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    Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers
    11.
    发明授权
    Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers 失效
    在绝缘体上硅晶片上形成的单晶硅结构上形成突起的方法

    公开(公告)号：US06413793B1

    公开(公告)日：2002-07-02

    申请号：US09858469

    申请日：2001-05-17

    Applicant: Chuang-Chia Lin ,  Peter M. Gulvin ,  Alex T. Tran ,  Nena Liakopoulos

    Inventor： Chuang-Chia Lin ,  Peter M. Gulvin ,  Alex T. Tran ,  Nena Liakopoulos

    IPC: H01L2100

    CPC classification number: B81B3/001

    Abstract: A semiconductor structure includes a substrate, a sacrificial layer formed on or over the substrate, and a structural layer formed on or over the sacrificial layer. At least one opening is formed in the structural layer. At least one opening is formed in the sacrificial layer below the at least one opening in the structural layer. The at least one opening in the structural layer and the at least one opening in the sacrificial layer are at least partially filled with a filler material. At least one portion of the structural layer is removed to define at least one microstructure. The sacrificial layer is removed such that the at least one microstructure is released from the substrate and the filler material forms one or more protrusions on the at least one microstructure, and/or one or more anchors anchoring the at least one microstructure to the substrate.

    Abstract translation: 半导体结构包括衬底，形成在衬底上或衬底上的牺牲层以及形成在牺牲层上或之上的结构层。 在结构层中形成至少一个开口。 在结构层中的至少一个开口下方的牺牲层中形成至少一个开口。 结构层中的至少一个开口和牺牲层中的至少一个开口至少部分地填充有填充材料。 去除结构层的至少一部分以限定至少一个微结构。 去除牺牲层，使得至少一个微结构从衬底释放并且填充材料在至少一个微结构上形成一个或多个突起，和/或一个或多个将至少一个微结构锚定到衬底的锚固件。

    Coriolis effect mass flow meter and gyroscope
    12.
    发明申请
    Coriolis effect mass flow meter and gyroscope 失效

    公开(公告)号：US20100018326A1

    公开(公告)日：2010-01-28

    申请号：US12148162

    申请日：2008-04-17

    Applicant: Chuang-Chia Lin ,  Alexander Spivak ,  Christopher Sanden ,  Odd Harald Steen Eriksen

    Inventor： Chuang-Chia Lin ,  Alexander Spivak ,  Christopher Sanden ,  Odd Harald Steen Eriksen

    IPC: G01F1/84

    CPC classification number: G01F1/8454

    Abstract: A Coriolis effect device includes a housing defining an interior chamber having a central axis, an inlet, an outlet, a leading disc and a trailing disc. Each disc is supported for oscillatory movement within the interior chamber of the housing. The leading disc defines a leading flow path in fluid communication with the inlet and interior chamber, wherein a portion of the leading flow path extends radially with respect to the central axis. The trailing disc is axially spaced from the leading disc. The trailing disc defines a trailing flow path in fluid communication with the interior chamber and the outlet, wherein a portion of the trailing flow path extends radially with respect to the central axis. A phase difference between leading and trailing oscillating signals picked up from the disc movement can be used to determine a mass flow rate of fluid passing from the inlet to the outlet.

    Self-aligned micro hinges
    14.
    发明授权
    Self-aligned micro hinges 失效
    自对准微铰链

    公开(公告)号：US06755982B2

    公开(公告)日：2004-06-29

    申请号：US10040687

    申请日：2002-01-07

    Applicant: Chuang-Chia Lin

    Inventor： Chuang-Chia Lin

    IPC: H01L2100

    CPC classification number: B32B1/00 ,  B81B2201/042 ,  B81C1/00198 ,  Y10T428/249921

    Abstract: A surface micromachining process for the fabrication of three-dimensional micro-hinges directly on silicon on insulator wafers. The process includes the steps of (a) defining openings around the surface of a desired hinge pin in a single layer of a silicon single crystal; (b) subjecting the openings to an etching process for removal of oxide material that is located in contiguous relation to the openings under the area of a hinge; (c) growing thermal oxide to define a gap between the hinge pin and a subsequently deposited polysilicon cap; (d) immediately depositing a thin layer of a chemical vapor deposited oxide sufficient to cover fine gaps not completely covered by the thermal oxide; depositing polysilicon and etching to define a hinge cap; and further etching to allow a mirror to be lifted out of the silicon wafer.

