Polishing Composition for CMP and device wafer producing method using the same
    1.
    发明申请
    Polishing Composition for CMP and device wafer producing method using the same 审中-公开
    用于CMP的抛光组合物和使用其的器件晶片制造方法

    公开(公告)号:US20090104778A1

    公开(公告)日:2009-04-23

    申请号:US12285458

    申请日:2008-10-06

    IPC分类号: H01L21/304 C09K13/00

    摘要: Disclosed is a polishing composition for CMP which contains a polyglycerol derivative (A) represented by following Formula (1): RO—(C3H6O2)n—H   (1) wherein R represents one selected from a hydroxyl-substituted or unsubstituted alkyl group having one to eighteen carbon atoms, a hydroxyl-substituted or unsubstituted alkenyl or alkapolyenyl group having two to eighteen carbon atoms, an acyl group having two to twenty-four carbon atoms, and hydrogen atom; and “n” denotes an average degree of polymerization of glycerol units and is an integer of 2 to 40; an abrasive (B); and water.

    摘要翻译: 公开了一种CMP用的研磨用组合物,其含有下述通式(1)表示的聚甘油衍生物(A):&lt;线内式记载=“直列式”末端=“铅”→RO-(C 3 H 6 O 2) nH(1)<?in-line-formula description =“In-line formula”end =“tail”?>其中R表示选自羟基取代或未取代的具有1至18个碳原子的烷基,羟基 - 具有2至18个碳原子的取代或未取代的烯基或多聚烯基,具有2至24个碳原子的酰基和氢原子; “n”表示甘油单元的平均聚合度,为2〜40的整数。 研磨剂(B); 和水。

    Polyester polyol and process for producing the same
    2.
    发明申请
    Polyester polyol and process for producing the same 审中-公开
    聚酯多元醇及其制备方法

    公开(公告)号:US20070232773A1

    公开(公告)日:2007-10-04

    申请号:US11727098

    申请日:2007-03-23

    IPC分类号: C08G18/00 C08G63/82

    摘要: A cyclic ester (e.g., a lactone such as ε-caprolactone) is ring-opening addition polymerized with a dihydroxycarboxylic acid in the presence of a basic compound (e.g., an amine). In a polyester polyol obtained by such a process, at least part of a carboxyl group of the polyester polyol forms a carboxylate with the basic compound, and the content of the dihydroxycarboxylic acid in a free form can be remarkably reduced (for example, reduced to not more than 5% by weight relative to the total polyester polyol). According to the present invention, a polyester polyol having a reduced content of a free or unreacted dihydroxycarboxylic acid is provided even in the case of using a dihydroxycarboxylic acid (e.g., a dimethylolalkanoic acid such as dimethylolpropionic acid) as an initiator.

    摘要翻译: 环状酯(例如内酯如ε-己内酯)在碱性化合物(例如胺)的存在下与二羟基羧酸加成聚合。 在通过这种方法获得的聚酯多元醇中,聚酯多元醇的至少一部分羧基与碱性化合物形成羧酸酯,并且游离形式的二羟基羧酸的含量可以显着降低(例如,降低至 相对于总聚酯多元醇为5重量%以下)。 根据本发明,即使使用二羟基羧酸(例如二羟甲基链烷酸如二羟甲基丙酸)作为引发剂,也提供了游离或未反应的二羟基羧酸含量降低的聚酯多元醇。

    Polyglycerol, polyglycerol/fatty acid ester, and processes for producing these
    3.
    发明申请
    Polyglycerol, polyglycerol/fatty acid ester, and processes for producing these 失效
    聚甘油,聚甘油/脂肪酸酯,及其制造方法

    公开(公告)号:US20060258823A1

    公开(公告)日:2006-11-16

    申请号:US10536388

    申请日:2003-11-28

    IPC分类号: C08G59/16

    摘要: The present invention relates to a polyglycerol significantly reduced in content of a polyglycerol having a cyclic structure formed by removal of a water molecule from a polyglycerol molecule, and to a fatty acid ester of a polyglycerol having excellent surface activity. 2 mole or more of glycidol and a catalyst are successively added to 1 mole of glycerol for a reaction to obtain a polyglycerol, in which a ratio of [total polyglycerol (1)] to [total polyglycerol (2) having a cyclic structure] is [70% or more]/[30% or less] (the total of both is 100% by weight) in terms of an intensity ratio determined by liquid chromatography/mass spectrometry; and an average polymerization degree “n” is 2 or more. A reaction of a polyglycerol with a fatty acid provides the corresponding a fatty acid ester of the polyglycerol.

