公开(公告)号：US06313562B1

公开(公告)日：2001-11-06

申请号：US09779969

申请日：2001-02-09

Applicant: Stephen M. Barnes ,  Samuel L. Miller ,  Brian D. Jensen ,  M. Steven Rodgers ,  Michael S. Burg

Inventor： Stephen M. Barnes ,  Samuel L. Miller ,  Brian D. Jensen ,  M. Steven Rodgers ,  Michael S. Burg

IPC: H02N1000

CPC classification number: F16H31/005 ,  F03G7/06 ,  F16H31/007 ,  H02K7/07 ,  H02N1/008 ,  Y10T74/1529

Abstract: A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.

Abstract translation: 公开了一种微机电（MEM）棘轮装置，其包括驱动环形齿轮，平台或机架形式的可移动部件的静电或热致动器。 运动由一个或多个由致动器驱动的往复式棘爪实现，该往复式棘爪沿着与路径平行，相对或相切的方向。 往复式棘爪接合在可移动构件上的分度元件（例如齿或销），以沿着弯曲或直线路径递增地移动构件，具有精确地控制和确定可移动构件的位置的能力。 可以通过常规的表面微加工方法在硅衬底上形成MEM装置。

公开(公告)号：US06133670A

公开(公告)日：2000-10-17

申请号：US340994

申请日：1999-06-24

Applicant: M. Steven Rodgers ,  Michael S. Burg ,  Brian D. Jensen ,  Samuel L. Miller ,  Stephen M. Barnes

Inventor： M. Steven Rodgers ,  Michael S. Burg ,  Brian D. Jensen ,  Samuel L. Miller ,  Stephen M. Barnes

IPC: B81B3/00 ,  G01P15/125 ,  H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0021 ,  G01P15/125 ,  B81B2201/033 ,  B81B2203/051 ,  G01P2015/0814

Abstract: A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the electrostatic combs (i.e. superposed with the moveable electrostatic combs) to considerably reduce the space required for the actuator. Additionally, a truss structure is provided to support the moveable electrostatic combs and prevent bending or distortion of these combs due to unbalanced electrostatic forces or external loading. The truss structure formed about the moveable electrostatic combs allows the spacing between the interdigitated fingers of the combs to be reduced to about one micron or less, thereby substantially increasing the number of active fingers which can be provided in a given area. Finally, electrostatic shields can be used in the actuator to substantially reduce unwanted electrostatic fields to further improve performance of the device. As a result, the compact electrostatic comb actuator of the present invention occupies only a fraction of the space required for conventional electrostatic comb actuators, while providing a substantial increase in the available drive force (up to one-hundred times).

Abstract translation: 公开了用于微机电（MEM）应用的紧凑型静电梳状致动器。 致动器基于多个网状静电梳，其中一些是静止的，其中一些是可移动的。 在静电梳的轮廓内（即与可移动的静电梳重叠）中制造一个或多个复原弹簧，以显着减少致动器所需的空间。 此外，提供桁架结构以支撑可移动的静电梳，并且由于不平衡的静电力或外部负载而防止这些梳子的弯曲或变形。 围绕可移动静电梳形成的桁架结构允许梳子的叉指之间的间隔减小到约一微米或更小，从而基本上增加了可以在给定区域中提供的活动手指的数量。 最后，可以在致动器中使用静电屏蔽以显着减少不需要的静电场，以进一步提高装置的性能。 结果，本发明的紧凑型静电梳状致动器仅占用常规静电梳状致动器所需的空间的一小部分，同时提供可用的驱动力（高达一百倍）的显着增加。

公开(公告)号：US07544176B2

公开(公告)日：2009-06-09

申请号：US11158144

申请日：2005-06-21

Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Paul J. McWhorter

Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Paul J. McWhorter

IPC: A61M5/00 ,  B01D63/00

CPC classification number: A61F9/00781 ,  B33Y80/00 ,  B82Y30/00

Abstract: One embodiment of a MEMS flow module (34) includes a first plate (36) and a second plate (48) that are separated by a first link (62). A plurality of concentrically disposed, annular flow-restricting walls (40) extend from the first plate (36), and each is separated from the second plate (48) by a flow-restricting gap (58). When the MEMS flow module (34) is exposed to a differential pressure and in one configuration, a perimeter (46) of the first plate (36) flexes away from the second plate (48) (and at least generally about where the first link (62) interfaces with the first plate (36)) to increase the size of one or more of the flow-restricting gaps (58), to in turn accommodate an increased flow or flow rate through the MEMS flow module (34).

