Method and sensor for detecting strain using shape memory alloys

    公开(公告)号:US06622558B2

    公开(公告)日:2003-09-23

    申请号:US09726257

    申请日:2000-11-30

    CPC classification number: F02C9/28 F02D41/3005 F23N5/022 G01B5/30 G01L1/005

    Abstract: A method and sensor for detecting strain using shape memory alloys is disclosed. The sensor comprises a substrate material, a flexible diaphragm provided on the substrate material and a thin film SMA material deposited on the flexible diaphragm. The thin film SMA material is capable of undergoing a phase transformation in response to a physical stimulus being applied thereto. During such a phase transformation, a change occurs in the electrical resistance of the thin film SMA material. By measuring the value of the electrical resistance of the thin film SMA material immediately before and after the thin film SMA material undergoes a phase transformation, the difference in the value of the electrical resistance can be determined and utilized to determine the magnitude of the physical stimulus that was applied to the thin film SMA material causing it to undergo a phase transformation.

    Sensor apparatus using an electrochemical cell
    152.
    发明申请
    Sensor apparatus using an electrochemical cell 失效
    使用电化学电池的传感器装置

    公开(公告)号:US20030034534A1

    公开(公告)日:2003-02-20

    申请号:US10217810

    申请日:2002-08-12

    Inventor: Mrinal Thakur

    CPC classification number: G01L1/005 G01L11/00 G01P15/08

    Abstract: A method for sensing mechanical quantities such as force, stress, strain, pressure and acceleration is disclosed. This technology is based on a change in the electrochemically generated voltage (electromotive force) with application of force, stress, strain, pressure or acceleration. The change in the voltage is due to a change in the internal resistance of the electrochemical cell with a change in the relative position or orientation of the electrodes (anode and cathode) in the cell. The signal to be detected (e.g. force, stress, strain, pressure or acceleration) is applied to one of the electrodes to cause a change in the relative position or orientation between the electrodes. Various materials, solid, semisolid, gel, paste or liquid can be utilized as the electrolyte. The electrolyte must be an ion conductor. The examples of solid electrolytes include specific polymer conductors, polymer composites, ion conducting glasses and ceramics. The electrodes are made of conductors such as metals with dissimilar electro negativities. Significantly enhanced sensitivities, up to three orders of magnitude higher than that of comparable commercial sensors, are obtained. The materials are substantially less expensive than commercially used materials for mechanical sensors. An apparatus for sensing such mechanical quantities using materials such as doped 1,4 cis-polyisopropene and nation. The 1,4 cis-polyisopropene may be doped with lithium perchlorate or iodine. The output voltage signal increases with an increase of the sensing area for a given stress. The device can be used as an intruder alarm, among other applications.

    Abstract translation: 公开了用于感测力,应力,应变,压力和加速度等机械量的方法。 该技术基于施加力,应力,应变,压力或加速度的电化学发生电压(电动势)的变化。 电压的变化是由于电池单元中电极(阳极和阴极)的相对位置或取向发生变化而导致的电化学电池内阻的变化。 要检测的信号(例如力,应力,应变,压力或加速度)被施加到电极中的一个以引起电极之间的相对位置或取向的改变。 可以使用各种材料,固体,半固体,凝胶,糊剂或液体作为电解质。 电解液必须是离子导体。 固体电解质的实例包括特定的聚合物导体,聚合物复合材料,离子导电玻璃和陶瓷。 电极由诸如具有不相似的电负性的金属的导体制成。 获得显着增强的敏感性,比可比较的商业传感器高出三个数量级。 这些材料比用于机械传感器的商业使用材料便宜得多。 使用诸如掺杂的1,4-顺式聚异丙烯和国家的材料来感测这种机械量的装置。 1,4-顺式 - 聚异丙烯可掺杂高氯酸锂或碘。 输出电压信号随着给定应力的感测面积的增加而增加。 该设备可用作入侵者报警器,以及其他应用。

    Surface micro-machined sensor with pedestal
    153.
    发明授权
    Surface micro-machined sensor with pedestal 有权
    带基座的表面微加工传感器

