Abstract:
A CAM testing procedure detects storage logic faults, comparison logic faults, and faults caused by interactions between the storage and comparison logic for both single port and dual port CAM's. To uncover faults in the storage logic, a series of read and write operations are performed, either using a standard test sequence, such as the March C algorithm, or any other desired test sequence. The CAM test, however, intermixes comparison operations with the read and write operations to uncover faults in the comparison logic. For dual port memories, the test sequence comprises executing comparison operations concurrently with the read and/or write operations, thus revealing faults between the storage and comparison logic. For single port memories, the test sequence comprises performing a comparison operation following the read/write operations at each address, immediately verifying the comparison logic at each address.
Abstract:
The present invention provides a method of forming a ruthenium seed layer on a substrate comprising the steps of introducing a ruthenium-containing compound into a CVD apparatus; introducing oxygen into the CVD apparatus; maintaining an oxygen rich environment in the process chamber for the initial formation of a ruthenium oxide seed layer; vaporizing the ruthenium-containing compound; depositing the ruthenium oxide seed layer onto the substrate by chemical vapor deposition; and annealing the deposited ruthenium oxide seed layer in a gas ambient forming a ruthenium seed layer. Also provided is a method of depositing a ruthenium thin metal film using a metalorganic precursor onto a CVD ruthenium seed layer by metalorganic chemical vapor deposition.
Abstract:
The present invention provides a method of depositing ruthenium films on a substrate via liquid source chemical vapor deposition wherein the source material is liquid at room temperature and utilizing process conditions such that deposition of the ruthenium films occurs at a temperature in the kinetic-limited temperature regime. Also provided is a method of depositing a thin ruthenium film on a substrate by liquid source chemical vapor deposition using bis-(ethylcyclopentadienyl) ruthenium by vaporizing the bis-(ethylcyclopentadienyl) ruthenium at a vaporization temperature of about 100-300° C. to form a CVD source material gas, providing an oxygen source reactant gas and forming a thin ruthenium film on a substrate in a reaction chamber using the CVD source material gas and the oxygen source reactant gas at a substrate temperature of about 100-500° C.
Abstract:
A method and apparatus for performing sand control using fracturing is described. A curve is defined that correlates the percentage of flow through out-of-phase perforations (those perforations not aligned with fractures) with the fracture conductivity over formation permeability. Given a desired production flow, formation conductivity may be defined. This allows the well operator to perform the proper fracturing operation to achieve the desired fracture conductivity. Alternatively, after a well has been fractured, and sand production is observed, a critical flow rate and the corresponding drawdown pressure can be calculated to prevent sand production.
Abstract:
In a method for determining a data value for a target pixel in a destination image based on data values for pixels in a source image, with the destination image being scaled relative to the source image, calculating a position in the source image based on position of a target pixel in the destination image, testing the presence of a diagonal gradient in the source image at the position determined in the calculating step, the testing step testing for the presence of a diagonal gradient by reference to values of pixels in the source image that surround the position calculated in the calculating step, responsive to the presence of a diagonal gradient in the testing step, calculating a data value for the target pixel based on interpolation of data values for diagonally-adjacent pixels in the source image, and responsive to the absence of a diagonal gradient in the testing step, calculating a data value for the target pixel based on interpolation of data values for at least all four surrounding pixels in the source image.
Abstract:
A method of depositing titanium nitride by chemical vapor deposition in a chamber having several design features directed to the conductive nature of titanium nitride, particularly when a plasma treatment step is performed after the thermal deposition of the film. Preferably, during the post-deposition plasma treatment, RF power is applied only to the showerhead counter-electrode and none to the pedestal supporting the wafer, thereby preventing charging of the wafer.
Abstract:
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.
Abstract:
The invention provides transgenic non-human animals and transgenic non-human mammalian cells harboring a transgene encoding an APP polypeptide comprising the Swedish mutation.
Abstract:
The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 Å/minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for bottom powered RF capability allows PECVD deposition at a temperature of at least 400° C. for more efficient plasma treatment. A thermal choke isolates the heater from its support shaft, reducing the thermal gradient across the heater to reduce the risk of breakage and improving temperature uniformity of the heater. A deposition system incorporates a flow restrictor ring and other features that allow a 15 liters/minute flow rate through the chamber with minimal backside deposition and minimized deposition on the bottom of the chamber, thereby reducing the frequency of chamber cleanings, and reducing clean time and seasoning. Deposition and clean processes are also further embodiments of the present invention.
Abstract:
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.