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公开(公告)号：US11714120B2
公开(公告)日：2023-08-01
申请号：US17515145
申请日：2021-10-29
发明人： Tomonori Nakamura , Yoshitaka Iwaki
IPC分类号： G06T7/00 , G01R31/265 , G02B6/32 , G02B26/10
CPC分类号： G01R31/2656 , G02B6/32 , G02B26/105 , G06T7/0004 , G06T2207/30148
摘要： An inspection system includes a light source, a mirror, Galvano mirrors, a casing that holds the mirror and the Galvano mirrors inside and includes an attachment portion for attaching an optical element, and a control unit that controls a deflection angle of the Galvano mirrors, wherein the control unit controls the deflection angle so that an optical path optically connected to a semiconductor device is switched between a first optical path passing through the Galvano mirrors and the mirror, and a second optical path passing through the Galvano mirrors and the attachment portion, and controls the deflection angle so that the deflection angle when switching to the first optical path has been performed and the deflection angle when switching to the second optical path has been performed do not overlap.
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公开(公告)号：US20230226639A1
公开(公告)日：2023-07-20
申请号：US18007808
申请日：2021-06-04
发明人： Takashi KURITA , Takeshi WATARI , Yuki KABEYA , Ryo YOSHIMURA
IPC分类号： B23K26/0622 , B23K26/356 , C21D10/00
CPC分类号： B23K26/0622 , B23K26/356 , C21D10/005
摘要： A processed product manufacturing method includes preparing a workpiece containing metal and forming a plurality of first regions and a second region along a surface of the workpiece by the irradiation of a laser beam. The first regions are applied with a tensile residual stress. In the second region applied with a compressive residual stress, a plurality of irradiation points separated from each other in the surface of the workpiece are irradiated with the laser beam. The first regions are formed to be separated from each other and each of the first regions is surrounded by the second region when viewed from a direction orthogonal to the surface.
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公开(公告)号：US20230223418A1
公开(公告)日：2023-07-13
申请号：US17922803
申请日：2021-01-12
发明人： Jun HIRAMITSU , Mitsuhito MASE , Akihiro SHIMADA , Hiroaki ISHII , Toshinori ITO , Yuma TANAKA
IPC分类号： H01L27/146 , H01L31/107
CPC分类号： H01L27/1463 , H01L31/107
摘要： An optical sensor includes an avalanche multiplication region including a first multiplication region having a first conductive type and a second multiplication region having a second conductive type, each of the first multiplication region and the second multiplication region being formed in a layer shape, a charge collection region having the second conductive type disposed on a first side of the second multiplication region, and a first conductive region having the first conductive type disposed on the first side of the second multiplication region. The second multiplication region has a first portion overlapping the charge collection region in a thickness direction of the first multiplication region and the second multiplication region and a second portion overlapping the first conductive region in the thickness direction. A concentration of impurities in the first portion is higher than a concentration of impurities in the second portion.
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公开(公告)号：US20230222753A1
公开(公告)日：2023-07-13
申请号：US17928992
申请日：2021-06-14
IPC分类号： G06V10/143 , G06T7/70 , G06V10/28 , G06V10/60
CPC分类号： G06V10/143 , G06T7/70 , G06V10/28 , G06V10/60 , G06T2207/10152
摘要： In a sample observation device, an image acquisition unit 6 acquires a plurality of pieces of image data of a sample in a Y-axis direction, and an image generation unit generates luminance image data on luminance of the sample on the basis of the plurality of pieces of image data, binarizes luminance values of each of the plurality of pieces of image data to generate a plurality of pieces of binarized image data, and generates area image data on an existing area of the sample on the basis of the plurality of pieces of binarized image data.
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95.发明公开公开(公告)号：US20230219172A1
公开(公告)日：2023-07-13
申请号：US18014495
申请日：2021-03-29
发明人： Takeshi SAKAMOTO
CPC分类号： B23K26/53 , B23K26/40 , B23K2101/40
摘要： A laser processing device includes: a light source configured to output laser light; a space light modulator for modulating the laser light output from the light source in accordance with a modulation pattern and outputting the modulated laser light; a converging lens for converging the laser light output from the space light modulator to an object, and forming a converging spot on the object; a movement unit for relatively moving the converging spot with respect to the object; and a control unit for relatively moving, while setting a position of the converging spot in a Z direction intersecting with an incident surface of the laser light on the object at a first Z position, the converging spot along a line extended in an X direction along the incident surface by controlling at least the space light modulator and the movement unit.
