公开(公告)号：US06750600B2

公开(公告)日：2004-06-15

申请号：US09848644

申请日：2001-05-03

Applicant: Harold R. Kaufman ,  James R. Kahn ,  Raymond S. Robinson ,  Viacheslav V. Zhurin

Inventor： Harold R. Kaufman ,  James R. Kahn ,  Raymond S. Robinson ,  Viacheslav V. Zhurin

IPC: H01J2702

CPC classification number: H01J27/146

Abstract: In accordance with one specific embodiment of the present invention, a Hall-current ion source of the end-Hall type has an anode that is contoured with one or more recesses in the electron-collecting surface which have areas that are protected from the deposition of externally generated contamination thereon, as well as one or more protrusions that have higher temperatures than the bulk of the anode, thereby increasing the removal or passivation of coatings during operation by the thermal degradation of the coating and the effects of thermomechanical stresses. In another specific embodiment, which can be combined with the above embodiment, electrically isolated baffle or baffles are located to protect a substantial fraction of the electron-collecting surface of the anode from the deposition of externally generated contamination thereon.

Abstract translation: 根据本发明的一个具体实施例，末端霍尔型的霍尔电流离子源具有阳极，其在电子收集表面中具有一个或多个凹槽的轮廓，该阳极具有被保护的区域， 外部产生的污染物以及一个或多个具有比阳极体积更高的温度的突起，从而通过涂层的热降解和热机械应力的影响来增加涂层在操作过程中的去除或钝化。 在可以与上述实施例组合的另一个具体实施例中，定位电隔离的挡板或挡板以保护阳极的电子收集表面的大部分免受其上外部产生的污染物的沉积。

公开(公告)号：US20110163674A1

公开(公告)日：2011-07-07

申请号：US12925082

申请日：2010-10-13

Applicant: Harold R. Kaufman ,  James R. Kahn

Inventor： Harold R. Kaufman ,  James R. Kahn

IPC: H05B31/26

CPC classification number: H01J27/16 ,  H05H1/46 ,  H05H2001/4667

Abstract: In accordance with one embodiment of the present invention, the dielectric discharge chamber of a generally axially symmetric ion source has a hollow cylindrical shape. One end of the discharge chamber is closed with a dielectric wall. The working gas is introduced through an aperture in the center of this wall. The ion-optics grids are at the other end of the discharge chamber, which is left open. The inductor is a helical coil of copper conductor that surrounds the cylindrical portion of the dielectric discharge chamber. The modification that produces uniformity about the axis of symmetry is a shorted turn of the helical-coil inductor at the end of the inductor closest to the ion-optics grids.

Abstract translation: 根据本发明的一个实施例，大致轴向对称的离子源的介质放电室具有中空的圆柱形形状。 放电室的一端用电介质壁封闭。 工作气体通过该壁中心的孔引入。 离子光栅位于放电室的另一端，该放电室保持打开。 电感器是围绕介电放电室的圆筒部分的铜导体的螺旋线圈。 产生对称轴的均匀性的修改是最靠近离子光栅网格的电感端部的螺旋线圈电感器的短路。

公开(公告)号：US07667379B2

公开(公告)日：2010-02-23

申请号：US11339783

申请日：2006-01-25

Applicant: Harold R. Kaufman ,  James R. Kahn

Inventor： Harold R. Kaufman ,  James R. Kahn

IPC: F03H1/00

CPC classification number: H01J1/025 ,  H01J1/52

Abstract: In accordance with one embodiment of the present invention, the hollow-cathode apparatus comprises a small-diameter tantalum tube with a plurality of tantalum-foil radiation shields, wherein the plurality of shields in turn comprise one or more spiral windings external to that tube and approximately flush with the open end from which electron emission takes place. The axial length of at least one of the inner windings (closer to the tantalum tube) is equal to or less than approximately half the length of the tantalum tube. An enclosed keeper surrounds the cathode. To start the cathode, a flow of ionizable inert gas, usually argon, is initiated through the cathode and out the open end. An electrical discharge is then started between the keeper and the hollow cathode. When heated to operating temperature, electrons exit from the open end of the hollow cathode.