Abstract translation: MEMS流量模块（34）的一个实施例包括由第一连杆（62）分开的第一板（36）和第二板（48）。 多个同心设置的环形流动限制壁（40）从第一板（36）延伸，并且每个通过流动限制间隙（58）与第二板（48）分离。 当MEMS流动模块（34）暴露于差压并且处于一种构造时，第一板（36）的周边（46）挠曲离开第二板（48）（并且至少大致围绕第一连接件 （62）与所述第一板（36）接合）以增加所述流动限制间隙（58）中的一个或多个的尺寸，从而适应通过所述MEMS流动模块（34）的增加的流量或流速。

公开(公告)号：US20090093781A1

公开(公告)日：2009-04-09

申请号：US12256768

申请日：2008-10-23

Applicant: Jeffry J. Sniegowski ,  Paul J. McWhorter ,  M. Steven Rodgers

Inventor： Jeffry J. Sniegowski ,  Paul J. McWhorter ,  M. Steven Rodgers

IPC: A61M35/00

CPC classification number: A61F9/00781

Abstract: Various embodiments of MEMS flow modules that both filter and regulate pressure are disclosed. One such MEMS flow module (58) has a tuning element (78) and a lower plate (70). A plurality of springs or spring-like structures (82) interconnect the tuning element (78) with the lower plate (70) in a manner that allows the tuning element (78) to move either toward or away from the lower plate (70), depending upon the pressure being exerted on the tuning element (78) by a flow through a lower flow port (74) on the lower plate (70). The tuning element (78) is disposed over this lower flow port (74) to induce a flow through the MEMS flow module (58) along a non-linear (geometrically) flow path. Preferably, a relatively small change in the pressure exerted by this flow on the tuning element (78) produces greater than a linear change in the flow rate out of the MEMS flow module (58).

Abstract translation: 公开了过滤和调节压力的MEMS流量模块的各种实施例。 一个这样的MEMS流量模块（58）具有调谐元件（78）和下板（70）。 多个弹簧或弹簧状结构（82）以使得调谐元件（78）朝向或远离下板（70）移动的方式将调谐元件（78）与下板（70）互连， 取决于通过下板（70）上的下流通口（74）的流动施加在调谐元件（78）上的压力。 调谐元件（78）设置在该下流动端口（74）上以引导沿着非线性（几何）流动路径流过MEMS流量模块（58）。 优选地，由该流量对调谐元件（78）施加的压力的相对小的变化产生大于MEMS流量模块（58）外的流速的线性变化。

公开(公告)号：US20080108932A1

公开(公告)日：2008-05-08

申请号：US11281274

申请日：2005-11-17

Applicant: M. Steven Rodgers

Inventor： M. Steven Rodgers

IPC: A61F9/00 ,  A61F2/14 ,  A61M39/08

CPC classification number: B01D67/0062 ,  B01D2325/021 ,  B82Y30/00

Abstract: A MEMS flow module (340) includes a plurality of filtering sections (344). Each filtering section (344) is defined by a stack (342) of a plurality of layers (346, 348, 350, 352). Each filtering section (344) includes at least one filter trap (364, 368) at each of at least two different levels or elevations within the stack (342). This provides for an increased flow rate through the MEMS flow module (340).

Abstract translation: MEMS流量模块（340）包括多个过滤部分（344）。 每个过滤部分（344）由多个层（346,348,350,352）的堆叠（342）限定。 每个过滤部分（344）在堆叠（342）内的至少两个不同级别或高度的每一个处包括至少一个过滤器捕获器（364,368）。 这提供了通过MEMS流量模块（340）的增加的流量。

公开(公告)号：US06954348B1

公开(公告)日：2005-10-11

申请号：US10911192

申请日：2004-08-04

Applicant: M. Steven Rodgers

Inventor： M. Steven Rodgers

IPC: H01G5/00 ,  H01G5/14

CPC classification number: H01G5/00 ,  H01G5/145 ,  H03J2200/39

Abstract: Various embodiments of tunable capacitors are disclosed. One embodiment is in the form of a tunable capacitor (368) having a pair of stationary capacitor electrodes (392) that are fixed to and disposed the same distance above a substrate (388) in the vertical dimension. A tuning element (416) is suspended above the substrate (388) by an elevation system (460) that accommodates movement of the tuning element (416) in the vertical dimension. Changing the capacitance of the tunable capacitor (368) is accomplished by moving the tuning element (416) in the vertical dimension.

Abstract translation: 公开了可调电容器的各种实施例。 一个实施例是具有一对固定电容器电极（392）的可调电容器（368）的形式，其在垂直方向上固定到衬底（388）上方并且被设置在相同的距离处。 调谐元件（416）通过升高系统（460）悬挂在基板（388）上方，该升降系统（460）在垂直方向上适应调谐元件（416）的移动。 通过在垂直方向上移动调谐元件（416）来实现改变可调电容器（368）的电容。

公开(公告)号：US06402969B1

公开(公告)日：2002-06-11

申请号：US09639656

申请日：2000-08-15

Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski

Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski

IPC: H01L2100

CPC classification number: B81B5/00 ,  B81B2201/034 ,  Y10T74/19651

Abstract: A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 &mgr;m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

