公开(公告)号：US08408789B2

公开(公告)日：2013-04-02

申请号：US12813049

申请日：2010-06-10

Applicant: Toshiyuki Takahara

Inventor： Toshiyuki Takahara

IPC: A61B6/08

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: An X-ray analysis apparatus including: a radiation source configured to irradiate an irradiation point on a sample with radiation; an X-ray detector configured to detect a characteristic X-ray emitted from the sample, and output a signal including energy information about the characteristic X-ray; an analyzer configured to analyze the signal; a sample stage configured to allow placement of the sample thereon; a shifting mechanism being capable of relatively shifting the sample on the sample stage and the radiation source and the X-ray detector with respect to each other; a height measuring mechanism being capable of measuring the height of the irradiation point on the sample; and a controller configured to control the shifting mechanism on the basis of the measured height of the irradiation point on the sample and adjust the distance of the sample with respect to the radiation source and the X-ray detector is used.

Abstract translation: 一种X射线分析装置，包括：被配置为用辐射照射样品上的照射点的辐射源; X射线检测器，被配置为检测从样本发射的特征X射线，并输出包括关于特征X射线的能量信息的信号; 分析器，被配置为分析所述信号; 样品台，其构造成允许样品放置在其上; 移动机构能够相对于彼此相对移动样品台上的样品和辐射源和X射线检测器; 高度测量机构能够测量样品上的照射点的高度; 以及控制器，其被配置为基于所测量的样品的照射点的高度来控制所述移动机构，并且调整所述样本相对于所述辐射源的距离，并且使用所述X射线检测器。

公开(公告)号：US08389953B2

公开(公告)日：2013-03-05

申请号：US12931993

申请日：2011-02-15

Applicant: Takashi Ogawa ,  Kenichi Nishinaka ,  Yoshihiro Koyama

Inventor： Takashi Ogawa ,  Kenichi Nishinaka ,  Yoshihiro Koyama

IPC: H01J49/10 ,  H01J37/08 ,  H01J27/02 ,  H01J3/14

CPC classification number: H01J37/08 ,  H01J2237/0451 ,  H01J2237/0458 ,  H01J2237/0807 ,  H01J2237/083 ,  H01J2237/24535 ,  H01J2237/28 ,  H01J2237/31749

Abstract: A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit that supplies gas to the tip, and an ion source gas supply source. An extracting electrode ionizes the gas adsorbed onto the surface of the tip and extracts ions by applying a voltage between the extracting electrode and the tip. A cathode electrode accelerates the ions toward a sample. An aperture member has an opening that passes therethrough a part of the ion beam ejected from the ion gun unit, and a lens system focuses the ion beam onto the sample.

Abstract translation: 聚焦离子束装置包括具有发射极尖端的离子枪单元，向尖端供应气体的气体供应单元和离子源气体供应源。 提取电极通过在提取电极和尖端之间施加电压使吸附在尖端表面上的气体电离并提取离子。 阴极将离子加速到样品。 孔部件具有从离子枪单元喷出的离子束的一部分通过的开口，透镜系统将离子束聚焦到样品上。

公开(公告)号：US08359180B2

公开(公告)日：2013-01-22

申请号：US12806997

申请日：2010-08-25

Applicant: Kentaro Yamada

Inventor： Kentaro Yamada

IPC: G01K17/00 ,  G06F15/00

CPC classification number: G01K17/00 ,  G01N25/4866

Abstract: To avoid an influence on measurement accuracy in a case where an observation window for a measurement sample is provided to a thermal analysis apparatus, the influence being imposed by thermal conduction through the observation window, the observation window is formed of layers of transparent members, and a gap layer is provided between the layers, to thereby reduce the thermal conduction. Gas or solid having a high heat insulation property is employed for the gap layer to further enhance a heat insulation property of the observation window. Accordingly, a change due to heating of the measurement sample is visually observed in the thermal analysis apparatus, to thereby obtain a thermal change or a physical change with higher accuracy.

