公开(公告)号：US09778413B2

公开(公告)日：2017-10-03

申请号：US15586434

申请日：2017-05-04

Applicant: Corning Incorporated

Inventor： Dana Craig Bookbinder ,  Ming-Jun Li ,  Pushkar Tandon

IPC: G02B6/036 ,  G02B6/02 ,  C03B37/027 ,  C03C3/06 ,  C03C25/10 ,  G02B6/028 ,  C03C3/076 ,  C03C13/04 ,  C03B37/018

CPC classification number: G02B6/03694 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2203/222 ,  C03B2203/23 ,  C03B2203/24 ,  C03C3/06 ,  C03C3/076 ,  C03C13/045 ,  C03C13/046 ,  C03C25/1055 ,  C03C2201/11 ,  C03C2201/24 ,  C03C2201/31 ,  G02B6/02395 ,  G02B6/0281 ,  G02B6/03627 ,  G02B6/03644

Abstract: A single mode optical fiber having a core made from silica and less than or equal to about 11 weight % germania and having a maximum relative refractive index Δ1MAX. The optical fiber also has an inner cladding surrounding the core and having a minimum relative refractive index Δ2MIN, a first outer cladding surrounding the inner cladding and a second outer cladding surrounding the first outer cladding. The viscosity at 1650° C. of the second outer cladding minus the viscosity at 1650° C. of the first outer cladding is greater than 0.1e7 Poise, and Δ1MAX>Δ2MIN. The single mode optical fiber may also have an outer cladding surrounding the inner cladding made from silica or SiON. The first outer cladding has a maximum relative refractive index Δ3MAX, and Δ3MAX>Δ2MIN.

公开(公告)号：US20170235045A1

公开(公告)日：2017-08-17

申请号：US15586434

申请日：2017-05-04

Applicant: Corning Incorporated

Inventor： Dana Craig Bookbinder ,  Ming-Jun Li ,  Pushkar Tandon

IPC: G02B6/036 ,  C03C3/06 ,  C03C13/04 ,  C03C3/076 ,  G02B6/028 ,  C03B37/027

CPC classification number: G02B6/03694 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2203/222 ,  C03B2203/23 ,  C03B2203/24 ,  C03C3/06 ,  C03C3/076 ,  C03C13/045 ,  C03C13/046 ,  C03C25/1055 ,  C03C2201/11 ,  C03C2201/24 ,  C03C2201/31 ,  G02B6/02395 ,  G02B6/0281 ,  G02B6/03627 ,  G02B6/03644

Abstract: A single mode optical fiber having a core made from silica and less than or equal to about 11 weight % germania and having a maximum relative refractive index Δ1MAX. The optical fiber also has an inner cladding surrounding the core and having a minimum relative refractive index Δ2MIN, a first outer cladding surrounding the inner cladding and a second outer cladding surrounding the first outer cladding. The viscosity at 1650° C. of the second outer cladding minus the viscosity at 1650° C. of the first outer cladding is greater than 0.1e7 Poise, and Δ1MAX>Δ2MIN. The single mode optical fiber may also have an outer cladding surrounding the inner cladding made from silica or SiON. The first outer cladding has a maximum relative refractive index Δ3MAX, and Δ3MAX>Δ2MIN.

公开(公告)号：US08877662B2

公开(公告)日：2014-11-04

申请号：US13540204

申请日：2012-07-02

Applicant: Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

Inventor： Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

IPC: C03C3/06 ,  C03C3/087 ,  C03C1/02 ,  C03B1/00

CPC classification number: C03C1/02 ,  C03B1/00 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/23 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/08 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/50

Abstract: The invention relates to a silica glass compound having improved physical and chemical properties. In one embodiment, the present invention relates to a silica glass having a desirable brittleness in combination with a desirable density while still yielding a glass composition having a desired hardness and desired strength relative to other glasses. In another embodiment, the present invention relates to a silica glass composition that contains at least about 85 mole percent silicon dioxide and up to about 15 mole percent of one or more dopants selected from F, B, N, Al, Ge, one or more alkali metals (e.g., Li, Na, K, etc.), one or more alkaline earth metals (e.g., Mg, Ca, Sr, Ba, etc.), one or more transition metals (e.g., Ti, Zn, Y, Zr, Hf, etc.), one or more lanthanides (e.g., Ce, etc.), or combinations of any two or more thereof.

