公开(公告)号：US4931425A

公开(公告)日：1990-06-05

申请号：US249653

申请日：1988-09-27

申请人： Takafumi Kimura ,  Hideki Yamawaki ,  Kazuto Ikeda ,  Masaru Ihara

发明人： Takafumi Kimura ,  Hideki Yamawaki ,  Kazuto Ikeda ,  Masaru Ihara

IPC分类号： C01G1/00 ,  C01G3/00 ,  C04B41/87 ,  C23C16/40 ,  H01B12/06 ,  H01B13/00 ,  H01L39/24

CPC分类号： C23C16/408 ,  H01L39/2438 ,  Y10S505/73

摘要： A thin film of a high temperature superconductive oxide of rare earth metal-alkali earth metal-copper-oxygen system or group VA metal-alkali earth metal-copper-oxygen system, which has an excellent crystallinity, particularly a single crystalline structure, is formed on a substrate by a CVD method, in which halides of the metals and an oxygen source gas are separately flowed over a substrate and caused to react with each other over the substrate, to deposit a desired superconducting oxide film.

公开(公告)号：US07045473B2

公开(公告)日：2006-05-16

申请号：US10662474

申请日：2003-09-16

申请人： Hiroyuki Hyodo ,  Hideki Yamawaki ,  Kenji Maruyama ,  Masaharu Hida

发明人： Hiroyuki Hyodo ,  Hideki Yamawaki ,  Kenji Maruyama ,  Masaharu Hida

IPC分类号： H01L21/324 ,  C23C16/00

CPC分类号： C23C16/4483 ,  C23C16/4485

摘要： Solid material gasification method comprises a solution preparation step wherein a first solid material is dissolved in a solvent to prepare a gasification solution, a solvent removal step wherein a second solid material is separated by removing the solvent used to prepare the gasification solution from that solution, and a solid sublimation step wherein the second solid material is gasified by sublimation.

摘要翻译： 固体气化方法包括溶液制备步骤，其中将第一固体材料溶解在溶剂中以制备气化溶液;溶剂去除步骤，其中通过从溶液中除去用于制备气化溶液的溶剂来分离第二固体物质， 和固体升华步骤，其中第二固体材料通过升华气化。

公开(公告)号：US06790677B2

公开(公告)日：2004-09-14

申请号：US10338647

申请日：2003-01-09

申请人： Hideki Yamawaki

发明人： Hideki Yamawaki

IPC分类号： H01L2100

CPC分类号： H01L21/02271 ,  C23C16/409 ,  H01L21/02197 ,  H01L21/02312 ,  H01L21/31691 ,  H01L28/55 ,  H01L28/60 ,  H01L28/65

摘要： A method of forming a ferroelectric film includes the steps of forming a layer by a material that takes a metal state in a reducing ambient and an oxide state in an oxidizing ambient, and depositing a ferroelectric film on a surface of the layer by supplying gaseous sources of the ferroelectric film and an oxidizing gas and causing a decomposition of the gaseous sources at the surface of said layer, wherein the step of depositing the ferroelectric film is started with a preparation step in which the state of the surface of said layer is controlled substantially to a critical point in which the layer changes from the metal state to the oxide state and from the oxide state to the metal state.

摘要翻译： 形成铁电体膜的方法包括以下步骤：通过在还原环境中具有金属状态并且在氧化环境中具有氧化态的材料形成层，并且通过提供气体源将铁电膜沉积在该层的表面上 的铁电体膜和氧化气体，并且在所述层的表面引起气态源的分解，其中沉积强电介质膜的步骤开始于制备步骤，其中所述层的表面的状态基本上被控制 到其中层从金属状态转变为氧化态，从氧化物状态转变为金属状态的临界点。

公开(公告)号：US5107119A

公开(公告)日：1992-04-21

申请号：US683421

申请日：1991-04-10

申请人： Takafumi Kimura ,  Hiroshi Nakao ,  Hideki Yamawaki ,  Masaru Ihara ,  Keigo Nagasaka

发明人： Takafumi Kimura ,  Hiroshi Nakao ,  Hideki Yamawaki ,  Masaru Ihara ,  Keigo Nagasaka

IPC分类号： C01B13/14 ,  C01G1/00 ,  C23C14/54 ,  C23C16/52 ,  G01N21/84 ,  H01B12/06 ,  H01B13/00 ,  H01L39/00 ,  H01L39/24

CPC分类号： G01N21/8422 ,  C23C14/54 ,  C23C16/52 ,  G01N21/3563 ,  G01N21/3581 ,  Y10S505/842

摘要： A method of evaluating the characteristics of superconductors, comprising: irradiating light to a superconductor held at a predetermined temperature; detecting light transmitted through the superconductor and composing a spectrum of the transmitted light; and using the obtained spectrum, calculating a ratio of the number of electrons contributing to a normal conduction to the number of electrons contributing to a superconduction in the superconductor, the ratio being effective at said predetermined temperature. A process and an apparatus for forming superconductor films by using the method are also disclosed.

摘要翻译： 一种评价超导体特性的方法，包括：将光照射到保持在预定温度的超导体; 检测透过超导体的光并构成透射光的光谱; 并且使用所获得的光谱，计算有助于正常导通的电子数与在超导体中有助于超导的电子数的比率，该比在所述预定温度下有效。 还公开了通过使用该方法形成超导体膜的方法和装置。