Abstract translation: 为了避免在对热分析装置设置测定试样的观察窗的情况下对测量精度的影响，通过观察窗的热传导施加的影响，观察窗由透明构件的层构成， 在层之间设置间隙层，从而降低热传导。 间隙层采用具有高绝热性的气体或固体，以进一步增强观察窗的绝热性能。 因此，在热分析装置中目视观察到由于测量样品的加热引起的变化，从而以更高的精度获得热变化或物理变化。

公开(公告)号：US08342744B2

公开(公告)日：2013-01-01

申请号：US12658828

申请日：2010-02-16

Applicant: Shinya Nishimura ,  Kentaro Yamada ,  Hirohito Fujiwara

Inventor： Shinya Nishimura ,  Kentaro Yamada ,  Hirohito Fujiwara

IPC: G01K17/04 ,  G01N25/20

CPC classification number: G01N25/4866

Abstract: The differential scanning calorimeter includes: a heat sink, which stores a measuring sample and a reference material; a heater, which heats the heat sink; a cooling block, which is separated away from the heat sink, and positioned below the heat sink; a thermal resistor, which is connected between the heat sink and the cooling block, and forms a heat flow path therebetween; a cooling head, which is detachably fitted to the cooling block, and is cooled by an external cooling device; and differential heat flow detectors, which output a temperature difference between the measuring sample and the reference material as a heat-flow-difference signal, in which: the cooling block forms a side wall to fit the bore of the cooling head outward from the joint of the thermal resistance body; the top surface of the cooling head is lower than the joint.

Abstract translation: 差示扫描量热计包括：散热器，其存储测量样品和参考材料; 加热器，其加热散热器; 冷却块，其从散热器分离并且定位在散热器下方; 热电阻器，其连接在散热器和冷却块之间，并且在其间形成热流动路径; 冷却头，其可拆卸地装配到冷却块，并由外部冷却装置冷却; 以及将测量样品和参考材料之间的温度差输出为热流差信号的差分热流检测器，其中：冷却块形成侧壁，以将冷却头的孔从接头向外 的耐热体; 冷却头的顶面低于接头。

公开(公告)号：US08214915B2

公开(公告)日：2012-07-03

申请号：US12455556

申请日：2009-06-03

Applicant: Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

IPC: G01Q20/00

CPC classification number: G01Q70/14 ,  G01G3/12 ,  G01G9/00 ,  G01Q10/045 ,  G01Q60/32

Abstract: Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

Abstract translation: 本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。 悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

公开(公告)号：US08000439B2

公开(公告)日：2011-08-16

申请号：US12544572

申请日：2009-08-20

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/223 ,  G01N23/203

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information of the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a first observation system which optically observes a surface of the sample in order to determine the irradiation point, and a second observation system which has a smaller depth of field than the first observation system, optically observes a narrow region, and measures the distance from the determined irradiation point by focus adjustment are included.

Abstract translation: 将X射线照射到样品的照射点的X射线管，检测特征X射线的X射线检测器和从样本发射的散射X射线，并输出包含能量信息的信号 特征X射线和散射X射线，分析该信号的分析仪，第一观察系统，用于光学地观察样品的表面以确定照射点;以及第二观察系统，其具有较小的景深 与第一观察系统相比，光学地观察狭窄区域，并且通过焦点调整来测量与确定的照射点的距离。

公开(公告)号：US07973280B2

公开(公告)日：2011-07-05

申请号：US12378138

申请日：2009-02-11

Applicant: Haruo Takahashi ,  Yutaka Ikku ,  Yo Yamamoto ,  Kouji Iwasaki

Inventor： Haruo Takahashi ,  Yutaka Ikku ,  Yo Yamamoto ,  Kouji Iwasaki

IPC: G01N23/00 ,  H01J27/00

CPC classification number: H01J37/3056 ,  G01N1/286 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/3045 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An apparatus is provided that precisely conduct ion beam etching to a sample having the properties of which easily change by electron beam irradiation with no loss of ease of operation and throughput. An apparatus includes an ion beam lens barrel and an electron beam lens barrel, which can observe or measure the conditions of a sample with an electron beam in the process of etching with an ion beam, wherein first, an observation image is obtained that includes the entire process area formed by secondary signals generated by an electron beam, secondly, an irradiation permit area and an irradiation inhibit area are defined in the observation image, and thirdly, electron beam irradiation is restricted only to the irradiation permit area.

