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    Methods and systems for manufacturing superconductor devices
    1.
    发明授权
    Methods and systems for manufacturing superconductor devices 有权

    公开(公告)号：US11719653B1

    公开(公告)日：2023-08-08

    申请号：US16575282

    申请日：2019-09-18

    申请人： PsiQuantum Corp.

    发明人： Faraz Najafi ,  Chia-Jung Chung

    IPC分类号： H01L39/24 ,  G01N23/207

    CPC分类号： G01N23/2076 ,  H01L39/2435 ,  H01L39/2438

    摘要： The various embodiments described herein include methods for manufacturing superconductor devices. In some embodiments, a method of manufacturing a superconductor includes: (1) manufacturing a first superconductor device; (2) characterizing the first superconductor device, including: (a) obtaining x-ray diffraction spectra of the first superconductor device; and (b) identifying a ratio of a first cubic phase peak to a second cubic phase peak in the x-ray diffraction spectra; (3) adjusting a manufacturing parameter based on the identified ratio; and (4) manufacturing a second superconductor device with the adjusted manufacturing parameter.

    Aerosol chemical vapor deposition of metal oxide films
    3.
    发明授权
    Aerosol chemical vapor deposition of metal oxide films 失效
    气溶胶化学气相沉积金属氧化物膜

    公开(公告)号：US5278138A

    公开(公告)日：1994-01-11

    申请号：US774748

    申请日：1991-10-11

    申请人： Kevin C. Ott ,  Toivo T. Kodas

    发明人： Kevin C. Ott ,  Toivo T. Kodas

    IPC分类号： C23C16/40 ,  C23C16/448 ,  H01L39/24 ,  C23C16/00 ,  B05D5/12

    CPC分类号： C23C16/408 ,  C23C16/4486 ,  H01L39/2438 ,  Y10S427/101 ,  Y10S505/734 ,  Y10S505/737 ,  Y10S505/742

    摘要： A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon saidFIELD OF THE INVENTIONThe present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. This invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).

    摘要翻译： 一种制备多组分金属氧化物膜的方法，包括：由适合的溶剂和至少两种能够在低于所述前体化合物的分解温度的温度下挥发的前体化合物形成溶液; 将所述气溶胶与合适的含氧载气组合通入加热区，所述加热区具有足以蒸发溶剂并挥发所述前体化合物的温度; 并将所述挥发的前体化合物通过基片的表面，所述基底具有足够的温度以分解所述挥发的前体化合物，由此包含在所述挥发的前体化合物中的金属原子作为金属氧化物膜沉积在基底上。 另外，包含符合选自硅，氧化镁，钇稳定的氧化锆，蓝宝石或没食子酸镓的底物表面的多组分金属氧化物膜的涂覆制品，所述多组分金属氧化物膜的特征在于具有 公开了在所述基底上基本上均匀的厚度，并且具有通过X射线衍射主要定位为C轴定向的结晶取向。

    SYSTEM FOR FORMING SUPERCONDUCTOR MATERIAL ON A TAPE SUBSTRATE
    9.
    发明申请
    SYSTEM FOR FORMING SUPERCONDUCTOR MATERIAL ON A TAPE SUBSTRATE 审中-公开
    用于在带状基材上形成超导体材料的系统

    公开(公告)号：US20120318196A1

    公开(公告)日：2012-12-20

    申请号：US13364549

    申请日：2012-02-02

    申请人： Alex Ignatiev ,  Xin Zhang ,  Alexander A. Molodyk ,  Louis D. Castellani

    发明人： Alex Ignatiev ,  Xin Zhang ,  Alexander A. Molodyk ,  Louis D. Castellani

    IPC分类号： B05C13/02 ,  B05C11/00

    CPC分类号： C23C16/40 ,  C23C16/545 ,  C23C16/56 ,  H01L39/2438 ,  H01L39/248 ,  Y10S505/74 ,  Y10S505/741

    摘要： There is disclosed a system for forming a superconductor material on a substrate. The system may comprise a dispensing reel; a spooling reel; and at least two modular reaction chambers, wherein at least one modular reaction chamber is connected to a supply of buffer precursor material and at least one other modular reaction chamber is connected to a supply of superconductor precursor material. The modular reaction chambers may include connections capable of being modified to add or remove adjacent components. It is understood that at least one of the spooling reel and/or the dispensing reel are exposed to normal atmosphere. The deposition chamber may also comprise a distribution head that provides a laminar flow of precursor materials onto the substrate, as well as at least one lamp comprising a reflector that directs UV and/or visible light towards the tape substrate to enhance a growth rate of material.

