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111.发明授权Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers 失效微机电可调谐，半对称，垂直腔表面发射激光器的单模操作公开(公告)号：US06744805B2
公开(公告)日：2004-06-01
申请号：US10255401
申请日：2002-09-26
IPC分类号： H01S308
CPC分类号： H01S5/18366 , H01S5/18308 , H01S5/18311 , H01S5/18388 , H01S2301/163 , H01S2301/166
摘要： A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers with precise lateral and vertical dimensional control. Microelectromechanical tunable vertical cavity surface emitting laser structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of MEM-tunable VCSEL's. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL's.
摘要翻译： 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器的方法。 还提供了微电子机械可调谐垂直腔表面发射激光器结构，其包括由电介质/金属膜或金属膜制成的悬浮膜结构，该膜结构在通过金属支撑柱在周边锚定的同时支撑腔调谐反射介电膜堆叠， 。 调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。 本发明涉及用于这种MEM可调谐VCSEL的电流注入的腔内电触头。 本发明还包括控制电流注入分布的各种机制，以确保在MEM可调VCSEL的整个调谐范围内的单模操作。
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公开(公告)号：US06504611B2
公开(公告)日：2003-01-07
申请号：US09859778
申请日：2001-05-17
IPC分类号： G01B1100
CPC分类号： G02B6/4225 , G01B11/27 , G02B6/4221 , G02B6/4226
摘要： A method and an automated apparatus for three-dimensional optical alignment of optical components for testing or assembly purposes comprise use of a visible light vision system to assist active alignment of optical components based on the measured optical output at a wavelength of light outside of the visible range.
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公开(公告)号：US06498800B1
公开(公告)日：2002-12-24
申请号：US09636807
申请日：2000-08-10
IPC分类号： H01S310
CPC分类号： G01J9/0246 , G01J2009/0257 , H01S5/0078 , H01S5/0687 , H01S5/18366 , H01S5/18388
摘要： A compact wavelength monitoring and control assembly for a narrow band (i.e., laser) source is provided, comprising two narrow bandpass, wavelength selective transmission filter elements of Fabry-Perot structure through which two separate collimated beams from a laser source are directed onto two photodetectors. The spacing of the multiple transmission maxima for one etalon is chosen to match that of the desired set of frequencies to be used for locking purposes. The spacing of the transmission maxima for the second etalon is used, in combination with a dielectric filter, to generate a wavelength fiducial to denote an absolute frequency. The spacing of the second etalon is chosen to be much wider than the frequency grid etalon. A control circuit processes the simultaneously acquired signals from the two detectors as the laser wavelength is varied. The device functions as an optical wavelength discriminator in which the detectors convert optical energy to current (or voltage) for a feedback loop for controlling the laser source. Any one of a large number of discrete, predetermined wavelengths may be chosen for locking using the same device. The system is compact and may be packaged within the same temperature controlled laser assembly for maximum performance and minimum circuit board space requirements.