Abstract translation: 提供了一种设备，其精确地将离子束蚀刻导入具有易于通过电子束照射而改变的性质的样品，而不会损失操作容易性和生产量。 一种装置包括离子束透镜镜筒和电子束透镜镜筒，其可以在用离子束蚀刻的过程中观察或测量具有电子束的样品的条件，其中首先获得包括 在观察图像中定义由电子束产生的二次信号形成的整个处理区域，其次，照射许可区域和照射禁止区域，第三，电子束照射仅限于照射许可区域。

公开(公告)号：US07781703B2

公开(公告)日：2010-08-24

申请号：US11809623

申请日：2007-06-01

Applicant: Jun Nagasawa

Inventor： Jun Nagasawa

IPC: B23K13/08 ,  G01N25/00

CPC classification number: G01N25/4833

Abstract: The thermal analyzer comprises temperature deviation approximation formula holder which holds an approximate formula of a temperature deviation between sample and furnace and an elevating or lowering rate of the temperature of furnace during measuring the temperature deviation, programmed temperature corrector which corrects a programmed temperature in proportion to the elevating or lowering rate of the temperature. So that, since the temperature deviation is corrected in proportion to the elevating or lowering rate of the temperature program, the temperature deviation between sample and furnace is controlled to diminish when heating or cooling the sample using the temperature program which elevates or lowers the temperature of the sample or the furnace.

Abstract translation: 热分析仪包括温度偏差近似公式保持器，其保持样品和炉之间的温度偏差的近似公式以及在测量温度偏差期间炉的温度的升高或降低速率，程序温度校正器，其按比例校正程序温度 升温或降温的温度。 因此，由于温度偏差与温度程序的升降速度成比例地校正，所以当使用温度程序加热或冷却样品时，样品和炉子之间的温度偏差被控制以减小，这升高或降低了温度 样品或炉子。

公开(公告)号：US07770474B2

公开(公告)日：2010-08-10

申请号：US11928303

申请日：2007-10-30

Applicant: Masatoshi Yasutake ,  Takeshi Umemoto

Inventor： Masatoshi Yasutake ,  Takeshi Umemoto

IPC: G01B5/28

CPC classification number: G01Q60/30

Abstract: There is provided a sample operation apparatus in which, by a static electricity force acting between a probe and a sample, an accurate position is gripped without the sample being moved, and the sample can be operated by the probe for an observation, a grip, a release, or the like. There is made such that an AC electric source applying an AC voltage to an observation probe having in its tip and a bias electric source applying a DC voltage are connected, a bias electric source applying the DC voltage a grip probe adjoining the observation probe is possessed, there is relatively moved by a scanner in a plane (XY) direction in regard to a substrate fixed to a sample base, a vibration of the observation probe, which occurs by a static electricity between the tip and the substrate or the sample on the substrate, or the like, is detected by a lock-in amplifier through a displacement detection means, there is applied to the observation probe by the bias electric source such that the vibration becomes small by a feedback circuit, and there is applied also to the grip probe similarly by the bias electric source.

Abstract translation: 提供了一种样品操作装置，其中通过作用在探针和样品之间的静电力，在没有样品被移动的情况下夹持精确的位置，并且样品可以由探头操作以进行观察，握持， 释放等等。 这样使得向其尖端的观测探针和施加了直流电压的偏置电源施加交流电压的交流电源被连接起来，施加直流电压的偏置电源与邻接观察探针的夹持探头相连 ，扫描仪相对于固定在样品基底上的基板的平面（XY）方向相对移动，由尖端和基板之间的静电产生的观察探针的振动 衬底等通过位移检测装置由锁定放大器检测，通过偏置电源将观察探针施加到观察探针，使得振动由反馈电路变小，并且还应用于 夹式探头类似地由偏置电源。

公开(公告)号：US07748894B2

公开(公告)日：2010-07-06

申请号：US11661638

申请日：2005-08-26

Applicant: Rintaro Nakatani

Inventor： Rintaro Nakatani

IPC: G01J5/00 ,  G01N25/20 ,  G01J1/00

CPC classification number: G01N25/72

Abstract: A thermal analysis equipment includes a thermal analysis data preservation function that preserves, as thermal analysis data, signals from a temperature sensor and a physical quantity sensor that detect a temperature and a change in physical quantity, respectively, of a sample. An electromagnetic-wave data acquisition control function controls acquisition of electromagnetic wave data in accordance with setting of a trigger to acquire the electromagnetic wave data. An electromagnetic-wave data preservation function preserves the electromagnetic wave data. An electromagnetic-wave data correlation function correlates the preserved electromagnetic wave data to a position on the thermal analysis data when the trigger is set.

Abstract translation: 热分析设备包括热分析数据保存功能，其作为热分析数据，保存来自温度传感器和物理量传感器的信号，其分别检测样品的温度和物理量的变化。 电磁波数据采集控制功能根据触发设置来控制电磁波数据的采集，以获取电磁波数据。 电磁波数据保存功能保留电磁波数据。 电磁波数据相关函数将保存的电磁波数据与设置触发器时的热分析数据的位置相关联。