摘要:
An oxide film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas including a source gas containing a film source element and no amino group, a second process gas including an oxidizing gas, and a third process gas including a preliminary treatment gas. A first step includes an excitation period of supplying the third process gas excited by an exciting mechanism, thereby performing a preliminary treatment on the target substrate by preliminary treatment gas radicals. A second step performs supply of the first process gas, thereby adsorbing the film source element on the target substrate. A third step includes an excitation period of supplying the second process gas excited by an exciting mechanism, thereby oxidizing the film source element adsorbed on the target substrate by oxidizing gas radicals.
摘要:
The present invention relates to a polishing apparatus, and a semiconductor manufacturing method using the apparatus. Dressing of a grindstone surface is ground by sizing processing whereby dressing of a tool surface can be done while preventing occurrence of cracks on the grindstone surface which is the cause for occurrence of scratches. Further, flatness of the surface of a dressing tool can be guaranteed because of sizing cutting-in; even if a thick grindstone of a few centimeters is used, the flatness can be maintained to the end; and processing with less in-face unevenness can be always carried out. Therefore, the life of the dressing tool can be greatly extended.Further, the present sizing-dressing is carried out jointly with processing of a wafer to thereby enable improvement of throughput of the apparatus as well as maintenance of a processing rate.The present apparatus and method are effective for planarization of various substrate surfaces having irregularities.
摘要:
The present invention relates to image processing in which an image resolution of input image data is compared to information of predetermined standard resolution, and the image data is judged to determine whether it includes specific information related to copy protection. Whether or not to perform judging is controlled based on the result of the comparison. Because the control technique of the present invention controls whether or not to perform the judgment based on the result of the c comparison, the control technique according to the invention provides an efficient judging processing, since no judgment is performed on low resolution image data which is not prone to counterfeiting.
摘要:
The present invention relates to a polishing apparatus, and a semiconductor manufacturing method using the apparatus. Dressing of a grindstone surface is ground by sizing processing whereby dressing of a tool surface can be done while preventing occurrence of cracks on the grindstone surface which is the cause for occurrence of scratches. Further, flatness of the surface of a dressing tool can be guaranteed because of sizing cutting-in; even if a thick grindstone of a few centimeters is used, the flatness can be maintained to the end; and processing with less in-face unevenness can be always carried out. Therefore, the life of the dressing tool can be greatly extended. Further, the present sizing-dressing is carried out jointly with processing of a wafer to thereby enable improvement of throughput of the apparatus as well as maintenance of a processing rate. The present apparatus and method are effective for planarization of various substrate surfaces having irregularities.
摘要:
A content addressable memory device includes a CAM core having a plurality of words. Each word includes a data field for storing target data and a weight field for storing weight data for use in weighting the target data stored in the data field. Both the data field and the weight field are simultaneously searched, for matching between search key data and the target data stored in the data field and for matching between weight search data used for searching for the weight data and the weight data stored in the weight field, and a search result is output from among the words storing the target data that is matched with the search key data in accordance with the weight of the target data.
摘要:
A digital color image to be processed is inputted at a color image input step, image segments are extracted from the input color image at an image-segment extraction step, and the data of the extracted image segments is created. Next, image-segment components in each extracted image segment are discriminated at an image-segment discrimination step, and each extracted image segment is subjected to zoom processing, which conforms to the discriminated image-segment component, at an adaptive zoom step, thereby creating a zoomed image of the input image. The zoomed image that has been created is displayed, outputted as a hard copy or delivered to a transmission line at a color image output step. Accordingly, a color image in which image segments having different characteristics are mixed can be subjected to excellent processing.
摘要:
An image processing apparatus or an image processing method is arranged to input image data obtained by an image pickup device and an image pickup parameter of the image pickup device used in obtaining the image data, to make a comparison between the image pickup parameter for a target image and the image pickup parameter for another image, and to decide whether or not the target image differs from the other image, according to a result of the comparison.
摘要:
In a contour extraction apparatus and method, states of target pixels and pixels adjacent to the respective target pixels in image data are stored, the target pixel is extracted in the sequence of raster scanning, and a pixel arranging vector in the horizontal direction and in the vertical direction is detected according to the state of the target pixel and pixels adjacent to the target pixel. A state of connection between the pixel arranging vectors is determined, and a contour of the image data is extracted according to the determined state of connection between the pixel arranging vectors.
摘要:
The contours of openings of a solder resist defining exposed portions of electrode pads and the contours of openings of the solder resist defining the contours of register or patterns are simultaneously formed by photolithography using the same mask pattern. As a result, the patterns for registration can be easily formed on a main board or circuit boards. Also, it is possible to increase the positional accuracy of the register or patterns relative to the positions of the electrode pads.
摘要:
The invention relates to a network interface apparatus called a router or the like which is provided in a network system and relays the transmission of a data packet as a bundle of information. In order to know the permission or inhibition of communication of the data packet at a high speed while suppressing an increase in memory capacity, there is provided a coupling management table in which one VLAN ID is allocated to each terminal (each MAC address) and coupling information showing whether the communication from the terminal having a transmitting side VLAN ID to the terminal having a receiving side VLAN ID is permitted (logic “1”) or inhibited (logic “0”) has been stored at each of the coordinate points using the VLAN ID on the transmitting side and the VLAN ID on the receiving side as coordinates.