Abstract translation: 根据本发明的一个实施例，中空阴极装置包括具有多个钽箔辐射屏蔽的小直径钽管，其中多个屏蔽依次包括该管外部的一个或多个螺旋绕组，以及 大致与发生电子发射的开口端齐平。 内部绕组（更靠近钽管）中的至少一个的轴向长度等于或小于钽管的长度的大约一半。 封闭的门将围绕阴极。 为了启动阴极，通过阴极引出电离惰性气体（通常为氩气）流出开口端。 然后在保持器和中空阴极之间开始放电。 当加热到工作温度时，电子从空心阴极的开口端排出。

公开(公告)号：US06323586B1

公开(公告)日：2001-11-27

申请号：US09264477

申请日：1999-03-08

Applicant: Viacheslav V. Zhurin ,  James R. Kahn ,  Harold R. Kaufman

Inventor： Viacheslav V. Zhurin ,  James R. Kahn ,  Harold R. Kaufman

IPC: H01J150

CPC classification number: F03H1/00 ,  H01J1/025 ,  H01J1/50 ,  H01J3/025

Abstract: In accordance with one specific embodiment of the present invention, the closed drift hollow cathode comprises an axisymmetric discharge region into which an ionizable gas is introduced, an annular electron emitting cathode insert disposed laterally about that discharge region, a surrounding enclosure, an aperture in that enclosure disposed near the axis of symmetry and at one end of that region, and a magnetic field within that region which is both axisymmetric and generally disposed transverse to a path from the cathode insert to the aperture. An electrical discharge is established between the cathode insert and the enclosure. The electrons emitted from the cathode insert drift in closed paths around the axis, collide with molecules of ionizable gas, and sustain the discharge plasma by generating additional electron-ion pairs. Ions from the plasma bombard the cathode insert, thereby maintaining an emissive temperature. Electrons from the plasma diffuse to and escape through the aperture to provide the electron emission. The closed drift nature of the discharge circumferentially distributes the heating of the cathode insert and the utilization of the electron emitting capabilities thereof. The discharge current controls the maximum value of the electron emission.

Abstract translation: 根据本发明的一个具体实施例，封闭漂移中空阴极包括一个轴向对称放电区域，可引入可电离气体的环境中的电子发射阴极插入件，围绕该放电区域横向放置的环形电子发射阴极插件，周围的外壳， 外壳设置在该对称轴线附近并且位于该区域的一端，以及该区域内的磁场，其两个轴对称且横向于从阴极插件到孔的通道设置。 在阴极插入件和外壳之间建立放电。 从阴极插件发射的电子在围绕轴线的闭合路径中漂移，与可电离气体的分子碰撞，并通过产生另外的电子 - 离子对来维持放电等离子体。 来自等离子体的离子轰击阴极插入物，从而保持发射温度。 来自等离子体的电子通过孔扩散到并逸出以提供电子发射。 放电的闭合漂移特性周向地分布阴极插件的加热和其电子发射能力的利用。 放电电流控制电子发射的最大值。

公开(公告)号：US08994258B1

公开(公告)日：2015-03-31

申请号：US13998044

申请日：2013-09-25

Applicant: Harold R. Kaufman ,  James R. Kahn ,  Richard E. Nethery

Inventor： Harold R. Kaufman ,  James R. Kahn ,  Richard E. Nethery

IPC: H01J27/02 ,  H01J27/18 ,  H01J7/24 ,  H01J9/18 ,  H01J27/14

CPC classification number: H01J27/146 ,  H01J27/14 ,  H01J2237/002

Abstract: In accordance with one embodiment of the present invention, an end-Hall ion source has an electron emitting cathode, an anode, a reflector, an internal pole piece, an external pole piece, a magnetically permeable path, and a magnetic-field generating means located in the permeable path between the two pole pieces. The anode and reflector are enclosed without contact by a thermally conductive cup that has internal passages through which a cooling fluid can flow. The closed end of the cup is located between the reflector and the internal pole piece and the opposite end of the cup is in direct contact with the external pole piece, and wherein the cup is made of a material having a low microhardness, such as copper or aluminum.

