公开(公告)号：US20230215704A1

公开(公告)日：2023-07-06

申请号：US17999823

申请日：2021-05-27

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Masaki HIRAYAMA ,  Tetsuro ITAGAKI

IPC: H01J37/32 ,  H01L21/683

CPC classification number: H01J37/32715 ,  H01J37/32568 ,  H01J37/32642 ,  H01J37/32541 ,  H01L21/6833 ,  H01J2237/2007 ,  H01J37/32577

Abstract: An electrostatic chuck device includes: an electrostatic chuck plate having a dielectric substrate having a placement surface on which a wafer is placed and an adsorption electrode positioned in the dielectric substrate; a metal base supporting the electrostatic chuck plate from a back surface side opposite to the placement surface; and a focus ring installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface. The electrostatic chuck plate has a ring adsorption region which is adsorbed to the focus ring and is located on a surface positioned on the same side as the placement surface and has a base adsorption region which is adsorbed to the metal base and located on a back surface opposite to the placement surface.

公开(公告)号：US11656486B2

公开(公告)日：2023-05-23

申请号：US17129576

申请日：2020-12-21

Applicant: Sumitomo Osaka Cement Co., Ltd.

Inventor： Yuki Kugimoto ,  Yumi Murata ,  Katsutoshi Kondo

IPC: G02F1/035 ,  G02F1/225

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F2203/21

Abstract: An optical waveguide device including an optical waveguide substrate that has an electro-optic effect, is a crystal having anisotropy in thermal expansion rate, has a thickness set to 10 μm or lower, and includes an optical waveguide and a holding substrate that holds the optical waveguide substrate, the optical waveguide substrate and the holding substrate being joined to each other, in which the holding substrate is formed of a crystal having a lower dielectric constant than the optical waveguide substrate and having anisotropy in thermal expansion rate, and the optical waveguide substrate and the holding substrate are joined to each other such that differences in thermal expansion rate between the optical waveguide substrate and the holding substrate become small in different axial directions on a joint surface.

公开(公告)号：US20230096004A1

公开(公告)日：2023-03-30

申请号：US17954304

申请日：2022-09-27

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Masayuki Motoya ,  Toshio Kataoka

IPC: G02F1/035

Abstract: An optical waveguide element includes a substrate having an electro-optic effect, an optical waveguide formed in the substrate, and a control electrode arranged on the substrate to modulate a light wave propagating through the optical waveguide. The control electrode includes a signal electrode and a ground electrode. The signal electrode and the ground electrode are arranged along a modulation effect portion of the optical waveguide that performs modulation. In a shape of a bottom surface of the ground electrode facing the substrate, a slit separating the ground electrode into a first ground electrode close to the signal electrode and a second ground electrode far from the signal electrode is formed in a range corresponding to the modulation effect portion.

公开(公告)号：US11551962B2

公开(公告)日：2023-01-10

申请号：US17041905

申请日：2019-03-28

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Mamoru Kosakai ,  Nobuhiro Hidaka ,  Naoto Kimura ,  Hironori Kugimoto

IPC: H01L21/683 ,  C04B35/117 ,  H02N13/00

Abstract: A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.

公开(公告)号：US20220381977A1

公开(公告)日：2022-12-01

申请号：US17827022

申请日：2022-05-27

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Masayuki Motoya ,  Shotaro Hirata ,  Kosuke Okahashi ,  Yu Kataoka ,  Shingo Takano

IPC: G02B6/12 ,  G02B6/136 ,  G02F1/21 ,  G02F1/035 ,  G02F1/225

Abstract: There is provided an optical waveguide device including: a substrate; an optical waveguide formed on the substrate; and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, a first conductive layer on the first base layer, a second base layer made of a second material different from the first material, which is on the first conductive layer, and a second conductive layer on the second base layer, and an edge of the second base layer is covered with the second conductive layer, in a cross-section perpendicular to an extending direction of the optical waveguide.