Abstract translation: 本发明涉及具有改善的物理和化学性质的二氧化硅玻璃化合物。 在一个实施方案中，本发明涉及具有期望的脆性以及所需密度的二氧化硅玻璃，同时仍然产生相对于其它玻璃具有所需硬度和所需强度的玻璃组合物。 在另一个实施方案中，本发明涉及二氧化硅玻璃组合物，其含有至少约85摩尔％的二氧化硅和至多约15摩尔％的选自F，B，N，Al，Ge的一种或多种掺杂剂，一种或多种 碱金属（如Li，Na，K等），一种或多种碱土金属（如Mg，Ca，Sr，Ba等），一种或多种过渡金属（如Ti，Zn，Y， Zr，Hf等），一种或多种镧系元素（例如Ce等），或其任何两种或多种的组合。

公开(公告)号：US08402792B2

公开(公告)日：2013-03-26

申请号：US13082076

申请日：2011-04-07

Applicant: Igor Milicevic ,  Mattheus Jacobus Nicolaas Van Stralen ,  Johannes Antoon Hartsuiker ,  Eugen Aldea

Inventor： Igor Milicevic ,  Mattheus Jacobus Nicolaas Van Stralen ,  Johannes Antoon Hartsuiker ,  Eugen Aldea

IPC: C03B37/018

CPC classification number: C03B37/0183 ,  C03B37/01807 ,  C03B2201/12 ,  C03B2201/24 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/42

Abstract: A method for manufacturing a primary preform for optical fibers using an internal vapor deposition process, including the steps of: i) providing a hollow glass substrate tube having a supply side and a discharge side, ii) surrounding at least part of the hollow glass substrate tube by a furnace, iii) supplying doped or undoped glass-forming gases to the interior of the hollow glass substrate tube via the supply side thereof, iv) creating a reaction zone in which conditions such that deposition of glass will take place on the interior of the hollow glass tube are created, and v) moving the reaction zone back and forth along the length of the hollow glass substrate tube between a reversal point located near the supply side and a reversal point located near the discharge side of the hollow glass substrate tube, wherein, during at least part of step v), the gas flow comprises a first concentration of fluorine-containing compound when the reaction zone is moving in the direction of the discharge side.

Abstract translation: 一种使用内部气相沉积工艺制造用于光纤的初级预制棒的方法，包括以下步骤：i）提供具有供给侧和排出侧的中空玻璃基板管，ii）至少部分中空玻璃基板 通过炉子管，iii）通过其供应侧将掺杂或未掺杂的玻璃形成气体供应到中空玻璃基底管的内部，iv）产生反应区，其中在内部发生玻璃沉积的条件 并且v）沿着中空玻璃基板管的长度在位于供给侧附近的反转点与位于中空玻璃基板的排出侧附近的反转点之间前后移动反应区域 管，其中在步骤v）的至少一部分期间，当反应区沿盘的方向移动时，气流包括第一浓度的含氟化合物 大一边

公开(公告)号：US08017536B2

公开(公告)日：2011-09-13

申请号：US12226861

申请日：2007-09-04

Applicant: Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

Inventor： Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

IPC: C03C3/06 ,  C03B19/06 ,  C03B19/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C4/20 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2203/10 ,  C03C2203/54

Abstract: The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-earth metals in a concentration of 0.1-3% by wt. each (based on the total mass of SiO2 and dopant). Starting from this, to provide a quartz glass component for use in semiconductor manufacture in an environment with etching action, which component is distinguished by both high purity and high resistance to dry etching and avoids known drawbacks caused by co-doping with aluminum oxide, it is suggested according to the invention that the first dopant should be nitrogen and that the mean content of metastable hydroxyl groups of the quartz glass is less than 30 wtppm.

Abstract translation: 本发明从用于半导体制造的石英玻璃的已知组件开始，至少在近表面区域中的该组分表现出第一掺杂剂和第二氧化物掺杂剂的共掺杂，所述第二掺杂剂含有一种或多种稀有金属 - 浓度为0.1-3重量％的矿物金属。 每个（基于SiO 2和掺杂剂的总质量）。 从此开始，为了在具有蚀刻作用的环境中提供用于半导体制造的石英玻璃组分，该组分通过高纯度和高耐干蚀刻性而被区分，并避免了与氧化铝共掺杂引起的已知缺点。 根据本发明建议第一掺杂剂应为氮，并且石英玻璃的亚稳态羟基的平均含量小于30重量ppm。

公开(公告)号：US20080066497A1

公开(公告)日：2008-03-20

申请号：US11630405

申请日：2006-03-30

Applicant: Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

Inventor： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

IPC: C03C3/06 ,  C03B19/14 ,  H01L21/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/09 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/32 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0025 ,  C03C23/006 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2203/54 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  Y02P40/57

Abstract: An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.

