公开(公告)号：US5343602A

公开(公告)日：1994-09-06

申请号：US4396

申请日：1993-01-14

Applicant: Horst Plankenhorn

Inventor： Horst Plankenhorn

IPC: G01P15/125 ,  G01P15/08 ,  H01G5/16

CPC classification number: B81B7/007 ,  G01P15/0802 ,  B81B2201/0235 ,  G01P2015/0828 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/4979 ,  Y10T29/49792

Abstract: A process for separating a glass-silicon-glass layer package wherein the glass-silicon-glass layer package is produced at a minimum process cost and is constructed from a plurality of acceleration sensors constructed with micro-mechanical structure techniques. At the same time, dirt is to be prevented from entering the acceleration sensors and the connection contacts are to be freed automatically. Separation is effected substantially by crosswise cutting and subsequent breaking. In order to prevent an "opening" of the acceleration sensors when cutting in one direction, i.e. transversely relative to the flexural resonators, and to achieve a defined breaking, one glass disk is cut until a predetermined breaking point is reached and the other glass disk is severed in a parallel plane. An intermediate layer which surrounds the connection in a U-shaped manner, serves as a blocking layer arranged between the two dividing planes and impedes a bonding of the glass disk and the silicon disk.

Abstract translation: 一种用于分离玻璃 - 硅 - 玻璃层包装的方法，其中玻璃 - 硅 - 玻璃层包装以最小的工艺成本生产，并且由多个由微机械结构技术构成的加速度传感器构成。 同时，防止灰尘进入加速度传感器，并且连接触点将被自动释放。 基本上通过横向切割和随后的断裂实现分离。 为了防止在一个方向（即相对于弯曲谐振器横向）切割时加速度传感器的“打开”，并且为了实现定义的断裂，一个玻璃盘被切割直到达到预定的断裂点，另一个玻璃盘 在平行的平面上被切断。 以U形方式围绕连接的中间层用作布置在两个分割平面之间的阻挡层，并阻止玻璃盘和硅盘的接合。

公开(公告)号：US5331853A

公开(公告)日：1994-07-26

申请号：US823102

申请日：1992-01-21

Applicant: Rand H. Hulsing, II

Inventor： Rand H. Hulsing, II

IPC: F02G1/044 ,  F16L37/24 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/18 ,  G01P9/04

CPC classification number: G01C19/5719 ,  F02G1/044 ,  F02G1/0445 ,  F16L37/24 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/18 ,  G01P2015/0828

Abstract: A sensor (10) is disclosed for measuring the acceleration and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).

Abstract translation: 公开了一种用于测量移动体的加速度和角度旋转速率并且从硅衬底（16）微加工的传感器（10）。 第一和第二加速度计（32a和b）从硅衬底（16）微加工，每个具有力感测轴（38），并且沿其力感测轴线（38）产生运动体的加速度的输出信号。 第一和第二加速度计（32a和b）安装在基板（16）内以沿着振动轴线（41）移动。 第一和第二加速度计（32a和b）被振动或抖动以增加来自第一和第二加速度计（32a和b）的输出信号的科里奥利分量。 将预定频率的正弦驱动信号施加到设置在每个加速度计上的导电路径（92）。 此外，磁通被引导以穿过每个导电路径（92），由此磁通和通过其的驱动信号的相互作用引起期望的抖动运动。 在硅衬底（16）内形成连接件（72）并连接到每个加速度计（32a和b），由此赋予一个运动的运动导致施加到另一个加速度计（32）的相似但相反的运动。 此外，单一磁体（20）及其相关联的磁通路组件将磁通量通过形成在硅衬底（16）内的第一和第二加速度计（32a和b）引导并聚焦。

公开(公告)号：US5289719A

公开(公告)日：1994-03-01

申请号：US791940

申请日：1991-11-13

Applicant: Bert D. Egley ,  Scott D. Orlosky

Inventor： Bert D. Egley ,  Scott D. Orlosky

IPC: G01P1/00 ,  G01P15/097 ,  G01P15/10 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P1/006 ,  G01P2015/0828 ,  Y10S73/01