摘要翻译： 提供了一种用于窄带（即激光）源的紧凑型波长监视和控制组件，其包括法布里 - 珀罗结构的两个窄带通波长选择性透射滤波器元件，来自激光源的两个分离的准直光束通过该组件被引导到两个光电检测器 。 选择一个标准具的多个传输最大值的间距以匹配要用于锁定目的的期望频率组的间隔。 与介质滤波器组合使用第二标准具的透射最大值的间隔以产生表示绝对频率的波长基准。 第二个标准具的间距被选择为比频率网格标准具宽得多。 当激光波长变化时，控制电路处理来自两个检测器的同时采集的信号。 该器件用作光学波长鉴别器，其中检测器将光能转换成用于控制激光源的反馈回路的电流（或电压）。 可以选择大量离散的预定波长中的任何一个用于使用相同的装置进行锁定。 该系统紧凑，可以封装在相同的温度控制激光器组件中，以实现最大的性能和最小的电路板空间要求。
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114.发明授权Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 失效利用可变形多层反射镜进行电可调节的fabry-perot结构及其制作方法公开(公告)号：US06324192B1
公开(公告)日：2001-11-27
申请号：US09059877
申请日：1998-04-14
申请人： Parviz Tayebati
发明人： Parviz Tayebati
IPC分类号： H01S310
CPC分类号： G02B26/0841 , G02B26/001 , G02B26/002 , H01S5/0614 , H01S5/18363 , H01S5/18366 , H01S5/18372
摘要： An electrically tunable Fabry-Perot structure using a deformable multi-layer mirror construction wherein Ga1−aAlaAs, where a 0.96, and a material selected from the group consisting of either Ga1−zAlzAs, where 0.7>Z>0, or Ga1−yAlyAs/Ga1−zAlzAs/Ga1−yAlyAs, where 0.7>Z>0 and y>0.5. The Ga1−xAlxAs is wet oxidized by exposing its edge to water in a nitrogen or helium atmosphere at a temperature of between about 360° C. and 450° C. so as to transform it to AlOx. The resulting AlOx layers abut the sacrificial layer and act as etch stops during the formation of a cantilever Fabry-Perot structure by etching of the sacrificial layer.
摘要翻译： 使用可变形多层反射镜结构的电可调法布里 - 珀罗结构，其中使用Ga1-aAlaAs（其中a <0.1）作为可以使用柠檬酸附魔选择性去除的牺牲层。 多层反射镜由N和M周期的四分之一波长层组成，其中N和M是整数，或整数加上1/2。 此外，反射镜由Ga1-xAlxAs的交替层制成，其中X> 0.96，以及选自Ga1-zAlzAs，其中0.7> Z> 0或Ga1-yAlyAs / Ga1-zAlzAs / Ga1的材料 -yAlyAs，其中0.7> Z> 0且y> 0.5。 将Ga1-xAlxAs在氮或氦气氛中在约360℃至450℃的温度下将其边缘暴露于水中进行湿式氧化，从而将其转化为AlOx。 所产生的AlO x层邻接牺牲层，并且通过蚀刻牺牲层在形成悬臂法布里 - 珀罗结构期间作为蚀刻停止。
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公开(公告)号：US12032202B2
公开(公告)日：2024-07-09
申请号：US18200673
申请日：2023-05-23
CPC分类号： G02B6/02042 , G02B6/03605 , G02B6/262 , G02B6/34 , G02B6/4296 , G02B6/32 , G02B6/3512 , G02B6/3524 , G02B6/3598
摘要： In various embodiments, the beam parameter product and/or beam shape of a laser beam is adjusted by directing the laser beam across a path along the input end of a cellular-core optical fiber. The beam emitted at the output end of the cellular-core optical fiber may be utilized to process a workpiece.
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公开(公告)号：US10401562B2
公开(公告)日：2019-09-03
申请号：US15879500
申请日：2018-01-25
摘要： In various embodiments, the beam parameter product and/or beam shape of a laser beam is adjusted by directing the laser beam across a path along the input end of a cellular-core optical fiber. The beam emitted at the output end of the cellular-core optical fiber may be utilized to process a workpiece.
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公开(公告)号：US10320145B2
公开(公告)日：2019-06-11
申请号：US15807824
申请日：2017-11-09
申请人： Parviz Tayebati , Michael Deutsch
发明人： Parviz Tayebati , Michael Deutsch
摘要： In various embodiments, laser apparatuses include thermal bonding layers between various components and sealing materials for preventing or retarding movement of thermal bonding material out of the thermal bonding layers.
