公开(公告)号：US20070046301A1

公开(公告)日：2007-03-01

申请号：US11438121

申请日：2006-05-18

Applicant: Steven Kasapi

Inventor： Steven Kasapi

IPC: G01R31/305

CPC classification number: G01R31/311 ,  G01R31/2851 ,  G01R31/308

Abstract: An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.

Abstract translation: 公开了一种用于提供调制映射的设备。 该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间 调制图由选定时间段内收集的调制激光和IC的选定区域组成。

公开(公告)号：US07042563B2

公开(公告)日：2006-05-09

申请号：US11042288

申请日：2005-01-24

Applicant: Kenneth R. Wilsher ,  Steven Kasapi

Inventor： Kenneth R. Wilsher ,  Steven Kasapi

IPC: G01N21/88

CPC classification number: G01R31/311 ,  G01R31/31905

Abstract: A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focusing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.

Abstract translation: 一种通过光耦合测试集成电路（IC）的方法和系统。 光学系统包括光纤，夹具和聚焦元件。 此外，在安装在集成电路上的灯具中提供通道以容纳光学系统。 夹具用作散热器。 因此，使用聚焦在每个目标位置的光来探测集成电路上的一个或多个感光元件/靶。 光引起数据锁存到集成电路中（其在测试程序的影响下运行），并形成用于确认IC正常工作的集成电路输出的测试图案。

公开(公告)号：US20050128471A1

公开(公告)日：2005-06-16

申请号：US11042288

申请日：2005-01-24

Applicant: Kenneth Wilsher ,  Steven Kasapi

Inventor： Kenneth Wilsher ,  Steven Kasapi

IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66 ,  G01N21/00

CPC classification number: G01R31/311 ,  G01R31/31905

Abstract: A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focussing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.

Abstract translation: 一种通过光耦合测试集成电路（IC）的方法和系统。 光学系统包括光纤，夹具和聚焦元件。 此外，在安装在集成电路上的灯具中提供通道以容纳光学系统。 夹具用作散热器。 因此，使用聚焦在每个目标位置的光来探测集成电路上的一个或多个感光元件/靶。 光引起数据锁存到集成电路中（其在测试程序的影响下运行），并形成用于确认IC正常工作的集成电路输出的测试图案。

公开(公告)号：US20050110893A1

公开(公告)日：2005-05-26

申请号：US10719880

申请日：2003-11-20

Applicant: Steven Kasapi ,  Amit Nabarro ,  Ofir Baharav

Inventor： Steven Kasapi ,  Amit Nabarro ,  Ofir Baharav

IPC: G01B11/02 ,  G03B7/00 ,  H04N5/235

CPC classification number: G01B11/028

Abstract: A system and method for automatically and accurately determining the exact location of a knife-edge, such as an edge of an optical shutter, so that it can be controlled automatically. In one aspect the system comprises a mechanized shutter coupled to a shutter controller that can automatically control the shutter's location and movement. According to one implementation of the shutter controller the system takes a first image at a first shutter position. The shutter is then moved a predetermined about and a second image is taken. Then, the pixels of each image are added in the direction perpendicular to the movement of the shutter, so as to provide two one-dimension functions. A linear difference of the functions is then taken, so as to obtain a one-dimensional linear difference function. A peak in the linear difference function is then identified as the location of the shutter.

Abstract translation: 一种用于自动和准确地确定诸如光学快门的边缘的刀刃的确切位置的系统和方法，使得其可以被自动控制。 在一个方面，系统包括耦合到快门控制器的机械式快门，其可以自动控制快门的位置和移动。 根据快门控制器的一个实施方式，系统在第一快门位置拍摄第一图像。 然后将快门移动预定的大约和第二个图像。 然后，每个图像的像素在与快门的运动垂直的方向上相加，以提供两个一维功能。 然后获取函数的线性差，以获得一维线性差分函数。 然后将线性差函数中的峰值识别为快门的位置。

公开(公告)号：US20050051726A1

公开(公告)日：2005-03-10

申请号：US10969315

申请日：2004-10-19

Applicant: Roman Sobolewski ,  Grigory Gol'tsman ,  Alexey Semenov ,  Oleg Okunev ,  Kenneth Wilsher ,  Steven Kasapi

Inventor： Roman Sobolewski ,  Grigory Gol'tsman ,  Alexey Semenov ,  Oleg Okunev ,  Kenneth Wilsher ,  Steven Kasapi

IPC: G01J1/02 ,  G01J1/00 ,  G01J1/42 ,  H01L31/101 ,  H01L31/18 ,  H01L39/00 ,  H01L39/10 ,  H01L39/16 ,  H01L39/18 ,  H01L39/22

CPC classification number: H01L39/10 ,  G01J1/0209 ,  G01J1/0252 ,  G01J1/0411 ,  G01J1/42 ,  H01L31/101

Abstract: A single-photon detector includes a superconductor strip biased near its critical current. The superconductor strip provides a discernible output signal upon absorption of a single incident photon. In one example, the superconductor is a strip of NbN (niobium nitride). In another example, the superconductor strip meanders to increase its probability of receiving a photon from a light source. The single-photon detector is suitable for a variety of applications including free-space and satellite communications, quantum communications, quantum cryptography, weak luminescence, and semiconductor device testing.