    公开(公告)号:US06495388B1

    公开(公告)日:2002-12-17

    申请号:US09538127

    申请日:2000-03-29

    Inventor: M. Salleh Ismail

    CPC classification number: G01B7/22 G01B7/16 G01L1/005 G01L1/18 H01L29/84

    Abstract: A surface micro-machined sensor uses a pedestal in a cavity to support a flexible structure and reduce the span of the flexible structure. The reduced span per sense area allows larger sensor areas without permitting forces to permanently deform the flexible structure or cause the structure to touch an opposite wall of the cavity. The flexible structure bonded to the pedestal and an elevated region surrounding the pedestal defines a cavity between the flexible membrane and a lower plane region. Active regions can be formed in the lower plane region for capacitors or transistors. A pedestal can be of various shapes including a circular, ovoid, rectangular or polygonal shape. The lower plane region can be of various shapes including a ring or donut shape, ovoid, rectangular or polygonal shape with an inner dimension corresponding to the outer dimension of the pedestal. The elevated region can be of various shapes with an inner dimension corresponding to the outer dimension of the lower plane region. Alternative embodiments of the invention include cavities containing multiple pedestals which may be concentric. Additionally, a central pedestal may be hollow to increase sensor volume. The device can be a capacitive sensor with plates in the active region and the flexible structure. The device can be a piezoresistive sensor with the flexible structure containing piezoresistive elements. The device can also be a transistor with source, drain, and channel in the active regions of the substrate and the flexible structure containing a gate.

    Abstract translation: 表面微加工传感器使用空腔中的基座来支撑柔性结构并减小柔性结构的跨度。 每个感测区域的减小的跨度允许更大的传感器区域,而不允许力使柔性结构永久变形或使结构接触空腔的相对的壁。 结合到基座的柔性结构和围绕基座的升高区域在柔性膜和下平面区域之间限定空腔。 有源区可以形成在用于电容器或晶体管的下平面区域中。 基座可以是各种形状,包括圆形,卵形,矩形或多边形。 下平面区域可以是各种形状,包括环形或环形,卵形,矩形或多边形形状,其内部尺寸对应于基座的外部尺寸。 升高区域可以是具有对应于下平面区域的外部尺寸的内部尺寸的各种形状。 本发明的替代实施例包括包含可以同心的多个基座的空腔。 此外,中央基座可以是中空的,以增加传感器体积。 该器件可以是在有源区域和柔性结构中具有板的电容传感器。 该器件可以是具有包含压阻元件的柔性结构的压阻式传感器。 器件还可以是在衬底的有源区域中的源极,漏极和沟道的晶体管,以及包含栅极的柔性结构。

    Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
    154.
    发明授权
    Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor 有权
    超晶体金刚石悬臂宽动态范围加速/振动/压力传感器

    公开(公告)号:US06422077B1

    公开(公告)日:2002-07-23

    申请号:US09543992

    申请日:2000-04-06

    Abstract: An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

    Abstract translation: 在一个高灵敏度的超小型传感器中,采用悬臂结构形成的超微晶金刚石(UNCD)元件用于在宽动态范围内测量加速度,冲击,振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用,测量光学或电容测量。 在另一个实施例中,悬臂UNCD元件设置在两个阳极之间,其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件的小的AC调制电压,并且由于Fowler-Nordheim方程中施加的电压和阳极 - 阴极间隙距离的对称性,维持指定的阳极电压比V1 / N2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化,可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极,可以精确地独立测量压力,单轴加速度,振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。