Abstract translation: 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其假想温度低于1250℃，在1200℃的温度下其粘度至少为10-13Pa。制备这种石英玻璃的经济方法包括以下方法步骤 ：将SiO 2原料熔化，得到石英玻璃坯料，将SiO 2原料或石英玻璃坯料进行脱水处理，加热SiO _{2 原料或石英玻璃坯料，在含氨气氛中在1050℃至1850℃的范围内的氮化温度，使用石英玻璃的石英玻璃 将玻璃坯料设定为1250℃以下的假想温度，进行表面处理 石英玻璃夹具形成石英玻璃夹具。}

公开(公告)号：US06988380B2

公开(公告)日：2006-01-24

申请号：US10219861

申请日：2002-08-15

Applicant: Wolfgang Neuberger ,  Leonid M. Blinov

Inventor： Wolfgang Neuberger ,  Leonid M. Blinov

IPC: C03B37/018

CPC classification number: C03B37/01426 ,  C03B2201/24 ,  C03C25/1061 ,  H05H2001/4615 ,  Y02P40/57

Abstract: A method is disclosed for the manufacture of optical fiber preforms using plasma enhanced chemical vapor deposition (PECVD). The invention consists of a cylindrical reactor in which material such as flourine-doped silica glass is deposited on a cylindrical silica rod. A furnace for regulating reactor temperature encases the reactor. A microwave generator coupled with a resonator and an H10 waveguide delivers microwave energy to the reactor, producing simultaneously symmetrical excitations in the E010 mode and a plasma surface wave in E01 mode located at the surface of the rod. A microwave plasma is scanned along the length of the rod through a slit in the reactor to deposit a homogeneous film of a desired thickness. The benefits of the present invention over the prior art include increased absorption of delivered power, and the ability to uniformly deposit films such as flourine-doped silica on rods with diameters of up to 30–35 mm and thus produce optical fiber preforms with diameters greater than 40 mm.

Abstract translation: 公开了一种使用等离子体增强化学气相沉积（PECVD）制造光纤预制件的方法。 本发明由圆柱形反应器组成，其中诸如掺杂有掺杂的二氧化硅玻璃的材料沉积在圆柱形二氧化硅棒上。 用于调节反应器温度的炉包装反应堆。 与谐振器和H 10 O波导耦合的微波发生器将微波能量传递到反应器，在E 101模式中产生同时对称的激励，并且在E < SUB> 01 模式位于杆的表面。 沿着杆的长度扫描微波等离子体通过反应器中的狭缝，以沉积所需厚度的均质膜。 本发明相对于现有技术的优点包括增加的输送功率的吸收，以及将直径为30-35mm的棒均匀沉积诸如掺杂二氧化硅的薄膜的能力，从而产生直径更大的光纤预制棒 超过40毫米。

公开(公告)号：US20050199013A1

公开(公告)日：2005-09-15

申请号：US10799147

申请日：2004-03-12

Applicant: Laurent Vandroux ,  Herve Monchoix

Inventor： Laurent Vandroux ,  Herve Monchoix

IPC: C03B37/018

CPC classification number: C03B19/143 ,  C03B19/1469 ,  C03B2201/10 ,  C03B2201/24 ,  C03B2201/28 ,  C03B2201/31 ,  Y02P40/57

Abstract: Methods are provided for forming optical devices, such as waveguides, with minimal defect formation. In one aspect, the invention provides a method for forming a waveguide structure on a substrate surface including forming a cladding layer on the substrate surface, forming a core layer on the cladding layer, depositing an amorphous carbon hardmask on the core layer, forming a patterned photoresist layer on the amorphous carbon hardmask, etching the amorphous carbon hardmask, and etching the core material.

