公开(公告)号：US20060063102A1

公开(公告)日：2006-03-23

申请号：US10536711

申请日：2003-12-01

申请人： Naotaka Kubota ,  Kiyoshi Ishikawa ,  Mitsuru Sato ,  Tasuku Matsumiya

发明人： Naotaka Kubota ,  Kiyoshi Ishikawa ,  Mitsuru Sato ,  Tasuku Matsumiya

IPC分类号： G03C1/76 ,  G03C1/492

CPC分类号： G03F7/32 ,  G03F7/0397 ,  G03F7/325 ,  G03F7/40

摘要： There is provided a positive resist composition which, during resist pattern formation, can prevent the collapse of very fine resist patterns during the drying step following developing. This positive resist composition is used in a resist pattern formation method comprising a step, within the lithography process, for substituting a liquid remaining on the substrate following alkali developing with a critical drying liquid, and then drying this critical drying liquid by causing passage through a critical state. The positive resist composition comprises a resin component (A), which has an alkali-soluble unit content of less than 20 mol %, contains an acid dissociable, dissolution inhibiting group, and displays increased alkali solubility under action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C) for dissolving the components (A) and (B), and moreover, the component (A) comprises a structural unit (a1) containing an acid dissociable, dissolution inhibiting group, a structural unit (a2) containing a lactone unit, and a structural unit (a3) containing a polycyclic group with an alcoholic hydroxyl group.

摘要翻译： 提供了抗蚀剂组合物，其在抗蚀剂图案形成期间可以防止在显影之后的干燥步骤期间非常精细的抗蚀剂图案的塌陷。 该抗蚀剂组合物用于抗蚀剂图案形成方法，该方法包括以下步骤：在光刻工艺中，用临界干燥液代替碱显影后残留在基材上的液体，然后通过使其通过 临界状态。 正型抗蚀剂组合物包含具有小于20摩尔％的碱溶性单元含量的树脂组分（A），其含有酸解离溶解抑制基团，并且在酸的作用下显示出增加的碱溶解度，酸产生剂组分 （A）和（B）成分的有机溶剂（C），（A）成分含有酸解离，抑制溶解的结构单元（a1） 基团，含有内酯单元的结构单元（a2）和含有醇羟基的多环基团的结构单元（a3）。

公开(公告)号：US06992953B2

公开(公告)日：2006-01-31

申请号：US09813898

申请日：2001-03-22

申请人： Mitsuru Sato ,  Junichi Furukawa ,  Kazuo Takahashi ,  Takanori Maeda ,  Hiroshi Nishiwaki ,  Takayuki Nomoto ,  Ikuya Kikuchi

发明人： Mitsuru Sato ,  Junichi Furukawa ,  Kazuo Takahashi ,  Takanori Maeda ,  Hiroshi Nishiwaki ,  Takayuki Nomoto ,  Ikuya Kikuchi

IPC分类号： G11B7/095

CPC分类号： G11B7/1353 ,  G11B7/0901 ,  G11B7/0912 ,  G11B7/094 ,  G11B7/0941 ,  G11B7/0943 ,  G11B7/1381

摘要： A tracking servo apparatus in which reflection light obtained when a laser beam is irradiated onto a recording surface of an optical disc is photoelectrically converted, thereby obtaining a photoelectric conversion signal, a tracking error signal showing a deviation amount of an irradiating position of said laser beam for a track in a disc radial direction on the recording surface is generated by the photoelectric conversion signal, a spherical aberration occurring in an optical system is detected, a level of the tracking error signal is corrected on the basis of the detection result, and the irradiating position of the laser beam is moved in the disc radial direction in accordance with the level-corrected tracking error signal.