    Pressure sensor element to measure contact stress

    公开(公告)号:US4967764A

    公开(公告)日:1990-11-06

    申请号:US261303

    申请日:1988-10-24

    Inventor: Peter J. Basser

    CPC classification number: A61B5/03 G01L1/005 G01R33/28 G01R33/465

    Abstract: A biological inplantable pressure sensor element comprises a fixed volume pouch formed by a sealed, flexible, impermeable membrane comprising therewithin a gel mass contained in a gel volume, said gel being hydrated with an aqueous solution comprising an agent having at least a first and a second NMR-detectable form, the proportion of the first to the second form of the agent in the gel volume being determined by their electrolytic interaction with the gel, whereby when an external pressure is applied to the sensor element a d(chemical shift)/d(.sigma./K) greater than 0.0001 ppm is attained, wherein .sigma. is the external pressure and K is the modulus of the gel. A kit contains sterile, individually wrapped sensor elements.A method of measuring in vivo contact stress applied to an implanted pressure sensor element, comprises implanting the pressure sensor of the invention into a situs of a subject in need of such measurement, non-invasively subjecting the subject situs to a nuclear magnetic resonance source effective to detect said NMR-detectible agent, obtaining the NMR spectrum of said agent, obtaining the chemical shifts from the spectrum, repeating steps (b) to (d) at least once at a desired time interval, comparing the chemical shifts obtaining in step (d) at different time intervals, and calculating the contact stress applied to said sensor element at a desired time from a correlation of observed chemical shifts for normalized stresses (.sigma./K) for the sensor element.A method of measuring in vitro contact stress applied to a pressure sensor element, comprises placing the stress sensor element of the invention in contact with a biological tissue in culture, non-invasively subjecting the biological tissue to a nuclear magnetic resonance source effective to detect said NMR-detectible agent, obtaining the NMR spectrum of said agent, obtaining the chemical shifts from the spectrum, repeating steps (b) to (d) at least once at a desired time interval, comparing the chemical shifts obtained in step (d) at different time intervals, and calculating the contact stress applied to said sensor element at a desired time from a correlation of observed chemical shifts to normalized stresses (.sigma./K) for the sensor element.

    Platform motion measuring system
    156.
    发明授权
    Platform motion measuring system 失效
    平台运动测量系统

    公开(公告)号:US4750365A

    公开(公告)日:1988-06-14

    申请号:US829358

    申请日:1986-02-14

    CPC classification number: G01M5/0041 E02B17/00 G01L1/005 G01M5/0066 G01P15/00

    Abstract: A method and apparatus for measuring the motion of tall structures, particularly offshore platforms. The method comprises disposing a number of accelerometer packages in a tubular member attached to a vertical or near vertical member of the structure. Each package contains three accelerometers having their axes dipsosed in an orthogonal arrangement. The apparatus includes means for installing and removing a plurality of packages from tubular members or chutes that are permanently attached to the structure.

    Abstract translation: 一种用于测量高层结构,特别是海上平台运动的方法和装置。 该方法包括将多个加速度计封装设置在连接到该结构的垂直或近垂直构件的管状构件中。 每个包装包含三个加速度计,其轴线以正交方式倾斜。 该装置包括用于从永久地附接到结构的管状构件或滑槽安装和移除多个包装的装置。

    Force measuring apparatus mounted on tractor including Hall sensor
detecting deformation of flex rod to control tractor power hoist
    157.
    发明授权
    Force measuring apparatus mounted on tractor including Hall sensor detecting deformation of flex rod to control tractor power hoist 失效
    安装在拖拉机上的力测量装置包括霍尔传感器检测挠曲杆的变形以控制拖拉机动力升降机

    公开(公告)号:US4497375A

    公开(公告)日:1985-02-05

    申请号:US357897

    申请日:1982-03-15

    CPC classification number: A01B63/112 G01L1/005 G01L1/14 G01L5/136 Y10S73/03

    Abstract: A force measuring procedure and a force measuring apparatus are used to control the power hoist of an agricultural tractor. The force measuring procedure operates in such a manner that the relative displacement of a point on an elastic system is detected by at least one Hall sensor disposed on either the elastic system or on the fixed frame with the Hall sensor being located in a magnetic field with a predeterminable magnetic flux. For this the force measuring apparatus has a flex rod attached to at least one of a pair of lower hitches which indicates the bending moment, and the Hall sensor is mounted with its detector surface essentially in the primary plane of bending deformation of the flex rod and is connected to the control circuit of the power hoist. The described force measuring procedure and the force measuring apparatus operating with this procedure produce the particular advantage that the mounting of the parts needed for the apparatus becomes extremely simple, with a resulting high degree of measuring precision and operating reliability assured for the apparatus. The force measuring procedure and the force measuring apparatus can thus be used to particular advantage whenever the objective is to continuously monitor the construction elements of a mass produced mechanical system.

