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    Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel
    12.
    发明申请
    Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel 有权
    具有介质真空容器的环形低场反应气体和等离子体源

    公开(公告)号：US20070145023A1

    公开(公告)日：2007-06-28

    申请号：US11684916

    申请日：2007-03-12

    申请人： William Holber ,  Xing Chen ,  Andrew Cowe ,  Matthew Besen ,  Ronald Collins ,  Susan Trullin ,  Shouqian Shao

    发明人： William Holber ,  Xing Chen ,  Andrew Cowe ,  Matthew Besen ,  Ronald Collins ,  Susan Trullin ,  Shouqian Shao

    IPC分类号： B23K9/00

    CPC分类号： H01J37/32357 ,  H01J37/32009 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/32449 ,  H01J37/32467 ,  H01J37/32522

    摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.

    摘要翻译： 描述了等离子体点火和冷却装置和等离子体系统的方法。 装置可以包括容器和与容器相邻的至少一个点火电极。 所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。 该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。 一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。 气体在通道中被点燃，而流量的剩余部分被引导离开通道。

    Inductively-coupled torodial plasma source
    13.
    发明授权
    Inductively-coupled torodial plasma source 有权
    电感耦合等离子体源

    公开(公告)号：US07166816B1

    公开(公告)日：2007-01-23

    申请号：US10837912

    申请日：2004-05-03

    申请人： Xing Chen ,  William M. Holber ,  Andrew Barnett Cowe ,  Eric Georgelis ,  Ilya M. Bystyak ,  Andrzej Bortkiewicz

    发明人： Xing Chen ,  William M. Holber ,  Andrew Barnett Cowe ,  Eric Georgelis ,  Ilya M. Bystyak ,  Andrzej Bortkiewicz

    IPC分类号： B23K10/00

    CPC分类号： H05H1/46 ,  H05H2001/4667 ,  H05H2001/4682

    摘要： Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.

    摘要翻译： 用于解离气体的装置包括包含气体的等离子体室。 具有第一磁芯的第一变压器包围等离子体室的第一部分并且具有第一初级绕组。 具有第二磁芯的第二变压器包围等离子体室的第二部分并且具有第二初级绕组。 包括一个或多个切换半导体器件的第一固态AC开关电源耦合到第一电压源并且具有耦合到第一初级绕组的第一输出。 包括一个或多个开关半导体器件的第二固态AC开关电源耦合到第二电压源，并且具有耦合到第二初级绕组的第二输出。 第一固态交流开关电源驱动第一初级绕组中的第一交流电流。 第二固态交流开关电源驱动第二初级绕组中的第二交流电流。 第一AC电流和第二AC电流引起等离子体室内的组合AC电位，其直接形成环形等离子体，其完成变压器的次级电路并且解离气体。

    Methods and apparatus for downstream dissociation of gases
    14.
    发明申请
    Methods and apparatus for downstream dissociation of gases 审中-公开
    气体下游解离的方法和装置

    公开(公告)号：US20060137612A1

    公开(公告)日：2006-06-29

    申请号：US11292520

    申请日：2005-12-02

    申请人： William Holber ,  Xing Chen

    发明人： William Holber ,  Xing Chen

    IPC分类号： C23C16/00 ,  C23F1/00

    CPC分类号： B01J19/088 ,  B01J2219/0875 ,  C23C16/452 ,  H01J37/32357 ,  H01J37/3244

    摘要： A method and apparatus for activating and dissociating gases involves generating an activated gas with a plasma located in a chamber. A downstream gas input is positioned relative to an output of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas does not substantially interact with an interior surface of the chamber.

    摘要翻译： 用于激活和解离气体的方法和装置包括用位于室中的等离子体产生活化气体。 下游气体输入端相对于腔室的输出定位，以使得活化气体能够促进由气体输入引入的下游气体的解离，其中解离的下游气体基本上不与腔室的内表面相互作用。

    Electrical connector
    16.
    发明申请
    Electrical connector 失效

    公开(公告)号：US20050124217A1

    公开(公告)日：2005-06-09

    申请号：US10998854

    申请日：2004-11-29

    申请人： Quan Zhuang ,  Wei-Xing Chen ,  Guang-Ming Zhao ,  Zhi-Qiang Chen

    发明人： Quan Zhuang ,  Wei-Xing Chen ,  Guang-Ming Zhao ,  Zhi-Qiang Chen

    IPC分类号： H01R12/16 ,  H01R13/648

    CPC分类号： H01R12/7088 ,  H01R12/716 ,  H01R13/658

    摘要： A power connector (1) includes an insulative housing (10), a number of conductive contacts (20) received in the insulative housing, a first shell (30) enclosing the insulative housing and a second shell (40) enclosing the first shell. The insulative housing includes a base portion (101) and a tongue portion (103) extending forwardly from the base portion. The cross-section of each of the first and the second shells consists of a pair of straight sections (308, 408) parallel to each other and a pair of arcuate sections (308′, 408′) each connecting with the pair of straight sections.

    Focused beam spectroscopic ellipsometry method and system
    17.
    发明申请
    Focused beam spectroscopic ellipsometry method and system 审中-公开
    聚焦光束椭偏仪的方法和系统

    公开(公告)号：US20050105090A1

    公开(公告)日：2005-05-19

    申请号：US11007420

    申请日：2004-12-07

    申请人： Timothy Piwonka-Corle ,  Karen Scoffone ,  Xing Chen ,  Lloyd Lacomb ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

    发明人： Timothy Piwonka-Corle ,  Karen Scoffone ,  Xing Chen ,  Lloyd Lacomb ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

    IPC分类号： G01N21/21 ,  G01J4/00

    CPC分类号： G01N21/211 ,  G01N2021/213

    摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).

    摘要翻译： 使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。 该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。 优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点 并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。 聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。 一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。 在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。 椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道 从样品）。

    Inductively-coupled toroidal plasma source
    18.
    发明授权
    Inductively-coupled toroidal plasma source 有权
    电感耦合环形等离子体源

    公开(公告)号：US06815633B1

    公开(公告)日：2004-11-09

    申请号：US09804650

    申请日：2001-03-12

    申请人： Xing Chen ,  William M. Holber ,  Andrew Barnett Cowe ,  Eric Georgelis ,  Ilya M. Bystyak ,  Andrzej Bortkiewicz

    发明人： Xing Chen ,  William M. Holber ,  Andrew Barnett Cowe ,  Eric Georgelis ,  Ilya M. Bystyak ,  Andrzej Bortkiewicz

    IPC分类号： B23K1000

    CPC分类号： H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

    摘要： Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.