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公开(公告)号：US20070012084A1
公开(公告)日：2007-01-18
申请号：US11464423
申请日：2006-08-14
Applicant: Kenneth Tsui , Aaron Geisberger
Inventor： Kenneth Tsui , Aaron Geisberger
IPC: G01D18/00
CPC classification number: B81C3/002 , B81B2203/0118 , B81B2203/056
Abstract: An apparatus including a micro-mechanical calibration member having at least a portion that is elastically biasable away from a neutral position in response to mechanical contact. The apparatus may also include a fixed member proximate the micro-mechanical calibration member which may be referenced to automatically detect deflection of the micro-mechanical calibration member away from the neutral position. The micro-mechanical calibration member may also be configured to receive a micro-mechanical contacting member to provide the mechanical contact employed to bias the micro-mechanical calibration member away from the neutral position.
Abstract translation: 一种包括微机械校准构件的装置，其具有响应于机械接触而至少部分弹性偏离中立位置。 该装置还可以包括靠近微机械校准构件的固定构件，其可被参考以自动地检测微机械校准构件远离中立位置的偏转。 微机械校准构件还可以被配置为接收微机械接触构件以提供用于将微机械校准构件偏离中立位置的机械接触。
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12.发明申请Method, system and device for microscopic examination employing fib-prepared sample grasping element 有权使用纤维制备的样品把持元件进行显微镜检查的方法，系统和装置公开(公告)号：US20050178980A1
公开(公告)日：2005-08-18
申请号：US10948385
申请日：2004-09-23
Applicant: George Skidmore , Matthew Ellis , Aaron Geisberger , Kenneth Bray , Kimberly Tuck , Robert Folaron
Inventor： George Skidmore , Matthew Ellis , Aaron Geisberger , Kenneth Bray , Kimberly Tuck , Robert Folaron
CPC classification number: H01J37/185 , G01N1/28 , G01N1/286 , G01N1/32 , G01N2001/2886 , G02B21/32 , H01J37/20 , H01J37/3056 , H01J2237/2007 , H01J2237/204 , H01J2237/31745 , H01J2237/31749
Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
Abstract translation: 一种方法包括在一个实施方案中，通过用聚焦离子束（FIB）切割衬底，至少部分地从衬底切割样品，通过激活抓握元件捕获衬底样品，以及将捕获的样品与衬底分离。 捕获的样品可以与基底分离并输送到电子显微镜进行检查。
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公开(公告)号：US20050162806A1
公开(公告)日：2005-07-28
申请号：US10850904
申请日：2004-05-20
Applicant: Neil Sarkar , Aaron Geisberger
Inventor： Neil Sarkar , Aaron Geisberger
CPC classification number: B81B3/0086 , B81B3/0024 , B81B2201/032 , H01G5/16 , H01G7/00
Abstract: A method of manufacturing an RF device including, in one embodiment, forming a deformable conductor over a substrate and plastically deforming the conductor via exposure to thermal energy to tune an electrical characteristic of the RF device. In another embodiment, the deformable conductor may also be elastically deformed to tune the electrical characteristic.
Abstract translation: 一种制造RF器件的方法，在一个实施例中包括在衬底上形成可变形导体并通过暴露于热能使导体塑性变形以调谐RF器件的电特性。 在另一个实施例中，可变形导体也可以弹性变形以调谐电特性。
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14.发明授权Microcomponent having intra-layer electrical isolation with mechanical robustness 失效微型组件具有机械稳健性的层内电隔离公开(公告)号：US06879016B1
公开(公告)日：2005-04-12
申请号：US10266726
申请日：2002-10-07
Applicant: George D. Skidmore , Aaron Geisberger , Matthew D. Ellis
Inventor： George D. Skidmore , Aaron Geisberger , Matthew D. Ellis
CPC classification number: B81C1/00246 , B81B3/0035 , H01L21/76232
Abstract: A system and method is disclosed that strengthens the structural integrity of trench-fill electrical isolation techniques. One embodiment provides for etching a series of interlocking geometric trenches into a device layer and filling the trenches with a non-conductive dielectric material. The dielectric material establishes electrical isolation while the interlocking geometric trenches strengthen the structural integrity of the separation by providing at least one surface on the interlocking separation that experiences a compression force for each direction that the electrically isolated MEMS component is moved.
