摘要:
Provided is a plasma processing apparatus including: an electrostatic chuck configured to hold a substrate inside a vacuum container, a pulse power source configured to apply a pulse having positive and negative polarities as a bias voltage and a controller configured to control the positive and negative polarities of the pulse.
摘要:
An electrostatic chuck protection method includes providing an exposed chuck surface with a protective surface for preventing adherence of foreign materials including a substance exhibiting volatility in a vacuum environment, and removing the protective surface in order to perform a process of forming a substrate electrostatically held on the chuck surface with a surface layer including a substance having volatility in a vacuum chamber. The protective surface may be provided when a low vacuum pumping mode of operation is performed in a vacuum environment surrounding the chuck surface.
摘要:
A position change section of a processing device changes the position of a treatment object, at the time of performing a process by a process section, to correspond to a predetermined position in conformity to the treatment object. An inspection device inspects the occurrence of a defect on the treatment object having been subjected to processes by a plurality of processing devices. Then an analyzing process for specifying in which processing device the defect occurred is carried out based on (i) positional information of the treatment object, in each of the processing devices, and (ii) defect information defected by the inspection device. With this arrangement, during the process of manufacture of treatment objects, it is possible to precisely specify which processing device or processing device group caused the defect, without performing processes such as attaching, to the treatment object, information regarding processing devices which have conducted processes.
摘要:
The present invention relates to an aminopyridine compound represented by the following general formula (I) or a salt thereof and an Syk inhibitor containing the compound or a salt thereof as an active ingredient. Here, X1, X2, X3, Z, Y1, Y2 represent a carbon atom or a nitrogen atom, R, R1, R5, R6 represent a hydrogen atom, an alkyl group, etc., and R7 represents a hydrogen atom, a halogen atom, a nitro group, a cyano group, —CpH2(p-1)(Ra1)(Ra2)—O—Ra3, —C(═O)—Rd1, a 5- or 6-membered saturated heterocyclic group, an aromatic heterocyclic group, —N(Rh1)(Rh2), etc. The aminopyridine compound of the present invention has not only high Syk inhibitory activity but also properties to selectively inhibit Syk.
摘要:
A new and distinct cultivar of Ipomoea plant named ‘Kyuikukan 5’, characterized by its compact and trailing growth habit and cordate-shaped leaves that are light green when developing and becoming dark purple with further development.
摘要:
A new and distinct cultivar of Ipomoea plant named ‘Kyuikukan 4’, characterized by its compact and outwardly trailing growth habit and dark green-colored foliage.
摘要:
A cell growth inhibiting film including a resin and having a porous structure formed at least on its surface, a cell growth inhibiting method including causing the surface of a film including a resin and having a porous structure formed at least on its surface to contact cells to inhibit growth of the cells in the contact area, a medical instrument including a medical instrument substrate and a film including a resin and having a porous structure formed at least on its surface, in which the surface of the medical instrument substrate is entirely or partially covered with the film, and a digestive system stent including a stent substrate and a film including a resin and having a porous structure formed by through-holes with an average pore size of 0.1 to 20 μm and a coefficient of variation in pore size of 30% or less, in which the stent substrate is covered with the film. According to the present invention, a material exhibiting cell growth inhibitory effects without using a physiologically active substance and suitable for forming a medical instrument, and a digestive system stent which secures a digestive system tubular cavity in the body and allows a digestive fluid and digestive enzymes contained therein to pass through, but blocks cancer cells, can be provided.
摘要:
An inverter system which converts DC input into AC output and supplies the AC output to a load such as an FL tube detects change in a circuit current due to anomaly such as discharge without contacting with a current route. Relating to an inverter which converts DC input into AC output and supplies the AC output to a load, change in a circuit current of the inverter is detected through the medium of magnetic flux change due to the change in the circuit current caused by discharge. For example, if change in a current occurs in the circuit current of the inverter by disconnection discharge or ground-fault discharge occurring in a current route including a load of the inverter, magnetic flux change occurs in circuit wiring and a space of a core gap of a transformer of the inverter. The change in the circuit current is detected through the medium of the magnetic flux change without contacting with the circuit wiring or the transformer.
摘要:
A sheet feeding apparatus main body for containing sheets in the inside thereof includes: a first cover and a second cover which are openable and closable; and a detecting sensor for detecting an opening and closing of the first cover. The detecting sensor does not detect closing of the first cover when the first cover is closed in a state in which the second cover is opened and detects closing of the first cover when the first cover is closed in a state in which the second cover is closed.
摘要:
There is provided a method for controlling morphological growth of neurons by specifically controlling the surface configuration of a substrate. There is also provided a neuron culture substrate necessary for application of the method and neurons controlled in morphological growth. The method for culturing neurons include, providing a culture medium and neurons on a cell culture substrate 1 and culturing the neurons in corresponding culture conditions, wherein the culture surface of the cell culture substrate 1 has a plurality of protrusions 4, and the shape, interval or both is controlled to control morphological growth of the neurons.