    Abstract translation: 使用力测量程序和力测量装置来控制农用拖拉机的电动葫芦。 力测量程序以这样一种方式操作,使得弹性系统上的点的相对位移由设置在弹性系统上的固定框架上的至少一个霍尔传感器或霍尔传感器位于具有 一个可预定的磁通量。 为此,力测量装置具有附接到指示弯矩的一对下搭扣中的至少一个的挠性杆,并且霍尔传感器安装成其检测器表面基本上在柔性杆的弯曲变形的主平面内, 连接到电动葫芦的控制电路。 所描述的力测量程序和使用该程序的力测量装置产生了特别的优点,即装置所需的部件的安装变得非常简单,从而导致装置的高度的测量精度和操作可靠性。 因此,只要目标是持续监测大规模生产的机械系统的构造元件,力测量程序和力测量装置就可以被特别地使用。

    Digital stylus force gauge
    158.
    发明授权
    Digital stylus force gauge 失效
    数字测针力量表

    公开(公告)号:US4395920A

    公开(公告)日:1983-08-02

    申请号:US224804

    申请日:1981-01-13

    CPC classification number: G01L1/005 G11B3/10

    Abstract: A device for measuring small units of force or weight, such as the tracking force of a phonograph cartridge, includes an elastic flexure member having an electric contact for engagement with an encoder. As the flexure member is deflected by an amount proportional to the force being measured, contacts on the encoder are sequentially activated to provide an electric signal used to drive on analog, digital or numeric visual display or readout of the measured force. The device of the invention may also include a mechanism for providing a second point of support for the flexure member and a second visual scale to provide a greater range of measurement.

    Abstract translation: 用于测量小单元的力或重量的装置,例如留声机卡盘的跟踪力,包括具有用于与编码器接合的电触头的弹性挠曲构件。 当挠曲构件偏转与被测量的力成比例的量时,编码器上的触点被顺序地启动,以提供用于驱动模拟,数字或数字视觉显示或读出所测量的力的电信号。 本发明的装置还可以包括用于为弯曲构件提供第二支撑点的机构和用于提供更大范围的测量的第二视觉刻度。

    Differential floating dual slope converter
    159.
    发明授权
    Differential floating dual slope converter 失效
    差分浮动双斜率转换器

    公开(公告)号:US4031533A

    公开(公告)日:1977-06-21

    申请号:US618783

    申请日:1975-10-02

    Inventor: Leopold Neumann

    CPC classification number: G01L1/005 G01G23/37 H03M1/52

    Abstract: For use in an electronic weighing or force measuring system having a load cell providing an output signal representing measured force or weight, a ratiometric analog-to-digital converter operative with a low level differential input signal from the load cell and providing differential sensing of load cell excitation for use as a reference signal and generation of any required offset signal.

    Abstract translation: 对于具有负载传感器提供表示测量的力或重量的输出信号的电子称重或力测量系统,使用比例式模数转换器,其工​​作于来自测力传感器的低电平差分输入信号,并提供负载的差分感测 电池激励用作参考信号并产生任何所需的偏移信号。

    Device for transmitting force
    160.
    发明授权
    Device for transmitting force 失效
    传递力的装置

    公开(公告)号:US3922603A

    公开(公告)日:1975-11-25

    申请号:US35668173

    申请日:1973-05-02

    Applicant: EXAPRECIS SA

    CPC classification number: G01L1/086 G01L1/005 G01R17/08

    Abstract: The invention relates to a device for transmitting force, comprising a movable means which receives the force to be transmitted and produces an electric current depending on the value of the said force, a movable coil fed by this electric current and rotating according to an angle depending on its value, a spring mechanically connected, on the one hand, to the means which receives the force and, on the other, to the movable coil, the coupling forced on the spring from the movable coil being opposed to the displacement of the movable means which receives the force.

    Abstract translation: 本发明涉及一种用于传递力的装置,包括一个可移动装置,该装置承受待传递的力并根据所述力的值产生电流;一个由该电流供给的可动线圈, 在其价值上,弹簧机械地连接到接收力的装置,另一方面与可动线圈机械连接,从可动线圈向弹簧施力的联接件与可移动的线圈的位移相对置 接收力的手段。

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