Abstract: Accelerometer having a frame, a proofmass, one or more force sensitive transducers, and a strut interconnecting the transducers with the proofmass and the frame so that forces are applied to the transducers in accordance with movement of the proofmass along the sensitive axis. The transducers and the strut have similar thermal expansion properties and are arranged in such manner that they can expand together with changes in temperature independently of the frame and the proofmass without imposing any significant strain on the transducers. In certain disclosed embodiments, the transducers are formed as a unitary planar structure from a single piece of crystalline quartz material, and the strut is formed of the same material.

Abstract translation: 加速度计具有框架，校样，一个或多个力敏感换能器，以及将换能器与校样和框架相互连接的支柱，以便根据校验物沿着敏感轴的运动将力施加到换能器。 传感器和支柱具有类似的热膨胀性质，并且以这样的方式布置，使得它们可以随着温度变化而独立于框架和校样物膨胀，而不会在换能器上施加任何显着的应变。 在某些公开的实施例中，换能器由单块结晶石英材料形成为整体平面结构，支柱由相同的材料形成。

公开(公告)号：US5279162A

公开(公告)日：1994-01-18

申请号：US848693

申请日：1992-03-09

Applicant: Katsuhiko Takebe ,  Mizuho Doi ,  Hiroyasu Takehara ,  Satoshi Hiyama ,  Masanobu Urabe

Inventor： Katsuhiko Takebe ,  Mizuho Doi ,  Hiroyasu Takehara ,  Satoshi Hiyama ,  Masanobu Urabe

IPC: G01P15/08 ,  G01P15/12 ,  G01L9/00 ,  H01L29/84

CPC classification number: G01P15/123 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L2224/48091 ,  H01L2924/12032 ,  H01L2924/13091 ,  Y10S73/04

Abstract: This invention relates to a semiconductor sensor for detecting external physical forces, such as acceleration, contact pressures, air pressures, mechanical vibrations, etc. The semiconductor sensor according to this invention is characterized by the use of compound semiconductors of high piezoelectricity, such as GaAs, etc. Conventionally sensors of the cantilever type, diaphragm type, etc. are made of silicon. These prior art sensors have low detection sensitivity, and their characteristics tend to deteriorate. The sensor according to this invention is made of GaAs, which has high piezoelectricity and can retain good characteristics of the semiconductor even at high temperatures and includes a field-effect transistor formed on the GaAs for sensing a stress. The FET is driven by a constant current or a constant voltage so as to detect a change of an electrical characteristic (e.g., threshold characteristic) due to a stress. The structure of the sensor according to this invention enables the sizes of the sensors not only to be diminished but also to reduce the fabrication costs. When a stress is applied to the FET, the transconductance changes, and the temperature changes, consequently the I-V characteristic changes. An a.c. signal biased by a direct current is supplied to the gate of the FET, and a drain current is detected in an a.c. component and a d.c. component so as to detect a temperature concurrently with a detection of a stress.

Abstract translation: 本发明涉及用于检测诸如加速度，接触压力，空气压力，机械振动等外部物理力的半导体传感器。根据本发明的半导体传感器的特征在于使用高压电性的化合物半导体，例如GaAs 等等。常规地，悬臂式，隔膜式等的传感器由硅制成。 这些现有技术的传感器具有低检测灵敏度，并且它们的特性趋于恶化。 根据本发明的传感器由GaAs制成，其具有高压电性，并且即使在高温下也能保持半导体的良好特性，并且包括形成在GaAs上用于感测应力的场效应晶体管。 FET由恒定电流或恒定电压驱动，以便检测由于应力引起的电特性（例如，阈值特性）的变化。 根据本发明的传感器的结构使得传感器的尺寸不仅可以减小，而且可以降低制造成本。 当FET施加应力时，跨导变化，温度变化，I-V特性变化。 一个 通过直流电流偏置的信号被提供给FET的栅极，并且以直流方式检测漏极电流。 组件和直径 以便与应力的检测同时检测温度。

