公开(公告)号：US20130195394A1

公开(公告)日：2013-08-01

申请号：US13754183

申请日：2013-01-30

Applicant: Sumitomo Osaka Cement Co., Ltd. ,  National Institute of Information and Communications Technology

Inventor： Youichi HOSOKAWA ,  Kaoru HIGUMA ,  Tetsuya KAWANISHI ,  Atsushi KANNO

IPC: G02F1/035

CPC classification number: G02F1/035 ,  G02F1/0123 ,  G02F1/225 ,  G02F2201/18 ,  H04B10/5053 ,  H04B10/541

Abstract: The optical modulator includes optical modulation units. The plurality of optical modulation units is disposed in parallel on the same substrate. One input waveguide branches off to be connected to the Mach-Zehnder type optical waveguide of each optical modulation unit, and an entire optical waveguide is formed such that outputs from the Mach-Zehnder type optical waveguides are combined and output through one output waveguide. A modulation signal with the same intensity is applied to a modulation electrode of each optical modulation unit. In at least some of the optical modulation units, mechanical structures including the modulation electrodes of the optical modulation units are configured such that an amplitude value of an optical output modulated by the modulation signal of the optical modulation unit is ½n (n is a natural number) of a maximum amplitude value in other optical modulation units.

Abstract translation: 光调制器包括光调制单元。 多个光学调制单元平行设置在同一基板上。 一个输入波导分支连接到每个光调制单元的马赫 - 曾德尔型光波导，并且形成整个光波导，使得来自马赫 - 策德尔型光波导的输出被组合并通过一个输出波导输出。 具有相同强度的调制信号被施加到每个光调制单元的调制电极。 在至少一些光调制单元中，包括光调制单元的调制电极的机械结构被配置为使得由光调制单元的调制信号调制的光输出的振幅值为½n（n为自然数 ）其他光调制单元中的最大振幅值。

公开(公告)号：US20040223690A1

公开(公告)日：2004-11-11

申请号：US10674956

申请日：2003-09-30

Applicant: Sumitomo Osaka Cement Co., Ltd.

Inventor： Tsutomu Saitou

IPC: G02B006/26 ,  G02B006/34

CPC classification number: G02B6/30 ,  G02B6/4214 ,  G02B2006/12104

Abstract: An object of the present invention is to provide an optical wave guide element for making the miniaturization of the entire device including the optical wave guide element possible, by connecting optical fiber for incoming and outgoing radiation to the optical wave guide element, so that the optical wave guide element and the optical fiber are positioned at an angle of approximately 90null, as well as to provide a manufacturing method for the same. The present invention provides an optical wave guide element having a substrate 10 which has the electro-optic effect and an optical wave guide 11 formed on the substrate, characterized by comprising: a reflective means 12 formed on a side of the substrate where an end of the optical wave guide is positioned; and optical fiber 13 connected to the substrate which is placed apart from the optical wave guide, wherein light waves 14 that propagate between the reflective means and the optical fiber propagate within the substrate excluding the optical wave guide.

Abstract translation: 本发明的目的是提供一种用于通过将用于入射和射出辐射的光纤连接到光波导元件来使包括光波导元件的整个装置的小型化成为可能的光波导元件，使得光学 波导元件和光纤以约90°的角度定位，并提供其制造方法。 本发明提供一种光波导元件，其具有具有电光效应的基板10和形成在基板上的光波导11，其特征在于包括：反射装置12，形成在基板的一侧， 定位光波导; 以及连接到离开光波导的基板的光纤13，其中在反射装置和光纤之间传播的光波14在除了光波导之外的基板内传播。

公开(公告)号：US20040047021A1

公开(公告)日：2004-03-11

申请号：US10404564

申请日：2003-04-01

Applicant: Sumitomo Osaka Cement Co., Ltd.

