公开(公告)号：US20210143217A1

公开(公告)日：2021-05-13

申请号：US17121741

申请日：2020-12-14

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L27/24 ,  H01L21/268 ,  H01L21/683 ,  H01L21/762 ,  H01L21/822 ,  H01L21/84 ,  H01L27/06 ,  H01L27/108 ,  H01L27/11 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/12 ,  H01L29/78 ,  H01L29/423 ,  H01L27/22

Abstract: A 3D semiconductor device, the device including: a first level including a single crystal layer, a first metal layer, a second metal layer above the first metal layer, and a third metal layer above the second metal layer, where the second metal layer is significantly thicker than either the third metal layer or the first metal layer, where the third metal layer is precisely aligned to the first metal layer with less than 20 nm misalignment; a second level including a first array of first memory cells, each of the first memory cells include first transistors; a third level including a second array of second memory cells, each of the second memory cells include second transistors, where the second level is above the third level, where the second transistors are self-aligned to the first transistors, being processed following the same lithography step; and periphery circuits connected by the second metal to control the memory cells, where the periphery circuits are either underneath or atop the memory cells.

公开(公告)号：US11004719B1

公开(公告)日：2021-05-11

申请号：US17147320

申请日：2021-01-12

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/82 ,  H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16 ,  H01L23/00 ,  H01L23/367 ,  H01L25/065 ,  H01L25/00

Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level; and performing a bonding of a fourth level above the third level, where the fourth level includes a second single crystal layer, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source and a drain having a same doping type.

公开(公告)号：US20210134654A1

公开(公告)日：2021-05-06

申请号：US17121726

申请日：2020-12-14

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/762 ,  H01L23/00 ,  H01L21/84 ,  H01L25/16 ,  H01L25/065 ,  G02F1/017 ,  G02B6/12

Abstract: A multi-level semiconductor device, the device including: a first level including integrated circuits; a second level including an electromagnetic waveguide, where the second level is disposed above the first level, where the first level includes crystalline silicon; and an oxide layer disposed between the first level and the second level, where the second level is bonded to the oxide layer, and where the bonded includes oxide to oxide bonds.

公开(公告)号：US20210134646A1

公开(公告)日：2021-05-06

申请号：US17147320

申请日：2021-01-12

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level; and performing a bonding of a fourth level above the third level, where the fourth level includes a second single crystal layer, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source and a drain having a same doping type.

公开(公告)号：US20210125852A1

公开(公告)日：2021-04-29

申请号：US17141453

申请日：2021-01-05

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented, where the second level is bonded to the first level, where the bonded includes oxide to oxide bonds, where the device includes at least a first logic circuit and a second logic circuit, and where the device includes a control function adapted to use the second logic circuit as a redundancy for the first logic circuit so to overcome a fault in the first logic circuit.

公开(公告)号：US10825864B2

公开(公告)日：2020-11-03

申请号：US16409813

申请日：2019-05-11

Applicant: Monolithic 3D Inc.

Inventor： Deepak C. Sekar ,  Zvi Or-Bach

IPC: H01L21/00 ,  H01L27/24 ,  H01L27/22 ,  H01L27/108 ,  H01L21/268 ,  H01L21/683 ,  H01L21/762 ,  H01L21/822 ,  H01L21/84 ,  H01L27/06 ,  H01L27/11 ,  H01L29/78 ,  H01L27/12 ,  H01L27/11578 ,  H01L27/11551 ,  H01L27/11529 ,  H01L29/423 ,  H01L27/11526 ,  H01L27/11573 ,  H01L27/105 ,  H01L45/00

Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer; first transistors overlaying the first single crystal layer; second transistors overlaying the first transistors; and a second level including a second single crystal layer, the second level overlays the second transistors, where the first transistors and the second transistors each includes a polysilicon channel.

