公开(公告)号：US20060076475A1

公开(公告)日：2006-04-13

申请号：US10533992

申请日：2003-11-07

Applicant: Don Cochran ,  Dennis Bradley ,  Steven Cech ,  Fredrick Awig ,  Terry Graves ,  Thomas Palombo ,  Michael Yoder

Inventor： Don Cochran ,  Dennis Bradley ,  Steven Cech ,  Fredrick Awig ,  Terry Graves ,  Thomas Palombo ,  Michael Yoder

IPC: G01N21/90

CPC classification number: G01N21/909 ,  G01N21/8806 ,  G01N21/9036 ,  G01N2201/0634

Abstract: This application relates to an apparatus and method for automated inspection of formed metal containers. More specifically, it pertains to the use of machine vision systems to identify and correlate manufacturing defects occurring in formed food and beverage containers to specific manufacturing paths or sources of origin (eg., body makers) used in the container forming process. The disclosed invention is enabled by the placement of a machine-readable code on specific portions of the can body during the forming process and the use of illumination exposure techniques.

公开(公告)号：US20050269530A1

公开(公告)日：2005-12-08

申请号：US11188243

申请日：2005-07-22

Applicant: Mark Oldham ,  Howard King ,  Douwe Haga ,  Tracy Ferea

Inventor： Mark Oldham ,  Howard King ,  Douwe Haga ,  Tracy Ferea

IPC: G01N21/64 ,  G01V8/00

CPC classification number: G01N21/76 ,  G01J3/10 ,  G01J3/4406 ,  G01N21/6428 ,  G01N21/645 ,  G01N21/6452 ,  G01N21/6456 ,  G01N2201/062 ,  G01N2201/0627 ,  G01N2201/0633 ,  G01N2201/0634

Abstract: An apparatus for imaging an array of a plurality of features associated with a sample tile. The apparatus can comprise a stage that supports the sample tile in an illumination region, and an illumination source having a plurality of LEDs adapted to emit light. At least a portion of the light can illuminate the illumination region. Additionally, the apparatus can comprise an image collecting device adapted to selectively collect images of either a first signal when the illumination source is illuminating the illumination region, or a second signal absent illumination of the illumination region. The first signal can have wavelengths effectively different from the wavelengths of the portion of the light emitted by the LEDs that illuminates the illumination region.

Abstract translation: 一种用于对与样本瓦片相关联的多个特征的阵列进行成像的装置。 该装置可以包括在照明区域中支撑样品瓦片的平台和具有适于发光的多个LED的照明源。 光的至少一部分可以照亮照明区域。 另外，该装置可以包括图像采集装置，适于当照明源照射照明区域时选择性地收集第一信号的图像，或者不存在照明区域的照明的第二信号。 第一信号可以具有与照亮照明区域的LED发射的光的部分的波长有效地不同的波长。

公开(公告)号：US06970240B2

公开(公告)日：2005-11-29

申请号：US10384995

申请日：2003-03-10

Applicant: Mark F. Oldham ,  Howard G. King ,  Douwe D. Haga ,  Tracy L. Ferea

Inventor： Mark F. Oldham ,  Howard G. King ,  Douwe D. Haga ,  Tracy L. Ferea

IPC: G01N21/64 ,  G01J3/30

CPC classification number: G01N21/76 ,  G01J3/10 ,  G01J3/4406 ,  G01N21/6428 ,  G01N21/645 ,  G01N21/6452 ,  G01N21/6456 ,  G01N2201/062 ,  G01N2201/0627 ,  G01N2201/0633 ,  G01N2201/0634

Abstract: An apparatus for imaging an array of a plurality of features associated with a sample tile. The apparatus includes a stage that supports the sample tile in an illumination region, and an illumination source having a plurality of LEDs adapted to emit light. At least a portion of the light illuminates the illumination region. Additionally, the apparatus includes an image collecting device adapted to selectively collect images of either a first signal when the illumination source is illuminating the illumination region, or a second signal absent illumination of the illumination region. The first signal has wavelengths effectively different from the wavelengths of the portion of the light emitted by the LEDs that illuminates the illumination region.