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公开(公告)号：US08236589B2
公开(公告)日：2012-08-07
申请号：US12839310
申请日：2010-07-19
IPC分类号： H01L21/00
CPC分类号： H01S5/06256 , H01S5/0207 , H01S5/026 , H01S5/0612 , H01S5/1003 , H01S5/2045 , H01S5/2081 , H01S5/2086
摘要： A distributed Bragg reflector (DBR) includes a base substrate and a gain medium formed on the base substrate. A waveguide positioned above the base substrate in optical communication with the gain medium and defines a gap extending between the base substrate and the waveguide along a substantial portion of the length thereof. The waveguide having a grating formed therein. A heating element is in thermal contact with the waveguide and electrically coupled to a controller electrically configured to adjust optical properties of the waveguide by controlling power supplied to the heating element.
摘要翻译： 分布式布拉格反射器（DBR）包括基底和在基底上形成的增益介质。 位于基底基板上方的波导与增益介质光通信，并且沿着其长度的大部分限定在基底基板和波导之间延伸的间隙。 波导具有形成在其中的光栅。 加热元件与波导热接触并且电耦合到控制器，电控制器通过控制供应到加热元件的功率来调节波导的光学特性。
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公开(公告)号：US20100311195A1
公开(公告)日：2010-12-09
申请号：US12857465
申请日：2010-08-16
IPC分类号： H01L33/30
CPC分类号： H01S5/125 , B82Y20/00 , H01S5/026 , H01S5/0612 , H01S5/06256 , H01S5/1003 , H01S5/2045 , H01S5/2086 , H01S5/227 , H01S5/34306
摘要： A distributed Bragg reflector (DBR) includes a base substrate and a gain medium formed on the base substrate. A waveguide positioned above the base substrate in optical communication with the gain medium and defines a gap extending between the base substrate and the waveguide along a substantial portion of the length thereof. The waveguide may have a grating formed therein. A heating element is in thermal contact with the waveguide and electrically coupled to a controller configured to adjust optical properties of the waveguide by controlling power supplied to the heating element.
摘要翻译： 分布式布拉格反射器（DBR）包括基底和在基底上形成的增益介质。 位于基底基板上方的波导与增益介质光通信，并且沿着其长度的大部分限定在基底基板和波导之间延伸的间隙。 波导可以具有形成在其中的光栅。 加热元件与波导热接触并电耦合到控制器，该控制器被配置为通过控制供应给加热元件的功率来调节波导的光学性质。
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120.发明授权公开(公告)号：US07697186B2
公开(公告)日：2010-04-13
申请号：US11977206
申请日：2007-10-24
CPC分类号： G02B6/4206 , G02B6/14 , G02B6/4215
摘要： An optical system comprising a frequency modulated laser source adapted to produce a frequency modulated optical beam, an optical spectrum reshaper (OSR) adapted to receive the frequency modulated optical beam from the laser source and convert it into an amplitude modulated optical beam, a focusing lens adapted to receive the amplitude modulated optical beam from the OSR and focus the same, and an optical fiber adapted to receive the amplitude modulated optical beam from the focusing lens and transmit an optical signal;characterized in that the OSR has a central axis, the focusing lens has a central axis, and the optical fiber has a central axis, with the central axis of the optical fiber being laterally offset from at least one of the central axis of the OSR and the central axis of the focusing lens so as to effect spatial filtering and thereby generate the desired optical transmission characteristics for the resulting optical signal in the optical fiber.
摘要翻译： 一种光学系统，包括适于产生调频光束的调频激光源，适于从激光源接收频率调制光束并将其转换成幅度调制光束的光谱整形器（OSR），聚焦透镜 适于接收来自OSR的幅度调制光束并对其进行聚焦;以及光纤，适于从聚焦透镜接收调幅光束并发射光信号; 其特征在于，所述OSR具有中心轴，所述聚焦透镜具有中心轴线，并且所述光纤具有中心轴线，所述光纤的中心轴线横向偏离所述OSR的中心轴线中的至少一个， 聚焦透镜的中心轴，从而实现空间滤波，从而产生光纤中产生的光信号所需的光传输特性。
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