公开(公告)号：US5239866A

公开(公告)日：1993-08-31

申请号：US760395

申请日：1991-09-16

Applicant: Raymond Froidevaux

Inventor： Raymond Froidevaux

IPC: G01L1/10 ,  G01D11/24 ,  G01P1/02 ,  G01P15/02 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01D11/245 ,  G01P1/023 ,  G01P2015/0828

Abstract: A measurement sensor is disclosed having a frame, a support which is resiliently flexible under the influence of a physical parameter and is fixed to the frame, a mass connected to the support, a housing which is formed by the frame and surrounds the mass to dampen movement of the mass and its support, a detection device for supplying a signal representative of the physical parameter in response to flection of the support. The sensor includes an assembly for precisely positioning the mass in the housing. The sensor has applications in the measurement of a physical parameter such as, for example, acceleration.

Abstract translation: 公开了一种测量传感器，其具有框架，支撑件，其在物理参数的影响下具有弹性柔性并且固定到框架，连接到支撑件的质量，壳体，其由框架形成并且围绕物体以阻尼 质量块及其支撑件的移动，用于响应于支撑件的弯曲而提供表示物理参数的信号的检测装置。 传感器包括用于将质量块精确地定位在壳体中的组件。 该传感器具有用于测量物理参数的应用，例如加速度。

公开(公告)号：US5174884A

公开(公告)日：1992-12-29

申请号：US595824

申请日：1990-10-10

Applicant: Satoshi Shimada ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Seiichi Ugai ,  Masayoshi Kaneyasu ,  Hiroshi Kuroiwa ,  Yoshihiro Yokota

Inventor： Satoshi Shimada ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Seiichi Ugai ,  Masayoshi Kaneyasu ,  Hiroshi Kuroiwa ,  Yoshihiro Yokota

IPC: G01N27/00 ,  G01D5/241 ,  G01D18/00 ,  G01N27/22 ,  G01P15/125 ,  G01P21/00

CPC classification number: G01D5/2417 ,  G01D18/006 ,  G01P21/00 ,  G01P2015/0828

Abstract: A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibrating signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion whereby a self-calibration and a correction of the characteristics are performed in accordance with the amount of the change in the response.

公开(公告)号：US5113698A

公开(公告)日：1992-05-19

申请号：US485188

申请日：1990-02-26

Applicant: Steven F. Grlj ,  Craig J. Cornelius

Inventor： Steven F. Grlj ,  Craig J. Cornelius

IPC: G01L1/10 ,  G01L1/16 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01L1/162 ,  G01P2015/0828

Abstract: A drive system for providing different excitation voltages to the separate beams of a multiple beam vibrating transducer is disclosed. In one embodiment of the invention an amplified voltage at the resonant frequency of a master beam is amplified and applied to a secondary beam, to force the secondary beam to vibrate at the resonant frequency and amplitude of the master beam to force the transducer to resonate at the frequency of the master beam. Since the transducer vibrates at the resonant frequency of one of the beams, the transducer energy losses to the adjacent mounting structure are reduced. This results in a higher transducer quality factor so that frequency shifts in the resonant frequency can be readily measured as changes in the parameter that the transducer is intended to monitor.

Abstract translation: 公开了一种用于向多波束振动换能器的单独波束提供不同激励电压的驱动系统。 在本发明的一个实施例中，在主光束的谐振频率处的放大电压被放大并施加到次光束，以迫使次光束以主光束的谐振频率和振幅振动，以迫使换能器在 主梁的频率。 由于传感器以一个光束的谐振频率振动，所以传感器对相邻安装结构的能量损耗减小。 这导致更高的传感器质量因子，使得可以容易地测量谐振频率的频率偏移，作为传感器旨在监视的参数的变化。

公开(公告)号：US5101669A

公开(公告)日：1992-04-07

申请号：US523715

申请日：1990-05-11

Applicant: James W. Holm-Kennedy ,  Gordon P. Lee

Inventor： James W. Holm-Kennedy ,  Gordon P. Lee

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828

Abstract: A multibeam structure measures displacement of one or more response elements to detect multiple components of applied force. The flexible beams are each coupled to a response element which may be displaced by a force arising from linear acceleration, angular acceleration, fluid flow, electric/magnetic/gravitational fields, and other sources. The displacement of the response element is detected with a variety of sensing methods including capacitive and piezoresistive sensing.