摘要翻译： 一种跟踪伺服装置，其中将激光束照射到光盘的记录表面上时获得的反射光被光电转换，从而获得光电转换信号，表示所述激光束的照射位置的偏差量的跟踪误差信号 通过光电转换信号产生在记录表面上的磁盘径向方向上的轨迹，检测出在光学系统中发生的球面像差，根据检测结果校正跟踪误差信号的电平，并且 根据电平校正的跟踪误差信号，激光束的照射位置沿盘径向移动。

公开(公告)号：US20050184323A1

公开(公告)日：2005-08-25

申请号：US11038173

申请日：2005-01-21

申请人： Mitsuru Sato ,  Hirofumi Inoue ,  Masaru Kito

发明人： Mitsuru Sato ,  Hirofumi Inoue ,  Masaru Kito

IPC分类号： H01L27/108 ,  H01L21/8242 ,  H01L27/10

CPC分类号： H01L27/10867

摘要： A semiconductor device includes semiconductor substrate, a trench capacitor formed in the semiconductor substrate, a cell transistor adjacently formed to the trench capacitor and having a gate electrode formed on the semiconductor substrate and a source/drain region formed in a surface of the semiconductor substrate, an impurity diffusion region formed in the semiconductor substrate so as to be electrically connected between the trench capacitor and the source/drain region, and a Ge inclusion region formed between the impurity diffusion region and the trench capacitor.

摘要翻译： 半导体器件包括半导体衬底，形成在半导体衬底中的沟槽电容器，与沟槽电容器相邻形成并具有形成在半导体衬底上的栅极电极和形成在半导体衬底的表面中的源极/漏极区域的单元晶体管， 形成在半导体衬底中以便电连接在沟槽电容器和源极/漏极区域之间的杂质扩散区域和形成在杂质扩散区域和沟槽电容器之间的Ge包含区域。

公开(公告)号：US20050130056A1

公开(公告)日：2005-06-16

申请号：US10501459

申请日：2003-11-28

申请人： Toshiyuki Ogata ,  Kotaro Endo ,  Hiromitsu Tsuji ,  Masaaki Yoshida ,  Hideo Hada ,  Ryoichi Takasu ,  Mitsuru Sato

发明人： Toshiyuki Ogata ,  Kotaro Endo ,  Hiromitsu Tsuji ,  Masaaki Yoshida ,  Hideo Hada ,  Ryoichi Takasu ,  Mitsuru Sato

IPC分类号： C08F16/24 ,  C08F20/22 ,  G03F7/004 ,  G03F7/039 ,  H01L21/027 ,  G03C1/494

CPC分类号： G03F7/0046 ,  C08F20/22 ,  G03F7/0397 ,  Y10S430/108

摘要： Provided are a polymer compound having high transparency for use in a photoresist composition for microfabrication of the next generation, a resist composition using the polymer compound as a base polymer, and a dissolution inhibitor agent composed of the polymer compound. To ensure etching resistance, an alicyclic group is introduced into a side chain portion. Hydrogen atoms on the ring of the alicyclic group are highly fluorinated to ensure transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm−1. As the alicyclic group, a polycyclic group is preferably used. Hydrogen atoms are highly fluorinated by preferably substituting all hydrogen atoms on the ring by fluorine atoms, that is, forming a perfluoroalicyclic group. The resist composition is formed by using the polymer compound as a base polymer and further, the dissolution inhibitor agent is formed of the polymer compound.

摘要翻译： 提供了用于下一代微细加工的光致抗蚀剂组合物中使用的高透明性的高分子化合物，使用该高分子化合物作为基础聚合物的抗蚀剂组合物和由该高分子化合物构成的溶解抑制剂。 为了确保耐蚀刻性，将脂环族基团引入侧链部分。 脂环族基团上的氢原子被高度氟化，以确保由等于或小于3.0μm的吸附系数表示的157纳米波长的透明度。 作为脂环基，优选使用多环基。 通过优选用氟原子代替环上的所有氢原子，即形成全氟环脂基，氢原子被高度氟化。 抗蚀剂组合物通过使用高分子化合物作为基础聚合物形成，并且该溶解抑制剂由高分子化合物形成。