    Abstract translation: 用于直接在硅绝缘体晶片上制造三维微铰链的表面微加工工艺。 该方法包括以下步骤：（a）在单层硅单晶中限定所需铰链销的表面周围的开口; （b）对开口进行蚀刻处理以除去位于与铰链区域下方的开口相邻的氧化物材料; （c）生长热氧化物以限定铰链销和随后沉积的多晶硅盖之间的间隙; （d）立即沉积化学气相沉积氧化物的薄层，足以覆盖未被热氧化物完全覆盖的微细间隙; 沉积多晶硅和蚀刻以限定铰链盖; 并进一步蚀刻以允许将镜子提升出硅晶片。

    Mechanical latch locking detection sensors
    16.
    发明申请
    Mechanical latch locking detection sensors 失效
    机械锁定锁定检测传感器

    公开(公告)号：US20100026482A1

    公开(公告)日：2010-02-04

    申请号：US11827591

    申请日：2007-07-12

    Applicant: Alexander Grichener ,  Chuang-Chia Lin

    Inventor： Alexander Grichener ,  Chuang-Chia Lin

    IPC: G08B1/08 ,  E05C19/10

    CPC classification number: E05B39/04 ,  B64D29/06 ,  E05C19/145 ,  Y10T292/0948

    Abstract: The invention provides a sensor for determining when a latch for securing an engine cowl on an aircraft is secured by detecting the proximity of a latch hook and a latch pin. The sensor includes a resonant circuit configured and adapted to transmit a status signal when the latch is in a secured state. The sensor also includes a means for conveying status information of the latch to a location remote from the latch based on the status signal, the conveying means being operably connected to the resonant circuit. The invention also provides a method of determining when a latch is open or secured by detecting the proximity of a latch hook and a latch pin.

    Abstract translation: 本发明提供了一种传感器，用于通过检测闩锁钩和闩锁销的接近来确定何时用于固定飞机上的发动机罩的闩锁。 所述传感器包括谐振电路，所述谐振电路经配置并适于在所述闩锁处于安全状态时发送状态信号。 传感器还包括用于基于状态信号将闩锁的状态信息传送到远离闩锁的位置的装置，该传送装置可操作地连接到谐振电路。 本发明还提供了一种通过检测闩锁钩和闩锁销的接近来确定闩锁何时打开或固定的方法。

    Self assembled micro anti-stiction structure
    19.
    发明授权
    Self assembled micro anti-stiction structure 有权
    自组装微抗静电结构

    公开(公告)号：US06859577B2

    公开(公告)日：2005-02-22

    申请号：US09891760

    申请日：2001-06-25

    Applicant: Chuang-Chia Lin

    Inventor： Chuang-Chia Lin

    IPC: B81B3/00 ,  G02B26/08 ,  G02B6/42 ,  G02B6/26

    CPC classification number: B81B3/0008 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841

    Abstract: A method and apparatus are described for reducing stiction in a MEMS device having a movable element and a substrate. The method generally comprises providing the substrate with an anti-stiction member and interposing the anti-stiction member between the moveable element and the substrate. The apparatus generally comprises an anti-stiction member that is interposable between the moveable element and the substrate. Another embodiment of the invention of the invention is directed to a MEMS device, comprising: a substrate, a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate. A further embodiment of the invention is directed to an optical switch having one or more moveable elements moveably coupled to a substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate. The anti-stiction member may be in the form of a flexible cantilevered structure that overhangs the moveable element. Actuating the moveable element causes the anti-stiction member to flex and snap into place between the moveable element and the substrate. An additional embodiment of the invention is directed to a method of fabricating a MEMS device. The method proceeds by providing a silicon-on-insulator (SOI) substrate; defining a moveable element from a device layer of the SOI substrate; and depositing a flexible material over the device layer and the moveable element. One or more portions of the flexible material overhang the moveable element, whereby the flexible material forms one or more anti-stiction members.