Abstract translation: 单光子检测器包括在其临界电流附近偏置的超导体带。 超导体条在吸收单个入射光子时提供可辨别的输出信号。 在一个实例中，超导体是NbN（氮化铌）的条带。 在另一个示例中，超导体条弯曲以增加其从光源接收光子的概率。 单光子检测器适用于自由空间和卫星通信，量子通信，量子加密，弱发光和半导体器件测试等各种应用。

公开(公告)号：US06859031B2

公开(公告)日：2005-02-22

申请号：US10229181

申请日：2002-08-26

Applicant: Nader Pakdaman ,  Steven Kasapi ,  Itzik Goldberger

Inventor： Nader Pakdaman ,  Steven Kasapi ,  Itzik Goldberger

IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/3185 ,  H01L21/66 ,  G01N27/72

CPC classification number: G01R31/318505 ,  G01R31/311 ,  G01R31/318511

Abstract: Systems and methods consistent with principles of the present invention allow contactless measuring of various kinds of electrical activity within an integrated circuit. The invention can be used for high-bandwidth, at speed testing of various devices on a wafer during the various stages of device processing, or on packaged parts at the end of the manufacturing cycle. Power is applied to the test circuit using conventional mechanical probes or other means, such as CW laser light applied to a photoreceiver provided on the test circuit. The electrical test signal is introduced into the test circuit by stimulating the circuit using a contactless method, such as by directing the output of one or more modelocked lasers onto high-speed receivers on the circuit, or by using a high-speed pulsed diode laser. The electrical activity within the circuit in response to the test signal is sensed by a receiver element, such as a time-resolved photon counting detector, a static emission camera system, or by an active laser probing system. The collected information is used for a variety of purposes, including manufacturing process monitoring, new process qualification, and model verification.

Abstract translation: 与本发明的原理一致的系统和方法允许在集成电路内的各种电活动的非接触式测量。 本发明可以用于在器件处理的各个阶段期间的晶片上的各种器件的高带宽，速度测试，或者在制造周期结束时的封装部件上。 使用传统的机械探针或其他手段（例如施加到设置在测试电路上的光接收器的CW激光）将功率施加到测试电路。 电测试信号通过使用非接触方法来刺激电路而被引入到测试电路中，例如通过将一个或多个锁模激光器的输出引导到电路上的高速接收器上，或者通过使用高速脉冲二极管激光器 。 响应于测试信号的电路内的电活动由诸如时间分辨光子计数检测器，静态发射照相机系统或主动激光探测系统的接收器元件感测。 收集的信息用于各种目的，包括制造过程监控，新工艺认证和型号验证。

公开(公告)号：US20050002028A1

公开(公告)日：2005-01-06

申请号：US10613592

申请日：2003-07-02

Applicant: Steven Kasapi ,  Gary Woods ,  John Field

Inventor： Steven Kasapi ,  Gary Woods ,  John Field

IPC: G01R11/24 ,  G01J3/30 ,  G01J3/28

CPC classification number: G01R31/311

Abstract: A system for temporal and spectral resolved detection of photon emission from an integrated circuit is disclosed. A DUT is stimulated by a conventional ATE, so that its active devices emit light. The signal from the ATE is also sent to the system's computer as a synchronization signal. The light emitted from the switching devices is passed through a wavelength filter. Selected bands of wavelengths are then passed to respective detector(s) and the detector(s) response with respect to the time correlated ATE stimulus is studied.

Abstract translation: 公开了一种用于从集成电路进行光子发射的时间和光谱解析检测的系统。 DUT由传统的ATE激励，使其有源器件发光。 来自ATE的信号也作为同步信号发送到系统的计算机。 从开关装置发出的光通过波长滤波器。 然后将所选波长的波段传递到相应的检测器，并且研究相对于时间相关的ATE刺激的检测器响应。

公开(公告)号：US07990167B2

公开(公告)日：2011-08-02

申请号：US12534069

申请日：2009-07-31

Applicant: Steven Kasapi

Inventor： Steven Kasapi

IPC: G01R31/305

CPC classification number: G01R31/311 ,  G01R31/2851 ,  G01R31/308

Abstract: An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.

Abstract translation: 公开了一种用于提供调制映射的设备。 该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间 调制图由选定时间段内收集的调制激光和IC的选定区域组成。

公开(公告)号：US07616312B2

公开(公告)日：2009-11-10

申请号：US11169423

申请日：2005-06-29

Applicant: Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

Inventor： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC: G01B11/00

CPC classification number: G01R31/308 ,  G01R31/311

Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

公开(公告)号：US07450245B2

公开(公告)日：2008-11-11

申请号：US11436267

申请日：2006-05-17

Applicant: Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

Inventor： Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

IPC: G01B9/02

CPC classification number: G01R31/308

Abstract: A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.

Abstract translation: 提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于 检测反射光束，采集和信号处理电子元件。 系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。 在替代实施例中，激光是CW并且调制被应用于光学检测器。