-
公开(公告)号:US20170345609A1
公开(公告)日:2017-11-30
申请号:US15595290
申请日:2017-05-15
CPC分类号: H01J11/52 , H01J9/385 , H01J11/20 , H01J11/46 , H01J21/02 , H01J21/18 , H01J37/3178 , H01J37/32724 , H01J37/32816 , H01J37/32834 , H01J41/12 , H01J41/16
摘要: A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.
-
公开(公告)号:US20160071686A1
公开(公告)日:2016-03-10
申请号:US14482761
申请日:2014-09-10
发明人: Eric D. Hermanson , Robert J. Mitchell , Steven Anella , Jeffrey Charles Blahnik , William T. Weaver , Michael Rohrer , James P. Buonodono
IPC分类号: H01J37/18 , H01J37/20 , H01J37/317
CPC分类号: H01J37/20 , H01J21/18 , H01J37/3171 , H01J2237/2005 , H01J2237/202 , H01L21/18
摘要: An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled to a drive mechanism adapted to selectively move the carriage along the shaft. A platen assembly can be coupled to the carriage, and a linkage conduit can extend between a side wall of the enclosure and the carriage. The linkage conduit can include a plurality of pivotably interconnected linkage members that define a contiguous internal volume that is sealed from the process chamber. The contiguous volume can be held at a desired vacuum pressure separate from the vacuum environment of the process chamber.
摘要翻译: 一种离子注入装置,其包括限定处理室的外壳,可滑动地安装在处理室内的轴上并联接到适于沿着轴选择性地移动托架的驱动机构的托架。 压板组件可以联接到滑架,并且连接导管可以在外壳的侧壁和滑架之间延伸。 连接导管可以包括多个可枢转地互连的连接构件,其限定了与处理室密封的连续内部容积。 连续体积可以保持在与处理室的真空环境分开的期望的真空压力下。
-
公开(公告)号:US3787747A
公开(公告)日:1974-01-22
申请号:US3787747D
申请日:1972-08-07
申请人: VARIAN ASSOCIATES
发明人: SCOTT A
IPC分类号: H01J21/18 , H01J23/087 , H01J25/34
CPC分类号: H01J21/18 , H01J23/0873
摘要: The periodic magnet structure for a periodically focused beam tube is formed by a single pair of homogeneous slabs of magnetizable material that are permanently magnetized with a pattern of magnetic poles of alternating polarity taken along the direction of the beam path. In a sheet beam tube of preferred geometry, a pair of ceramic slabs are disposed to straddle the sheet beam and the internal planar faces of the ceramic slabs have circuits printed thereon for: electrical connections to all elements, beam forming electrodes, microwave interaction structure, edge focusing electrodes, and the beam collector electrode structure. The permanently magnetized slabs are disposed external to the vacuum envelope, straddling the printed circuit ceramic slabs, for focusing the beam.
摘要翻译: 用于周期性聚焦的光束管的周期性磁体结构由一对可磁化材料的均匀平板形成,其永久地磁化,沿着光束路径的方向具有交替极性的磁极的图案。 在优选几何形状的片材束管中,一对陶瓷板被设置成跨越片材梁,并且陶瓷板的内部平坦面具有印刷在其上的电路,用于:与所有元件的电连接,波束形成电极,微波相互作用结构, 边缘聚焦电极和束集电极结构。 永久磁化的板坯设置在真空外壳的外部,跨过印刷电路陶瓷板,用于聚焦光束。
-
公开(公告)号:US3660770A
公开(公告)日:1972-05-02
申请号:US3660770D
申请日:1970-04-07
申请人: WILLIAM W SNOW
发明人: SNOW WILLIAM W
摘要: A function generator. An electron tube is provided having a cathode, and an anode coextensive with and spaced from the cathode so as to form a gap therebetween. The anode is at a higher potential than the cathode so as to create an electric field between the anode and the cathode. A means for obtaining an output from the function generator as a desired function of the input to the function generator is also provided. This means includes a means for providing a magnetic field in the gap which is normal to the electric field and further includes means for varying the direction of the magnetic field. The variation in the electric field is obtained by varying the width of the gap in the direction of the longitudinal axis of the tube. The variation in the magnetic field is obtained by varying the intensity of the magnetic field in the direction of the longitudinal axis of the tube. By use of additional magnetic fields or by separating the cathode and anode into distinct portions, or a combination thereof multiple functions may be provided.
摘要翻译: 函数发生器 提供了具有阴极和与阴极共同延伸并与阴极间隔开的阳极以在其间形成间隙的电子管。 阳极处于比阴极更高的电位,以在阳极和阴极之间产生电场。 还提供了用于从函数发生器获得输出作为函数发生器的输入的期望函数的装置。 该装置包括用于在与电场垂直的间隙中提供磁场的装置,还包括用于改变磁场方向的装置。 通过改变管的纵向轴线方向上的间隙的宽度来获得电场的变化。 通过改变管的纵向轴线方向的磁场强度来获得磁场的变化。 通过使用额外的磁场或通过将阴极和阳极分离成不同的部分,或其组合,可以提供多种功能。
-
公开(公告)号:US3366823A
公开(公告)日:1968-01-30
申请号:US53430866
申请日:1966-03-15
申请人: PHILIPS CORP
发明人: DORGELO EDUARD G , FINN JOHN E
CPC分类号: H01J21/18 , H01J19/34 , H01J2893/0003
-
公开(公告)号:US2762944A
公开(公告)日:1956-09-11
申请号:US62566645
申请日:1945-10-30
申请人: CLOGSTON ALBERT M
发明人: CLOGSTON ALBERT M
IPC分类号: H01J21/18
CPC分类号: H01J21/18
-
公开(公告)号:US2468127A
公开(公告)日:1949-04-26
申请号:US51557743
申请日:1943-12-24
申请人: RAYTHEON MFG CO
发明人: SMITH CHARLES G
IPC分类号: H01J21/18
CPC分类号: H01J21/18
-
公开(公告)号:US2461250A
公开(公告)日:1949-02-08
申请号:US63297745
申请日:1945-12-05
申请人: GEN ELECTRIC
发明人: BAILEY FRANCIS M
CPC分类号: H03C3/32 , H01J19/02 , H01J21/14 , H01J21/18 , H01J31/04 , H01J2893/0001 , H01J2893/0029
-
公开(公告)号:US2352657A
公开(公告)日:1944-07-04
申请号:US39725941
申请日:1941-06-09
申请人: TELETYPE CORP
发明人: POTTS LOUIS M
IPC分类号: H01J21/18
CPC分类号: H01J21/18
-
公开(公告)号:US2326677A
公开(公告)日:1943-08-10
申请号:US36230040
申请日:1940-10-22
申请人: ADOLF PERELMANN
发明人: ADOLF PERELMANN
-
-
-
-
-
-
-
-
-