公开(公告)号：US08698401B2

公开(公告)日：2014-04-15

申请号：US12925082

申请日：2010-10-13

Applicant: Harold R. Kaufman ,  James R. Kahn

Inventor： Harold R. Kaufman ,  James R. Kahn

IPC: H05B31/26

CPC classification number: H01J27/16 ,  H05H1/46 ,  H05H2001/4667

Abstract: In accordance with one embodiment of the present invention, the dielectric discharge chamber of a generally axially symmetric ion source has a hollow cylindrical shape. One end of the discharge chamber is closed with a dielectric wall. The working gas is introduced through an aperture in the center of this wall. The ion-optics grids are at the other end of the discharge chamber, which is left open. The inductor is a helical coil of copper conductor that surrounds the cylindrical portion of the dielectric discharge chamber. The modification that produces uniformity about the axis of symmetry is a shorted turn of the helical-coil inductor at the end of the inductor closest to the ion-optics grids.

Abstract translation: 根据本发明的一个实施例，大致轴向对称的离子源的介质放电室具有中空的圆柱形形状。 放电室的一端用电介质壁封闭。 工作气体通过该壁中心的孔引入。 离子光栅位于放电室的另一端，该放电室保持打开。 电感器是围绕介电放电室的圆筒部分的铜导体的螺旋线圈。 产生对称轴的均匀性的修改是最靠近离子光栅网格的电感端部的螺旋线圈电感器的短路。

公开(公告)号：US06864485B2

公开(公告)日：2005-03-08

申请号：US10001165

申请日：2001-12-04

Applicant: James R. Kahn ,  Rhonda J. Parker ,  Harold R. Kaufman

Inventor： Cheryl A. Phillips

IPC: H01J27/02 ,  G01K1/08 ,  H01J9/04 ,  H01J9/12

CPC classification number: H01J27/024

Abstract: In accordance with one specific embodiment of the present invention, the ion optics for use with an ion source have a plurality of electrically conductive grids that are mutually spaced apart and have mutually aligned respective pluralities of apertures through which ions may be accelerated and wherein each grid has an integral peripheral portion. A plurality of moment means are applied to a circumferentially distributed plurality of locations on the peripheral portion of each grid, which is initially flat, thereby establishing an annular segment of a cone as the approximate shape for that peripheral portion and a segment of a sphere as the approximate dished shape for the grid as a whole. The plurality of grids have conformal shapes in that the direction of deformation and the approximate spherical radii are the same. This elastic deformation during installation avoids any need for any permanent or inelastic deformation during fabrication, as well as controlling the excessive thermal displacements and accompanying performance changes to which flat grids are prone.

Abstract translation: 根据本发明的一个具体实施例，与离子源一起使用的离子光学器件具有多个相互间隔开的导电栅格，并且具有相互排列的多个孔，通过该孔可以离子加速，并且其中每个栅格 具有整体的周边部分。 多个力矩装置被施加到每个格栅的周边部分上的周向分布的多个位置，其最初是平坦的，从而建立锥体的环形段作为该外围部分和球体的一部分的近似形状， 作为整体的网格的近似抛光形状。 多个格栅具有共形形状，因为变形方向和近似球面半径相同。 安装过程中的这种弹性变形避免了在制造过程中任何永久性或非弹性变形的任何需要，以及控制过度的热位移和伴随的平坦栅格易于发生的性能变化。

公开(公告)号：US06843891B2

公开(公告)日：2005-01-18

申请号：US09766069

申请日：2001-01-19

Applicant: James R. Kahn ,  Harold R. Kaufman ,  Viacheslav V. Zhurin ,  David A. Baldwin ,  Todd L. Hylton

Inventor： James R. Kahn ,  Harold R. Kaufman ,  Viacheslav V. Zhurin ,  David A. Baldwin ,  Todd L. Hylton

IPC: C23C14/46 ,  H01J37/317 ,  H01J37/34 ,  C23C14/00 ,  C23C14/32

CPC classification number: C23C14/46 ,  H01J37/3178 ,  H01J37/34 ,  H01J2237/3146

Abstract: In one embodiment of this invention, the apparatus for sputter deposition within an evacuated volume comprises a compact gridless ion source into which an ionizable gas is introduced and from which ions leave with directed energies at or near the sputtering threshold and a sputter target near that source, biased negative relative to the surrounding vacuum enclosure, and located within the beam of ions leaving that source. Particles sputtered from the target are deposited on a deposition substrate spaced from both the ion source and the sputter target. An energetic beam of electrons can be generated by the incident ions striking the negatively biased sputter target and the deposition substrate is located either within or outside of this beam, depending on whether the net effect of bombardment by energetic electrons is beneficial or detrimental to that particular deposition process.

