摘要:
There is provided a positive resist composition excellent in transparency, heat resistance, and refractive index particularly for forming a microlens and for forming a planarization film; and a microlens and a planarization film formed from the positive resist composition. A positive resist composition comprising a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure; a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and a component (C): a solvent. The positive resist composition wherein the alkali-soluble polymer as the component (A) is a polymer comprising a unit structure of Formula (1): where when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0.
摘要:
A material for a microlens having heat resistance, high resolution and high light-extraction efficiency is provided. A positive resist composition comprises an alkali-soluble polymer (A) containing a unit structure having an aromatic fused ring or a derivative thereof, and a compound (B) having an organic group which undergoes photodecomposition to yield an alkali-soluble group. The positive resist composition has coating film properties of a refractive index at a wavelength of 633 nm of 1.6 or more and a transmittance at wavelengths of 400 to 730 nm of 80% or more. A pattern forming method comprises applying the positive resist composition, drying the composition, exposing the composition to light, and developing the composition.
摘要:
There is provided a resist underlayer film forming composition for lithography, which in order to prevent a resist pattern from collapsing after development in accordance with the miniaturization of the resist pattern, is applied to multilayer film process by a thin film resist, has a lower dry etching rate than resists and semiconductor substrates, and has a satisfactory etching resistance relative to a substrate to be processed in the processing of the substrate. A resist underlayer film forming composition used in lithography process by a multiplayer film, comprises a polymer containing a unit structure having an aromatic fused ring, a unit structure having a protected carboxyl group or a unit structure having an oxy ring. A method of forming a pattern by use of the resist underlayer film forming composition. A method of manufacturing a semiconductor device by utilizing the method of forming a pattern.
摘要:
There is provided an underlayer coating forming composition for lithography, and an underlayer coating having a high dry etching rate compared with photoresist, and causing no intermixing with the photoresist, which are used in lithography process of manufacture of semiconductor device. Concretely, it is an underlayer coating forming composition comprising a polymer having a structural unit containing naphthalene ring substituted with halogen atom in a molar ratio of 0.3 or more in the structural units constituting the polymer, a solvent.
摘要:
A protective member for protecting electric wires includes: a non-woven cloth layer having flexibility and made of a chlorine-free resin; and an outer resin layer laminated monolithically on outer surface of the non-woven cloth layer, and made of a chlorine-free and fire-retardant resin, wherein a thickness of the outer resin layer is configured to be not more than a thickness of the non-woven cloth layer, and wherein a total thickness of the non-woven cloth layer and the outer resin layer is configured to have a predetermined wear resistance.
摘要:
A nail gun includes a contact arm that is movable relative to a nail gun body between an upper first stroke end position and a lower second stroke end position. The contact arm may prevent the nails from being driven when it is in the first stroke end position. A nail driving prevention device includes an engaging member that is movable to enter the moving path of the contact arm so as to prevent the contact arm from moving from the first stroke end position toward the second stroke end position when the number of the nails in a nail magazine has been reduced to a predetermined number. A deviating device is operable to change the moving course of the engaging member away from the moving path of the contact arm when the contact arm is positioned above the first stroke end position.
摘要:
A sheet coil motor is configured such that a plurality of coil units are attached to a circuit substrate at a predetermined interval, the interval separating the coil units are regular. Each of the plurality of coil units includes a plurality of coils and has a shape of a sector. Accordingly, the sheet coil motor can be made thin, the number of driving sheet coils can be reduced, and the production cost can be reduced. A method of fabricating the sheet coil motor includes the steps of printing, on a sheet base, a plurality of sheet coil units, in which units a plurality of sector-shaped coils are provided, such that the coil units lie in alternately opposite directions, cutting out the sheet coil units from the sheet base, attaching sheet coil units, in which units a plurality of sector-shaped coils are provided, on a substrate at an arbitrary distance from each other, and attaching driving sheet coils thus fabricated to the substrate so as to be opposite a rotor magnet at a close distance. Accordingly, the number of sheet coil units printed on and cut out from a sheet base can be increased so that the efficiency of production can be improved.
摘要:
A disk drive of the kind having a turntable for supporting a flexible magnetic disk thereon, a spindle extending centrally through the turntable for centering engagement in a first opening formed centrally in a sheet metal hub of the disk, and a drive pin arranged eccentrically of the turntable for driving engagement in a second opening formed eccentrically in the disk hub. For supporting the drive pin, a sheet metal drive pin support of approximately arcuate shape is mounted on the underside of the turntable for joint rotation therewith and has the drive pin erected on one end thereof so as to extend with clearance through an opening in the turntable. The drive pin support with the drive pin thereon is movable linearly relative to the turntable in a plane parallel to that of the turntable along a first notional line orthogonally intersecting a second notional line extending through the axes of the drive pin and the spindle. A biasing spring acts between turntable and drive pin support for biasing the drive pin at least in a predetermined direction of rotation of the turntable.
摘要:
A thrust ball-bearing in which a good lubrication is maintained for a long period of time and having a long service life. The bearing comprises a plurality of balls having a uniform diameter, a retainer which retains the balls, and two plates situated at either side of the retainer and rotatable relative to each other via the balls. The retainer has a thickness less than the diameter of the ball. A plurality of holes that retain each ball is provided on the retainer and a groove having a rectangular cross section is formed in a portion between two adjacent holes. An amount of grease applied to the ball is collected inside the groove and provided to the ball located on the downstream side of flowing grease without moving outwardly of the groove even if a centrifugal force generated by a rotation of the bearing is exerted.
摘要:
A pre-set variable passive element can prevent faulty insulation between itself and a conductive board. A cylindrical member extended higher than a adjusting member is made of ceramic around the adjusting member which is rotatably fitted for adjustment of the value of resistance of the pre-set variable resistor element, the forming of the cylindrical member being integrally formed with a main part also formed in a ceramic. The cylindrical member is fitted into an opening bored in a stator board mainly of a steel plate, and the pre-set variable resistor is fitted on the stator board. The adjusting member which is contacted by a contact, by which the value of resistance of the pre-set variable resistor element is determined, and an inside periphery of the opening free from any insulating treatment is securely insulated by the cylindrical member.