    摘要翻译: 本发明涉及通过从聚甘油分子中除去水分子而形成的具有环状结构的聚甘油的含量显着降低的聚甘油和具有优异表面活性的聚甘油的脂肪酸酯。 将2摩尔以上的缩水甘油和催化剂依次加入到1摩尔甘油中进行反应,得到[总聚甘油(1)]与[具有环状结构的总聚甘油(2)]的比例为 [70%以上] / [30%以下](两者的总量为100重量%)以通过液相色谱/质谱法测定的强度比计算; 平均聚合度“n”为2以上。 聚甘油与脂肪酸的反应提供相应的聚甘油的脂肪酸酯。

    Process And Activated Carbon Catalyst For Ring-Opening Polymerization Of Lactone Compounds
    4.
    发明申请
    Process And Activated Carbon Catalyst For Ring-Opening Polymerization Of Lactone Compounds 失效
    用于内酯化合物开环聚合的工艺和活性炭催化剂

    公开(公告)号:US20080125568A1

    公开(公告)日:2008-05-29

    申请号:US11795794

    申请日:2006-02-03

    IPC分类号: C08G63/87 B01J21/18

    CPC分类号: C08G63/823

    摘要: A lactone compound represented by following General Formula (1), such as ε-caprolactone, is reacted in the presence of a powdered activated carbon where necessary with an initiator such as a polyhydric alcohol, an aliphatic alcohol, or an aliphatic carboxylic acid to thereby yield, for example, a polylactone, a polylactone alkyl ether, or a polylactone alkyl ester.[Chemical Formula 1] Wherein R1 is an alkylene group having two to eighteen carbon atoms which may be substituted with one or more alkyl groups each having one to ten carbon atoms.Accordingly, a target compound can be produced in a high yield with high quality, from which the catalyst can be easily removed.

    摘要翻译: 如下所述,通式(1)所示的内酯化合物如ε-己内酯在必要时与引发剂如多元醇,脂族醇或脂族羧酸在粉末状活性炭存在下反应,由此 产生例如聚内酯,聚内酯烷基醚或聚内酯烷基酯。 [化学式1]其中R 1是具有2至18个碳原子的亚烷基,其可被一个或多个各自具有1至10个碳原子的烷基取代。 因此,可以以高产率高质量地制备目标化合物,从而可以容易地除去催化剂。

    Polyglycerol, polyglycerol/fatty acid ester, and processes for producing these
    5.
    发明授权
    Polyglycerol, polyglycerol/fatty acid ester, and processes for producing these 失效
    聚甘油,聚甘油/脂肪酸酯,及其制造方法

    公开(公告)号:US07687649B2

    公开(公告)日:2010-03-30

    申请号:US10536388

    申请日:2003-11-28

    IPC分类号: C07C57/00

    摘要: The present invention relates to a polyglycerol significantly reduced in content of a polyglycerol having a cyclic structure formed by removal of a water molecule from a polyglycerol molecule, and to a fatty acid ester of a polyglycerol having excellent surface activity. 2 mole or more of glycidol and a catalyst are successively added to 1 mole of glycerol for a reaction to obtain a polyglycerol, in which a ratio of [total polyglycerol (1)] to [total polyglycerol (2) having a cyclic structure] is [70% or more]/[30% or less] (the total of both is 100% by weight) in terms of an intensity ratio determined by liquid chromatography/mass spectrometry; and an average polymerization degree “n” is 2 or more. A reaction of a polyglycerol with a fatty acid provides the corresponding a fatty acid ester of the polyglycerol.