公开(公告)号：US06885616B2

公开(公告)日：2005-04-26

申请号：US09765306

申请日：2001-01-22

申请人： Ikuya Kikuchi ,  Takanori Maeda ,  Mitsuru Sato

发明人： Ikuya Kikuchi ,  Takanori Maeda ,  Mitsuru Sato

IPC分类号： G11B7/00 ,  G11B7/09 ,  G11B7/125 ,  G11B7/135

CPC分类号： G11B7/1353 ,  G11B7/0908 ,  G11B7/0943 ,  G11B7/1369 ,  G11B7/1378 ,  G11B7/1381 ,  G11B7/13925 ,  G11B2007/0006

摘要： A phase device for providing a phase difference between an inner radius portion and an outer radius portion of a light beam which is emitted from a light source is provided in an optical path between the light source of an optical pickup apparatus and an objective lens. The light beam to which the phase difference has been provided is converged by the objective lens and irradiated to an optical disc. An interference of an inner radius portion and an outer radius portion of the returning light beam caused when the light beam is diffracted by the optical disc with ±1 primary diffracted light caused by the diffraction is suppressed. Therefore, an intensity fluctuation of the returning light beam caused by the interference is suppressed. A spherical aberration error showing a thickness error of the optical disc and a focusing error having a high linearity can be detected with high precision on the basis of the returning light. A numerical aperture of the objective lens, consequently, can be increased, high density information recording and information reproduction can be performed, and further, an optical pickup apparatus and an information recording and/or reproducing apparatus each having compatibility are realized.

摘要翻译： 在光拾取装置的光源和物镜之间的光路中设置用于提供从光源发射的光束的内半径部分和外半径部分之间的相位差的相位装置。 已经提供了相位差的光束被物镜会聚并照射到光盘。 抑制由衍射引起的±1次衍射光使光束被光盘衍射时引起的返回光束的内径部和外径部的​​干涉。 因此，抑制由干涉引起的返回光束的强度波动。 可以基于返回光以高精度检测出表示光盘的厚度误差的球面像差误差和高线性度的聚焦误差。 因此，可以增加物镜的数值孔径，可以执行高密度信息记录和信息再现，并且还实现了具有兼容性的光学拾取装置和信息记录和/或再现装置。

公开(公告)号：US20050041541A1

公开(公告)日：2005-02-24

申请号：US10921836

申请日：2004-08-20

申请人： Kiyoshi Tateishi ,  Kazuo Takahashi ,  Mitsuru Sato ,  Ichiro Sugai

发明人： Kiyoshi Tateishi ,  Kazuo Takahashi ,  Mitsuru Sato ,  Ichiro Sugai

IPC分类号： G11B7/085 ,  G11B7/00 ,  G11B7/09

CPC分类号： G11B7/08511 ,  G11B7/0945 ,  G11B2007/0013

摘要： An optical pickup is provided for preventing an objective lens from colliding with an optical recording medium at the stage of initial adjustments. The optical pickup device comprises a servo circuit, and a lens driver for driving an objective lens. In the servo circuit, a drive signal generator supplies the lens driver with one of a first focus drive signal for moving the objective lens in a direction closer to an information recording layer, and a second focus drive signal for moving the objective lens in a direction away from the information recording layer. A controller in a timing generator switches a signal supplied to the lens driver from the first focus drive signal to the second focus drive signal when the level changes by a predetermined range or more in a servo signal which is generated during a period in which the first focus drive signal is being supplied to the lens driver.

摘要翻译： 提供了一种用于在初始调整阶段防止物镜与光记录介质碰撞的光拾取器。 光学拾取装置包括伺服电路和用于驱动物镜的透镜驱动器。 在伺服电路中，驱动信号发生器向透镜驱动器提供用于使物镜沿更靠近信息记录层的方向移动的第一聚焦驱动信号和用于使物镜沿方向移动的第二聚焦驱动信号 远离信息记录层。 定时发生器中的控制器在第一聚焦驱动信号中提供给镜头驱动器的信号切换到第二聚焦驱动信号，当电平在伺服信号中改变预定范围或更大时，该伺服信号是在第一 聚焦驱动信号被提供给镜头驱动器。