Abstract translation: 一种用于对与样本瓦片相关联的多个特征的阵列进行成像的装置。 该装置包括在照明区域中支撑样品瓦的台，以及具有适于发光的多个LED的照明源。 至少一部分光照射照明区域。 另外，该装置包括图像采集装置，适于当照明源照射照明区域时选择性地收集第一信号的图像，或者不存在照明区域的照明的第二信号。 第一信号具有与照亮照明区域的由LED发射的光的部分的波长有效不同的波长。

公开(公告)号：US06496272B1

公开(公告)日：2002-12-17

申请号：US09417192

申请日：1999-10-12

Applicant: Mahito Watanabe

Inventor： Mahito Watanabe

IPC: G01B1114

CPC classification number: G01N21/8806 ,  G01N21/95684 ,  G01N2021/8816 ,  G01N2201/062 ,  G01N2201/0634 ,  G01N2201/0636 ,  G01N2201/0644 ,  H05K13/08

Abstract: An illuminator includes: a first cylindrical member with a mirror-like inner surface formed to facilitate light reflection; a flat plate member having an aperture in its center; LEDs with trimmed distal ends and arranged in a circle along the periphery of the aperture; LEDs with trimmed distal ends and arranged in a circle along a circumferential direction of the first cylindrical member so as to be located on a lengthwise middle part of the inner surface of the cylindrical member; a second cylindrical member having an engagement portion engaged with the cylindrical member, LEDs with trimmed distal ends and arranged in a circle along a circumferential direction of the engagement portion; and a ring-shaped semitransparent diffusion plate. The illuminators illuminate a to-be-mounted component with light having a directivity.

Abstract translation: 照明器包括：第一圆柱形构件，其具有形成为有助于光反射的镜面状内表面; 平板部件，其中心具有孔; 具有修剪的远端并且沿着孔的周边布置成圆的LED; 具有修剪的远端的LED，沿着第一圆柱形构件的圆周方向以圆形布置，以位于圆柱形构件的内表面的纵向中间部分上; 第二圆柱形构件，具有与圆柱形构件接合的接合部分，具有修剪的远端的LED沿着接合部分的圆周方向圆形布置; 和环状半透射扩散板。 照明器照亮具有方向性的光的待安装部件。

公开(公告)号：US06263099B1

公开(公告)日：2001-07-17

申请号：US09107432

申请日：1998-06-30

Applicant: Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

Inventor： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

IPC: G06K900

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/95615 ,  G01N2201/0618 ,  G01N2201/0634

Abstract: A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.

Abstract translation: 一种用于以高分辨率检查被检查物体上的图案的微细缺陷的图案检测方法及其装置以及以高产率制造半导体晶片等半导体基板的半导体基板的制造方法和系统。 通过将通过物镜的环形照明照射到安装在台架上的晶片上，检查被检查物体上的微细图案，晶片上具有微细精细图案。 照明光可以根据在物镜的光瞳上检测到的图像而被圆形或椭圆偏振并且被控制，并且通过检测来自晶片的反射光来获得图像信号。 将图像信号与参考图像信号进行比较，并且检测出显示不一致的图案的一部分作为缺陷，从而同时以高分辨率检测微细微图案或微细图案上的缺陷。 此外，通过分析缺陷的原因和在图案上发生的缺陷因素来控制生产线的工艺条件。

公开(公告)号：US20240344975A1

公开(公告)日：2024-10-17

申请号：US18751514

申请日：2024-06-24

Applicant: Instrument Systems GmbH

Inventor： Elisabeth BOTHSCHAFTER ,  Ferdinand DEGER ,  Markus ESTERMANN ,  Reto HÄRING ,  Christoph KAPPEL ,  Jürgen NEUMEIER ,  Roland SCHANZ ,  Christof THALHAMMER

IPC: G01N21/31 ,  G01N21/25 ,  G06T7/90

CPC classification number: G01N21/31 ,  G01N21/251 ,  G06T7/90 ,  G01N2201/06 ,  G01N2201/0634 ,  G06T2207/10024 ,  G06T2207/20021

Abstract: The disclosure relates to an imaging system which is designed for two-dimensional, spatially resolved measurement of radiometric and/or photometric measured variables, for example the color coordinates of light emitted by a test object. An image sensor is provided for receiving a first part of the light and for generating a two-dimensional digital image of the light emission of the test object. A measuring unit receives a second part of the light and detects radiometric and/or photometric measured variables for different measuring spots or measuring angles. A computing unit transforms the image values of at least a few image points of the generated image, the transformation taking into account the measured variables detected for the measuring spots or measuring angles. The disclosure provides a system which is improved in relation to the prior art. For example, determining the color coordinates when measuring displays with spatially inhomogeneous spectral emission is more precise than in the prior art. The disclosure comprises an imaging spectrometer which is able to determine the measured variables separately for each measuring spot or measuring angle. Alternatively, two or more measuring units can be provided, a measuring unit being associated with each measuring spot or measuring angle. The disclosure also relates to a method for two-dimensional, spatially resolved measurement of radiometric and/or photometric measured variables, for example the color coordinates of light, which uses such an imaging system.