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公开(公告)号：US20230215989A1
公开(公告)日：2023-07-06
申请号：US18090002
申请日：2022-12-28
发明人： Shota SOMEYA , Takayuki HOSHINO , Shunji SUZUKI
CPC分类号： H01L33/46 , H01L33/20 , H01L25/167 , G01D5/3473
摘要： A light emitting element includes: a substrate; a mesa portion formed on the substrate and including an active layer, a first semiconductor layer, and a second semiconductor layer; a metal layer including a first metal part disposed on a top surface of the mesa portion and connected to the second semiconductor layer and a second metal part formed integrally with the first metal part and extending along a side surface of the mesa portion; an insulating layer formed on the side surface; and a resin layer formed on the insulating layer. The first metal part includes an opening region formed with a light passage opening and a connection region for external connection. The second metal part is formed on the side surface via the insulating layer and the resin layer and overlaps the active layer when viewed in a direction perpendicular to a thickness direction of the substrate.
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公开(公告)号：US20230213446A1
公开(公告)日：2023-07-06
申请号：US18008503
申请日：2021-02-10
IPC分类号： G01N21/64
CPC分类号： G01N21/645 , G01N2201/0636
摘要： A light guide includes a translucent member. The translucent member includes: a light incident surface where light is incident; a light emitting surface provided on a side of the translucent member opposite to the light incident surface and emitting light; a parabolic first mirror surface facing the light incident surface and reflecting the light incident from the light incident surface as parallel light; and a parabolic second mirror surface facing the first mirror surface and the light emitting surface and reflecting the parallel light reflected by the first mirror surface so as to be condensed toward the light emitting surface.
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公开(公告)号：US11693132B2
公开(公告)日：2023-07-04
申请号：US17310819
申请日：2019-12-23
发明人： Mototsugu Sugiyama
IPC分类号： G01T1/20
CPC分类号： G01T1/20188 , G01T1/2002
摘要： A scintillator attachment structure includes an opening formed in a first side wall portion of a housing and a scintillator holder that holds the scintillator and includes a holder portion fitted in the opening. The scintillator holder can be attached to and detached from the housing. While the scintillator holder is attached to the housing, a predetermined angle is formed between the scintillator held by the holder portion protruding from the first side wall portion into the housing and the front surface mirror in the housing.
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公开(公告)号：US20230184681A1
公开(公告)日：2023-06-15
申请号：US17925131
申请日：2021-03-17
发明人： Satoshi YAMAMOTO
IPC分类号： G01N21/64
CPC分类号： G01N21/6456 , G01N21/6452 , G01N2201/103 , G02B21/06
摘要： In this sample observation device, a reference table in which an optimum light amount of planar light at a measurement sensitivity represented by the product of a light amount of the planar light and a scanning speed is set according to the scanning speed is referred to, and the scanning speed of a scanning unit and the optimum light amount of the planar light that is applied to a sample are determined on the basis of the measurement sensitivity selected by a user.
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公开(公告)号：US20230176352A1
公开(公告)日：2023-06-08
申请号：US17924160
申请日：2021-03-17
CPC分类号： G02B21/0032 , G01N21/6456 , G01N2201/06113
摘要： A light irradiation device includes: a light source configured to output light having coherence; a light focusing element having a focusing axis and a non-focusing axis intersecting with the focusing axis and configured to focus the light on a focusing line so as to generate planar light; and an aperture mask having an opening part that limits a part of luminous fluxes of the light transmitted from the light source to the light focusing element. The opening part of the aperture mask has opening edges disposed to extend in a direction along the focusing axis of the light focusing element, and, in a case in which the opening edges are projected onto the focusing line, corresponding projected portions have linear spreads.
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