公开(公告)号：US11506950B2

公开(公告)日：2022-11-22

申请号：US17202288

申请日：2021-03-15

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Yu Nakata ,  Norikazu Miyazaki

IPC: G02F1/21 ,  G02F1/225 ,  G02F1/035

Abstract: In an optical waveguide element which uses a rib type optical waveguide, light propagating in the rib type optical waveguide is monitored stably and accurately. The optical waveguide element includes a rib type optical waveguide provided on a optical waveguide substrate and configured of a convex portion protruding in a thickness direction of the optical waveguide substrate and extending in a plane direction of the optical waveguide substrate, and a light receiving element configured of a light receiving part formed on a light receiving element substrate disposed on the rib type optical waveguide and configured to receive at least a part of light propagating through the rib type optical waveguide, and the light receiving element substrate is supported by at least one first convex portion having the same height as that of the rib type optical waveguide provided on the optical waveguide substrate.

公开(公告)号：US20220357605A1

公开(公告)日：2022-11-10

申请号：US17619824

申请日：2020-06-18

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Norikazu Miyazaki ,  Toru Sugamata

IPC: G02F1/035 ,  G02F1/03

Abstract: An optical modulator includes a relay substrate having signal conductor patterns that connect input signal terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing that accommodates the optical modulation element and the relay substrate. Regarding at least one signal conductor pattern, the two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view in a rectangular connection area including a signal connection portion at which the signal conductor pattern and the input signal terminal are connected. The connection area is centered on the at least one signal conductor pattern in a width direction, and has a width equal to a distance to the nearest adjacent signal conductor pattern and a height equal to a distance from an end of the signal connection portion farthest from a signal input side to the signal input side.

公开(公告)号：US11471987B2

公开(公告)日：2022-10-18

申请号：US17264705

申请日：2019-08-02

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Keisuke Maeda ,  Masaki Ozaki ,  Masayuki Shiojiri ,  Takeshi Watanabe ,  Shinichi Maeta ,  Yuuki Kinpara

IPC: B23Q3/15 ,  H01J37/32 ,  H01L21/683

Abstract: An electrostatic chuck device comprising a mounting table having a mounting surface, a focus ring; and a cooling element, wherein the mounting table has a holding portion surrounding the mounting surface, the holding portion has an annular groove portion having a through-hole, the holding portion has inner and outer peripheral surfaces which hold the focus ring and are located on both sides of the groove portion, the holding surface satisfies conditions (i) and (ii), (i) a straight line connecting a first point corresponding to an innermost periphery of the holding surface and a second point corresponding to an outermost periphery of the holding surface has a positive or a negative inclination from the innermost periphery toward the outermost periphery, wherein a difference between a height of the first point and a height of the second point is 0 μm to 10 μm, and (ii) leak areas of the inner peripheral surface and the outer peripheral surface are less than 0.7 mm2.

公开(公告)号：US11460650B2

公开(公告)日：2022-10-04

申请号：US17215260

申请日：2021-03-29

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Norikazu Miyazaki ,  Yu Nakata

IPC: G02B6/42

Abstract: An optical waveguide device includes: a substrate having an electro-optic effect, an optical waveguide formed on the substrate, a light-receiving element disposed on the substrate and monitoring a light wave propagating through the optical waveguide or a light wave that is radiated from the optical waveguide; and a monitoring optical waveguide extending from the optical waveguide to the light-receiving element, in which the monitoring optical waveguide has a U-turn waveguide with respect to an output direction of the optical waveguide, and the light-receiving element is disposed at a part of the monitoring optical waveguide after the U-turn waveguide.

公开(公告)号：US20220267164A1

公开(公告)日：2022-08-25

申请号：US17622986

申请日：2020-07-03

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Teppei YAKUBO ,  Naoko ITO ,  Tadashi NEYA

IPC: C01G23/04 ,  A61K8/29 ,  A61K8/04

Abstract: A titanium oxide powder of the present invention has a BET specific surface area of 5 m2/g or higher and 15 m2/g or lower and contains single-crystalline titanium oxide particles, in which a value (d10/d50) that is obtained by dividing a value (d10), which is obtained when a particle size distribution represented by a cumulative volume percentage of primary particle diameters of the titanium oxide particles is 10%, by a value (d50), which is obtained when a particle size distribution represented by a cumulative volume percentage thereof is 50%, is 0.3 or higher and 1 or lower, an amount of titanium oxide thereof is 99.0% by mass or more, and the titanium oxide powder has an anatase-type crystalline phase.