Abstract translation: 在本发明的一个实施例中，用于在抽真空体积内溅射沉积的装置包括一个紧凑的无栅离子源，可离子化气体被引入到其中并且离子离开具有在溅射阈值处或附近的定向能量，以及在该源附近的溅射靶 ，相对于周围的真空外壳偏置为负值，并且位于离开该源的离子束内。 从目标物溅射的颗粒沉积在与离子源和溅射靶相隔离的沉积基底上。 电子的能量束可以通过入射离子撞击负偏压的溅射靶产生，并且沉积衬底位于该光束的内部或外部，这取决于能量电子的轰击的净效应是有益的还是有害的 沉积工艺。

公开(公告)号：US06724160B2

公开(公告)日：2004-04-20

申请号：US10404162

申请日：2003-04-01

Applicant: Harold R. Kaufman ,  James R. Kahn ,  Viacheslav V. Zhurin

Inventor： Harold R. Kaufman ,  James R. Kahn ,  Viacheslav V. Zhurin

IPC: H01J2300

CPC classification number: H01J27/14

Abstract: In accordance with one embodiment of the present invention, the ion-beam apparatus takes the form of a gridless ion source with a hot-filament cathode-neutralizer, in which the hot filament is heated with a current from the cathode-neutralizer heater. The cathode-neutralizer is connected to the negative terminal of the discharge supply for the gridless ion source. This connection is substantially isolated from ground (the potential of the surrounding vacuum chamber, which is usually at earth ground) and its potential is measured relative to ground. The heater current to the cathode-neutralizer is controlled by adjusting it so as to maintain this potential in a narrow operating range. This control can be manual or automatic.

Abstract translation: 根据本发明的一个实施例，离子束装置采用具有热丝阴极中和器的无栅离子源的形式，其中热丝被来自阴极 - 中和器加热器的电流加热。 阴极中和器连接到无电离离子源的放电源的负极端子。 该连接基本上与地面隔离（周围真空室的电位，通常在地面），其电位相对于地面测量。 通过对阴极中和器的加热器电流进行调节，以将其保持在窄的工作范围内。 此控件可以手动或自动。

公开(公告)号：US06246162B1

公开(公告)日：2001-06-12

申请号：US09337589

申请日：1999-06-21

Applicant: James R. Kahn ,  Harold R. Kaufman ,  Raymond S. Robinson

Inventor： James R. Kahn ,  Harold R. Kaufman ,  Raymond S. Robinson

IPC: H01J2700

CPC classification number: H01J27/022

Abstract: In one embodiment of the present invention, the ion optics for use with an ion source have first and second electrically conductive grids having mutually aligned respective pluralities of apertures through which ions may be accelerated and wherein each has an integral peripheral portion. There is also a support member. There are first and second series of seats around the respective peripheral portions of the first and second grids. A plurality of first spherical insulators are distributed between seats of the first and second series, thereby establishing a predetermined distance between the grids while still enabling radial movement between their peripheral portions. There are third and fourth series of seats around the support member and the peripheral portion of the second grid, respectively, with seats of the fourth series displaced from those of the second series in the same grid. A plurality of second spherical insulators are distributed between seats of the third and fourth series, thereby establishing a predetermined distance between the support member and the second grid while still enabling motion in at least the radial direction between the support member and the peripheral portion of the second grid. A clamping force between the support member and the peripheral portion of the first grid maintains contact between the insulators and their seats.

Abstract translation: 在本发明的一个实施例中，与离子源一起使用的离子光学器件具有第一和第二导电栅格，其具有相互排列的相应多个孔，离子可以通过这些孔被加速，并且其中每个具有整体的周边部分。 还有一个支持成员。 在第一和第二格栅的相应周边部分周围有第一和第二系列的座。 多个第一球形绝缘体分布在第一和第二系列的座之间，从而在栅格之间建立预定的距离，同时仍能在其周边部分之间径向移动。 分别围绕支撑构件和第二格栅的周边部分具有第三和第四系列的座位，其中第四系列的座位与第二系列的座位在相同的格栅中移位。 多个第二球形绝缘体分布在第三和第四系列的座之间，由此在支撑构件和第二格栅之间建立预定的距离，同时仍使得能够至少沿径向方向在支撑构件和周边部分之间进行运动 第二格。 支撑构件和第一栅极的周边部分之间的夹紧力保持了绝缘体和它们的座之间的接触。