公开(公告)号：US20050036052A1

公开(公告)日：2005-02-17

申请号：US10895595

申请日：2004-07-21

申请人： Katsunori Kokubun ,  Mitsuru Sato

发明人： Katsunori Kokubun ,  Mitsuru Sato

IPC分类号： H01L21/28 ,  H01L21/339 ,  H01L27/14 ,  H01L27/146 ,  H01L27/148 ,  H01L29/762 ,  H01L31/10 ,  H04N5/335

CPC分类号： H01L29/66946 ,  H01L21/28247 ,  H01L27/14689 ,  H01L27/14806

摘要： A solid-state image pickup device is constructed in which a charge transfer portion is provided on one side of a light-receiving sensor portion, the charge transfer portion is composed of charge transfer electrodes 2A, 2B of a plurality of layers, sidewall insulating layers 11, 8 being formed on the side surfaces of the charge transfer electrodes 2A, 2B of the respective layers of the charge transfer electrodes of a plurality of layers. A method of forming the above-described solid-state image pickup device manufacturing method comprises the process for forming the charge transfer electrodes 2A, 2B and the process for forming an insulating film on the whole surface and forming the sidewall insulating layers 11, 8 on the side surfaces of the charge transfer electrodes 2A, 2B of the respective layers by effecting etch-back process on this insulating film. It is possible to provide the solid-state image pickup device having the structure in which the charge transfer electrode can be suppressed from being reduced in size due to oxidation caused when the interlayer insulators are formed on the charge transfer electrodes and in which the number of the pixels of the solid-state image pickup device can be increased and the solid-state image pickup device can be increased in density and a manufacturing method of such solid-state image pickup device.

摘要翻译： 一种固态摄像装置，其中在光接收传感器部分的一侧设置电荷转移部分，电荷转移部分由多层的电荷转移电极2A，2B组成，侧壁绝缘层 11,8形成在多层电荷转移电极的各层的电荷转移电极2A，2B的侧表面上。 形成上述固态图像拾取器件制造方法的方法包括形成电荷转移电极2A，2B的工艺和在整个表面上形成绝缘膜的工艺，并将侧壁绝缘层11,8形成在 通过对该绝缘膜进行回蚀处理，各层的电荷转移电极2A，2B的侧表面。 可以提供具有这样的结构的固态摄像装置，其中可以抑制电荷转移电极在电荷转移电极上形成层间绝缘体时由于氧化引起的尺寸减小， 可以增加固态图像拾取装置的像素，并且可以提高固态图像拾取装置的密度和这种固态图像拾取装置的制造方法。

公开(公告)号：US06791700B2

公开(公告)日：2004-09-14

申请号：US10448120

申请日：2003-05-30

申请人： Katsuyuki Omura ,  Kunikazu Tsuda ,  Mitsuru Sato

发明人： Katsuyuki Omura ,  Kunikazu Tsuda ,  Mitsuru Sato

IPC分类号： G01B1114

CPC分类号： G06F3/0423 ,  G06F3/0428 ,  G06F3/0488

摘要： A coordinate inputting/detecting apparatus, for optically detecting a position of a designating device inserted into a flat or substantially flat two-dimensional coordinate inputting/detecting area, and including a coordinate determining device to determine two-dimensional coordinates of the designating device in the area. A distance determining device determines a distance of the designating device from a surface of the area when the designating device is located on or in vicinity to the area. A storing device stores information of the determined coordinates and information of the determined distance. A coordinates change detecting/storing device detects and stores a change of the coordinates information. A distance change detecting/storing device detects and stores a change of the distance information. A state allocating device allocates at least one designating state among designating states of the designating device stored in advance, based upon the coordinate change and distance change information.

