公开(公告)号：US07616312B2

公开(公告)日：2009-11-10

申请号：US11169423

申请日：2005-06-29

Applicant: Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

Inventor： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC: G01B11/00

CPC classification number: G01R31/308 ,  G01R31/311

Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

公开(公告)号：US07450245B2

公开(公告)日：2008-11-11

申请号：US11436267

申请日：2006-05-17

Applicant: Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

Inventor： Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

IPC: G01B9/02

CPC classification number: G01R31/308

Abstract: A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.

Abstract translation: 提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于 检测反射光束，采集和信号处理电子元件。 系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。 在替代实施例中，激光是CW并且调制被应用于光学检测器。

公开(公告)号：US20050128471A1

公开(公告)日：2005-06-16

申请号：US11042288

申请日：2005-01-24

Applicant: Kenneth Wilsher ,  Steven Kasapi

Inventor： Kenneth Wilsher ,  Steven Kasapi

IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66 ,  G01N21/00

CPC classification number: G01R31/311 ,  G01R31/31905

Abstract: A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focussing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.

Abstract translation: 一种通过光耦合测试集成电路（IC）的方法和系统。 光学系统包括光纤，夹具和聚焦元件。 此外，在安装在集成电路上的灯具中提供通道以容纳光学系统。 夹具用作散热器。 因此，使用聚焦在每个目标位置的光来探测集成电路上的一个或多个感光元件/靶。 光引起数据锁存到集成电路中（其在测试程序的影响下运行），并形成用于确认IC正常工作的集成电路输出的测试图案。

公开(公告)号：US20050051726A1

公开(公告)日：2005-03-10

申请号：US10969315

申请日：2004-10-19

Applicant: Roman Sobolewski ,  Grigory Gol'tsman ,  Alexey Semenov ,  Oleg Okunev ,  Kenneth Wilsher ,  Steven Kasapi

Inventor： Roman Sobolewski ,  Grigory Gol'tsman ,  Alexey Semenov ,  Oleg Okunev ,  Kenneth Wilsher ,  Steven Kasapi

IPC: G01J1/02 ,  G01J1/00 ,  G01J1/42 ,  H01L31/101 ,  H01L31/18 ,  H01L39/00 ,  H01L39/10 ,  H01L39/16 ,  H01L39/18 ,  H01L39/22

CPC classification number: H01L39/10 ,  G01J1/0209 ,  G01J1/0252 ,  G01J1/0411 ,  G01J1/42 ,  H01L31/101

Abstract: A single-photon detector includes a superconductor strip biased near its critical current. The superconductor strip provides a discernible output signal upon absorption of a single incident photon. In one example, the superconductor is a strip of NbN (niobium nitride). In another example, the superconductor strip meanders to increase its probability of receiving a photon from a light source. The single-photon detector is suitable for a variety of applications including free-space and satellite communications, quantum communications, quantum cryptography, weak luminescence, and semiconductor device testing.

Abstract translation: 单光子检测器包括在其临界电流附近偏置的超导体带。 超导体条在吸收单个入射光子时提供可辨别的输出信号。 在一个实例中，超导体是NbN（氮化铌）的条带。 在另一个示例中，超导体条弯曲以增加其从光源接收光子的概率。 单光子检测器适用于自由空间和卫星通信，量子通信，量子加密，弱发光和半导体器件测试等各种应用。

公开(公告)号：US20070002329A1

公开(公告)日：2007-01-04

申请号：US11169423

申请日：2005-06-29

Applicant: Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

Inventor： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC: G01B9/02

CPC classification number: G01R31/308 ,  G01R31/311

Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

公开(公告)号：US20070002328A1

公开(公告)日：2007-01-04

申请号：US11436267

申请日：2006-05-17

Applicant: Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

Inventor： Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

IPC: G01B9/02

CPC classification number: G01R31/308

Abstract: A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.

Abstract translation: 提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于 检测反射光束，采集和信号处理电子元件。 系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。 在替代实施例中，激光是CW并且调制被应用于光学检测器。

公开(公告)号：US06891363B2

公开(公告)日：2005-05-10

申请号：US10234231

申请日：2002-09-03

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/311 ,  G01R31/02

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

Abstract translation: 用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。 该分析涉及光子发射的空间和/或时间相关性。 在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。 在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。 在一些情况下，重量反映了光子被晶体管发射的可能性。 该分析还可以包括自动识别光子发射图像中的晶体管。

公开(公告)号：US06836131B2

公开(公告)日：2004-12-28

申请号：US10379925

申请日：2003-03-04

Applicant: Tahir Cader ,  Nathan Stoddard ,  Donald Tilton ,  Nader Pakdaman ,  Steven Kasapi

Inventor： Tahir Cader ,  Nathan Stoddard ,  Donald Tilton ,  Nader Pakdaman ,  Steven Kasapi

IPC: G01R3128

CPC classification number: G01R31/2875 ,  G01R1/0458 ,  G01R31/2891

Abstract: A combination cooling plate and micro-spray cooling system beneficial for use in testers of electrically stimulated integrated circuit chips is disclosed. The system includes a transparent heat spreader and micro-spray heads disposed about the heat spreader. The spray heads spray cooling liquid onto a periphery of said heat spreader so as to remove heat from the chip. Alternatively, and micro-spray heads are provided inside the cooling plate holder so as to spray cooling liquid inside the interior of the holder so that the holder is cooled. The holder is in physical contact with the heat spreader, so that as the holder is cooled by the spray, heat is removed from the heat spreader, and thereby from the chip.

公开(公告)号：US07323862B2

公开(公告)日：2008-01-29

申请号：US11380044

申请日：2006-04-25

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/28

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

公开(公告)号：US07227580B2

公开(公告)日：2007-06-05

申请号：US10719880

申请日：2003-11-20

Applicant: Steven Kasapi ,  Amit Nabarro ,  Ofir Baharav

Inventor： Steven Kasapi ,  Amit Nabarro ,  Ofir Baharav

IPC: G03B7/00 ,  G01R31/02

CPC classification number: G01B11/028

Abstract: A system and method for automatically and accurately determining the exact location of a knife-edge, such as an edge of an optical shutter, so that it can be controlled automatically. In one aspect the system comprises a mechanized shutter coupled to a shutter controller that can automatically control the shutter's location and movement. According to one implementation of the shutter controller the system takes a first image at a first shutter position. The shutter is then moved a predetermined about and a second image is taken. Then, the pixels of each image are added in the direction perpendicular to the movement of the shutter, so as to provide two one-dimension functions. A linear difference of the functions is then taken, so as to obtain a one-dimensional linear difference function. A peak in the linear difference function is then identified as the location of the shutter.

Abstract translation: 一种用于自动和准确地确定诸如光学快门的边缘的刀刃的确切位置的系统和方法，使得其可以被自动控制。 在一个方面，系统包括耦合到快门控制器的机械式快门，其可以自动控制快门的位置和移动。 根据快门控制器的一个实施方式，系统在第一快门位置拍摄第一图像。 然后将快门移动预定的大约和第二个图像。 然后，在与快门的移动垂直的方向上添加每个图像的像素，以提供两个一维功能。 然后获取函数的线性差，以获得一维线性差分函数。 然后将线性差函数中的峰值识别为快门的位置。