Inventor： Toshio Sakane ,  Tsutomu Saitou ,  Susumu Murata

IPC: G02B026/00

CPC classification number: G02B6/4208 ,  H01S5/0085 ,  H01S5/02208 ,  H01S5/02248 ,  H01S5/02284

Abstract: This invention offer optical modulator module with fulfilling the effective and the stable optical modulation, which stabilizes the emission of semiconductor and control the shift of optic axis between the optical component by the temperature change and so on, when using the semiconductor laser. Peculiarly, the optical modulator module includes, in same package, the semiconductor laser 27 as light source, the optical modulation device 28 that has optical waveguide on the surface of the chip made by the element of the electro-optical effect, and the polarization rotating element 40 between said semiconductor laser and said optical modulation device, for bringing plane of polarization of light from said semiconductor laser 27 to optimum plane of polarization in waveguide of the said optical modulation device in line and blocking the returning light from said optical modulation device to said semiconductor laser.

Abstract translation: 本发明提供了实现有效和稳定的光调制的光调制器模块，其在使用半导体激光器时稳定半导体的发射并且通过温度变化等控制光学部件之间的光轴的移动。 特别地，光调制器模块在相同的封装中包括作为光源的半导体激光器27，在由光电效应的元件制成的芯片的表面上具有光波导的光调制装置28和偏振旋转 所述半导体激光器和所述光调制装置之间的元件40，用于使所述光调制装置的波导中的所述半导体激光器27的偏振光的平面偏振到所述光调制装置的最佳偏振平面，并阻挡来自所述光调制装置的返回光 说半导体激光器。

公开(公告)号：US20030123213A1

公开(公告)日：2003-07-03

申请号：US10294837

申请日：2002-11-12

Applicant: Sumitomo Osaka Cement Co. Ltd

Inventor： Mamoru Kosakai

IPC: H01H001/00

CPC classification number: H01L21/6831 ,  H02N13/00

Abstract: An electrostatic chuck of the invention comprising; a first insulating member whose upper surface serves as a mounting surface on which a plate specimen is mounted, a second insulating member which is positioned facing a lower surface side of the first insulating member, and an internal electrode located between the first insulating member and the second insulating member, wherein the first insulating member is a composite ceramic having as its main constituents 1 wt % to 4 wt % of silicon carbide, and aluminum oxide, with a volume resistivity value in a temperature range of null200null C to 200null C, of 1null1014 nullcm to 1null1016 nullcm.

Abstract translation: 本发明的静电吸盘包括： 第一绝缘构件，其上表面用作安装有板试样的安装面，面对第一绝缘构件的下表面侧的第二绝缘构件，以及位于第一绝缘构件和第二绝缘构件之间的内部电极， 第二绝缘构件，其中所述第一绝缘构件是其主要成分为碳化硅的1重量％至4重量％的复合陶瓷和体积电阻率值在-200℃至200℃的温度范围内的氧化铝 C为1×1014个OMEGAcm至1×1016个OMEGAcm。

公开(公告)号：US20030090070A1

公开(公告)日：2003-05-15

申请号：US10235585

申请日：2002-09-05

Applicant: Sumitomo Osaka Cement Co., Ltd.

Inventor： Kazunori Endou ,  Hiroshi Inazumachi

IPC: B23B031/28

CPC classification number: B23Q3/154 ,  Y10T279/23

Abstract: One object of the present invention is to provide a chucking apparatus and its production method that is capable of carrying out holding, alignment, transport and so forth without causing problems such as the generation of particles. In order to achieve this object, the present invention provides a chucking apparatus provided with a base in which protrusions or grooves are formed on one of its faces to form an irregular surface, and the apical surfaces of protrusions of the irregular surface serve as a chucking surface for chucking and holding a plate-shaped sample, wherein the apical and lateral surfaces of the above protrusions, and the bottom surfaces of the above indentations, are all polished.

Abstract translation: 本发明的一个目的是提供一种能够进行保持，对准，运输等的夹持装置及其制造方法，而不会产生诸如颗粒的产生的问题。 为了达到上述目的，本发明提供了一种夹持装置，其具有在其一个面上形成突起或槽的基部，形成不规则的表面，并且不规则表面的突起的顶端面用作夹紧 用于夹紧和保持板状样品的表面，其中上述突起的顶部和侧表面以及上述凹陷的底表面都被抛光。

公开(公告)号：US12259631B2

公开(公告)日：2025-03-25

申请号：US17916400

申请日：2020-12-04

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Norikazu Miyazaki ,  Yu Kataoka