Abstract translation: 提供了用于形成具有最小缺陷形成的光学器件（例如波导）的方法。 一方面，本发明提供了一种在基板表面上形成波导结构的方法，包括在基板表面上形成包覆层，在包层上形成芯层，在芯层上沉积无定形碳硬掩模，形成图案化 无定形碳硬掩模上的光致抗蚀剂层，蚀刻无定形碳硬掩模，并蚀刻芯材。

公开(公告)号：US06847771B2

公开(公告)日：2005-01-25

申请号：US10171337

申请日：2002-06-12

Applicant: James C. Fajardo ,  Michael T. Gallagher ,  James A. West ,  Natesan Venkataraman

Inventor： James C. Fajardo ,  Michael T. Gallagher ,  James A. West ,  Natesan Venkataraman

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/027 ,  C03C13/04 ,  G02B6/02 ,  G02B6/032 ,  G02B6/20

CPC classification number: G02B6/02328 ,  C03B37/0122 ,  C03B37/02781 ,  C03B2201/24 ,  C03B2201/40 ,  C03B2203/14 ,  C03B2203/222 ,  C03B2203/42 ,  C03C13/04 ,  G02B6/02347 ,  G02B6/02357 ,  G02B6/02361 ,  G02B6/02371

Abstract: A microstructured optical fiber is described. The microstructured optical fiber comprises an inner region and an outer region. The inner region includes an inner material and a plurality of holes formed in the inner material. The outer region surrounds the inner region, and includes an outer material. The softening point temperature of the inner material is greater than the softening point temperature of the outer material by at least about 50° C. Microstructured optical fiber preforms and methods for making the microstructured optical fibers are also described. The microstructured optical fiber may be made to have substantially undistorted holes in the inner region.

Abstract translation: 描述了微结构光纤。 微结构光纤包括内部区域和外部区域。 内部区域包括形成在内部材料中的内部材料和多个孔。 外部区域包围内部区域，并且包括外部材料。 内部材料的软化点温度比外部材料的软化点温度高至少约50℃。还描述了微结构化光纤预制件和制造微结构光纤的方法。 微结构化光纤可以在内部区域中具有基本上未失真的孔。

公开(公告)号：US20020152768A1

公开(公告)日：2002-10-24

申请号：US10139940

申请日：2002-05-07

Inventor： Ted A. Loxley ,  John F. Blackmer ,  Klaus-Markus Peters

IPC: C03B008/02

CPC classification number: C03B19/12 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/24

Abstract: Cup-shaped porous silica preforms suitable for manufacture of large 24-inch crucibles used in Czochralski crystal-growing furnaces are produced by a unique electrophoretic casting process using a high-purity aqueous silica slip or slurry having a predetermined particle-size distribution, an average particle size of from 6 to 10 microns and a solids content of from 80 to 85 percent by weight. The slurry contains an electrolyte, such as ammonium hydroxide, has a pH of from 7.5 to 8.5, and can be wet milled at a pH of at least 7 in such manner as to provide the micronized silica particles with excellent electrophoretic mobility, thereby providing a superb process for economical mass production of large pure silica preforms using safe voltages, such as 20 to 40 volts. The electrophoretic casting apparatus can be of the type shown in FIGS. 1 and 2 and includes a permeable porous cup-shaped carbon-graphite mold (2) that serves as a positive anode and an internal reticulate or perforated cathode (3) of similar shape having a thin pervious cover means, such as the shroud 25, to prevent local dilution of the slurry at the cathode.

Abstract translation: 用于制造用于切克劳斯基晶体生长炉的大型24英寸坩埚的杯形多孔二氧化硅预制件通过使用具有预定粒度分布的高纯度水性二氧化硅滑石或浆料的独特的电泳铸造方法生产，平均 粒度为6至10微米，固体含量为80至85重量％。 该浆料含有电解质如氢氧化铵，其pH值为7.5-8.5，并且可以在pH至少为7的条件下进行湿法研磨，以使微粉化的二氧化硅颗粒具有优异的电泳迁移率，从而提供了一种 使用安全电压（例如20至40伏特）大规模生产大型纯二氧化硅预制件的卓越工艺。 电泳铸造装置可以是图1和图2所示的类型。 如图1和图2所示，并且包括用作正阳极的可渗透多孔杯形碳 - 石墨模具（2）和具有类似形状的内部网状或多孔阴极（3），其具有薄的可透过的覆盖装置，例如护罩25， 以防止浆料在阴极处的局部稀释。