公开(公告)号：US12092570B2

公开(公告)日：2024-09-17

申请号：US17802695

申请日：2021-02-26

Applicant: THE UNIVERSITY OF TOKYO

Inventor： Yohei Kobayashi ,  Shuntaro Tani ,  Hiroharu Tamaru

IPC: G01N21/3504 ,  G01N33/00

CPC classification number: G01N21/3504 ,  G01N33/0027 ,  G01N2201/0634

Abstract: A configuration of the present disclosure specifies a signal point of a specific component and a background point, based on time series two-dimensional spectroscopic image data of a gas; calculates a correlation coefficient between a time series detection signal at the signal point and a time series detection signal at the background point; and generates a time series detection signal of the specific component, based on a corrected time series detection signal obtained by subtracting a product of the correlation coefficient and the time series detection signal at the background point from the time series detection signal at the signal point.

公开(公告)号：US12085509B2

公开(公告)日：2024-09-10

申请号：US17793957

申请日：2021-01-22

Applicant: AquaRealTime, Inc.

Inventor： Christopher Lee

IPC: G01N21/64

CPC classification number: G01N21/645 ,  G01N2201/0634

Abstract: The disclosure describes systems, methods, and apparatuses for monitoring fluorescent peaks using a fluorometer, where the fluorometer comprises an instrument assembly, a circuit assembly, a casing, and a window set into the casing, wherein at least a portion of the instrument assembly is submerged within a liquid and above an analyte workspace; a buoy assembly; one or more emission sources electrically coupled to the circuit assembly, the emission sources configured to emit light in one or more frequencies or wavelength bands; a prism arranged in contact with the window, the prism configured to direct emissions from the emission sources towards the analyte workspace, the prism including at least one angled surface; at least one photosensor positioned above the window and configured to detect fluorescence emissions of analytes in the analyte workspace; and a filter array positioned between the window and the photosensor.

公开(公告)号：US12073556B2

公开(公告)日：2024-08-27

申请号：US17722031

申请日：2022-04-15

Applicant: SK hynix Inc.

Inventor： Jeong Ok Park

IPC: G06T7/00 ,  G01N21/95 ,  H01L21/67

CPC classification number: G06T7/001 ,  G01N21/9501 ,  H01L21/67196 ,  H01L21/67288 ,  G01N2201/0634 ,  G06T2207/30148

Abstract: A defect inspection system may include an information-obtaining module and a defect inspection module. The information obtaining module may be arranged over a transferring apparatus to continuously photograph a surface of a substrate transferred by the transferring apparatus. The defect inspection module may generate an image signal based on information of the substrate provided from the information-obtaining module. The defect inspection module may compare the image signal with a reference to detect a defect of the substrate.

公开(公告)号：US12019014B2

公开(公告)日：2024-06-25

申请号：US17812512

申请日：2022-07-14

Applicant: Thermo Electron Scientific Instruments LLC

Inventor： William Robert Keefe ,  Gang Feng ,  Min Yan ,  William Bayer ,  Peter Steinberg

IPC: G01N21/35 ,  G01L1/22 ,  G01N21/3563

CPC classification number: G01N21/3563 ,  G01L1/22 ,  G01N2201/0634

Abstract: An optical measurement system measurement system for examining a sample. The measurement system comprises an internally reflective element, a stage, an optical assembly, a chassis, and a sensor. The internally reflective element has a contact surface. The stage is positioned below the internally reflective element. The stage and the internally reflective element are configured to apply a force to the sample. The optical assembly comprises a light source and a light detector. The optical assembly is configured to scan the sample by directing source light from the light source towards the contact surface and detecting source light optically interacting with the contact surface by the light detector. The chassis is configured to support the optical assembly and the internally reflective element. The sensor is mounted to the chassis and configured to detect the force applied to the sample by the internally reflective element and the stage.