螺纹槽部排出。 当开口形成在转子叶片保持部分和阶梯部分之间的接合部分时，可以承受来自转子旋转的应力。 此外，在另一个定子线槽的入口侧的间隙部设置有配置有平衡重的槽，从而不需要缩短另一个定子线槽的长度。
-
公开(公告)号：US20130149105A1
公开(公告)日：2013-06-13
申请号：US13817473
申请日：2011-07-20
申请人： Yoshiyuki Sakaguchi , Tooru Miwata , Akihiko Wada
发明人： Yoshiyuki Sakaguchi , Tooru Miwata , Akihiko Wada
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D19/044 , F04D29/644 , F04D29/662
摘要： An object of the present invention is to enhance the capacity of a turbomolecular pump.A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion.Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.
摘要翻译： 本发明的目的是提高涡轮分子泵的容量。 涡轮分子泵是组合刀片部分和螺纹槽部分的复合型真空泵。 开口形成在保持转子叶片的转子叶片保持部和保持转子圆筒部的阶梯部之间的接合部，使得开口跨越转子叶片保持部和台阶部。 由叶片部分排出的气体的一部分通过由转子筒部和定子螺纹槽形成的螺纹槽部抽出，其余的气体经由开口被引入转子筒部，并且 通过由转子筒部和另一个定子螺纹槽形成的螺纹槽部排出。 当开口形成在转子叶片保持部分和阶梯部分之间的接合部分时，可以承受来自转子旋转的应力。 此外，在另一个定子线槽的入口侧的间隙部设置有配置有平衡重的槽，从而不需要缩短另一个定子线槽的长度。
-
公开(公告)号：US06832888B2
公开(公告)日：2004-12-21
申请号：US10278188
申请日：2002-10-22
申请人： Takashi Kabasawa , Manabu Nonaka , Tooru Miwata
发明人： Takashi Kabasawa , Manabu Nonaka , Tooru Miwata
IPC分类号： F04D1904
CPC分类号： F04D29/083 , F04D19/048
摘要： A molecular pump for exhausting a chamber has a casing, a stator mounted in the casing, and a rotor mounted in the casing for undergoing rotation relative to the stator during exhaustion of the container. The rotor has a surface disposed opposite to and confronting a surface of the stator. A thread groove is formed in at least one of the opposite and confronting surfaces of the stator and the rotor. A clearance varying device varies a magnitude of a clearance between the opposite and confronting surfaces of the stator and the rotor. An exhaust controlling device controls a degree of exhaustion of the chamber by adjusting the magnitude of the clearance between the opposite and confronting surfaces of the stator and the rotor to a preselected target value during operation of the molecular pump.
摘要翻译： 用于排出腔室的分子泵具有壳体，安装在壳体中的定子和安装在壳体中的转子，用于在容器耗尽期间相对于定子旋转。 转子具有与定子的表面相对并面对定子的表面。 在定子和转子的相对和相对表面中的至少一个中形成螺纹槽。 间隙改变装置改变定子和转子的相对面和相对表面之间的间隙的大小。 排气控制装置通过在分子泵的操作期间将定子和转子的相对面和相对表面之间的间隙的大小调整到预选的目标值来控制室的排气度。
-
公开(公告)号：US06851848B2
公开(公告)日：2005-02-08
申请号：US10395673
申请日：2003-03-24
申请人： Tooru Miwata , Manabu Nonaka , Takashi Kabasawa
发明人： Tooru Miwata , Manabu Nonaka , Takashi Kabasawa
摘要： A turbo-molecular pump has components including a stator column, a rotary shaft, and a blade connected to the rotary shaft for rotation therewith. A radiation temperature measuring apparatus has a radiation thermometer for measuring a temperature of a preselected one of the components of the turbo-molecular pump disposed within a view angle range of the radiation thermometer and in accordance with heat energy radiated from the preselected component. A hood is connected to the radiation thermometer so as to not interfere with the view angle range of the radiation thermometer and is configured to block heat energy radiated from components of the turbo-molecular pump disposed outside of the view angle range of the radiation thermometer.
摘要翻译： 涡轮分子泵具有包括定子柱，旋转轴和连接到旋转轴的叶片以与其一起旋转的部件。 辐射温度测量装置具有辐射温度计，用于测量设置在辐射温度计的视角范围内并根据从预选部件辐射的热能的涡轮分子泵的预选一个部件的温度。 罩与辐射温度计连接，不会与辐射温度计的视角范围相干扰，并且被构造成阻挡从设置在辐射温度计的视角范围外的涡轮分子泵的部件所辐射的热能。
-
公开(公告)号：US06779969B2
公开(公告)日：2004-08-24
申请号：US10308795
申请日：2002-12-03
申请人： Manabu Nonaka , Tooru Miwata , Takashi Kabasawa
发明人： Manabu Nonaka , Tooru Miwata , Takashi Kabasawa
IPC分类号： F01D136
CPC分类号： F04D29/083 , F04D19/044 , F04D19/046
摘要： A thread-groove pump mechanism portion PB employs a turn-back structure including a rotor formed of a multiple cylinder having an inner cylindrical rotor and an outer cylindrical rotor and a stator formed of a multiple cylinder having an inner cylindrical stator and on outer cylindrical stator. Gaps g1 and g3 defined by the outer walls of the rotor and the stator walls, and a gap g2 defined by the inner cylinder wall of the rotor and the stator wall during the rest of the pump are formed such that they increase with the distance from the rotor shaft center and g1>g2 and g1>g3 are satisfied. Thus, even if displacement occurs by the centrifugal force and thermal expansion during the operation of pump, predetermined gaps can be provided therebetween.
摘要翻译： 螺纹槽泵机构部分PB采用回转结构，其包括由具有内圆柱形转子和外圆筒形转子的多缸的转子和由具有内圆柱形定子的多个圆筒形成的定子和外圆柱定子 。 由转子的外壁和定子壁限定的间隙g1和g3，并且在泵的其余部分期间形成由转子的内筒壁和定子壁限定的间隙g2，使得它们随着距离 转子轴心和g1> g2和g1> g3。 因此，即使在泵的运转过程中由离心力和热膨胀发生位移，也可以在其间设置规定的间隙。
-
-
-
-
-
-
-
-
搜索结果
9 条记录 (耗时 0.017 秒)