    Abstract translation: 描述了一种用于减小具有可移动元件和基板的MEMS器件中的静摩擦的方法和装置。 该方法通常包括向基板提供抗静电部件并将抗静电部件插入在可移动元件和基板之间。 该装置通常包括可移动元件和基板之间的抗静电构件。 本发明的另一个实施例涉及一种MEMS装置，其包括：基板，可移动地联接到基板的可移动元件以及可移动元件和基板之间的抗静电元件。 本发明的另一实施例涉及一种光开关，其具有可移动地耦合到基板的一个或多个可移动元件，以及可移动到至少一个可移动元件和基板之间的抗静电元件。 防静电构件可以是悬垂于可移动元件的柔性悬臂结构的形式。 激活可移动元件使得抗静电元件弯曲并卡入到​​可移动元件和基板之间的位置。 本发明的另一实施例涉及制造MEMS器件的方法。 该方法通过提供绝缘体上硅（SOI）衬底; 从SOI衬底的器件层限定可移动元件; 以及将柔性材料沉积在所述器件层和所述可移动元件上。 柔性材料的一个或多个部分伸出可移动元件，由此柔性材料形成一个或多个防静电构件。

    Method of making a MEMS element having perpendicular portion formed from substrate
    20.
    发明授权
    Method of making a MEMS element having perpendicular portion formed from substrate 失效
    制造具有由衬底形成的垂直部分的MEMS元件的方法

    公开(公告)号：US06583031B2

    公开(公告)日：2003-06-24

    申请号：US09915217

    申请日：2001-07-25

    Applicant: Chuang-Chia Lin

    Inventor： Chuang-Chia Lin

    IPC: H01L2130

    CPC classification number: G02B6/3518 ,  B81B3/004 ,  B81B2201/045 ,  B81B2203/058 ,  B81C2201/053 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/358

    Abstract: A microelectromechanical systems (MEMS) element, MEMS optical switch and MEMS fabrication method are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element moveable is moveably attached to the substrate for motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. The perpendicular portion may be formed substantially perpendicular portion to the substrate. An array of such structures can be implemented to work as an optical switch. The optical switch may comprise a crystalline substrate and one or more moveable elements moveably attached to the substrate. The MEMS elements may be fabricated by providing a substrate; forming one or more trenches in the substrate to define a perpendicular portion of a element; and moveably attaching the moveable element to a first surface of the substrate; removing a portion of the substrate such that at least a part of the perpendicular portion projects beyond a second surface of the substrate. The various embodiments provide for a robust and reliable MEMS elements that may be simply fabricated and densely packed.

    Abstract translation: 描述了微机电系统（MEMS）元件，MEMS光开关和MEMS制造方法。 MEMS元件包括可移动地附接到基底的结晶和可移动元件。 可移动元件包括垂直于基本垂直于基底平面的垂直部分。 垂直部分和基底的晶体结构基本相似。 可移动的可移动元件可移动地附接到基板，用于基本上约束到基本上垂直于基板的平面定向的平面的运动。 在至少一个位置中，可移动元件的垂直部分的一部分突出超过衬底的表面。 可移动元件可以通过闩锁保持在适当的位置。 垂直部分可以形成为基本上垂直于基底的部分。 可以实现这种结构的阵列以用作光学开关。 光学开关可以包括结晶衬底和可移动地附接到衬底的一个或多个可移动元件。 可以通过提供衬底来制造MEMS元件; 在所述衬底中形成一个或多个沟槽以限定元件的垂直部分; 以及将所述可移动元件可移动地附接到所述基板的第一表面; 去除所述基底的一部分，使得所述垂直部分的至少一部分突出超过所述基底的第二表面。 各种实施例提供了可以简单地制造和密集包装的鲁棒且可靠的MEMS元件。

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