公开(公告)号：US20200243423A1

公开(公告)日：2020-07-30

申请号：US16852506

申请日：2020-04-19

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L23/48 ,  H01L27/06 ,  H01L27/088 ,  H01L27/11551 ,  H01L27/108 ,  H01L29/732 ,  H01L27/11526 ,  H01L27/118 ,  H01L29/10 ,  H01L29/808 ,  H01L27/11573 ,  H01L29/66 ,  H01L27/02 ,  H01L27/11578 ,  H01L29/78 ,  H01L21/74 ,  H01L23/544 ,  H01L23/34 ,  H01L23/50

Abstract: A 3D semiconductor device, the device including: a first level including single crystal first transistors, where the first level is overlaid by a first isolation layer; a second level including second transistors, where the first isolation layer is overlaid by the second level, and where the second level is overlaid by a second isolation layer; a third level including single crystal third transistors, where the second isolation layer is overlaid by the third level, where the third level is overlaid by a third isolation layer, and where the first isolation layer and the second isolation layer are separated by a distance of less than four microns.

公开(公告)号：US10665695B2

公开(公告)日：2020-05-26

申请号：US16536606

申请日：2019-08-09

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L29/00 ,  H01L29/12 ,  H01L29/76 ,  H01L29/94 ,  H01L31/00 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119 ,  H01L29/66 ,  H01L23/48 ,  H01L23/34 ,  H01L23/50 ,  H01L27/088 ,  H01L27/06 ,  H01L27/02 ,  H01L29/78 ,  H01L27/108 ,  H01L27/11526 ,  H01L27/11551 ,  H01L27/11573 ,  H01L23/544 ,  H01L21/74 ,  H01L29/10 ,  H01L29/808 ,  H01L29/732 ,  H01L27/118 ,  H01L27/11578 ,  H01L27/24

Abstract: A 3D semiconductor device, the device including: a first level including single crystal first transistors, where the first level is overlaid by a first isolation layer; a second level including single crystal second transistors, where the first isolation layer is overlaid by the second level, and where the second level is overlaid by a second isolation layer; a third level including single crystal third transistors, where the second isolation layer is overlaid by the third level, where the third level is overlaid by a third isolation layer, and where the first isolation layer and the second isolation layer are separated by a distance of less than four microns.

公开(公告)号：US10388568B2

公开(公告)日：2019-08-20

申请号：US15950169

申请日：2018-04-11

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H01L25/065 ,  H01L21/683 ,  H01L29/786 ,  H01L29/78 ,  H01L21/84 ,  G11C29/00 ,  G11C17/06 ,  G11C16/04 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L21/762 ,  H01L23/544 ,  H01L23/36 ,  G11C17/14 ,  H01L21/8238 ,  G11C5/02 ,  G11C5/06 ,  H01L27/1157 ,  H01L27/11578 ,  H03K19/00 ,  G11C13/00 ,  H01L23/00 ,  H01L23/525 ,  H01L23/48 ,  H01L27/24 ,  G11C29/02 ,  G11C8/10 ,  H01L23/367 ,  H01L23/498 ,  G11C17/16

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one first metal layer interconnecting the plurality of first transistors, where the interconnecting includes forming memory peripheral circuits; a plurality of second transistors overlaying the at least one first metal layer; a second metal layer overlaying the plurality of second transistors; a first memory cell overlaying the memory peripheral circuits; and a second memory cell overlaying the first memory cell, where the first memory cell includes at least one of the second transistors, where at least one of the second transistors includes a source, channel and drain, where the source, the channel and the drain have the same dopant type.

公开(公告)号：US20190148234A1

公开(公告)日：2019-05-16

申请号：US16228757

申请日：2018-12-21

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H01L21/8238 ,  G11C17/14 ,  H01L21/683 ,  H01L29/786 ,  H01L29/78 ,  H01L21/84 ,  G11C29/00 ,  G11C17/06 ,  G11C16/04 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L21/762 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36

Abstract: A method for producing a 3D memory device including: providing a first level including a single crystal layer; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; performing additional processing steps to form memory cells within the second level and within the third level, each of the first memory cells include one first transistor, each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source and a drain having the same doping type, the memory is NAND, the first level includes memory peripheral circuits, at least one of the first memory cells is at least partially atop a portion of the peripheral circuits.