Abstract translation: 公开了一种加强沟槽填充电气隔离技术的结构完整性的系统和方法。 一个实施例提供了将一系列互锁几何沟槽蚀刻到器件层中并用非导电介电材料填充沟槽。 电介质材料建立电隔离，而互锁几何沟槽通过在互锁分离上提供至少一个表面，从而经受电动隔离MEMS组件移动的每个方向的压缩力，从而增强了分离的结构完整性。
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Patent Agency Ranking
15.发明授权Method, system and device for microscopic examination employing fib-prepared sample grasping element 有权使用纤维制备的样品把持元件进行显微镜检查的方法，系统和装置公开(公告)号：US07227140B2
公开(公告)日：2007-06-05
申请号：US10948385
申请日：2004-09-23
Applicant: George Skidmore , Matthew D. Ellis , Aaron Geisberger , Kenneth Bray , Kimberly Tuck , Robert Folaron
Inventor： George Skidmore , Matthew D. Ellis , Aaron Geisberger , Kenneth Bray , Kimberly Tuck , Robert Folaron
IPC: G21G5/00
CPC classification number: H01J37/185 , G01N1/28 , G01N1/286 , G01N1/32 , G01N2001/2886 , G02B21/32 , H01J37/20 , H01J37/3056 , H01J2237/2007 , H01J2237/204 , H01J2237/31745 , H01J2237/31749
Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
Abstract translation: 一种方法包括在一个实施方案中，通过用聚焦离子束（FIB）切割衬底，至少部分地从衬底切割样品，通过激活抓握元件捕获衬底样品，以及将捕获的样品与衬底分离。 捕获的样品可以与基底分离并输送到电子显微镜进行检查。
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公开(公告)号：US20070001248A1
公开(公告)日：2007-01-04
申请号：US11465367
申请日：2006-08-17
Applicant: Aaron Geisberger , Niladri Sarkar
Inventor： Aaron Geisberger , Niladri Sarkar
IPC: H01L29/82
CPC classification number: B81B3/0018
Abstract: A MEMS device including a plurality of actuator layers formed over a substrate and a bimorph actuator having a substantially serpentine pattern. The serpentine pattern is a staggered pattern having a plurality of static segments interlaced with a plurality of deformable segments. Each of the plurality of static segments has a static segment length and each of the plurality of deformable segments has a deformable segment length, wherein the deformable segment length is substantially different than the static segment length. At least a portion of each of the plurality of deformable segments and each of the plurality of static segments is defined from a common one of the plurality of actuator layers.
Abstract translation: 一种MEMS器件，包括形成在衬底上的多个致动器层和具有基本蛇形图案的双压电晶片致动器。 蛇形图案是具有与多个可变形段交织的多个静态段的交错图案。 多个静态段中的每一个具有静态段长度，并且多个可变形段中的每一个具有可变形段长度，其中可变形段长度基本上不同于静态段长度。 多个可变形段中的每一个的至少一部分和多个静态段中的每一个均由多个致动器层中的公共的一个限定。
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公开(公告)号：US20050181636A1
公开(公告)日：2005-08-18
申请号：US11074448
申请日：2005-03-08
Applicant: Kenneth Tsui , Aaron Geisberger
Inventor： Kenneth Tsui , Aaron Geisberger
CPC classification number: B81C3/008 , B81B2201/13 , B81C99/002
Abstract: An apparatus including at least three deflectable members each configured to deflect during assembly with a component, and also configured to remain in contact with the component after assembly with the component. At least one of the deflectable members and the component has a thickness not greater than about 1000 microns.
Abstract translation: 一种装置，包括至少三个可偏转构件，每个可挠曲构件构造成在与构件组装期间偏转，并且还构造成在与构件组装之后保持与构件接触。 可偏转构件和部件中的至少一个具有不大于约1000微米的厚度。
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公开(公告)号：US06923669B1
公开(公告)日：2005-08-02
申请号：US10778460
申请日：2004-02-13
Applicant: Kenneth Tsui , Aaron Geisberger , George Skidmore
Inventor： Kenneth Tsui , Aaron Geisberger , George Skidmore
CPC classification number: B81C99/002 , B81B2201/13 , B81C3/008
Abstract: A MEMS microconnector including a compliant handle and a deflectable connection member. The compliant handle is configured to frictionally engage a manipulation probe. The deflectable connection member includes a first end coupled to the handle and a second end configured to deflect and thereby engage a receptacle in response to disengagement of the manipulation probe from the handle.
Abstract translation: 一种MEMS微连接器，其包括柔性手柄和可偏转连接构件。 顺应手柄被配置为摩擦地接合操纵探针。 可偏转连接构件包括联接到手柄的第一端和构造成响应于操纵探针与手柄的分离而偏转并因此接合插座的第二端。
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公开(公告)号：US06877316B1
公开(公告)日：2005-04-12
申请号：US10719266
申请日：2003-11-21
Applicant: Niladri Sarkar , Aaron Geisberger , Matthew Ellis
Inventor： Niladri Sarkar , Aaron Geisberger , Matthew Ellis
CPC classification number: B81B3/0024 , B81B2201/031 , B81B2201/038 , B81B2203/051
Abstract: A scratch drive actuator (SDA) device comprising a drive shoe and an actuator. The drive shoe has a first drive shoe position and a second drive shoe position and is configured to urge a shuttle from a first shuttle position to a second shuttle position. The actuator is coupled to the drive shoe and is configured to expand and contract in response to exposure to thermal energy, wherein the expansion and contraction of the actuator each urge the drive shoe towards a corresponding one of the first and second drive shoe positions.
Abstract translation: 包括驱动靴和致动器的刮擦驱动致动器（SDA）装置。 驱动靴具有第一驱动靴位置和第二驱动靴位置，并且构造成将穿梭从第一穿梭位置推动到第二穿梭位置。 致动器联接到驱动靴并且被配置为响应于暴露于热能而膨胀和收缩，其中致动器的膨胀和收缩将每个驱动靴推向第一和第二驱动靴位置中相应的一个。
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