摘要翻译： 一种坐标输入/检测装置，用于光学地检测插入到平坦或基本上平坦的二维坐标输入/检测区域中的指定装置的位置，并且包括坐标确定装置，以确定指定装置的二维坐标 区。 距离确定装置确定指定装置距指定装置位于该区域上或附近区域的表面的距离。 存储装置存储确定的坐标的信息和确定的距离的信息。 坐标变化检测/存储装置检测并存储坐标信息的改变。 距离变化检测/存储装置检测并存储距离信息的变化。 基于坐标变化和距离变化信息，状态分配装置在预先存储的指定装置的指定状态中分配至少一个指定状态。

公开(公告)号：US06766624B2

公开(公告)日：2004-07-27

申请号：US10003367

申请日：2001-11-15

申请人： Tokio Shibazaki ,  Yosikatsu Aizawa ,  Mitsuru Sato ,  Kenichi Enda

发明人： Tokio Shibazaki ,  Yosikatsu Aizawa ,  Mitsuru Sato ,  Kenichi Enda

IPC分类号： B65B5700

CPC分类号： B65B13/32 ,  B65B13/18

摘要： A controller in a banding packing machine which can easily correct a shift from the predetermined timing cycle. The controller includes a cam shaft having a plurality of cams, a timing plate which includes a plurality of holes corresponding to rotation positions of the cam shaft, and a detecting means. An inching mode is also disclosed which provides for the manual adjustment of presser members following a step in the rotation of the cam shaft.

摘要翻译： 一种捆扎包装机中的控制器，其可以容易地从预定的定时周期校正偏移。 控制器包括具有多个凸轮的凸轮轴，包括对应于凸轮轴的旋转位置的多个孔的定时板以及检测装置。 还公开了一种微动模式，其提供在凸轮轴的旋转中的步骤之后的按压构件的手动调节。

公开(公告)号：US6015467A

公开(公告)日：2000-01-18

申请号：US859926

申请日：1997-05-21

申请人： Koichi Nagasawa ,  Naomi Kawaguchi ,  Futoshi Shimai ,  Mitsuru Sato ,  Kouji Harada ,  Jun Koshiyama

发明人： Koichi Nagasawa ,  Naomi Kawaguchi ,  Futoshi Shimai ,  Mitsuru Sato ,  Kouji Harada ,  Jun Koshiyama

IPC分类号： B08B3/10 ,  B08B3/12 ,  C11D7/06 ,  C11D7/26 ,  C11D7/32 ,  C11D7/50 ,  G03F7/16 ,  G03F7/42 ,  H01L21/00 ,  B08B1/02 ,  B08B3/08

CPC分类号： C11D7/261 ,  B08B3/10 ,  B08B3/12 ,  C11D7/06 ,  C11D7/3218 ,  C11D7/3281 ,  C11D7/5022 ,  G03F7/162 ,  G03F7/425 ,  H01L21/6708 ,  C11D7/263

摘要： In a method of removing a coating from an edge of a substrate a solvent reservoir is filled with a solvent to dissolve and remove a photoresist film, the solvent includes one of dipropylene glycol monoalkyl ether, a mixture of this ether and an easily volatile organic solvent (boiling point of 75-130.degree. C., vapor pressure of 5-75 mmHg at 20.degree. C.), and an alkaline aqueous solution, an edge of a substrate W is horizontally inserted in the reservoir, and thereafter, the edge of the substrate W is immersed in the solvent for a period of time, so as to dissolve and remove a coating such as photoresist from the edge of the substrate. The solvent may be filled into the solvent reservoir either before or after the edge of the substrate is inserted therein, and the method may further involve aspirating the solvent from the reservoir after the substrate edge has been inserted therein.

摘要翻译： 在从基材的边缘去除涂层的方法中，溶剂储存器填充有溶剂以溶解并除去光致抗蚀剂膜，溶剂包括二丙二醇单烷基醚，该醚和易挥发的有机溶剂的混合物 （沸点75-130℃，20℃蒸气压5-75mmHg）和碱性水溶液，将基材W的边缘水平地插入储存器中，然后将边缘 将衬底W浸入溶剂中一段时间​​，从而从衬底的边缘溶解并除去诸如光致抗蚀剂的涂层。 在将基材的边缘插入其中之前或之后，可以将溶剂填充到溶剂容器中，并且该方法还可以包括在衬底边缘已插入其中之后从储存器吸出溶剂。