Abstract:
Plasma producing method and apparatus as well as plasma processing apparatus including the plasma producing apparatus wherein one or more high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power is applied to a gas in the chamber from the antenna(s) to produce inductively coupled plasma. Impedance of the high-frequency antenna is set in a range of 45 Ω or lower.
Abstract:
Plasma producing method and apparatus as well as plasma processing apparatus utilizing the plasma producing apparatus wherein a plurality of high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power supplied from a high-frequency power supply device (including a power source, a matching box and the like) is applied to a gas in the chamber from the antennas to produce inductively coupled plasma. At least some of the plurality of high-frequency antennas are arranged in a fashion of such parallel arrangement that the antennas successively neighbor to each other and each of the antennas is opposed to the neighboring antenna. The high-frequency power supply device supplies the high-frequency power to each antenna from terminals of the antennas on the same side.
Abstract:
An image display device is constituted such that a back substrate on which image signal lines, scanning signal lines and electron sources are arranged and a face substrate which has phosphor layers are hermetically sealed to each other by way of a frame body using a sealing material, and the inside of the image display device is formed into a vacuum. A length LSK of a second sealing region into which scanning signal lines hermetically penetrate is set larger than a length LDK of a first sealing region into which thin-film image signal lines hermetically penetrate and hence, it is possible to suppress the decrease of the degree of vacuum.
Abstract:
A capacitive sensor for measuring a dynamical quantity based on a change in capacitance has a semiconductor substrate having a weight supported by beams so as to undergo displacement according to the dynamical quantity. The semiconductor substrate is sandwiched between glass substrates on which fixed electrodes are disposed in a position facing the weight with minute gaps existing between the glass substrates and the weight. A substrate electrode is disposed on one of the glass substrates and contacts a part of the semiconductor substrate. A recess having a size equal to or larger than a contact area in which the semiconductor substrate contacts the substrate electrode is formed in the semiconductor substrate, and a contact electrode is disposed in the recess in contact with the substrate electrode.
Abstract:
The object of the invention is to provide a display device, particularly to provide a display device that inhibits discharge caused in the operation of the display device utilizing field emission and enables image display for a long time. Discharge between a metal-backed film and an electron emission element is inhibited by forming a plurality of spacers arranged in a display area between a front board and a back board by an insulating material, providing a conductive metallic film on side walls of the spacer and integrating a convex portion protruded on the side of the front board with the conductive metallic film.
Abstract:
In a projection cathode ray tube device in which a projection cathode ray tube and a projection lens assembly are coupled and held by a coupler, superior focus characteristics and high resolution are realized by eliminating the deviation between the center of the phosphor screen of the cathode ray tube and the center of the lens assembly. In the cathode ray tube, each of the outside and inside surfaces of a faceplate is formed as a spherical convex surface which is curved toward an electron gun.
Abstract:
The object of the present invention is to provide an information recording/reproduction device for implementing high-density information recording and reading using mutual interaction of a recording medium with near field light, and particularly to a near field optical head with a high optical efficiency and a manufacturing method thereof. This is achieved by enabling an energy propagation mechanism via a plasmon by forming a layer dispersed with metal particulate at a microscopic opening generating near field light, and therefore increase optical efficiency.
Abstract:
A separator unit inserted into a fuel cell having an electrolyte layer interposed between a fuel electrode and an oxygen electrode is provided with a plate like separator that separates fuel gas supplied to the fuel electrode from oxidizing gas supplied to the oxygen electrode, and a mesh like collector having an opening that forms one of a passage through which the fuel gas flows and a passage through which the oxidizing gas flows. The collector is provided to at least one side of the separator base in abutment against one of the fuel electrode and the oxygen electrode. The separator base has a coolant passage formed therein, through which a coolant is allowed to flow, and an electrode abutment portion of the collector, which abuts against one of the fuel electrode and the oxygen electrode, has an aperture ratio higher than those of other portions of the collector.
Abstract:
A work vehicle includes an engine, a PTO shaft driven by power from the engine, an operator's seat, an operator's presence sensor for detecting presence/absence of an operator at the operator's seat, and an automatic engine stop unit operable to automatically stop the engine in response to detection of the operator's absence at the operator's seat. The work vehicle includes a utility member for the vehicle selectively movable between a use position and a non-use position, a non-use state detecting sensor for detecting movement of the utility member to the non-use position, and an override unit operable to override the automatic engine stop function of the automatic engine stop unit, the override unit providing an override signal to the automatic engine stop unit in response to detection by the non-use state detecting sensor of the movement of the utility member to the non-use position.
Abstract:
A CV conversion circuit capable of measuring a plurality of capacitances with a simple circuit is provided. A time-division signal is applied to each capacitor, whereby a plurality of capacitances of the capacitors can be measured in series by a circuit with a small number of components.