摘要:
In certain embodiments of the invention an ion exchange polish pad, which is used for polishing Copper layers formed on a semiconductor substrate, may be conditioned and/or reconditioned to regenerate its binding capacity for cations. Once bound to an ion exchange polish pad, cations for example may be exchanged for protons (H+) by exposing the ion exchange polish pad to a reconditioning medium(s). The exchange of cations with H+ reconditions the ion exchange material of an ion exchange polish pad so it is capable of binding and removing additional cations from a surface. In certain embodiments, a reconditioning head is used to recondition an ion exchange polish pad. A typical reconditioning process comprises elution of bound copper from ion exchange polish pad followed by protonation. Elution of bound copper may be accomplished by exposing an ion exchange polish pad to a strong acid solution, or similar chemical treatments.
摘要:
Embodiments of the invention include methods and apparatus for electrodialytic polishing of various layers formed on semiconductor substrates. In certain embodiments the use of electrodialytic processes in conjunction with chemical mechanical forces to achieve a copper interconnect with a desired level of planarity and process performance. In certain embodiments electrodialytic polishing uses an electrodialytic polish pad, which is an active pad which has copper binding groups provided in its core structure and has an added capability of allowing electrical conductivity. An electrodialytic polish pad allows transfer of cations or anions through a membrane in the presence of an electric field and into a cathodic electrolyte. Under the influence of an electric field the electrodialytic polish pad and/or electrodialytic pads are continuously refreshed to bind cations.
摘要:
A method and apparatus for detecting data strobe errors. A strobe error detection circuit has a strobe input and a counter coupled to the strobe input to count strobe pulses received. The circuit also has a comparator to determine if a strobe error has occurred based on the magnitude of the difference between a first count of strobe pulses and a second count of strobe pulses. In an embodiment, the first count is read from a memory location at a first time and the second count is read at a second time.
摘要:
According to one embodiment of the present invention a method for biasing a body of a transistor. The method includes detecting a voltage applied to a terminal of a transistor and coupling a biasing voltage to the body based upon the detected voltage.
摘要:
A method and apparatus for a strobe glitch protection mechanism for a source synchronous I/O link. One method of the present invention comprises separating a transfer clock having a plurality of transfer clock edges into a pointer path and a timing path. Glitches are filtered from signals on said pointer path. The pointer path and the timing path are coupled to generate latch enable signals to latch data bits.
摘要:
An apparatus and method for debugging a bus including interposing a device that monitors the data transferred between two devices on the bus such that the bus is split into two busses, with data being copied for transmission to a diagnostics device as the data is transferred between the two busses.
摘要:
According to one embodiment of the present invention a method for biasing a body of a transistor. The method includes detecting a voltage applied to a terminal of a transistor and coupling a biasing voltage to the body based upon the detected voltage.
摘要:
An integrated circuit including a performance circuit occupying a first area of an integrated circuit substrate and a protection circuit coupled to the performance circuit and occupying a second area of an integrated circuit substrate separate from the first area. Also, a method of forming an integrated circuit including the steps of: Forming a performance circuit occupying a first area of an integrated circuit substrate, forming a protection circuit occupying a second area of an integrated circuit separate from the first area, and coupling the protection circuit to the performance circuit.
摘要:
The present invention features flat-panel displays having a mosaic of tiles, and methods of constructing and sealing them. Sealing designs are described to maintain appropriate vacuum levels for FEDs, PFPDs and LCDs. The mosaic of tiles forming a flat-panel display may include subassembly tiles, with each consisting of two, unsealed, substantially parallel plates having a structure positioned between them; these are known as s-tiles. The tiles may be enclosed by a cover plate and backplate. Non-permeable material may be deposited on the cover plate and the backplate, with solderable metal overlaid on the non-permeable material. A metallized, non-permeable spacer/connector is also located between the cover plate and backplate for hermetically sealing the perimeter of the display. A set of electrical-interconnection, metal feed-throughs can also be positioned in the non-permeable spacer/connector. A flat-panel display may also be made up of half-tiles (h-tiles), with each including an individual bottom plate with a structure disposed on them. The mosaic of tiles also has a cover plate that is shared in common with all of the h-tiles. This common cover plate for each type of FPD integrates functions such as masking, screening, color filtering, polarizing and interconnecting. Also provided in the invention is a method for testing the seal of the flat-panel display. A simulated cover plate is attached via a polymeric seal, so that a structure enclosed between the two plates may be evacuated. When a gas is applied around the display seal, its leakage rate is measured, so as to locate the site of defects.
摘要:
An electronic communications receiver includes a derived clock signal circuit operable to receive a data signal and to derive a derived clock signal from the received data signal. A separate forwarded clock signal circuit is further operable to receive a forwarded clock signal, and a clock management circuit is operable to receive signals from the derived clock signal circuit and the forwarded clock signal circuit, and to output an output clock signal.