Abstract translation: 多光束结构测量一个或多个响应元件的位移以检测施加的力的多个分量。 柔性梁各自耦合到响应元件，该响应元件可能由于线性加速度，角加速度，流体流动，电/磁/重力场和其它源产生的力而移位。 响应元件的位移通过包括电容和压阻感测的各种感测方法来检测。

公开(公告)号：US5095750A

公开(公告)日：1992-03-17

申请号：US542823

申请日：1990-06-25

Applicant: Seikou Suzuki ,  Shigeki Tsuchitani ,  Satoshi Shimada ,  Masayuki Miki ,  Shigeyuki Kobori ,  Masahiro Matsumoto

Inventor： Seikou Suzuki ,  Shigeki Tsuchitani ,  Satoshi Shimada ,  Masayuki Miki ,  Shigeyuki Kobori ,  Masahiro Matsumoto

IPC: G01P15/125 ,  G01P15/13

CPC classification number: G01P15/131 ,  G01P15/125 ,  G01P2015/0828

Abstract: An accelerometer having a movable electrode which is moved according to acceleration with respect to a fixed electrode disposed in opposition to the movable electrode. An output device generates an output voltage which is proportional to the acceleration by measuring a gap between the movable electrode and the fixed electrode. A pulse width modulator generates pulses, wherein a pulse width of the pulses is modulated according to the output voltage, and a feedback device feeds back an electrostatic force which is proportional to the pulse width of the pulses from the pulse modulator between the movable electrode and the fixed electrode. As the acceleration in the acceleration sensor is linearly detected, the acceleration sensor is easily adjusted.

公开(公告)号：US4879914A

公开(公告)日：1989-11-14

申请号：US316341

申请日：1989-02-27

Applicant: Brian L. Norling

Inventor： Brian L. Norling

IPC: G01L1/00 ,  G01L1/10 ,  G01L1/16 ,  G01L1/18 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/12 ,  H01L41/09 ,  H01L41/113

CPC classification number: H01L41/1132 ,  G01L1/162 ,  G01L1/183 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/0975 ,  G01P15/123 ,  G01P2015/0828

Abstract: A push-pull force transducer comprising a unitary body formed from a crystalline substrate. The body comprises first and second mounting elements for mounting the force transducer to first and second structures, and first and second force sensing elements connected to the mounting elements. Each force sensing element has first and second ends, a line extending from the second to the first end defining a force sensing axis for the force sensing elements. The force sensing elements are oriented with their force sensing axes parallel to and aligned with one another. The first force sensing element has its first end connected to the second mounting element and its second end connected to the first mounting element. The second force sensing element has its first end connected to the first mounting element and its second end connected to the second mounting element. Also described are embodiments utilizing strain relief flexures and an embodiment featuring a leveraged design.

Abstract translation: 推力力传感器，包括由结晶基底形成的整体。 主体包括用于将力传感器安装到第一和第二结构的第一和第二安装元件以及连接到安装元件的第一和第二力感测元件。 每个力感测元件具有第一和第二端，从第二端延伸到第一端的线限定用于力感测元件的力感测轴线。 力传感元件的力传感轴线彼此平行并对准。 第一力感测元件的第一端连接到第二安装元件，其第二端连接到第一安装元件。 第二力传感元件的第一端连接到第一安装元件，其第二端连接到第二安装元件。 还描述了使用应变消除挠曲的实施例和具有杠杆设计的实施例。