IPC: G02B6/12 ,  G02F1/01 ,  G02F1/035 ,  G02F1/21 ,  G02F1/225 ,  H04B10/516

Abstract: Provided is an optical control element that can minimize an optical path difference between branched waveguides while reducing a difference in structure between the branched waveguides by disposing an input portion and an output portion of an optical waveguide on the same side of a substrate on which the optical waveguide is formed. An optical control element includes a substrate 1 having an electro-optic effect, an optical waveguide 2 formed on the substrate, and a control electrode controlling a light wave propagating through the optical waveguide, in which an input portion (input light L1) and an output portion (output light L2) of the optical waveguide are formed on the same side of the substrate, the optical waveguide includes at least one Mach-Zehnder type optical waveguide portion (MZ) that has two branched waveguides (21, 22) branched from one optical waveguide and combines the two branched waveguides to form one optical waveguide, and the branched waveguides have an even number of turned-back potions (A1, A2).

公开(公告)号：US20250014933A1

公开(公告)日：2025-01-09

申请号：US18710508

申请日：2022-11-07

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Keisuke MAEDA ,  Norito MORISHITA ,  Tetsuro ITAGAKI ,  Yoshiki YOSHIOKA

IPC: H01L21/683 ,  H01J37/32

Abstract: Provided is an electrostatic chuck device including: an electrostatic chuck plate including a dielectric substrate that includes a placement surface on which a sample is mounted and an adsorption electrode that is positioned inside the dielectric substrate; and a base that supports the electrostatic chuck plate from a side opposite to the placement surface, in which in the electrostatic chuck plate, a first through-hole through which gas is supplied to the placement surface is provided, a porous body that allows passage of the gas is inserted into the first through-hole, a first adhesive layer that bonds an inner peripheral surface of the first through-hole and an outer peripheral surface of the porous body to each other is provided between the inner peripheral surface and the outer peripheral surface, and a thickness dimension of the first adhesive layer is 0 mm or more and 0.15 mm or less, at least in a region of 0.1 mm from the placement surface.

公开(公告)号：US20240312769A1

公开(公告)日：2024-09-19

申请号：US18259385

申请日：2021-08-31

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Jun ARIKAWA ,  Nobuhiro HIDAKA ,  Yukio MIURA

IPC: H01J37/32 ,  H01L21/683

CPC classification number: H01J37/32715 ,  H01J37/32568 ,  H01L21/6833

Abstract: A ceramic joined body includes: a pair of ceramic plates; and an electrode layer and an insulating layer that are interposed between the pair of ceramic plates and, in which the insulating layer is formed of an insulating material and a conductive material.

公开(公告)号：US20240255827A1

公开(公告)日：2024-08-01

申请号：US18390725

申请日：2023-12-20

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Yu KATAOKA ,  Shotaro HIRATA ,  Yumi MURATA

IPC: G02F1/225 ,  G02F1/21

CPC classification number: G02F1/225 ,  G02F1/212

Abstract: An optical waveguide device including an optical waveguide formed on a substrate is provided, in which a directional coupler is disposed in a part of the optical waveguide, the directional coupler includes one center waveguide and two side waveguides disposed to interpose the center waveguide between the side waveguides, the side waveguides are disposed to come close to the center waveguide from a position where the side waveguides are separated from the center waveguide and then to be separated again from the center waveguide in a traveling direction of a light wave, and the center waveguide and the side waveguides are not in contact with each other.

公开(公告)号：US20240152021A1

公开(公告)日：2024-05-09

申请号：US18550475

申请日：2022-06-15

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Norikazu Miyazaki ,  Toru Sugamata

IPC: G02F1/21 ,  G02F1/225

CPC classification number: G02F1/212 ,  G02F1/2255

Abstract: In an optical waveguide device having a plurality of intersections between a convex optical waveguide and a signal electrode, the occurrence of disturbance modulation at the intersections is effectively reduced, thereby achieving good operating characteristics. The optical waveguide device includes an optical waveguide composed of a protruding portion extending on the substrate, and a signal electrode formed on the substrate and controlling a light wave propagating through the optical waveguide. The optical waveguide includes a Mach-Zehnder optical waveguide including two parallel waveguides having a curved portions, the signal electrode includes two signal lines intersecting the two parallel waveguides at the curved portions and transmitting a differential signal, and each of the two signal lines is configured such that the intersection lengths on the two parallel waveguides are the same as each other.