    摘要翻译： 公开了一种在衬底上形成超导体材料的系统。 系统可以包括分配卷轴; 绕线卷轴; 和至少两个模块化反应室，其中至少一个模块化反应室连接到缓冲前体材料供应源，并且至少一个其它模块化反应室连接到超导体前体材料供应源。 模块化反应室可以包括能够被修改以添加或除去相邻部件的连接。 应当理解，卷绕卷轴和/或分配卷轴中的至少一个暴露于正常的气氛。 沉积室还可以包括分配头，其将前体材料的层流提供到衬底上，以及至少一个灯，其包括将UV和/或可见光引导到带衬底以增强材料的生长速率的反射器 。

    Oxide superconducting conductor and its production method
    10.
    发明申请
    Oxide superconducting conductor and its production method 审中-公开
    氧化物超导导体及其制备方法

    公开(公告)号：US20050079116A1

    公开(公告)日：2005-04-14

    申请号：US10768899

    申请日：2004-01-30

    申请人： Kazunori Onabe ,  Takashi Saito ,  Naoji Kashima ,  Shigeo Nagaya

    发明人： Kazunori Onabe ,  Takashi Saito ,  Naoji Kashima ,  Shigeo Nagaya

    IPC分类号： C23C12/00 ,  C23C16/40 ,  C23C16/54 ,  C23C26/00 ,  C23C28/04 ,  H01L39/24 ,  C01B33/12

    CPC分类号： C23C28/322 ,  C23C12/00 ,  C23C16/408 ,  C23C16/545 ,  C23C26/00 ,  C23C28/321 ,  C23C28/325 ,  C23C28/345 ,  C23C28/3455 ,  H01L39/2438 ,  H01L39/2461 ,  Y10S428/93

    摘要： The object of the present invention is to provide an oxide superconducting conductor having superior strength and superconductor characteristics, and its production method. In order to achieve the above object, the present invention provides an oxide superconducting conductor having an oxide superconductor layer obtained by a method in which a raw material gas of an oxide superconductor is chemically reacted on a base material for forming an oxide superconductor provided with an Ag layer having a rolling texture formed on at least one side of a base material containing Ag base material or other base metal, a diffusion layer in which Cu is diffused in Ag is formed on the surface layer of the oxide superconductor layer side of the above base material, and the above oxide superconductor layer is formed on the above diffusion layer; and, an oxide superconducting conductor comprising the sequential generation of a plurality of layers of oxide superconductor containing Cu by CVD on an Ag layer of a base material for forming an oxide superconducting conductor provided with an Ag layer having a rolling texture formed on at least one side of an Ag base material or other base metal, and among the above plurality of oxide superconductor layers, the Cu content of the oxide superconductor layer immediately above the base material is made to have a higher concentration than the Cu content of the other oxide superconductor layers.

    摘要翻译： 本发明的目的是提供一种具有优异的强度和超导特性的氧化物超导体及其制造方法。 为了实现上述目的，本发明提供一种具有氧化物超导体层的氧化物超导体导体，该氧化物超导体层通过使氧化物超导体的原料气体在形成具有氧化物超导体的氧化物超导体的基材上发生化学反应的方法而获得， 在含有Ag基材或其他基体金属的基材的至少一面上形成有轧制结构的Ag层，在上述氧化物超导体层侧的表面层上形成有Cu扩散Ag的扩散层 在上述扩散层上形成上述氧化物超导体层， 以及氧化物超导导体，其包括在用于形成氧化物超导导体的基材的Ag层上通过CVD连续生成含有Cu的多层氧化物超导体，所述氧化物超导体具有形成在至少一个 Ag基材或其他贱金属的侧面，并且在上述多个氧化物超导体层中，将紧贴在基材上方的氧化物超导体层的Cu含量设定为高于其它氧化物超导体的Cu含量 层。