    摘要翻译: 本发明涉及通过从聚甘油分子中除去水分子而形成的具有环状结构的聚甘油的含量显着降低的聚甘油和具有优异表面活性的聚甘油的脂肪酸酯。 将2摩尔以上的缩水甘油和催化剂依次加入到1摩尔甘油中进行反应,得到[总聚甘油(1)]与[具有环状结构的总聚甘油(2)]的比例为 [70%以上] / [30%以下](两者的总量为100重量%)以通过液相色谱/质谱法测定的强度比计算; 平均聚合度“n”为2以上。 聚甘油与脂肪酸的反应提供相应的聚甘油的脂肪酸酯。

    Polyglycerols and production thereof
    6.
    发明授权
    Polyglycerols and production thereof 失效
    聚甘油及其生产

    公开(公告)号:US07335801B2

    公开(公告)日:2008-02-26

    申请号:US11510594

    申请日:2006-08-28

    IPC分类号: C07C29/32 C07C29/34 C07C41/03

    摘要: A polyglycerol composition contains diglycerol, triglycerol, and tetraglycerol each in a content of 5 percent by weight or more, has a total content of diglycerol, triglycerol, and tetraglycerol of 75 percent by weight or more, has a total content of higher polyglycerol components of 10 percent by weight or less, the higher polyglycerol components each having a degree of polymerization of 7 or higher, and is substantially free from chlorine atom. A process prepares a polyglycerol composition by reacting glycerol and/or a polyglycerol with glycidol in the presence of an activated carbon catalyst.

    摘要翻译: 聚甘油组合物含有5重量%以上的二甘油,甘油三酯和四甘油,其中双甘油,三甘油和四甘油的总含量为75重量%以上,总甘油含量为 10重量%以下,聚合度高于7以上且基本上不含氯原子的高级聚甘油成分。 一种方法是在活性炭催化剂存在下,使甘油和/或聚甘油与缩水甘油反应制备聚甘油组合物。

    Ejector, fine solid piece recovery apparatus and fluid conveyor
    7.
    发明授权
    Ejector, fine solid piece recovery apparatus and fluid conveyor 失效
    喷射器,精细固体回收装置和流体输送机

    公开(公告)号:US06974279B2

    公开(公告)日:2005-12-13

    申请号:US10679352

    申请日:2003-10-07

    IPC分类号: B65G53/14 B65G53/58 B65G53/60

    CPC分类号: B65G53/58 B65G53/14

    摘要: An ejector is configured to generate a high negative pressure capable of sucking and conveying fine metal pieces or chips, such as machinings or cuttings, for example, when using the ejector as a driving source for a fluid conveyor. The ejector includes a convergent-divergent nozzle having a throat formed between a suction port and a discharge port. Jet blowing holes are formed in the convergent-divergent nozzle to direct a jet stream from upstream of the throat to downstream of the throat, thereby forming a negative pressure. Pressure control holes open to the downstream of the jet blowing holes and are configured to communicate with a pressure space at a pressure level higher than a negative pressure formed by the jet stream and lower than a static pressure of the jet stream and the inside of the convergent-divergent nozzle.

    摘要翻译: 喷射器被配置为当使用喷射器作为流体输送机的驱动源时,产生能够吸入和输送诸如机械加工或切割的精细金属片或芯片的高负压。 喷射器包括会聚扩散喷嘴,其具有在吸入口和排出口之间形成的喉部。 在会聚扩散喷嘴中形成喷射吹风孔,以将喷射流从咽喉的上游引导到喉部的下游,从而形成负压。 压力控制孔通向喷射吹风孔的下游,并且被配置成与压力水平高于由喷射流形成的负压的压力水平连通并且低于喷流的静压力和 会聚扩散喷嘴。

    Liquid waste processing apparatus
    8.
    发明授权
    Liquid waste processing apparatus 失效
    液体废物处理装置

    公开(公告)号:US4925563A

    公开(公告)日:1990-05-15

    申请号:US283133

    申请日:1988-12-12

    摘要: A liquid waste processing apparatus having a liquid waste processing vessel for separating and recovering floating sludges. The liquid waste processing vessel includes an inlet disposed on its one side wall for receiving liquid wastes from above and turning them toward an exit disposed on the other side wall of the vessel, slanted downwardly toward the one side wall, and an inclined plate disposed above the exit for forming a shallow portion below the liquid surface and extended along the inclination of the opposite side wall toward the one side wall to define a narrow flow channel between the plate and the opposite side wall which is in communication from the bottom to the exit. The cross-sectional area of the narrow flow channel is made smaller than that of the channel opening. Floating sludges and precipitating sludges contained in liquid wastes from a coating booth, etc. can be separated and recovered completely and easily.