公开(公告)号：US06175170B1

公开(公告)日：2001-01-16

申请号：US09393396

申请日：1999-09-10

Applicant: Sridhar Kota ,  M. Steven Rodgers ,  Joel A. Hetrick

Inventor： Sridhar Kota ,  M. Steven Rodgers ,  Joel A. Hetrick

IPC: H02K3310

CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/0136 ,  B81B2203/051 ,  F16H21/44

Abstract: A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 &mgr;m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 &mgr;m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

Abstract translation: 公开了一种可枢转的柔性结构，其可用于增加诸如静电梳状致动器，电容式板静电致动器或热致动器之类的微机电（MEM）致动器的几何优点或机械优点。 柔性结构基于由一个或多个多晶硅或氮化硅层形成的互连的柔性梁和横梁的组合可以提供约5:1至约60:1的几何优势，以乘以0.25-3 通过短行程致动器提供的妈妈位移，使得这样的致动器可以用于产生约10-34μm的位移行程以操作棘轮驱动的MEM装置或微型发动机。 柔性结构比基于杠杆臂和枢转接头的常规位移倍增装置的游隙少，并且预期比这种装置更可靠。 柔性结构和相关联的静电或热致动器可以使用表面微加工形成在共同的衬底（例如硅）上。

公开(公告)号：US6082208A

公开(公告)日：2000-07-04

申请号：US53569

申请日：1998-04-01

Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Samuel L. Miller ,  Paul J. McWhorter

Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Samuel L. Miller ,  Paul J. McWhorter

IPC: B81B5/00 ,  F16H19/00 ,  F16H57/00

CPC classification number: B81C1/00198 ,  F16H19/00 ,  B81B2201/035 ,  B81B2203/06 ,  Y10S310/06 ,  Y10T74/19614 ,  Y10T74/19619

Abstract: A process for forming complex microelectromechanical (MEM) devices having five layers or levels of polysilicon, including four structural polysilicon layers wherein mechanical elements can be formed, and an underlying polysilicon layer forming a voltage reference plane. A particular type of MEM device that can be formed with the five-level polysilicon process is a MEM transmission for controlling or interlocking mechanical power transfer between an electrostatic motor and a self-assembling structure (e.g. a hinged pop-up mirror for use with an incident laser beam). The MEM transmission is based on an incomplete gear train and a bridging set of gears that can be moved into place to complete the gear train to enable power transfer. The MEM transmission has particular applications as a safety component for surety, and for this purpose can incorporate a pin-in-maze discriminator responsive to a coded input signal.

Abstract translation: 一种用于形成具有五层或多层多晶硅的复合微机电（MEM）器件的方法，包括可形成机械元件的四个结构多晶硅层，以及形成电压参考平面的下层多晶硅层。 可以使用五电平多晶硅工艺形成的特定类型的MEM器件是用于控制或互锁静电电动机和自组装结构之间的机械功率传递的MEM传输（例如，铰链式弹出式反射镜，用于与 入射激光束）。 MEM传动基于不完整的齿轮系和可以移动到位的桥接齿轮组，以完成齿轮系以实现功率传递。 MEM传输具有特定应用作为保证的安全部件，为此，可以根据编码的输入信号结合引入迷宫识别器。

公开(公告)号：US07384550B2

公开(公告)日：2008-06-10

申请号：US11065183

申请日：2005-02-24

Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Paul J. McWhorter

Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Paul J. McWhorter

IPC: B01D63/08 ,  A61M5/165 ,  A61M37/00 ,  B01D63/00 ,  B01D61/00

CPC classification number: B01D63/088 ,  A61F9/00781 ,  B01D63/081 ,  B01D67/0062 ,  B01D2313/08 ,  B01D2313/10 ,  B01D2313/12 ,  B01D2313/14 ,  B33Y80/00 ,  Y10T137/2224

Abstract: Various MEMS filter elements or modules are disclosed, and which may be used in a glaucoma implant (490). One such MEMS filter module (34) includes a first film (70) and a second film (46) that are spaced and interconnected by a plurality of supports (78). A plurality of first flow ports (74) extend through the first film (70), and a plurality of second flow ports (50) extend through the second film (46). A plurality of annular filter walls (54) extend from the second film (46) toward the first film (70), and are separated therefrom by a filter trap gap (58).

Abstract translation: 公开了各种MEMS滤波器元件或模块，其可以用于青光眼植入物（490）中。 一个这样的MEMS滤波器模块（34）包括由多个支撑件（78）隔开并互连的第一薄膜（70）和第二薄膜（46）。 多个第一流动端口（74）延伸穿过第一膜（70），并且多个第二流动端口（50）延伸穿过第二膜（46）。 多个环形过滤器壁（54）从第二膜（46）朝向第一膜（70）延伸，并通过过滤器捕集器间隙（58）与其隔开。