摘要:
A plasma processing apparatus includes a process container configured to accommodate a target substrate and to be vacuum-exhausted. A first electrode and a second electrode are disposed opposite each other within the process container. A process gas supply unit is configured to supply a process gas into the process container. An RF power supply is configured to apply an RF power to the first electrode or second electrode to generate plasma of the process gas. A DC power supply is configured to apply a DC voltage to the first electrode or second electrode. A control section is configured to control the RF power supply and the DC power supply such that the DC power supply causes the DC voltage applied therefrom to reach a voltage set value, when or after the RF power supply starts applying the RF power.
摘要:
A solid polymer electrolyte is made up of a polymer compound having a hydrocarbon aromatic group in the backbone thereof and including a side chain expressed by FORMULA 1: CH2nSO3H FORMULA 1 wherein “n” is 1, 2, 3, 4, 5, or 6. The solid polymer electrolyte may be incorporated into a membrane and may be used in a solution for covering an electrode catalyst.
摘要:
In a thermal processing apparatus, using a lamp for heating a substrate, an opening is formed for a camera unit, which is used to image portions of an auxiliary ring supporting the substrate, to obtain the position of the center of the auxiliary ring. The camera further images the substrate to determine the center of the substrate before the thermal processing apparatus receives and places the substrate on the auxiliary ring. The thermal processing apparatus moves the substrate so that the center thereof coincides with the center of the auxiliary ring, and thereafter places the former on the latter. Thus, the auxiliary ring can be designed to reduce overlaps of the auxiliary ring and the outer edge of the substrate while overlaps can be uniform over the entire circumference of the substrate to improve temperature uniformity of the substrate.
摘要:
A plasma processing apparatus includes a process container configured to accommodate a target substrate and to be vacuum-exhausted. A first electrode and a second electrode are disposed opposite each other within the process container. A process gas supply unit is configured to supply a process gas into the process container. An RF power supply is configured to apply an RF power to the first electrode or second electrode to generate plasma of the process gas. A DC power supply is configured to apply a DC voltage to the first electrode or second electrode. A control section is configured to control the RF power supply and the DC power supply such that the DC power supply causes the DC voltage applied therefrom to reach a voltage set value, when or after the RF power supply starts applying the RF power.
摘要:
A portable printer device is capable of holding a plurality of paper rolls. The portable printer device comprises a single printing portion which is provided for printing of each of the plurality of paper rolls. A paper roll hold device includes a plurality of paper roll hold portions each of which holds one of the plurality of paper rolls, and includes a plurality of paper passages each of which is provided to deliver a paper from one of the plurality of paper roll hold portions to the printing portion.
摘要:
An image photographing device (1), which converts an optical image of a subject into an electric signal by an image pick up device, and stores image data by the electric signal in an information recording medium (21), includes a communication interface (25), which communicates the image data, a determination device (31), which determines whether a device connected to the communication interface is an external device (2) or a release device (3), a communication process device (10), which conducts a communication process with the external device if the determination device determines that the external device is connected, and a photographing process device (10), which conducts a photographing process if the determination device determines that the release device is connected.
摘要:
A solid polymer electrolyte is made up of a polymer compound having a hydrocarbon aromatic group in the backbone thereof and including a side chain expressed by FORMULA 1: CH2nSO3H FORMULA 1 wherein “n” is 1, 2, 3, 4, 5, or 6. The solid polymer electrolyte may be incorporated into a membrane and may be used in a solution for covering an electrode catalyst.
摘要:
A steel wire, 0.10-0.40 mm in diameter, obtained by subjecting a high-carbon (0.70-0.90 wt. %) steel wire material to heat treatment and wire drawing, wherein its tensile strength and test values of special repeated torsional tests satisfy a predetermined relation; and a method of manufacturing the same. A high strength steel wire which has so high a ductility as to substantially prevent the wire from being broken even during wire twisting, and which rarely encounters a decrease in the ductility even after the wire has been subjected to age hardening by heating, is obtained, and a method of manufacturing the same is economical.
摘要:
An adapter, for a terminal unit, comprising a base housing having a mount surface for mounting of a terminal unit. A receptive space is defined by a plurality of walls on a part of the mount surface. A pair of guide rails are formed on the mount surface of the base housing, so as to be slidably engaged with the terminal unit. Overhanging guide plates extending from opposed side walls have edges facing to the mount surface, so as to be slidably engaged with the terminal unit. The guides rails and the edges serve to guide the terminal unit to introduce a part of the terminal unit into the receptive space. A pair of protrusions are formed on the mount surface, so as to be engaged with the terminal unit. The protrusions serve to detachably hold the terminal unit in a proper position on the mount surface to maintain the functional connection between the adapter and the terminal unit.
摘要:
A nebulizer comprising a housing having a liquid reservoir at a lower portion thereof and an atomizer space and an atomized liquid discharge port both communicating with the liquid reservoir at an upper portion thereof, a compressed air introduction pipe formed with a nozzle at an end thereof and a liquid suction pipe for sucking liquid in the liquid reservoir, both pipes being provided at a lower portion of the housing, wherein said liquid suction pipe is removably fitted to said compressed air introduction pipe, and a gap between said compressed air introduction pipe and said liquid suction pipe is used as a liquid suction passage.