    摘要翻译: 一种液体废物处理装置,具有用于分离和回收浮动污泥的废液处理容器。 液体废物处理容器包括设置在其一个侧壁上的入口,用于从上方接收液体废物并将其转向设置在容器的另一侧壁上的出口,向下倾斜朝向一个侧壁,以及倾斜板 所述出口用于在所述液体表面下方形成浅部并且沿着所述相对侧壁的倾斜朝向所述一个侧壁延伸,以在所述板和所述相对侧壁之间限定狭窄的流动通道,所述窄流动通道从底部到所述出口 。 窄流道的横截面积比通道开口的横截面积小。 来自涂装室等的液体废物中含有的污泥和沉淀液可以完全,容易地分离回收。

    Method of operating an air-supplied type coating booth
    9.
    发明授权
    Method of operating an air-supplied type coating booth 失效
    运行空气供应型涂装车间的方法

    公开(公告)号:US4730553A

    公开(公告)日:1988-03-15

    申请号:US947386

    申请日:1986-12-29

    IPC分类号: B05B13/04 B05B15/12 F24F11/00

    摘要: A method of operating an air-supplied type coating booth in which conditioned air supplied from an air supply blower is enforced downwardly to the inside of a tunnel-shaped coating booth and the air in the coating booth is drawn together with paint mists and the likes down to the beneath of a booth floor by way of an air exhaust blower comprises the steps of detecting the flow velocity of air streams flowing into or out of inlet and the exit of the coating booth, applying primary and secondary averaging processings for signals for averaging variations caused by external disturbances fluctuating at relatively shorter and longer periods of time, judging the thus averaged direction and the flow velocity of the air streams at the inlet and the exit, variably controlling the flow rate of exhaust from the exhaust blower in accordance with the direction and the flow velocity. The exhaust blower means are divided into a plurality of blowers and the minute variations in the direction and the flow velocity are controlled excessively by the blowers situated at the inlet and the exit of the coating booth, while remaining exhaust blowers are operated at predetermined flow rate.

    摘要翻译: 一种操作供气式涂装室的方法,其中从供气鼓风机供应的调节空气向下施加到隧道形涂装室的内部,并且涂漆室中的空气与油漆等一起 通过排气鼓风机下降到展台底部的步骤包括检测流入或流出入口和出口的空气流的流速的步骤,对涂覆室的信号进行一次和二次平均处理 由外部干扰引起的变化在相对较短和较长的时间段内波动,判断出入口和出口处空气流的平均方向和流速,可根据实际情况可变地控制排风机的排气流量 方向和流速。 排风机装置被分成多个鼓风机,并且由位于喷涂室的入口和出口处的鼓风机过度地控制方向和流速的微小变化,同时剩余的排气鼓风机以预定的流量运行 。

    Method of operating an air-supplied type coating booth
    10.
    发明授权
    Method of operating an air-supplied type coating booth 失效
    运行空气供应型涂装车间的方法

    公开(公告)号:US4729295A

    公开(公告)日:1988-03-08

    申请号:US947383

    申请日:1986-12-29

    摘要: A method of operating an air-supplied type coating booth adapted to enforce conditioned air by an air supply blower through a filter downwardly to the inside of a tunnel-shaped coating booth at a predetermined flow velocity and then drawn to discharge together with coating mists, etc. to the beneath of the floor comprises the step of detecting the flow velocity of conditioned air flowing through the filter to the inside of continuously, applying primary and secondary averaging processings for the detected signals containing variations fluctuating at relatively shorter and longer periods respectively, comparing the value obtained from the signals applied with the secondary averaging processing with a predetermined flow velocity value and variably controlling the flow rate of the air supplied from the air supply blower depending on the deviation and thereby maintaining the flow velocity of the conditioned air flowing to the inside of the coating booth always constant. Reduction of the flow velocity supplied to the inside of the air-supplied type coating booth due to the filter clogging can be compensated exactly with no effects of external disturbances.

    摘要翻译: 一种操作空气供应型涂装室的方法,其适于通过供气鼓风机通过过滤器以预定的流速向下施加到隧道形涂层室的内部,然后与涂料雾一起排出, 对于地板下面的等离子体包括检测连续流过滤光器的调节空气的流速的步骤,对分别在相对较短和较长周期上波动的变化的检测信号进行一次和二次平均处理, 将从二次平均处理中应用的信号获得的值与预定的流速值进行比较,并根据偏差可变地控制从供气鼓风机供应的空气的流量,从而保持调节空气流动的流速 涂装室内部总是恒定的。 由于过滤器堵塞而导致供给到空气供给型涂装室内部的流速的降低可以在没有外部干扰的影响的情况下进行补偿。